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    • 46. 发明授权
    • MEMS utility meters with integrated mass flow sensors
    • 具有集成质量流量传感器的MEMS功率表
    • US09109935B2
    • 2015-08-18
    • US13662523
    • 2012-10-28
    • Xiangyou YangYong FengSugang JiangChih-Chang ChenLiji Huang
    • Xiangyou YangYong FengSugang JiangChih-Chang ChenLiji Huang
    • G01F1/68G01F1/684G01F25/00G01F15/00
    • G01F1/6845G01F1/6842G01F15/00G01F25/0007
    • This invention is related to an apparatus which incorporates a microfabricated silicon mass flow sensor to measure city gas flow rate in a medium pressure range for utility industry which is dominated by conventional mechanical meters such as turbine and rotary meters. The microfabricated mass flow sensor is so called micro-electro-mechanical systems (a.k.a. MEMS) device. Due to the small feature size of micro scale for MEMS mass flow sensor, the invented apparatus includes many advantages such as low power consumption, compact package, high reliability and extended dynamic measurement range. This apparatus is also provided with a stable flow conditioning to achieve a desired dynamic range capability. Furthermore, because of the high accuracy characteristic, the apparatus in this invention could be applied for custody transfer or tariff in utility industry as well.
    • 本发明涉及一种装置,该装置包括微制硅质量流量传感器,用于测量以常规机械仪表如涡轮机和旋转仪表为主的公用工业的中压范围内的城市气体流量。 微型质量流量传感器是所谓的微机电系统(微机电系统)设备。 由于MEMS质量流量传感器的微尺度特征尺寸小,本发明装置具有功耗低,封装紧凑,可靠性高,扩展动态测量范围等优点。 该装置还具有稳定的流动调节以实现期望的动态范围能力。 此外,由于具有高精度特性,本发明的装置也可应用于公用事业行业的托管转让或关税。
    • 47. 发明授权
    • MEMS mass flow sensor assembly and method of making the same
    • MEMS质量流量传感器组件及其制造方法
    • US08950253B2
    • 2015-02-10
    • US13736941
    • 2013-01-08
    • Liji HuangChih-Chang Chen
    • Liji HuangChih-Chang Chen
    • G01F1/68G01F1/69
    • G01F1/69G01F1/684G01F1/6845G01F1/692
    • A silicon mass flow sensor manufacture process that enables the backside contacts and eliminates the conventional front side wire binding process, and the assembly of such a mass flow sensor is disclosed in the present invention. The achieved assembly enhances the reliability by eliminating the binding wire exposure to the flow medium that may lead to detrimental failure due to the wire shortage or breakage while the miniature footprint could be maintained. The assembly further reduces flow instability from the flow sensor package including the bump of wire sealing. The invented mass flow sensor assembly can be a flow sensor module if the supporting sensor carrier is pre-designed with the control electronics. Without the control electronics, the said mass flow sensor assembly is easy to install into desired flow channels and connect to the external control electronics.
    • 硅质量流量传感器制造方法,其能够实现背面接触并消除常规的前侧线束粘合过程,并且在本发明中公开了这种质量流量传感器的组装。 实现的组件通过消除可能导致由于电线短缺或断裂而导致有害故障的流动介质的接合线而增强了可靠性,同时可以保持微小的占地面积。 该组件进一步减少了流量传感器封装的流动不稳定性,包括电线密封凸块。 如果支撑传感器载体与控制电子装置预先设计,则本发明的质量流量传感器组件可以是流量传感器模块。 没有控制电子器件,所述质量流量传感器组件易于安装到期望的流动通道中并连接到外部控制电子装置。
    • 48. 发明申请
    • MEMS UTILITY METERS WITH EXCHANGEABLE METROLOGY UNIT
    • 具有可交换计量单位的MEMS实用程序
    • US20140118161A1
    • 2014-05-01
    • US13662520
    • 2012-10-28
    • Changming JiangYong FengSugang JiangChih-Chang ChenLiji Huang
    • Changming JiangYong FengSugang JiangChih-Chang ChenLiji Huang
    • G01F5/00G08C15/06
    • H04Q9/00H04Q2209/43H04Q2209/60
    • An all-electronic utility gas meter using with micromachined (a.k.a. MEMS Micro Electro Mechanical Systems) silicon sensor to measure gas metrology data for custody transfer or tariff in city gas metering application is disclosed in the present invention. The meter has two separate metrology units. One of the units is located in the main flow channel with the insertion probing configuration while the other is configured as a bypass unit assembly with the main metrology unit. The bypass metrology unit can perform independent metrology tasks and can be exchanged onsite during service, maintenance or repair without dismantle the meter from the service pipeline. The bypass metrology unit also can be used to compare the measured data from time to time and performance self-diagnosis that shall help the performance and data authentication during the meter field service. Both of the units can be powered by battery or external sources. The units can be connected to network as well as provide internal plural storages for data transmission and safety.
    • 在本发明中公开了一种使用微机械(即微机电MEMS机电系统)硅传感器来测量用于城市燃气计量应用中的监管转移或关税的气体计量数据的全电气公用事业气量计。 仪表有两个独立的计量单位。 其中一个单元位于具有插入探测配置的主流道中,而另一个被配置为与主计量单元的旁路单元组件。 旁路计量单元可以执行独立的计量任务,并可在维修,维护或维修期间进行现场交换,而无需将仪表从服务管道拆除。 旁路计量单元还可用于比较不时测量的数据和性能自我诊断,这将有助于仪表现场服务期间的性能和数据认证。 这两个单元可以由电池或外部来源供电。 这些单元可以连接到网络,并提供用于数据传输和安全的内部多个存储。
    • 49. 发明申请
    • MEMS Utility Meters with Integrated Mass Flow Sensors
    • 具有集成质量流量传感器的MEMS实用仪表
    • US20140116129A1
    • 2014-05-01
    • US13662523
    • 2012-10-28
    • Xiangyou YangYong FengSugang JiangChih-Chang ChenLiji Huang
    • Xiangyou YangYong FengSugang JiangChih-Chang ChenLiji Huang
    • G01F1/684
    • G01F1/6845G01F1/6842G01F15/00G01F25/0007
    • This invention is related to an apparatus which incorporates a microfabricated silicon mass flow sensor to measure city gas flow rate in a medium pressure range for utility industry which is dominated by conventional mechanical meters such as turbine and rotary meters. The microfabricated mass flow sensor is so called micro-electromechanical systems (a.k.a. MEMS) device. Due to the small feature size of micro scale for MEMS mass flow sensor, the invented apparatus includes many advantages such as low power consumption, compact package, high reliability and extended dynamic measurement range. This apparatus is also provided with a stable flow conditioning to achieve a desired dynamic range capability. Furthermore, because of the high accuracy characteristic, the apparatus in this invention could be applied tot custody transfer or tariff in utility industry as well.
    • 本发明涉及一种装置,该装置包括微制硅质量流量传感器,用于测量以常规机械仪表如涡轮机和旋转仪表为主的公用工业的中压范围内的城市气体流量。 微型质量流量传感器是所谓的微机电系统(微机电系统)设备。 由于MEMS质量流量传感器的微尺度特征尺寸小,本发明装置具有功耗低,封装紧凑,可靠性高,扩展动态测量范围等优点。 该装置还具有稳定的流动调节以实现期望的动态范围能力。 此外,由于具有高精度特性,本发明的装置也可应用于公用事业行业的保管转让或关税。
    • 50. 发明授权
    • Integrated micromachining proximity switch sensors in air/oil lubricators
    • 空气/油润滑器中的集成微加工接近开关传感器
    • US08644693B2
    • 2014-02-04
    • US12796565
    • 2010-06-08
    • Liji HuangJiliang RuanJian LuoChih-Chang Chen
    • Liji HuangJiliang RuanJian LuoChih-Chang Chen
    • F24H1/10
    • G01N33/2888G01N25/18
    • An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon thermal sensor as a proximity switch sensor in air/oil Lubricators is disclosed in the present invention. The present invention relates to mass flow sensing and measurement for both gas and liquid phase and relates to air/oil lubrication process for multi-point lubrication machine. The invented apparatus is utilized as an alarm device to prevent mechanical system failures caused by the discontinuity of oil lubrication. The MEMS silicon thermal sensor is distinguished with a variety of advantages of small size, low power consumption, high reliability and high accuracy. In addition to the above benefits, the most significant and critical advantage is its fast response time of less than 20 msec, which makes the proximity switch control become viable for preventing equipment damage from oil lubricants discontinuity.
    • 本发明公开了一种与微加工(即微机电MEMS机械系统)硅热传感器集成的装置,作为空气/油中的接近开关传感器。 本发明涉及气相和液相的质量流量感测和测量,涉及多点润滑机的空气/油润滑过程。 本发明的装置用作报警装置,以防止油润滑不连续引起的机械系统故障。 MEMS硅热传感器具有体积小,功耗低,可靠性高,精度高等优点。 除了上述优点之外,最重要和最关键的优点是其快速响应时间小于20毫秒,这使得接近开关控制变得可行,以防止油润滑剂不连续的设备损坏。