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    • 41. 发明授权
    • Aluminum nitride sintered body and method of producing the same
    • 氮化铝烧结体及其制造方法
    • US5529962A
    • 1996-06-25
    • US406242
    • 1995-03-14
    • Seiji NakahataTakahiro MatsuuraKouichi SogabeAkira Yamakawa
    • Seiji NakahataTakahiro MatsuuraKouichi SogabeAkira Yamakawa
    • C04B35/581C04B35/58
    • C04B35/581
    • An aluminum nitride sintered body comprising aluminum nitride crystals belonging to a Wurtzite hexagonal crystal system wherein the 3 axes a, b and c of the unit lattice of the crystal are defined such that the ratio b/a of the lengths of the axes b and a is 1,000 near the center of the crystal grain and lies within the range 0.997-1.003 in the vicinity of the grain boundary phase. Aluminum nitride sintered body is produced by sintering a molded body of a raw material powder having aluminum and nitrogen as its principal components at a temperature of 1700.degree.-1900.degree. C. in a non-oxidizing atmosphere having a partial pressure of carbon monoxide or carbon of not more than 200 ppm and then cooling the sintered body to 1500.degree. C. or a lower temperature at a rate of 5.degree. C./min or less. The aluminum nitride sintered body has a greatly improved thermal conductivity and, therefore, is suitable for heat slingers, substrates or the like for semiconductor devices.
    • 一种氮化铝烧结体,其包含属于纤锌矿六方晶系的氮化铝晶体,其中晶体的单位晶格的3轴a,b和c被定义为使得轴b和a的长度的比率b / a 在晶粒中心附近为1,000,位于晶界相附近的0.997-1.003范围内。 氮化铝烧结体通过在具有一氧化碳或碳分压的非氧化性气氛中,在1700〜1900℃的温度下烧结以铝和氮为主要成分的原料粉末的成型体 不超过200ppm,然后以5℃/分钟以下的速度将烧结体冷却至1500℃或更低温度。 氮化铝烧结体具有大大提高的导热性,因此适用于半导体器件的热引脚,基板等。
    • 42. 发明授权
    • Aluminum nitride sintered body and method of preparing the same
    • 氮化铝烧结体及其制备方法
    • US5393715A
    • 1995-02-28
    • US115446
    • 1993-09-01
    • Seiji NakahataTakahiro MatsuuraKouichi SogabeAkira Yamakawa
    • Seiji NakahataTakahiro MatsuuraKouichi SogabeAkira Yamakawa
    • C04B35/581C04B35/626H01L21/48H01L23/15H05K1/03C04B35/58
    • C04B35/581H01L21/4807
    • An aluminum nitride sintered body has a high breakdown voltage for serving as a substrate material particularly suited to highly integrated circuits. The aluminum nitride sintered body contains titanium, which is included as a solid solute in the aluminum nitride crystal lattice in a weight ratio of at least 50 ppm and not more than 1000 ppm. The unpaired electron concentration in the sintered body as determined from an absorption spectrum of electron spin resonance is at least 1.times.10.sup.13 /g. At least 0.1 percent by weight and not more than 5.0 percent by weight, in terms of TiO.sub.2, of an oxy-nitride of titanium and aluminum exists in the aluminum nitride sintered body. The aluminum nitride sintered body has a breakdown voltage of 20 kV/mm. The sintered body is obtained by nitriding aluminum nitride raw material powder in a nitrogen atmosphere at a temperature of 800.degree. to 1400.degree. C., adding an oxy-nitride of titanium thereto with a sintering assistant, and sintering the mixture.
    • 氮化铝烧结体具有高的击穿电压,用作特别适用于高集成电路的衬底材料。 氮化铝烧结体含有钛,其以氮化铝晶格内的固体溶质以至少50ppm至不大于1000ppm的重量比包含在其中。 由电子自旋共振的吸收光谱确定的烧结体中不成对的电子浓度为至少1×10 13 / g。 在氮化铝烧结体中存在钛和铝的氮氧化物的至少0.1重量%且不超过5.0重量%(以TiO 2计)。 氮化铝烧结体的击穿电压为20kV / mm。 烧结体是通过在氮气气氛中在800〜1400℃的温度下氮化氮化铝原料粉末,用烧结助剂向其中加入钛的氮氧化物,烧结该混合物而得到的。
    • 46. 发明授权
    • Si3N4 ceramic, Si-base composition for production thereof and processes for producing these
    • Si3N4陶瓷,用于制造的Si基组合物及其制造方法
    • US06284690B1
    • 2001-09-04
    • US08708933
    • 1996-09-06
    • Seiji NakahataAkira Yamakawa
    • Seiji NakahataAkira Yamakawa
    • C04B35591
    • C04B35/591
    • A slurry Si-base composition comprising an Si powder having a thickness of a surface oxide film ranging from 1.5 to 15 nm, 50 to 90% by weight of water, 0.2 to 7.5% by weight, in terms of oxide, of a sintering aid and 0.05 to 3% by weight of a dispersant, the Si-base composition having a pH value adjusted to 8-12. This slurry Si-base composition is produced by a process which comprises subjecting Si powder to oxidation treatment at 200 to 800° C. in air, adding 50 to 90% by weight of water, 0.2 to 7.5% by weight, in terms of oxide, of a sintering aid and 0.05 to 3% by weight of a dispersant to the oxidized Si powder and performing such a pH adjustment that the resultant mixture has a pH value of 8 to 12. The slurry Si-base composition not only enables producing a ceramic of Si3N4 at a lowered cost without the need to install explosionproof facilities but also allows the obtained Si3N4 ceramic having a relative density of at least 96% and a flexural strength of at least 800 MPa can be obtained.
    • 一种浆料Si基组合物,其包含Si粉末,其表面氧化膜的厚度为1.5至15nm,50至90重量%的水,0.2至7.5重量%的氧化物,烧结助剂 和0.05〜3重量%的分散剂,所述Si基组合物的pH值调节至8-12。 该浆料Si基组合物是通过以下方法制造的,该方法包括使Si粉末在空气中在200至800℃下进行氧化处理,加入50至90重量%的水,0.2至7.5重量%的氧化物 的烧结助剂和0.05〜3重量%的分散剂与氧化的Si粉末进行这种pH调节,使得所得混合物的pH值为8〜12。浆料Si-碱组合物不仅能够制备 Si3N4的陶瓷,而不需要安装防爆设备,而且还可以获得所获得的相对密度至少为96%,弯曲强度至少为800MPa的Si 3 N 4陶瓷。
    • 49. 发明授权
    • High-strength porous silicon nitride body and process for producing the
same
    • 高强度多孔氮化硅体及其制造方法
    • US5780374A
    • 1998-07-14
    • US774612
    • 1996-12-30
    • Chihiro KawaiTakahiro MatsuuraAkira Yamakawa
    • Chihiro KawaiTakahiro MatsuuraAkira Yamakawa
    • C04B35/584C04B38/00C04B38/06
    • C04B38/00C04B38/06
    • A high-porosity and high-strength porous silicon nitride body comprises columnar silicon nitride grains and an oxide bond phase containing 2 to 15 wt. %, in terms of oxide based on silicon nitride, of at least one rare earth element, and has an SiO.sub.2 /(SiO.sub.2 +rare earth element oxide) weight ratio of 0.012 to 0.65 and an average pore size of at most 3.5 .mu.m. The porous silicon nitride body is produced by compacting comprising a silicon nitride powder, 2 to 15 wt. %, in terms of oxide based on silicon nitride, of at least one rare earth element, and an organic binder while controlling the oxygen content and carbon content of said compact; and sintering said compact in an atmosphere comprising nitrogen at 1,650.degree. to 2,200.degree. C. to obtain a porous body having a three-dimensionally entangled structure made up of columnar silicon nitride grains and an oxide bond phase, and having an SiO.sub.2 /(SiO.sub.2 +rare earth element oxide) weight ratio of 0.012 to 0.65.
    • 高孔隙率和高强度多孔氮化硅体包括柱状氮化硅颗粒和含有2至15wt。 至少一种稀土元素为基于氮化硅的氧化物的%,SiO 2 /(SiO 2 +稀土元素氧化物)的重量比为0.012〜0.65,平均孔径为3.5μm以下。 多孔氮化硅体通过压制而制成,其包含氮化硅粉末,2〜15重量% %,基于氮化硅的氧化物,至少一种稀土元素和有机粘合剂,同时控制所述成型体的氧含量和碳含量; 并在包含氮气的气氛中在1650℃-2200℃下烧结所述成型体,得到由柱状氮化硅晶粒和氧化物结合相构成的三维缠结结构的多孔体,并具有SiO 2 /(SiO 2 + 稀土元素氧化物)重量比为0.012〜0.65。
    • 50. 发明授权
    • Sintered body of silicon nitride and method of producing the same
    • 氮化硅烧结体及其制造方法
    • US5756411A
    • 1998-05-26
    • US696823
    • 1996-08-20
    • Seiji NakahataAkira YamakawaHisao Takeuchi
    • Seiji NakahataAkira YamakawaHisao Takeuchi
    • C04B35/591
    • C04B35/591
    • The invention reduces the time required for nitriding in the process of reaction sintering for production of a sintered body of silicon nitride, thereby improving productivity, and provides a sintered body of silicon nitride having sufficient compactness and high strength which can be produced by reaction sintering. The sintered body is Si.sub.3 N.sub.4 having an unpaired electron density of 10.sup.15 /cm.sup.3 to 10.sup.21 /cm.sup.3. The sintered body is produced through reaction sintering by using a Si powder having an unpaired electron density of 10.sup.15 -10.sup.20 /cm.sup.3, which is obtained by annealing a commercially available Si powder at temperatures of 300.degree. to 800.degree. C. in other than nitrogen atmosphere for 3-5 hours. In particular, the sintered body is produced by adding to the so obtained Si powder, together with a sintering assistant, an element having a valence of, particularly, from +1 to +3, the element having a covalent bond radius RM which bears such a relation with the covalent bond radius RSi of Si that (RM - RSi)/RSi
    • PCT No.PCT / JP95 / 02679 Sec。 371日期1996年8月20日 102(e)日期1996年8月20日PCT 1995年12月26日PCT公布。 WO96 / 20144 PCT出版物 日本1996年7月4日本发明减少了在制造氮化硅烧结体的反应烧结过程中氮化所需的时间,从而提高了生产率,并提供了具有足够的致密性和高强度的氮化硅烧结体,其可以是 通过反应烧结制备。 烧结体是不成对电子密度为1015 / cm 3至1021 / cm 3的Si 3 N 4。 通过使用不成对电子密度为1015〜1020 / cm 3的Si粉末,通过反应烧结制造烧结体,其通过在氮气气氛以外的温度下在300℃〜800℃下退火市售的Si粉末而得到 持续3-5小时。 特别地,通过将​​如此获得的Si粉末与烧结助剂一起加入具有共价键半径RM的元素(特别是从+1至+3的价数)特别是这样的元素制备烧结体 与RS的共价键半径RSi(RM-RSi)/ RSi <0.5的关系,或作为氮气发生剂的元素的化合物,并使所得复合材料进行反应烧结。