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    • 41. 发明专利
    • Fluid control device
    • 流体控制装置
    • JP2005069305A
    • 2005-03-17
    • JP2003298082
    • 2003-08-22
    • Fujikin Inc株式会社フジキン
    • KOGAI MUTSUNORIYAMAJI MICHIOTOKUDA ICHIROTAKEUCHI KAZUAKI
    • F16K27/00F17D1/02
    • PROBLEM TO BE SOLVED: To provide a fluid control device for additionally installing or changing a line without stopping a device connected with an existing line.
      SOLUTION: An additionally installed line 2 is connected with the existing line 1 through a connecting means for additional installation. The connecting means includes an existing line side shutoff/opening part 3 disposed to a fluid inlet part of the existing line 1, an additionally installed line side shutoff/opening part 4, and a communicating part 5 which is disposed between the existing line side shutoff/opening part 3 and the additionally installed line side shutoff/opening part 4, and the additionally installed line side shutoff/opening part 4 can be opened to the air.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种流体控制装置,用于在不停止与现有生产线连接的装置的情况下额外安装或更换管线。

      解决方案:另外安装的线路2通过连接装置与现有线路1连接,用于附加安装。 连接装置包括设置在现有管线1的流体入口部分上的现有管线侧截止/打开部分3,另外安装的管线侧截止/打开部分4和连通部分5,其设置在现有管线侧关闭 /开口部3和附加安装的线侧截止开口部4,另外安装的线侧切断开口部4能够向空气开放。 版权所有(C)2005,JPO&NCIPI

    • 45. 发明专利
    • Fluid coupling
    • 流体联轴器
    • JPH11280967A
    • 1999-10-15
    • JP8580798
    • 1998-03-31
    • Fujikin Inc株式会社フジキン
    • YAMAJI MICHIOSHINOHARA TSUTOMUYOKOYAMA KOSUKE
    • F16L17/00F16K27/00
    • F16K27/003Y10S285/906
    • PROBLEM TO BE SOLVED: To eliminate discrimination between the male and female molds of a coupling member and to prevent worsening of sealing ability due to slippage.
      SOLUTION: Retainer storing recesses 45 and 46 are formed in the abutment end face of each coupling member 5 and annular protrusion parts 47 and 48 for pressing a gasket with annular protrusions 47a and 48a are formed on the bottom of the retainer storing recesses 45 and 46. A retainer 42 comprises a retainer body 43 holding the outer peripheral surface of a gasket 41 and mounted on the outer periphery of the annular protrusion part 47 of one coupling member 5; and a guide ring part 44 to guide the peripheral surface of the retainer storing recess 46 of the other coupling member 12 during abutment of coupling members 5 and 12 against each other.
      COPYRIGHT: (C)1999,JPO
    • 要解决的问题:消除联接构件的阴模和阴模之间的区别,并防止由于滑动引起的密封能力的恶化。 解决方案:在每个联接构件5的邻接端面形成保持器存储凹部45和46,并且在保持器容纳凹部45和46的底部上形成用于按压具有环形突起47a和48a的垫圈的环形突起部分47和48 保持器42包括:保持体本体43,其保持垫圈41的外周面并安装在一个联接构件5的环状突出部47的外周上; 以及引导环部分44,以在联接构件5和12彼此抵靠的同时引导另一联接构件12的保持器存放凹部46的外周表面。
    • 46. 发明专利
    • Flow control valve for flow controlling device
    • 流量控制阀用于流量控制装置
    • JP2014190387A
    • 2014-10-06
    • JP2013064692
    • 2013-03-26
    • Fujikin Inc株式会社フジキン
    • HIROSE TAKASHIYAMAJI MICHIOYOSHIDA TOSHIHIDESHIKKO KOHEI
    • F16K31/02F16K27/02
    • F16K31/004F16K7/14F16K25/005F16K27/0236F16K31/007
    • PROBLEM TO BE SOLVED: To provide a valve capable of simplifying and miniaturizing a structure of a piezoelectric element driving type metal diaphragm control vale, and facilitate assembly, maintenance and check of the structure.SOLUTION: A flow control valve comprises: a valve body 1; a metal diaphragm valve body 2; a presser screw 5; an upper support cylinder body 23 mounted vertically in a hole part 1a for a valve chamber of the valve body 1 and screwed with a lower support body 22 having a diaphragm presser 3 at a lower part; a guide body 24 mounted to an outer periphery of the upper support body 23; a leaf spring 18 arranged on a bottom wall of the lower support body 22 via a leaf spring receiving board 8; a lower receiving board 9 provided in an upper support cylinder body 21; a piezoelectric element 10 mounted in the upper support cylinder body 21 via a ball 9a; a bearing 14 arranged at an upper part of the piezoelectric element 10; and positioning members 12, 13 arranged above the upper support cylinder body 23.
    • 要解决的问题:提供一种能够简化和小型化压电元件驱动型金属隔膜控制阀的结构的阀,并且便于组装,维护和检查结构。解决方案:流量控制阀包括:阀体1 ; 金属隔膜阀体2; 压脚螺丝5; 上部支撑筒体23垂直安装在阀体1的阀室的孔部1a中,并与下部具有隔膜推压器3的下部支撑体22螺纹连接; 安装到上支撑体23的外周的引导体24; 通过板簧接收板8布置在下支撑体22的底壁上的板簧18; 设置在上支撑筒体21中的下接收板9; 经由球9a安装在上支撑筒体21中的压电元件10; 布置在压电元件10的上部的轴承14; 以及布置在上支撑筒体23上方的定位构件12,13。
    • 47. 发明专利
    • Accumulation-type gas supply device
    • 蓄能式气体供应装置
    • JP2014092929A
    • 2014-05-19
    • JP2012243041
    • 2012-11-02
    • Fujikin Inc株式会社フジキン
    • KOGAI MUTSUNORIHIROSE TAKASHIYAMAJI MICHIOMATSUDA TAKAHIRO
    • G05D7/00
    • G05D7/00F15B13/044F16K27/003G05D7/0652G05D7/0682Y10T137/87249Y10T137/87885
    • PROBLEM TO BE SOLVED: To improve an accumulation-type gas supply device for a semiconductor manufacturing apparatus by the following: increasing the number of gas supply lines, reducing the size of the device, reducing the internal volume of gas channels inside the device, enhancing the gas replacement properties of the device, reducing installation space, and facilitating maintenance of various instruments.SOLUTION: Two flow control devices 3 provided with a plurality of flow controllers are secured in mutually opposed combination to a gas-inlet-side block 12 and a gas-outlet-side block 13 which are parallelly arranged with a space in between in planar view; each of the flow controllers 3 is provided with an inlet opening/closing valve 1 and an outlet opening/closing valve 5, whereby a gas supply unit U provided with at least four gas supply lines S is formed; and a plurality of gas supply units U are secured in a stacked configuration.
    • 要解决的问题:通过以下方式改善用于半导体制造装置的累积型气体供应装置:增加气体供应管线的数量,减小装置的尺寸,减小装置内的气体通道的内部容积,增强 设备的气体替换性能,减少安装空间,便于各种仪器的维护。解决方案:设有多个流量控制器的两个流量控制装置3以相互相对的组合固定到气体入口侧块体12和 气体出口侧块13,其平面地平面地布置有在其间的空间; 每个流量控制器3设置有入口开闭阀1和出口开/关阀5,由此形成设置有至少四个气体供应管线S的气体供应单元U; 并且多个气体供给单元U被固定在堆叠构造中。
    • 48. 发明专利
    • Actuator for fluid controller
    • 流体控制器执行器
    • JP2014020398A
    • 2014-02-03
    • JP2012157051
    • 2012-07-13
    • Fujikin Inc株式会社フジキン
    • YAKUSHIJIN TADAYUKIYAMAJI MICHIOTANIGAWA TAKESHIISHIBASHI KEISUKESASAKI SHINICHIRO
    • F16K31/122
    • F16K31/1221F15B15/02F15B15/1476F16K21/04F16K27/0236F16K31/1225Y10T137/7754
    • PROBLEM TO BE SOLVED: To provide an actuator for a fluid controller, capable of eliminating necessity of a plurality of bolts for fixing an inner spring presser on a casing, and thereby capable of simplifying constitution, capable of omitting time and effort for assembly, and capable of adjusting energization force of an energization member from the outside after assembly.SOLUTION: An inner spring presser 15 includes a shaft part 22 and a cylindrical part 23 attached to a lower end part of the shaft part 22. An upper peripheral edge part of a through hole 12a of an energization member 12 is pressed by a lower end of the cylindrical part 23. The shaft part 22 is extended upward through an outer spring presser member 16. An adjusting screw 19 with a lower end abutting on an upper surface of the shaft part 22 of the inner spring presser 15 for positioning the inner spring presser 15 is screwed into a top wall 11d of a casing 11.
    • 要解决的问题:为了提供一种用于流体控制器的致动器,其能够消除用于将内部弹簧加压器固定在壳体上的多个螺栓的必要性,从而能够简化构造,能够省略组装的时间和精力,以及 能够在组装之后从外部调整通电构件的通电力。解决方案:内部弹簧加压件15包括轴部22和安装在轴部22的下端部的圆筒部23。 通电构件12的通孔12a由圆筒部23的下端按压。轴部22通过外部弹簧压紧构件16向上延伸。调节螺钉19的下端抵接在 用于定位内弹簧压脚15的内弹簧压脚15的轴部22旋入外壳11的顶壁11d。
    • 49. 发明专利
    • Screw member tightening device and pipe joint tightening device
    • 螺丝紧固装置和管接头紧固装置
    • JP2013066967A
    • 2013-04-18
    • JP2011206751
    • 2011-09-22
    • Tokyo Electron Ltd東京エレクトロン株式会社Fujikin Inc株式会社フジキン
    • OKABE YASUYUKIMORIYA SHUJISATO KENICHINAKADA TOMOHIROSHINOHARA TSUTOMUYAMAJI MICHIO
    • B25B23/15
    • PROBLEM TO BE SOLVED: To provide a screw member tightening device capable of performing a fasting operation added with a tightening-forgetting prevention function by only performing work which is the same with that of a conventional device even if an object is a pipe joint or the like which is limited in a tightening place, and to provide a pipe joint tightening device adapted to the screw member tightening device.SOLUTION: The pipe joint tightening device 1 comprises: a first jig 21 which is fit to a male screw member 11 while being perpendicular to the axial direction of the male screw member and holds the male screw member 11 so as to be unrotative; a second jig 22 which is fit to a female screw member 12 while being perpendicular to the axial direction of the female screw member, and rotates the female screw member 12; and a marking member 23 arranged at the first jig 21 so as to contact with the female screw member 12. A mark is applied to the female second member 12 by a marking member 23 when the female screw member 12 is rotated.
    • 要解决的问题:为了提供一种能够通过仅执行与常规装置相同的工作来执行加紧防止忘记功能的空腹操作的螺钉构件紧固装置,即使物体是管道 接头等被限制在紧固位置,并且提供适合于螺钉构件紧固装置的管接头紧固装置。 管接头紧固装置1包括:第一夹具21,其与阳螺纹构件11配合,同时与外螺纹构件的轴向垂直,并且将外螺纹构件11保持为不旋转 ; 第二夹具22,其与内螺纹构件12配合,同时垂直于内螺纹构件的轴向,并使阴螺纹构件12旋转; 以及设置在第一夹具21处以与内螺纹构件12接触的标记构件23.当阴螺纹构件12旋转时,通过标记构件23将标记施加到阴第二构件12。 版权所有(C)2013,JPO&INPIT