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    • 41. 发明授权
    • Semiconductor integrated circuit device having a first MISFET of an
output buffer circuit and a second MISFET of an internal circuit
    • 具有输出缓冲电路的第一MISFET和内部电路的第二MISFET的半导体集成电路器件
    • US5436483A
    • 1995-07-25
    • US142965
    • 1993-10-29
    • Hidetoshi IwaiKazumichi MitsusadaMasamichi IshiharaTetsuro MatsumotoKazuyuki MiyazawaHisao KattoKousuke Okuyama
    • Hidetoshi IwaiKazumichi MitsusadaMasamichi IshiharaTetsuro MatsumotoKazuyuki MiyazawaHisao KattoKousuke Okuyama
    • H01L21/8238H01L21/8242H01L27/02H01L27/092H01L29/78H01L29/06
    • H01L21/823864H01L27/0251H01L27/0266H01L27/0922H01L27/10873H01L29/78
    • Disclosed is a semiconductor device having an internal circuit protected by an electrostatic protective circuit, the internal circuit and electrostatic protective circuit being formed on the same semiconductor substrate. The internal circuit includes MIS elements and has a double-diffused drain structure, while the protective circuit has a single-diffused drain structure. The internal circuit can be, e.g., a DRAM, and the protective circuit can have diffused resistors and clamping MIS elements. The single-diffused drain structure can be formed in the protective circuit on the semiconductor substrate, while providing double-diffused drain structure in the internal circuit on the same substrate, by: (1) scanning the ion implanting apparatus to avoid ion implantation of the first ions into the region of the protective circuit, and/or (2) forming a photoresist film over the region of the protective circuit to prevent ion implanation of the first ions into the protective circuit region. As a further embodiment of the present invention, a semiconductor integrated circuit device is provided wherein the source and drain regions of an MOSFET in the internal circuit have lightly doped drain (LDD) structure in order to suppress the appearance of hot carriers, and the source and drain regions of an MOSFET in the input/output circuit have structure doped with phosphorus at a high impurity concentration, in order to enhance an electrostatic breakdown voltage.
    • 公开了具有被静电保护电路保护的内部电路的半导体器件,内部电路和静电保护电路形成在同一半导体衬底上。 内部电路包括MIS元件,并具有双扩散漏极结构,而保护电路具有单扩散漏极结构。 内部电路可以是例如DRAM,并且保护电路可以具有扩散电阻器和钳位MIS元件。 单扩散漏极结构可以形成在半导体衬底上的保护电路中,同时通过以下步骤在同一衬底上的内部电路中提供双扩散漏极结构:(1)扫描离子注入装置以避免离子注入 第一离子进入保护电路的区域,和/或(2)在保护电路的区域上形成光致抗蚀剂膜,以防止第一离子离子注入保护电路区域。 作为本发明的另一实施例,提供了一种半导体集成电路器件,其中内部电路中的MOSFET的源极和漏极区域具有轻掺杂漏极(LDD)结构,以便抑制热载流子的出现,源极 并且输入/输出电路中的MOSFET的漏极区域掺杂有高杂质浓度的磷的结构,以增强静电击穿电压。
    • 44. 发明授权
    • Semiconductor memory device
    • 半导体存储器件
    • US4887237A
    • 1989-12-12
    • US174974
    • 1988-03-29
    • Tetsuro Matsumoto
    • Tetsuro Matsumoto
    • G11C11/404H01L27/108
    • G11C11/404H01L27/10805
    • A semiconductor memory device is provided with memory cells which each comprises an insulated gate type field effect transistor and a capacitor connected in series with one another and connected to bit lines. The capacitor is composed of a pair of electrodes and a dielectric film which includes a silicon nitride film existing between the pair of electrodes. One electrode of the capacitor is provided with a terminal to which a voltage is applied. The value of the applied voltage is chosen so that the voltage applied between the pair of electrodes is smaller in an absolute value than a voltage applied to the bit line.
    • 半导体存储器件设置有存储单元,每个存储单元包括彼此串联并连接到位线的绝缘栅型场效应晶体管和电容器。 电容器由一对电极和介电膜组成,电介质膜包括存在于该对电极之间的氮化硅膜。 电容器的一个电极设置有施加电压的端子。 选择施加电压的值,使得在一对电极之间施加的电压的绝对值小于施加到位线的电压的绝对值。
    • 45. 发明授权
    • Semiconductor memory device
    • 半导体存储器件
    • US4562555A
    • 1985-12-31
    • US535232
    • 1983-09-23
    • Yoshiaki OuchiMasamichi IshiharaTetsuro MatsumotoKazuyuki Miyazawa
    • Yoshiaki OuchiMasamichi IshiharaTetsuro MatsumotoKazuyuki Miyazawa
    • G11C11/401G11C7/00G11C7/10G11C8/04
    • G11C7/10G11C7/1033G11C8/04
    • An address multiplex type system for a dynamic RAM includes a memory cell array having a plurality of memory cells which are simultaneously selected by signals output from an address decoder, a decoder, and a shift register. The dynamic RAM further includes a selecting circuit which receives a plurality of address signals applied externally through one of a plurality of pins of a package in a time-sharing manner and makes it possible to write or read data into or from one memory cell of the plurality of memory cells selected. The dynamic RAM can read out or write in serially data of a plurality of memory cells selected from the memory cell array when a shift register operates. The dynamic RAM can also read or write data serially into or from a plurality of memory cells selected from the memory cell array simply by connecting the pin to a predetermined potential. When the data is written or read serially, the pin arrangement of the package of a 256K bit dynamic RAM can be substantially the same as that of the package of a 64K bit dynamic RAM. Hence, compatibility can be established between the 256K bit dynamic RAM and a 64K bit dynamic RAM.
    • 用于动态RAM的地址多路复用类型系统包括具有多个存储单元的存储单元阵列,这些存储单元通过从地址解码器,解码器和移位寄存器输出的信号同时选择。 动态RAM还包括选择电路,其以分时方式接收通过封装的多个引脚之一施加到外部的多个地址信号,并且使得可以将数据写入或从其中的一个存储器单元读取数据 选择多个存储单元。 当移位寄存器操作时,动态RAM可以读出或写入从存储单元阵列中选择的多个存储单元的串行数据。 动态RAM也可以简单地通过将引脚连接到预定电位,来将数据串行读取或写入从存储单元阵列中选择的多个存储单元中。 当数据被串行写入或读取时,256K位动态RAM的封装的引脚排列可以与64K位动态RAM的封装基本相同。 因此,可以在256K位动态RAM和64K位动态RAM之间建立兼容性。
    • 48. 发明授权
    • Method of fabrication of semiconductor integrated circuit device
    • 半导体集成电路器件制造方法
    • US5610089A
    • 1997-03-11
    • US429868
    • 1995-04-27
    • Hidetoshi IwaiKazumichi MitsusadaMasamichi IshiharaTetsuro MatsumotoKazuyuki MiyazawaHisao KattoKousuke Okuyama
    • Hidetoshi IwaiKazumichi MitsusadaMasamichi IshiharaTetsuro MatsumotoKazuyuki MiyazawaHisao KattoKousuke Okuyama
    • H01L21/8238H01L21/8242H01L27/02H01L27/092H01L29/78
    • H01L27/10873H01L21/823864H01L27/0251H01L27/0266H01L27/0922H01L29/78H01L29/7836
    • Disclosed is a semiconductor device having an internal circuit protected by an electrostatic protective circuit, the internal circuit and electrostatic protective circuit being formed on the same semiconductor substrate. The internal circuit includes MIS elements and has a double-diffused drain structure, while the protective circuit has a single-diffused drain structure. The internal circuit can be, e.g., a DRAM, and the protective circuit can have diffused resistors and clamping MIS elements. The single-diffused drain structure can be formed in the protective circuit on the semiconductor substrate, while providing double-diffused drain structure in the internal circuit on the same substrate, by: (1) scanning the ion implanting apparatus to avoid ion implantation of the first ions into the region of the protective circuit, and/or (2) forming a photoresist film over the region of the protective circuit to prevent ion implanation of the first ions into the protective circuit region. As a further embodiment of the present invention, a semiconductor integrated circuit device is provided wherein the source and drain regions of an MOSFET in the internal circuit have lightly doped drain (LDD) structure in order to suppress the appearance of hot carriers, and the source and drain regions of an MOSFET in the input/output circuit have structure doped with phosphorus at a high impurity concentration, in order to enhance an electrostatic breakdown voltage.
    • 公开了具有被静电保护电路保护的内部电路的半导体器件,内部电路和静电保护电路形成在同一半导体衬底上。 内部电路包括MIS元件,并具有双扩散漏极结构,而保护电路具有单扩散漏极结构。 内部电路可以是例如DRAM,并且保护电路可以具有扩散电阻器和钳位MIS元件。 单扩散漏极结构可以形成在半导体衬底上的保护电路中,同时通过以下步骤在同一衬底上的内部电路中提供双扩散漏极结构:(1)扫描离子注入装置以避免离子注入 第一离子进入保护电路的区域,和/或(2)在保护电路的区域上形成光致抗蚀剂膜,以防止第一离子离子注入保护电路区域。 作为本发明的另一实施例,提供了一种半导体集成电路器件,其中内部电路中的MOSFET的源极和漏极区域具有轻掺杂漏极(LDD)结构,以便抑制热载流子的出现,源极 并且输入/输出电路中的MOSFET的漏极区域掺杂有高杂质浓度的磷的结构,以增强静电击穿电压。
    • 49. 发明授权
    • Semiconductor integrated circuit device having output and internal
circuit MISFETS
    • 具有输出和内部电路MISFETS的半导体集成电路器件
    • US5534723A
    • 1996-07-09
    • US431568
    • 1995-04-27
    • Hidetoshi IwaiKazumichi MitsusadaMasamichi IshiharaTetsuro MatsumotoKazuyuki MiyazawaHisao KattoKousuke Okuyama
    • Hidetoshi IwaiKazumichi MitsusadaMasamichi IshiharaTetsuro MatsumotoKazuyuki MiyazawaHisao KattoKousuke Okuyama
    • H01L21/8238H01L21/8242H01L27/02H01L27/092H01L29/78H01L29/06
    • H01L21/823864H01L27/0251H01L27/0266H01L27/0922H01L27/10873H01L29/78
    • Disclosed is a semiconductor device having an internal circuit protected by an electrostatic protective circuit, the internal circuit and electrostatic protective circuit being formed on the same semiconductor substrate. The internal circuit includes MIS elements and has a double-diffused drain structure, while the protective circuit has a single-diffused drain structure. The internal circuit can be, e.g., a DRAM, and the protective circuit can have diffused resistors and clamping MIS elements. The single-diffused drain structure can be formed in the protective circuit on the semiconductor substrate, while providing double-diffused drain structure in the internal circuit on the same substrate, by: (1) scanning the ion implanting apparatus to avoid ion implantation of the first ions into the region of the protective circuit, and/or (2) forming a photoresist film over the region of the protective circuit to prevent ion implantation of the first ions into the protective circuit region. As a further embodiment of the present invention, a semiconductor integrated circuit device is provided wherein the source and drain regions of an MOSFET in the internal circuit have lightly doped drain (LDD) structure in order to suppress the appearance of hot carriers, and the source and drain regions of an MOSFET in the input/output circuit have structure doped with phosphorus at a high impurity concentration, in order to enhance an electrostatic breakdown voltage.
    • 公开了具有被静电保护电路保护的内部电路的半导体器件,内部电路和静电保护电路形成在同一半导体衬底上。 内部电路包括MIS元件,并具有双扩散漏极结构,而保护电路具有单扩散漏极结构。 内部电路可以是例如DRAM,并且保护电路可以具有扩散电阻器和钳位MIS元件。 单扩散漏极结构可以形成在半导体衬底上的保护电路中,同时通过以下步骤在同一衬底上的内部电路中提供双扩散漏极结构:(1)扫描离子注入装置以避免离子注入 第一离子进入保护电路的区域,和/或(2)在保护电路的区域上形成光致抗蚀剂膜,以防止第一离子离子注入保护电路区域。 作为本发明的另一实施例,提供了一种半导体集成电路器件,其中内部电路中的MOSFET的源极和漏极区域具有轻掺杂漏极(LDD)结构,以便抑制热载流子的出现,源极 并且输入/输出电路中的MOSFET的漏极区域掺杂有高杂质浓度的磷的结构,以增强静电击穿电压。
    • 50. 发明授权
    • Semiconductor memory device
    • 半导体存储器件
    • US4740920A
    • 1988-04-26
    • US925223
    • 1986-10-31
    • Tetsuro Matsumoto
    • Tetsuro Matsumoto
    • G11C11/404H01L27/108G11C11/40
    • G11C11/404H01L27/10805
    • A semiconductor memory device is provided with memory cells which each comprises an insulated gate type field effect transistor and a capacitor connected in series with one another and connected to bit lines. The capacitor is composed of a pair of electrodes and a dielectric film which includes a silicon nitride film existing between the pair of electrodes. One electrode of the capacitor is provided with a terminal to which a voltage is applied. The value of the applied voltage is chosen so that the voltage applied between the pair of electrodes is smaller in an absolute value than a voltage applied to the bit line.
    • 半导体存储器件设置有存储单元,每个存储单元包括彼此串联并连接到位线的绝缘栅型场效应晶体管和电容器。 电容器由一对电极和介电膜组成,电介质膜包括存在于该对电极之间的氮化硅膜。 电容器的一个电极设置有施加电压的端子。 选择施加电压的值,使得在一对电极之间施加的电压的绝对值小于施加到位线的电压的绝对值。