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    • 41. 发明申请
    • Solid-state imaging device, method for producing the same, and electronic apparatus
    • 固态成像装置及其制造方法以及电子装置
    • US20100224951A1
    • 2010-09-09
    • US12660579
    • 2010-03-01
    • Yutaka Nishimura
    • Yutaka Nishimura
    • H01L23/48H01L21/768
    • H01L27/14689H01L27/14609H01L27/14636H01L2924/0002H01L2924/00
    • A solid-state imaging device includes: a peripheral circuit element formed on a semiconductor substrate having an image sensing area where an image sensing element that captures an image of an object is provided and a peripheral area located on the periphery of the image sensing area, the peripheral circuit element being in the peripheral area; a plurality of insulation films formed to cover at least the peripheral circuit element; and a contact plug formed in a contact hole through the plurality of insulation films and above the peripheral circuit element in such a manner that the contact plug is electrically connected to the peripheral circuit element; the plurality of insulation films including a first insulation film, and a second insulation film formed to cover the first insulation film, the contact hole being formed by etching the second insulation film so as to remove a portion thereof where the contact hole is to be formed, and then etching the first insulation film so as to remove a portion thereof where the contact hole is to be formed, the first insulation film being formed to serve as an etching stopper layer during etching of the second insulation film, the first insulation film also being formed to cover a portion where the contact hole is to be formed above the peripheral circuit element, with portions other than the portion where the contact hole is to be formed above the peripheral circuit element being exposed.
    • 一种固态成像装置,包括:形成在具有拍摄物体的图像的摄像元件的图像感测区域的半导体衬底上的外围电路元件和位于摄像区域周边的周边区域, 外围电路元件在周边区域中; 形成为至少覆盖外围电路元件的多个绝缘膜; 以及接触插塞,其通过所述多个绝缘膜和所述外围电路元件上方形成在接触孔中,使得所述接触插塞电连接到所述外围电路元件; 所述多个绝缘膜包括第一绝缘膜和形成为覆盖所述第一绝缘膜的第二绝缘膜,所述接触孔通过蚀刻所述第二绝缘膜而形成,以去除其中将形成所述接触孔的部分 然后蚀刻第一绝缘膜以除去其中将形成接触孔的部分,第一绝缘膜形成为在第二绝缘膜的蚀刻期间用作蚀刻停止层,第一绝缘膜也 被形成为覆盖在周边电路元件上方形成接触孔的部分,除了在周边电路元件上方形成接触孔的部分之外的部分露出。
    • 47. 发明授权
    • Pattern forming method and ink compostion
    • 图案形成方法和油墨组合
    • US5635006A
    • 1997-06-03
    • US540622
    • 1990-06-19
    • Hirotoshi WatanabeYutaka NishimuraKoji MatsuoNoboru AikawaMasahide Tsukamoto
    • Hirotoshi WatanabeYutaka NishimuraKoji MatsuoNoboru AikawaMasahide Tsukamoto
    • B41M1/10G02F1/1335H01J9/227H01J29/32B05D5/00
    • H01J29/327B41M1/10G02F1/133516H01J9/2277H01J9/2278
    • The fine-line pattern forming method is to form a pattern by transferring the pattern formed on the blanket of which surface is covered with an elastic material mainly composed of silicone resin, on a substrate on which a tack layer is formed. As an example thereof, the forming method of cathode-ray tube anode comprises a step of filling the groove of an intaglio with a graphite ink, a step of transferring the graphite ink in the groove of the intaglio on a blanket of which surface is covered with an elastic material mainly composed of silicone resin, a step of forming a tack layer on a substrate, a step of transferring and printing the pattern transferred on the blanket onto the substrate, a step of filling the groove of the intaglio with a phosphor ink, a step of transferring the ink in the groove of the intaglio on the blanket of which surface is covered with an elastic material mainly composed of silicone resin, a step of forming a tack layer on the substrate, a step of transferring and printing the pattern transferred on the blanket on the substrate on which the graphite pattern has been formed, a step of transferring an aluminum thin film possessing multiple pores as a metal-backed layer so as to cover a black matrix and a phosphor layer, and a step of firing the substrate covered with the aluminum thin film. The graphite ink comprises graphite powder, vehicle containing depolymerization type organic binder, and organic acid metal salt. The phosphor ink comprises phosphor powder and vehicle containing polymerization type organic binder.
    • 细线图案形成方法是在形成有粘性层的基板上,通过将主要由硅树脂构成的弹性材料覆盖在其表面的毯子上的图案转印而形成图案。 作为其示例,阴极射线管阳极的形成方法包括用石墨墨水填充凹版的凹槽的步骤,将石墨墨在凹版的凹槽中的表面覆盖的毯子上的步骤 主要由硅树脂构成的弹性材料,在基材上形成粘性层的步骤,将在橡皮布上转印的图案转印印刷到基材上的步骤,用荧光体墨水填充凹版的凹槽的步骤 将主要由硅树脂构成的弹性材料覆盖在表面的毯子上的凹版凹槽中的墨水转印到基板上形成粘着层的工序,转印印刷图案的步骤 转印在已经形成有石墨图案的基板上的橡皮布上,转印具有多个孔的铝薄膜作为金属背衬层以覆盖黑矩阵a 和荧光体层,以及烧制被铝薄膜覆盖的基板的步骤。 石墨油墨包括石墨粉,含有解聚型有机粘合剂的载体和有机酸金属盐。 荧光体油墨包含荧光体粉末和含有聚合型有机粘合剂的载体。