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    • 43. 发明授权
    • Optical interference apparatus
    • 光干扰装置
    • US07570367B2
    • 2009-08-04
    • US11620142
    • 2007-01-05
    • Mitsuo OhashiYoshitoshi Ito
    • Mitsuo OhashiYoshitoshi Ito
    • G01B9/02G01B11/02G01J3/45G01J5/02
    • G01N21/4795A61B5/0059A61B5/14551
    • A light emission section includes light generators which are operated on the basis of drive signals from a controller so as to emit near infrared interferable light beams having different specific wavelengths to a light interference section. The light interference section includes a beam splitter having a low-reflection region. The beam splitter allows a most portion of the near infrared interferable light beams to propagate toward an object to be examined, and reflects a portion of the near infrared interferable light beams to a movable mirror. The beam splitter causes interference between measurement light reflected by the object and reference light reflected by the movable mirror, and the resultant interference light propagates to a light detection section. The light detection section receives the interference light and calculates predetermined information regarding the object by making use of the quantity distribution of the interference light. A display section displays the calculated information.
    • 发光部分包括基于来自控制器的驱动信号操作以发射具有不同特定波长的近红外可干扰光束到光干涉部分的光发生器。 光干涉部分包括具有低反射区域的分束器。 分束器允许近红外干涉光束的大部分传播到要检查的物体,并将近红外干涉光束的一部分反射到可移动镜。 分束器引起由物体反射的测量光和可移动反射镜反射的参考光之间的干涉,并且所得到的干涉光传播到光检测部分。 光检测部分接收干涉光,并通过利用干涉光的数量分布来计算关于物体的预定信息。 显示部分显示计算的信息。