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    • 44. 发明授权
    • Method for high density plasma chemical vapor deposition of dielectric films
    • 介电膜高密度等离子体化学气相沉积方法
    • US06270862B1
    • 2001-08-07
    • US09359639
    • 1999-07-26
    • Brian McMillinHuong NguyenMichael BarnesButch Berney
    • Brian McMillinHuong NguyenMichael BarnesButch Berney
    • H05H124
    • C23C16/45565C23C16/455C23C16/45572C23C16/45578C23C16/507C30B25/105C30B25/14H01J37/321H01J37/3244
    • A plasma processing system for processes such as chemical vapor deposition includes a plasma processing chamber, a substrate holder for supporting a substrate within the processing chamber, a dielectric member having an interior surface facing the substrate holder, the dielectric member forming a wall of the processing chamber a gas supply for supplying gas to the chamber, directed towards the substrate, and an RF energy source such as a planar coil which inductively couples RF energy through the dielectric member and into the chamber to energize the process gas into a plasma state. The gas supply may comprise a primary gas ring and a secondary gas ring for supplying gases or gas mixtures into the chamber. The gas supply may further include injectors attached to the primary gas ring which inject gas into the chamber, directed toward the substrate. The plasma processing system may also include a cooling mechanism for cooling the primary gas ring during processing.
    • 用于诸如化学气相沉积的工艺的等离子体处理系统包括等离子体处理室,用于在处理室内支撑衬底的衬底保持器,具有面向衬底保持器的内表面的电介质构件,形成处理壁的电介质构件 将用于向腔室供应气体的气体供给,朝向衬底,以及诸如平面线圈的RF能量源,其将RF能量感应耦合通过电介质构件并进入腔室,以将处理气体激励成等离子体状态。 气体供应可以包括用于将气体或气体混合物供应到室中的初级气体环和次级气体环。 气体供应还可以包括连接到主气环的喷射器,其将气体注入到腔室中,指向基底。 等离子体处理系统还可以包括用于在处理期间冷却主气环的冷却机构。
    • 47. 发明授权
    • Latch construction
    • 锁结构
    • US5192098A
    • 1993-03-09
    • US751312
    • 1991-08-28
    • Michael BarnesJoseph Koskelowsky
    • Michael BarnesJoseph Koskelowsky
    • E05B17/20E05B35/00E05C3/04
    • E05C3/042E05B35/008E05B17/2038Y10T292/1089
    • A releasable latch construction having a body member attachable to a panel, a latching member turnable on the body member for arcuate movement between a latching position and a releasing position, a locking mechanism movably carried by the body member and operable to lock the latching member in either its latching position or else in its releasing position, and an actuator movably carried in the body member and engageable with the locking mechanism, for effecting the locking or releasing movement of the latching member. The actuator is directly engageable by a latch key and is shiftable thereby in order to effect such movements.
    • 一种可释放的闩锁构造,其具有可附接到面板的主体构件,可在主体构件上转动的闩锁构件,用于在闩锁位置和释放位置之间弓形运动;锁定机构,可由主体构件可移动地承载并可操作以将闩锁构件锁定 或者其闩锁位置,或者处于其释放位置,以及可移动地承载在本体构件中并与锁定机构接合的致动器,用于实现闩锁构件的锁定或释放运动。 致动器可通过闩锁键直接接合,并且可由此移动以便实现这种运动。
    • 48. 发明授权
    • Document sorting apparatus
    • 文件分类装置
    • US5054621A
    • 1991-10-08
    • US451925
    • 1989-12-18
    • Gary J. MurphyDerrick L. MurphyMichael J. MurphyMichael Barnes
    • Gary J. MurphyDerrick L. MurphyMichael J. MurphyMichael Barnes
    • B07C3/08B07C3/06B65G15/42B65H29/04B65H29/18B65H29/60G06K13/12
    • B65H29/041B07C3/065B65H29/048G06K13/12B65H2404/2311B65H2701/1912Y10S209/912
    • A document sorting and stacking device provides for automated processing of randomly assembled batches of sheet items or objects such as negotiable instruments, currency, data cards, envelopes and the like which are fed into the unit in a continuing sequential progression for their separation and stacking, each in one of the designated multiple pockets. The motor driven transport conveyor of the unit moves the objects through the device at a known speed. If an object is "tagged" to enter a particular pocket, a computing microprocessor controls a step-motor to advance a sorting belt to extend one of its capture fingers into the transport path for rendezvous with the object. As the belt is advanced further the capture finger closes upon the object and the belt pulls it forward for deposit in the designated stacking pocket. If the object is not "tagged" for the pocket, the microprocessor holds the sorting belt in a position that hides the tip of a capture finger behind a parking paw to preclude rendezvous with the advancing object which then passes on to the next sorting and stacking stage of the device.
    • 文件分拣和堆垛装置提供随机组装的批次物品(例如可转让票据,货币,数据卡,信封等)的自动处理,这些物品或物品以连续顺序的进行进给到该单元中进行分离和堆叠, 每个在指定的多个口袋之一。 该单元的马达驱动的运输输送机以已知的速度移动物体穿过该装置。 如果物体被“标记”以进入特定的口袋,则计算微处理器控制步进电动机以推进分拣带将其捕获指状物之一延伸到传送路径中以与对象交会。 随着皮带进一步前进,捕获手指闭合在物体上,皮带将其向前拉,以便沉积在指定的堆叠袋中。 如果物体没有被标记为口袋,则微处理器将分拣机保持在将捕获手指的尖端隐藏在停车爪后面的位置,以防止与前进物体的会合,然后传递到下一个分选和堆叠 设备的阶段