专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

41. 发明授权

US06478974B1 Microfabricated filter and shell constructed with a permeable membrane 失效
标题翻译：微型过滤器和壳体用可渗透膜构成
公开(公告)号：US06478974B1
公开(公告)日：2002-11-12
申请号：US09347903
申请日：1999-07-06
申请人： Kyle S. Lebouitz , Roger T. Howe , Albert P. Pisano
发明人： Kyle S. Lebouitz , Roger T. Howe , Albert P. Pisano
IPC分类号： B01D6700
CPC分类号： B81C1/00333 , B01D67/0072 , B01D67/0093 , B01D71/02 , B01D2323/225 , B01D2325/04 , B01L3/502707 , B01L3/502753 , B01L2200/12 , B01L2300/0681 , B81C1/00158 , G01N33/491 , G03F7/00
摘要： A method of fabricating a microfabricated filter. The method includes forming a frame structure and forming a plurality of openings through the frame structure. A permeable polysilicon membrane is formed over the plurality of openings through the frame structure. At least part of the sacrificial structure is etched with an etchant wherein the etchant passes through the permeable polysilicon membrane. The permeable polycrystal silicon membrane may have a thickness of between about 0.05 micrometers and about 0.30 micrometers.
摘要翻译：一种制造微加工过滤器的方法。该方法包括形成框架结构并且通过框架结构形成多个开口。通过框架结构在多个开口上形成可渗透的多晶硅膜。用蚀刻剂蚀刻牺牲结构的至少一部分，其中蚀刻剂通过可渗透的多晶硅膜。可渗透多晶硅膜的厚度可以在约0.05微米至约0.30微米之间。

42. 发明授权

US06236281B1 Q-controlled microresonators and tunable electronic filters using such resonators 有权
标题翻译： Q控制的微谐振器和使用这种谐振器的可调电子滤波器
公开(公告)号：US06236281B1
公开(公告)日：2001-05-22
申请号：US09401337
申请日：1999-09-21
申请人： Clark Tu-Cuong Nguyen , Roger T. Howe
发明人： Clark Tu-Cuong Nguyen , Roger T. Howe
IPC分类号： H03B530
CPC分类号： H03H9/02377 , G01R33/0286 , H01G5/14 , H03H9/0023 , H03H9/02393 , H03H9/02425 , H03H9/467 , H03H2009/02496
摘要： A Q-controlled microresonator and devices including such resonators.
摘要翻译： Q控制的微谐振器和包括这种谐振器的器件

43. 发明授权

US06210988B1 Polycrystalline silicon germanium films for forming micro-electromechanical systems 有权
标题翻译：用于形成微机电系统的多晶硅锗膜
公开(公告)号：US06210988B1
公开(公告)日：2001-04-03
申请号：US09483222
申请日：2000-01-14
申请人： Roger T. Howe , Andrea Franke , Tsu-Jae King
发明人： Roger T. Howe , Andrea Franke , Tsu-Jae King
IPC分类号： H01L2100
CPC分类号： B81C1/00246 , B81B2203/0118 , B81C2201/0109 , B81C2203/0735 , Y10S438/933
摘要： This invention relates to micro-electromechanical systems using silicon-germanium films.
摘要翻译：本发明涉及使用硅 - 锗膜的微机电系统

44. 发明授权

US6142358A Wafer-to-wafer transfer of microstructures using break-away tethers 失效
标题翻译：使用脱离系绳的晶圆 - 晶片转移微结构
公开(公告)号：US6142358A
公开(公告)日：2000-11-07
申请号：US866954
申请日：1997-05-31
申请人： Michael B. Cohn , Roger T. Howe
发明人： Michael B. Cohn , Roger T. Howe
IPC分类号： B23K1/00 , B81B7/00 , H01L21/68 , B23K31/02 , B23K1/018 , H01L23/52 , B65G49/07
CPC分类号： H01L21/6835 , B23K1/0016 , B81B7/00 , B23K2201/40 , H01L2221/68359 , H01L2924/30105 , Y10S414/135 , Y10S414/136
摘要： Break-away tethers to secure electronic, mechanical, optical, or other microstructures, during release from one substrate and transfer to another. Microstructures are fabricated with integrated tethers attaching them to a first substrate. The structures are undercut by etching and contacted and bonded to a second substrate. First and second substrates are separated, breaking the tethers.
摘要翻译：脱离系绳以在从一个基板释放并转移到另一个基板时固定电子，机械，光学或其他微结构。微结构制造具有将其附接到第一基底的集成系绳。该结构通过蚀刻被切割并接触并结合到第二基底。分离第一和第二底物，破坏系绳。

45. 发明授权

US6067858A Micromachined vibratory rate gyroscope 失效
标题翻译：微加工振动率陀螺仪
公开(公告)号：US6067858A
公开(公告)日：2000-05-30
申请号：US865726
申请日：1997-05-30
申请人： William A. Clark , Thor Juneau , Roger T. Howe
发明人： William A. Clark , Thor Juneau , Roger T. Howe
IPC分类号： G01C19/5719 , G01C19/00
CPC分类号： G01C19/5719
摘要： A microfabricated gyroscope to measure rotation about an axis parallel to the surface of the substrate. A voltage differential may be applied between pairs of electrode fingers to reduce the quadrature error. A microfabricated gyroscope includes a vibratory structure and interdigited electrodes having a high aspect ratio.
摘要翻译：用于测量围绕平行于衬底表面的轴的旋转的微制造陀螺仪。可以在电极指对之间施加电压差以减小正交误差。微制造的陀螺仪包括具有高纵横比的振动结构和交叉指向的电极。

46. 发明授权

US5639542A Sub-ground plane for micromachined device 失效
标题翻译：用于微加工装置的子接地平面
公开(公告)号：US5639542A
公开(公告)日：1997-06-17
申请号：US485367
申请日：1995-06-07
申请人： Roger T. Howe , Richard S. Payne , Stephen F. Bart
发明人： Roger T. Howe , Richard S. Payne , Stephen F. Bart
IPC分类号： B81B7/00 , G01P15/08 , B32B3/00 , G01P15/00 , H03H9/00
CPC分类号： B81B7/0006 , G01P15/0802 , Y10S428/901 , Y10T428/24917 , Y10T428/24926
摘要： A method and apparatus for providing a sub-ground plane for a micromachined device. The sub-ground plane is formed in or on the substrate. Above the sub-ground plane is a dielectric and then a discontinuous conductive layer used for interconnects for parts of the micromachined device. A movable microstructure is suspended above the interconnect layer. A conductive layer can be suspended above the movable microstructure. In one embodiment, the sub-ground plane is diffused into the substrate or a well in the substrate, and is of an opposite type from the type of silicon into which it is diffused. Alternatively, the sub-ground plane is formed from a conductive layer, deposited over the substrate before the layer used for interconnects.
摘要翻译：一种用于提供微加工装置的子接地平面的方法和装置。子接地平面形成在基底中或基底上。在子接地平面之上是电介质，然后是用于微加工装置的部件的互连的不连续导电层。可移动微结构悬浮在互连层上方。导电层可以悬浮在可移动微结构的上方。在一个实施例中，子接地平面扩散到衬底或衬底中的阱中，并且与其被扩散的硅的类型相反。或者，子接地平面由导电层形成，在用于互连的层之前沉积在衬底上。

47. 发明授权

US5491604A Q-controlled microresonators and tunable electronic filters using such resonators 失效
标题翻译： Q控制的微谐振器和使用这种谐振器的可调电子滤波器
公开(公告)号：US5491604A
公开(公告)日：1996-02-13
申请号：US989396
申请日：1992-12-11
申请人： Clark T.-C. Nguyen , Roger T. Howe
发明人： Clark T.-C. Nguyen , Roger T. Howe
IPC分类号： H01G5/14 , H03H9/02 , H03H9/46 , H01G5/011
CPC分类号： H03H9/02377 , G01R33/0286 , H01G5/14 , H03H9/02393 , H03H9/02425 , H03H9/467 , H03H2009/02496 , H03H9/0023
摘要： Resonator systems with controlled quality factors including a resonator having a plurality of ports and a first quality factor greater than the system quality factor, and an amplifier providing negative feedback among the ports to render the system quality factor independent of the resonator quality factor.
摘要翻译：具有受控质量因素的谐振器系统包括具有多个端口的谐振器和大于系统品质因数的第一品质因数，以及在端口之间提供负反馈的放大器，以使系统品质因数与谐振器品质因数无关。

48. 发明授权

US4823607A Released film structures and method of measuring film properties 失效
标题翻译：发布膜结构和测量膜性质的方法
公开(公告)号：US4823607A
公开(公告)日：1989-04-25
申请号：US51526
申请日：1987-05-18
申请人： Roger T. Howe , Mehran Mehregany , Stephen D. Senturia
发明人： Roger T. Howe , Mehran Mehregany , Stephen D. Senturia
IPC分类号： G01N3/00 , G01N19/06
CPC分类号： G01N3/00 , G01N1/32 , G01N2033/0096 , G01N2203/0053 , G01N2203/0075 , G01N2203/008 , G01N2203/0254 , G01N2203/0282 , G01N2203/0647
摘要： Released film structures are employed in measuring the mechanical properties of the film material. By measuring the deformation of thin film structures held under intrinsic tensile stress and then released, these mechanical properties can be accurately measured.
摘要翻译：释放的膜结构用于测量膜材料的机械性能。通过测量在固有拉伸应力下保持的薄膜结构的变形然后释放，可以精确地测量这些机械性能。

49. 发明授权

US4674319A Integrated circuit sensor 失效
标题翻译：集成电路传感器
公开(公告)号：US4674319A
公开(公告)日：1987-06-23
申请号：US714076
申请日：1985-03-20
申请人： Richard S. Muller , Roger T. Howe
发明人： Richard S. Muller , Roger T. Howe
IPC分类号： G01N27/00 , H01L29/84
CPC分类号： G01N29/036 , G01N2291/0256
摘要： A polysilicon microstructure is formed on a silicon substrate. Beneath the microstructure, are diffused regions in the substrate. The microstructure is capacitively coupled to these diffused regions so that one such capacitor acts as an excitation capacitor and the other capacitor acts as a sense capacitor. By applying an AC voltage to the excitation capacitor, the electrostatic force between the substrate and the microstructure changes causing a mechanical vibration in the microstructure. A DC voltage is applied to the sense capacitor. The mechanical vibration, which changes its capacitance, will develop a current through the sense capacitor. A phenomenon may then be sensed by the vibrating microstructure. A polymer film disposed on the microstructure can sorb a gas of interest. As the mass of the polymer film and vibrating microstructure increases, its frequency or phase changes. The current through the sense capacitor will exhibit a commensurate frequency or phase shift. Detection of such frequency or phase shift in the sense capacitor current will transduce the detection of the vapor of interest.
摘要翻译：在硅衬底上形成多晶硅微结构。在微观结构之下，是底物中的扩散区域。微结构电容耦合到这些扩散区域，使得一个这样的电容器用作激励电容器，另一个电容器用作感测电容器。通过向激励电容器施加AC电压，衬底和微结构之间的静电力导致微结构中的机械振动。直流电压被施加到感测电容器。改变其电容的机械振动将产生通过感测电容器的电流。然后可以通过振动微结构感测现象。设置在微结构上的聚合物膜可吸附感兴趣的气体。随着聚合物膜的质量和振动微结构的增加，其频率或相位发生变化。通过感测电容器的电流将呈现相当的频率或相移。感测电容器电流中的这种频率或相移的检测将转换感兴趣的蒸气的检测。

50. 发明授权

US08633573B2 Strained semiconductor materials, devices and methods therefore 失效
标题翻译：因此，应变半导体材料，器件和方法
公开(公告)号：US08633573B2
公开(公告)日：2014-01-21
申请号：US12706112
申请日：2010-02-16
申请人： Jinendra Raja Jain , Roger T. Howe
发明人： Jinendra Raja Jain , Roger T. Howe
IPC分类号： H01L29/06
CPC分类号： H01L31/105 , H01L33/34
摘要： Various applications are directed to a material stack having a strained active material therein. In connection with an embodiment, an active material (e.g. a semiconductor material) is at least initially and partially released from and suspended over a substrate, strained, and held in place. The release and suspension facilitates the application of strain to the semiconductor material.
摘要翻译：各种应用涉及其中具有应变活性材料的材料堆叠。结合一个实施例，活性材料（例如半导体材料）至少首先和部分地从衬底上释放并悬浮在衬底上，应变并保持就位。释放和悬浮有助于将应变应用于半导体材料。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式