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    • 43. 发明授权
    • Method for forming scribed groove and scribing apparatus
    • 用于形成划线槽和划线装置的方法
    • US06916726B2
    • 2005-07-12
    • US10624985
    • 2003-07-22
    • Yuji OhnoHiroshi ImaiYoshito Nakase
    • Yuji OhnoHiroshi ImaiYoshito Nakase
    • C03B33/023C03B33/037H01L21/301H01L21/304H01L21/78H01L21/46H01L21/76
    • H01L21/3043H01L21/78
    • A method for forming scribed grooves on a wafer and an apparatus for implementing the method. The method moves the cutting part such that its cutting edge forms an inverted trapezoid-shaped path, thereby reducing the scribing angle of the cutting edge to an acute angle. Consequently, the stress produced by the mechanical shock at the time of the scribing can be dispersed in the moving direction of the cutting edge and in a direction perpendicular to the surface of the wafer. The horizontal movement of the scribing cutting edge in the wafer enables the application of a sufficient load in a direction perpendicular to the scribing plane in the wafer. Consequently, vertical cracks are sufficiently generated, and the amount of dimensional deviation between the scribed groove and the cleaved plane is reduced. This method can produce chips featuring outside dimensions with higher precision and cleaved surfaces with high-quality mirror finish.
    • 一种用于在晶片上形成刻划槽的方法以及用于实现该方法的装置。 该方法移动切割部分,使得其切割边缘形成倒梯形路径,从而将切割刃的划线角度减小到锐角。 因此,在划线时由机械冲击产生的应力可以沿切削刃的移动方向和垂直于晶片表面的方向分散。 晶片上的划线切割刃的水平运动使得能够在与晶片上的划线平面垂直的方向上施加足够的负载。 因此,充分产生垂直裂纹,并且划线槽和解理面之间的尺寸偏差量减少。 这种方法可以生产具有更高精度的外形尺寸和切割表面的芯片,具有高品质的镜面光洁度。
    • 45. 发明授权
    • Ultrasonic flow meter having a tubular elastic transducer holding unit
    • 超声波流量计具有管状弹性换能器保持单元
    • US06644130B2
    • 2003-11-11
    • US10061894
    • 2002-02-01
    • Hiroshi ImaiAkira Takada
    • Hiroshi ImaiAkira Takada
    • G01F166
    • G01F1/667
    • The ultrasonic flow meter of the present invention comprising a measuring pipe through which liquid flows, and two measuring units provided at an interval in the lengthwise direction on measuring pipe. A tightly adhered tube having elasticity is attached to an attaching indentation formed in the measuring pipe over the peripheral direction, and its inner peripheral surface is tightly adhered to the outer peripheral surface of measuring pipe. A transducer is arranged on the outer peripheral surface of tightly adhered tube in the state in which it is pressed against the outer peripheral surface of the tightly adhered tube. In this ultrasonic flow meter, the transmission of vibrations between the transducer and fluid inside the measuring pipe can be carried out uniformly.
    • 本发明的超声波流量计包括液体流过的测量管和在测量管上沿长度方向间隔设置的两个测量单元。 将具有弹性的紧密粘合的管附接到在测量管上形成的在周向上的安装凹部,并且其内周面紧密地粘附在测量管的外周面上。 传感器在紧贴在紧密粘合的管的外周表面的状态下布置在紧密粘合的管的外周表面上。 在这种超声波流量计中,传感器与测量管内的流体之间的振动传输可以均匀地进行。
    • 47. 发明授权
    • Rotary joint
    • 旋转接头
    • US6145889A
    • 2000-11-14
    • US309590
    • 1999-05-11
    • Hiroshi Imai
    • Hiroshi Imai
    • F16L27/093F16C17/00F16L27/08F16L17/035
    • F16L27/0816Y10S285/906
    • A rotary joint comprises: a joint main body constructed of a casing (1) and a housing (3); and, a rotary body (8) inserted in the joint main body and rotatably mounted therein. In the joint: a part of an outer peripheral surface of the rotary body (8) serves as a corresponding inner race of a sliding bearing; and, the sliding bearing rotatably supports the rotary body (8), and constructed of the corresponding inner race (11) and a corresponding outer race (10) incorporated in the housing (3). The sliding bearing (10, 11) may be constructed of: a plurality of units of thin-width sliding bearings; or, a single unit of a thick-width sliding bearing. A pin (12) is pounded into the joint and engaged with both the outer race (10) and the housing (3), whereby the outer race (10) is prevented from rotating in operation.
    • 旋转接头包括:由壳体(1)和壳体(3)构成的接头主体; 以及插入到接头主体中并可旋转地安装在其中的旋转体(8)。 在接头中:旋转体(8)的外周面的一部分作为滑动轴承的相应的内圈; 并且,滑动轴承可旋转地支撑旋转体(8),并且由相应的内座圈(11)和组合在壳体(3)中的对应的外圈(10)构成。 滑动轴承(10,11)可以由多个薄型滑动轴承单元构成; 或者是单宽度的滑动轴承的单个单元。 销(12)撞入接头并与外座圈(10)和外壳(3)啮合,从而防止外座圈(10)在工作中旋转。