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    • 45. 发明申请
    • Parallel Array Architecture for Constant Current Electro-Migration Stress Testing
    • 用于恒流电迁移应力测试的并行阵列架构
    • US20100327892A1
    • 2010-12-30
    • US12492619
    • 2009-06-26
    • Kanak B. AgarwalPeter A. HabitzJerry D. HayesYing LiuDeborah M. MasseyAlvin W. Strong
    • Kanak B. AgarwalPeter A. HabitzJerry D. HayesYing LiuDeborah M. MasseyAlvin W. Strong
    • G01R31/02
    • G01R31/2858
    • A parallel array architecture for constant current electro-migration stress testing is provided. The parallel array architecture comprises a device under test (DUT) array having a plurality of DUTs coupled in parallel and a plurality of localized heating elements associated with respective ones of the DUTs in the DUT array. The architecture further comprises DUT selection logic that isolates individual DUTs within the array. Moreover, the architecture comprises current source logic that provides a reference current and controls the current through the DUTs in the DUT array such that each DUT in the DUT array has substantially a same current density, and current source enable logic for selectively enabling portions for the current source logic. Electro-migration stress testing is performed on the DUTs of the DUT array using the heating elements, the DUT selection logic, current source logic, and current source enable logic.
    • 提供了一种用于恒流电迁移应力测试的并行阵列架构。 并行阵列结构包括被测器件(DUT)阵列,其具有并联耦合的多个DUT和与DUT阵列中相应的DUT相关联的多个局部加热元件。 该架构还包括DUT阵列中的各个DUT隔离的DUT选择逻辑。 此外,该架构包括提供参考电流并且控制通过DUT阵列中的DUT的电流的电流源逻辑,使得DUT阵列中的每个DUT具有基本上相同的电流密度,以及电流源使能逻辑,用于选择性地使能部分 电流源逻辑。 使用加热元件,DUT选择逻辑,电流源逻辑和电流源使能逻辑在DUT阵列的DUT上执行电迁移应力测试。
    • 46. 发明授权
    • Method and apparatus for statistical CMOS device characterization
    • 用于统计CMOS器件表征的方法和装置
    • US07834649B2
    • 2010-11-16
    • US12779038
    • 2010-05-12
    • Kanak B. AgarwalJerry D. HayesYing Liu
    • Kanak B. AgarwalJerry D. HayesYing Liu
    • G01R31/26
    • G01R31/3181G01R31/3004
    • A unified test structure having a large number of electronic devices under test is used to characterize both capacitance-voltage parameters (C-V) and current-voltage parameters (I-V) of the devices. The devices are arranged in an array of columns and rows, and selected by control logic which gates input/output pins that act variously as current sources, sinks, clamps, measurement ports and sense lines. The capacitance-voltage parameter is measured by taking baseline and excited current measurements for different excitation voltage frequencies, calculating current differences between the baseline and excited current measurements, and generating a linear relationship between the current differences and the different frequencies. The capacitance is then derived by dividing a slope of a line representing the linear relationship by the excitation voltage. Different electronic devices may be so tested, including transistors and interconnect structures.
    • 使用具有大量被测电子器件的统一测试结构来表征器件的电容电压参数(C-V)和电流 - 电压参数(I-V)。 这些器件被排列成列和行的阵列,并由控制逻辑选择,该逻辑门将不同地作为电流源,吸收器,钳位,测量端口和检测线的输入/输出引脚进行门控。 通过对不同的激发电压频率进行基线和激励电流测量来测量电容电压参数,计算基线和激励电流测量之间的电流差异,并产生电流差与不同频率之间的线性关系。 然后通过将表示线性关系的线的斜率除以激励电压来导出电容。 可以对不同的电子设备进行测试,包括晶体管和互连结构。
    • 47. 发明申请
    • METHOD AND APPARATUS FOR STATISTICAL CMOS DEVICE CHARACTERIZATION
    • 用于统计CMOS器件特征的方法和装置
    • US20100225348A1
    • 2010-09-09
    • US12779038
    • 2010-05-12
    • Kanak B. AgarwalJerry D. HayesYing Liu
    • Kanak B. AgarwalJerry D. HayesYing Liu
    • G01R31/26
    • G01R31/3181G01R31/3004
    • A unified test structure having a large number of electronic devices under test is used to characterize both capacitance-voltage parameters (C-V) and current-voltage parameters (I-V) of the devices. The devices are arranged in an array of columns and rows, and selected by control logic which gates input/output pins that act variously as current sources, sinks, clamps, measurement ports and sense lines. The capacitance-voltage parameter is measured by taking baseline and excited current measurements for different excitation voltage frequencies, calculating current differences between the baseline and excited current measurements, and generating a linear relationship between the current differences and the different frequencies. The capacitance is then derived by dividing a slope of a line representing the linear relationship by the excitation voltage. Different electronic devices may be so tested, including transistors and interconnect structures.
    • 使用具有大量被测电子器件的统一测试结构来表征器件的电容电压参数(C-V)和电流 - 电压参数(I-V)。 这些器件被排列成列和行的阵列,并由控制逻辑选择,该逻辑门将不同地作为电流源,吸收器,钳位,测量端口和检测线的输入/输出引脚进行门控。 通过对不同的激发电压频率进行基线和激励电流测量来测量电容电压参数,计算基线和激励电流测量之间的电流差异,并产生电流差与不同频率之间的线性关系。 然后通过将表示线性关系的线的斜率除以激励电压来导出电容。 可以对不同的电子设备进行测试,包括晶体管和互连结构。