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    • 2. 发明专利
    • Method for manufacturing optical waveguide
    • 制造光波导的方法
    • JP2003014966A
    • 2003-01-15
    • JP2001201911
    • 2001-07-03
    • Takashi MatsuuraTokuyama Corp孝 松浦株式会社トクヤマ
    • MATSUURA TAKASHIMUROTA JUNICHIMIYAHARA KENICHIRONONAKA TORUMITSUNABE YUICHIRO
    • G02B6/13G02B6/12
    • PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical waveguide by which an optical waveguide having a core pattern formed on a substrate and suitable to be used as an optical integrated circuit having large difference in the refractive index between the clad and core can be easily manufactured without performing complicated processes of forming and removing a resist pattern and etching. SOLUTION: After a film of a photosensitive material, for example, consisting of a mixture of polymethyl silazane and a photoacid producing agent is formed on a substrate of quartz or the like, the film is exposed by using a photomask having the core pattern of the optical waveguide and then developed to form the core pattern consisting of a photosensitive material on the substrate. Then the photosensitive material constituting the core pattern is heat-treated, for example, at about 900 deg.C in an argon atmosphere to stabilize and increase the refractive index to form the optical waveguide.
    • 要解决的问题:提供一种制造光波导的方法,其中具有形成在基板上的芯图案的光波导适合用作包层和芯之间的折射率差大的光集成电路 容易地制造而不执行形成和去除抗蚀剂图案和蚀刻的复杂工艺。 解决方案:在石英等的基板上形成感光材料膜,例如由聚甲基硅氮烷和光致酸产生剂的混合物组成的薄膜,通过使用具有核心图案的光掩模来曝光该膜 光波导,然后显影以形成由基底上的感光材料组成的芯图案。 然后将构成芯图案的感光材料在氩气气氛中例如在约900℃下进行热处理,以稳定和增加折射率以形成光波导。
    • 3. 发明申请
    • DIMENSION MEASURING DEVICE FOR LONG MATERIAL
    • 长材尺寸测量装置
    • US20110146095A1
    • 2011-06-23
    • US13056317
    • 2009-07-10
    • Mutsumi TanidaTakashi MatsuuraYasuhisa Kasa
    • Mutsumi TanidaTakashi MatsuuraYasuhisa Kasa
    • G01B5/08
    • G01B5/08G01B5/0009G01B5/163G01B21/047G01B21/10
    • A dimension measuring device 100 in accordance with the present invention includes an end face following mechanism 1 that butts against an end face E of a long material, a dimension measuring mechanism 2 for measuring the dimensions of the long material, and a pushingly moving mechanism 3 for pushingly moving the end face following mechanism toward the end face of the long material. The end face following mechanism includes a plurality of contact sensors for detecting a contact state, and is turnable around two axes intersecting at right angles with each other. The pushingly moving mechanism pushingly moves the end face following mechanism into the state in which the plurality of contact sensors detect that the end face following mechanism butts against the end face of the long material. The dimension measuring mechanism is pushingly moved integrally and is turnable integrally with the end face following mechanism, and measures the dimensions of the long material when it is detected, by the plurality of contact sensors, that the end face following mechanism butts against the end face of the long material.
    • 根据本发明的尺寸测量装置100包括抵靠长材料的端面E的端面跟随机构1,用于测量长材料尺寸的尺寸测量机构2和推动机构3 用于将端面跟随机构推向长材料的端面。 端面跟随机构包括用于检测接触状态的多个接触传感器,并且可绕彼此成直角相交的两个轴线转动。 推动移动机构将端面跟随机构推动地移动到多个接触传感器检测到端面跟随机构抵靠长材料的端面的状态。 尺寸测量机构一体地推动移动并且与端面跟随机构一体地转动,并且通过多个接触传感器测量长材料的尺寸时,端面跟随机构抵靠端面 的长材料。
    • 5. 发明授权
    • DLC film and method for forming the same
    • DLC膜及其形成方法
    • US07466491B2
    • 2008-12-16
    • US11660036
    • 2005-07-06
    • Takashi MatsuuraKazuhiko OdaToshihiko Ushiro
    • Takashi MatsuuraKazuhiko OdaToshihiko Ushiro
    • G02B3/00
    • G02B5/1857G02B3/0087
    • The present invention provides a DLC film that functions as an optical element and that can easily be miniaturized or integrated, and a method for forming the DLC film. A DLC film that has a refractive index varying continuously in at least one width direction from the center O of the DLC film. More specifically, a DLC film in which the refractive index decreases continuously in at least one width direction from the center O of the DLC film, and thereby the DLC film functions as a convex lens. A DLC film in which the refractive index increases continuously in at least one width direction from the center of the DLC film, and thereby the DLC film functions as a concave lens. A DLC film that has a refractive index varying continuously in the thickness direction. In addition, a method for forming a DLC film, including irradiating the DLC film with an energy beam to change the refractive index of the DLC film continuously in at least one width direction from the center of the DLC film and/or the thickness direction.
    • 本发明提供了用作光学元件并且可以容易地小型化或集成的DLC膜以及用于形成DLC膜的方法。 具有从DLC膜的中心O至少一个宽度方向连续变化的折射率的DLC膜。 更具体地说,其中折射率从DLC膜的中心O在至少一个宽度方向上连续降低的DLC膜,从而DLC膜用作凸透镜。 DLC膜的折射率在距离DLC膜的中心的至少一个宽度方向上连续增加,从而DLC膜用作凹透镜。 折射率在厚度方向连续变化的DLC膜。 另外,用于形成DLC膜的方法包括用能量束照射DLC膜,以从DLC膜的中心和/或厚度方向在至少一个宽度方向连续地改变DLC膜的折射率。
    • 9. 发明授权
    • Semiconductor wafer and method for producing the same
    • 半导体晶片及其制造方法
    • US06770507B2
    • 2004-08-03
    • US09926190
    • 2001-09-20
    • Takao AbeTakashi MatsuuraJunichi Murota
    • Takao AbeTakashi MatsuuraJunichi Murota
    • H01L2100
    • H01L21/76243H01L21/76254
    • There is provided a novel bonded semiconductor wafer having a layered structure alternately stacked with semiconductor layers and insulator layers in two cycles or more and manufactured by means of a bonding process, wherein at least one of the insulator layers is formed with ion implanted oxygen, and a novel manufacturing process for a bonded semiconductor wafer in which an ion implantation separation process is adopted. The novel bonded semiconductor wafer is manufactured by means of a bonding process and has a layered structure alternately stacked with semiconductor layers and insulator layers in two cycles or more, wherein at least one of the insulator layers is formed with ion implanted oxygen.
    • 提供了一种新颖的键合半导体晶片,其具有交替层叠的半导体层和绝缘体层的两层以上的层叠结构,并且通过接合工艺制造,其中至少一个绝缘体层由离子注入的氧形成,并且 用于其中采用离子注入分离工艺的接合半导体晶片的新颖制造方法。 新型键合半导体晶片通过接合工艺制造,并且具有在两个周期以上交替层叠的半导体层和绝缘体层的层叠结构,其中至少一个绝缘体层由离子注入的氧形成。