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1. 发明授权

US4823607A Released film structures and method of measuring film properties 失效
标题翻译：发布膜结构和测量膜性质的方法
公开(公告)号：US4823607A
公开(公告)日：1989-04-25
申请号：US51526
申请日：1987-05-18
申请人： Roger T. Howe , Mehran Mehregany , Stephen D. Senturia
发明人： Roger T. Howe , Mehran Mehregany , Stephen D. Senturia
IPC分类号： G01N3/00 , G01N19/06
CPC分类号： G01N3/00 , G01N1/32 , G01N2033/0096 , G01N2203/0053 , G01N2203/0075 , G01N2203/008 , G01N2203/0254 , G01N2203/0282 , G01N2203/0647
摘要： Released film structures are employed in measuring the mechanical properties of the film material. By measuring the deformation of thin film structures held under intrinsic tensile stress and then released, these mechanical properties can be accurately measured.
摘要翻译：释放的膜结构用于测量膜材料的机械性能。通过测量在固有拉伸应力下保持的薄膜结构的变形然后释放，可以精确地测量这些机械性能。

2. 发明授权

US5043043A Method for fabricating side drive electrostatic micromotor 失效
标题翻译：制造侧驱静电微电机的方法
公开(公告)号：US5043043A
公开(公告)日：1991-08-27
申请号：US542435
申请日：1990-06-22
申请人： Roger T. Howe , Jeffrey H. Lang , Martin F. Schlecht , Martin A. Schmidt , Stephen D. Senturia , Mehran Mehregany , Lee S. Tavrow
发明人： Roger T. Howe , Jeffrey H. Lang , Martin F. Schlecht , Martin A. Schmidt , Stephen D. Senturia , Mehran Mehregany , Lee S. Tavrow
IPC分类号： H02N1/00
CPC分类号： H02N1/004
摘要： An electrostatic micromotor employs a side drive design. The stator operates in a plane above a substract and a moveable member lies and moves in the plane of the stator. An electrostatic field of operational strength is generated and sustained without breakdown in the plane between the stator and edges of the moveable member. Three fabrication processes enable formation of a moveable member in the plane of operation of the stator and spaced apart from the stator by a micron amount. One fabrication process deposits and patterns a structural layer to form the stator and moveable member over a sacrificial layer. A second fabrication process etches channels in a first structural layer to outline a stator, moveable member, and if desired, a bearing. A substrate is connected to the side of the structural layer through which the channels are etched and the opposite side is ground down to the ends of the channels to form salient stator, rotor and, if desired, bearing structures. The third fabrication process grows a sacrificial layer by local oxidation in an etched cavity of the substrate. A structural layer is then deposited and patterned over the substrate and sacrificial layer to form the stator and moveable member in a common plane. A harmonic side drive micromotor is also provided by the fabrication processes.
摘要翻译：静电微电机采用侧驱设计。定子在一个减法器上方的平面中工作，并且可移动构件位于定子的平面内并移动。产生并维持操作强度的静电场，而不会在定子和可移动构件的边缘之间的平面内发生故障。三个制造工艺使得能够在定子的操作平面中形成可移动构件并且与定子隔开微米量。一个制造工艺沉积和图案化结构层，以在牺牲层上形成定子和可移动构件。第二制造工艺蚀刻第一结构层中的通道以勾勒定子，可移动构件，并且如果需要，轮廓轴承。衬底连接到结构层的侧面，通道通过该侧被蚀刻并且相对侧被研磨到通道的端部，以形成凸出的定子，转子以及如果需要的话承载结构。第三制造工艺通过在衬底的蚀刻腔中的局部氧化来生长牺牲层。然后在衬底和牺牲层上沉积和图案化结构层，以在公共平面中形成定子和可移动构件。还通过制造工艺提供了谐波侧驱动微电机。

3. 发明授权

US4942767A Pressure transducer apparatus 失效
标题翻译：压力传感器装置
公开(公告)号：US4942767A
公开(公告)日：1990-07-24
申请号：US360325
申请日：1989-06-02
申请人： Joseph H. Haritonidis , Stephen D. Senturia , David J. Warkentin , Mehran Mehregany
发明人： Joseph H. Haritonidis , Stephen D. Senturia , David J. Warkentin , Mehran Mehregany
IPC分类号： H04R23/00
CPC分类号： H04R23/008
摘要： A micromachined diaphragm is positioned across a gap from an end of an optic fiber. The optic fiber and the diaphragm are integrally mounted. The end of the optic fiber provides a local reference plane which splits light carried through the fiber toward the diaphragm. The light is split into a transmitted part which is subsequently reflected from the diaphragm, and a locally reflected part which interferes with the subsequently diaphragm reflected part. The interference of the two reflective parts forms an interference light pattern carried back through the fiber to a light detector. The interference pattern provides an indication of diaphragm deflection as a function of applied pressure across the exposed side of the diaphragm. A detection of magnitude and direction of diaphragm deflection is provided by use of a second fiber positioned across the gap from the diaphragm. The second fiber provides an interference pattern in the same manner as the first fiber but with a phase shift. An opening allowing communication between ambient and the gap enables use of the interferometer sensor as a shear stress measuring device.
摘要翻译：微加工膜片位于与光纤端部的间隙上。光纤和隔膜一体安装。光纤的端部提供了一个局部参考平面，它将穿过光纤的光分成隔膜。光被分割成随后从光阑反射的透射部分和与随后的光阑反射部分干涉的局部反射部分。两个反射部件的干涉形成通过光纤带回光检测器的干涉光图案。干涉图形提供了膜片偏转的指示，作为横跨隔膜的暴露侧的施加压力的函数。通过使用位于隔膜间隙的第二纤维来提供膜片偏转的幅度和方向的检测。第二光纤以与第一光纤相同的方式提供干涉图案，但是具有相移。允许环境和间隙之间的通信的开口使得能够使用干涉仪传感器作为剪切应力测量装置。

4. 发明授权

US4926696A Optical micropressure transducer 失效
标题翻译：光学微压力传感器
公开(公告)号：US4926696A
公开(公告)日：1990-05-22
申请号：US932780
申请日：1986-11-19
申请人： Joseph H. Haritonidis , Stephen D. Senturia , David J. Warkentin , Mehran Mehregany
发明人： Joseph H. Haritonidis , Stephen D. Senturia , David J. Warkentin , Mehran Mehregany
IPC分类号： H04R23/00
CPC分类号： G01L9/0079 , H04R23/008
摘要： A thin diaphragm receives pressure across one side and faces a beam splitter on the other side. The beam splitter is integrally attached to the diaphragm and serves as a local optical reference plane for the entire assembly. Coherent light from a light source is partially reflected at the beam splitter. The remainder of the light is reflected from the diaphragm. The reflected beams recombine at a detection point and have a phase difference which is a function of the amount of deflection of the diaphragm. The detected recombined beams are indicative of the deflection of the diaphragm. Optical calibration of the aseembly is a function of the distance between the diaphragm and beam splitter which remains as predefined because the beam splitter is integral with the diaphragm. A vent in the small cavity formed between the diaphragm and beam splitter enables the diaphragm to sense small pressures with increased sensitivity. Through micro-fabrication techniques, the diaphragm is made sensitive to dynamic and static pressure. Detection of the thermal expansion of the assembly as well as deflection of the diaphragm enables a sensed pressure measurement as a differential between the detected thermal expansion and deflection.
摘要翻译：薄隔膜承受一侧的压力，并面对另一侧的分束器。分束器一体地附接到隔膜，并用作整个组件的局部光学参考平面。来自光源的相干光部分地在分束器处反射。剩余的光从隔膜反射。反射光束在检测点复合，并具有作为光阑偏转量的函数的相位差。检测到的重组光束表示膜片的偏转。组件的光学校准是隔膜和分束器之间的距离的函数，其保持为预定义，因为分束器与隔膜成一体。在隔膜和分束器之间形成的小空腔中的通风口使得隔膜能够以更高的灵敏度感测小压力。通过微型制造技术，膜片对动态和静态压力敏感。检测组件的热膨胀以及隔膜的偏转使得能够将检测到的压力测量作为检测到的热膨胀和挠曲之间的差。

5. 发明申请

US20120232398A1 WIRELESS FETAL MONITORING SYSTEM 有权
标题翻译：无线FET监控系统
公开(公告)号：US20120232398A1
公开(公告)日：2012-09-13
申请号：US13290002
申请日：2011-11-04
申请人： Masoud Roham , Enrique Saldivar , Srinivas Raghavan , Mehran Mehregany , Mitul Shah
发明人： Masoud Roham , Enrique Saldivar , Srinivas Raghavan , Mehran Mehregany , Mitul Shah
IPC分类号： A61B5/024 , A61B5/0444 , A61B7/00 , A61B8/00 , A61B8/02
CPC分类号： A61B5/0011 , A61B5/0022 , A61B5/02411 , A61B5/02438 , A61B5/02444 , A61B5/0245 , A61B5/033 , A61B5/04882 , A61B5/4356 , A61B5/6832 , A61B8/0866 , A61B8/4227 , A61B8/4472 , A61B8/488 , A61B8/565
摘要： A wireless fetal and maternal monitoring system includes a fetal sensor unit adapted to receive signals indicative of a fetal heartbeat, the sensor optionally utilizing a Doppler ultrasound sensor. A short-range transmission unit sends the signals indicative of fetal heartbeat to a gateway unit, either directly or via an auxiliary communications unit, in which case the electrical coupling between the short-range transmission unit and the auxiliary communications unit is via a wired connection. The system includes a contraction actuator actuatable upon a maternal uterine contraction, which optionally is a EMG sensor. A gateway device provides for data visualization and data securitization. The gateway device provides for remote transmission of information through a data communication network. A server adapted to receive the information from the gateway device serves to store and process the data, and an interface system to permits remote patient monitoring.
摘要翻译：无线胎儿和母亲监测系统包括适于接收指示胎儿心跳的信号的胎儿传感器单元，所述传感器可选地使用多普勒超声传感器。短距离传输单元直接地或经由辅助通信单元将指示胎心跳信号的信号发送到网关单元，在这种情况下，短程传输单元和辅助通信单元之间的电耦合经由有线连接。该系统包括可在母体子宫收缩时致动的收缩致动器，其可选地是EMG传感器。网关设备提供数据可视化和数据证券化。网关设备通过数据通信网络提供信息的远程传输。适于从网关设备接收信息的服务器用于存储和处理数据，以及允许远程病人监视的接口系统。

6. 发明申请

US20110306859A1 MULTIPURPOSE, MODULAR PLATFORM FOR MOBILE MEDICAL INSTRUMENTATION 审中-公开
标题翻译：多用途移动医疗仪器的模块化平台
公开(公告)号：US20110306859A1
公开(公告)日：2011-12-15
申请号：US13102817
申请日：2011-05-06
申请人： Enrique SALDIVAR , Mehran Mehregany
发明人： Enrique SALDIVAR , Mehran Mehregany
IPC分类号： A61B5/145 , A61B5/01 , A61N5/06 , A61B5/0488 , A61M5/142 , A61B5/0402 , A61B5/08 , G08B1/08 , A61N1/362
CPC分类号： A61B5/6898 , A61B5/0404 , A61B5/08 , A61B5/082 , A61B5/0836 , A61B5/14551 , A61B5/6823
摘要： A system provides for mobile medical instrumentation for use with a body. The system includes a primary wireless communication device, such as a cell phone or tablet computer, and one or more cradles. The cradles provide an interface to the body which provides for input of signals from the body, and optionally, therapeutic outputs to the body. The cradle and the primary wireless communication device may be releasably joined together so as to form a unitary structure when contacting the body. Alternately, the cradle may interface with the body, and communicate wirelessly to the primary wireless communication device. A cradle adapted to provide for a portable electrocardiogram includes a plurality of electrodes adapted for contact or non-contact sensing of the body. In the preferred embodiment, three electrodes are arranged in a triangular arrangement, most preferably a Einthoven triangular arrangement, with the distance between electrodes being 4 centimeters or less.
摘要翻译：系统提供与身体一起使用的移动医疗仪器。该系统包括诸如手机或平板计算机的主要无线通信设备以及一个或多个托架。支架为身体提供了一个接口，该接口提供了来自身体的信号输入，以及可选地对身体的治疗输出。支架和主无线通信设备可以可释放地连接在一起，以便当接触身体时形成整体结构。或者，托架可以与身体接口，并且与主无线通信设备无线通信。适于提供便携式心电图的支架包括适于接触或非接触感测身体的多个电极。在优选实施例中，三个电极以三角形布置，最优选地是Einthoven三角形布置，电极之间的距离为4厘米或更小。

7. 再颁专利

USRE42887E1 Silicon carbide and other films and method of deposition 有权
标题翻译：碳化硅等薄膜及沉积方法
公开(公告)号：USRE42887E1
公开(公告)日：2011-11-01
申请号：US12548363
申请日：2009-08-26
申请人： Mehran Mehregany , Christian A. Zorman , Xiao-An Fu , Jeremy Dunning
发明人： Mehran Mehregany , Christian A. Zorman , Xiao-An Fu , Jeremy Dunning
IPC分类号： C23C16/00
CPC分类号： C23C16/325
摘要： A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.
摘要翻译：公开了一种在衬底上沉积陶瓷膜，特别是碳化硅膜的方法，其中控制残余应力，残余应力梯度和电阻率。还公开了具有具有这些受控特性的沉积膜和具有这些性质的器件的衬底，特别是MEMS和NEMS器件，具有具有这些性质的膜的衬底。

8. 发明授权

US07892876B2 Three-axis accelerometers and fabrication methods 有权
标题翻译：三轴加速度计和制造方法
公开(公告)号：US07892876B2
公开(公告)日：2011-02-22
申请号：US12503382
申请日：2009-07-15
申请人： Mehran Mehregany
发明人： Mehran Mehregany
IPC分类号： H01L21/00 , H01L21/56
CPC分类号： G01P15/18 , B81B2201/0235 , B81C1/00182 , B81C2201/0111 , G01P15/0802 , G01P15/125 , G01P15/131 , G01P2015/084 , Y10T29/49156
摘要： Disclosed are MEMS accelerometers and methods for fabricating same. An exemplary accelerometer comprises a substrate, and a proof mass that is a portion of the substrate and which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, and a plurality of electrically-conductive suspension anus that are separated from the proof mass extend from the anchor and are coupled to the substrate surrounding the proof mass. A plurality of sense and actuation electrodes are separated from the proof mass by gaps and are coupled to processing electronics. Capacitive sensing is used to derive electrical signals caused by forces exerted on the proof mass, and the electrical signals are processed by the processing electronics to produce x-, y- and z-direction acceleration data. Electrostatic actuation is used to induce movements of the mass for force balance operation, or self-test and self-calibration. The fabrication methods use deep reactive ion etch bulk micromachining and surface micromachining to form the proof mass, suspension arms and electrodes. The anchor, suspension arms and electrodes are made in the same process steps from the same electrically conductive material, which is different from the substrate material.
摘要翻译：公开了MEMS加速度计及其制造方法。示例性的加速度计包括基板和作为基板的一部分的检测质量块，并且其与通过间隙围绕其的基板分离。导电锚固体耦合到检测质量块，并且与防护物质分离的多个导电悬浮肛门从锚固体延伸并且耦合到围绕证明物质的基底。多个感测和致动电极通过间隙与证明块分离，并且耦合到处理电子器件。电容感测用于导出由施加在检验质量上的力引起的电信号，并且电信号由处理电子器件处理以产生x，y和z方向的加速度数据。静电驱动用于引起质量的运动，用于力平衡运行，或自检和自校准。制造方法使用深反应离子蚀刻体微加工和表面微加工形成证明质量块，悬臂和电极。锚固器，悬架臂和电极由与基板材料不同的相同导电材料以相同的工艺步骤制成。

9. 发明申请

US20100078753A1 Flow Sensor and Method of Fabrication 审中-公开
标题翻译：流量传感器及其制作方法
公开(公告)号：US20100078753A1
公开(公告)日：2010-04-01
申请号：US12243941
申请日：2008-10-01
申请人： Mehran Mehregany , Nelsimar Moura Vandelli, JR.
发明人： Mehran Mehregany , Nelsimar Moura Vandelli, JR.
IPC分类号： H01L21/28 , H01L29/66
CPC分类号： G01F1/6888 , G01F1/6845
摘要： A method for forming a flow sensor having self-supported heat-carrying elements is disclosed. Self-supported heat-carrying elements are capable of operating with higher thermal efficiency, enabling lower power consumption and higher sensitivity, due to a lack of heat loss into a supporting membrane. Self-supported heat-carrying elements facilitate wider operating temperature range and compatibility with harsh media.
摘要翻译：公开了一种用于形成具有自支承热承载元件的流量传感器的方法。由于缺乏对支撑膜的热损失，自支撑的承载元件能够以更高的热效率运行，从而能够实现更低的功率消耗和更高的灵敏度。自支撑的承载元件有助于更宽的工作温度范围和与苛刻介质的兼容性。

10. 发明申请

US20050106320A1 Silicon carbide and other films and method of deposition 有权
标题翻译：碳化硅等薄膜及沉积方法
公开(公告)号：US20050106320A1
公开(公告)日：2005-05-19
申请号：US10716006
申请日：2003-11-18
申请人： Mehran Mehregany , Christian Zorman , Xiao-An Fu , Jeremy Dunning
发明人： Mehran Mehregany , Christian Zorman , Xiao-An Fu , Jeremy Dunning
IPC分类号： B81B3/00 , C23C16/32 , C23C16/52 , G02B26/08 , H01L21/04 , B32B9/00 , C23C16/24
CPC分类号： C23C16/325
摘要： A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.
摘要翻译：公开了一种在衬底上沉积陶瓷膜，特别是碳化硅膜的方法，其中控制残余应力，残余应力梯度和电阻率。还公开了具有具有这些受控特性的沉积膜和具有这些性质的器件的衬底，特别是MEMS和NEMS器件，具有具有这些性质的膜的衬底。

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