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    • 41. 发明授权
    • Method of manufacturing a semiconductor device having a multi-channel type MOS transistor
    • 制造具有多通道型MOS晶体管的半导体器件的方法
    • US07696046B2
    • 2010-04-13
    • US11876613
    • 2007-10-22
    • Min-Sang KimSung-Young LeeSung-Min KimEun-Jung YunIn-Hyuk Choi
    • Min-Sang KimSung-Young LeeSung-Min KimEun-Jung YunIn-Hyuk Choi
    • H01L21/336H01L21/20H01L21/31H01L21/469
    • H01L29/78696H01L29/42392H01L29/66787
    • In a method of manufacturing a semiconductor device, an active channel pattern is formed on a substrate. The active channel pattern includes preliminary gate patterns and single crystalline silicon patterns that are alternately stacked with each other. A source/drain layer is formed on a sidewall of the active channel pattern. Mask pattern structures including a gate trench are formed on the active channel pattern and the source/drain layer. The patterns are selectively etched to form tunnels. The gate trench is then filled with a gate electrode. The gate electrode surrounds the active channel pattern. The gate electrode is protruded from the active channel pattern. The mask pattern structures are then removed. Impurities are implanted into the source/drain regions to form source/drain regions. A silicidation process is carried out on the source/drain regions to form a metal silicide layer, thereby completing a semiconductor device having a MOS transistor.
    • 在制造半导体器件的方法中,在衬底上形成有源沟道图案。 有源沟道图案包括彼此交替堆叠的初步栅极图案和单晶硅图案。 源极/漏极层形成在有源沟道图案的侧壁上。 在有源沟道图案和源极/漏极层上形成包括栅极沟槽的掩模图案结构。 选择性地蚀刻图案以形成隧道。 然后用栅电极填充栅极沟槽。 栅电极围绕有源沟道图案。 栅电极从有源沟道图案突出。 然后去除掩模图案结构。 将杂质注入源/漏区以形成源/漏区。 在源极/漏极区域上进行硅化处理以形成金属硅化物层,从而完成具有MOS晶体管的半导体器件。
    • 43. 发明申请
    • Semiconductor device having bar type active pattern
    • 具有棒式有源图案的半导体器件
    • US20100059807A1
    • 2010-03-11
    • US12461500
    • 2009-08-13
    • Keun-hwl ChoDong-won KimJun SeoMin-sang KimSung-min KimHyun-jun BaeJi-Myoung Lee
    • Keun-hwl ChoDong-won KimJun SeoMin-sang KimSung-min KimHyun-jun BaeJi-Myoung Lee
    • H01L27/108
    • H01L29/66795H01L27/10814H01L27/10873H01L27/10879H01L29/785
    • A semiconductor device having a bar type active pattern and a method of manufacturing the same are provided. The semiconductor device may include a semiconductor substrate having a semiconductor fin configured to protrude from a surface of the semiconductor substrate in a first direction, the semiconductor substrate having a first width and a second width crossing the first width, wherein the first width and the second width extend in a second direction. A plurality of active patterns may be arranged in the first direction with a separation gap from the semiconductor fin. A plurality of support patterns may be arranged between the semiconductor fin and one of the plurality of active patterns arranged closer to the semiconductor fin in the first direction, and between the plurality of active patterns arranged in the first direction to support the plurality of active patterns. A gate may be arranged to cross the plurality of active patterns in the second direction and to cover a portion of the at least one of the plurality of active patterns.
    • 提供了具有条形有源图案的半导体器件及其制造方法。 半导体器件可以包括具有半导体鳍片的半导体衬底,半导体鳍片被配置为在第一方向上从半导体衬底的表面突出,半导体衬底具有与第一宽度交叉的第一宽度和第二宽度,其中第一宽度和第二宽度 宽度在第二方向上延伸。 多个有源图案可以在第一方向上与半导体鳍片分离间隙布置。 多个支撑图案可以布置在半导体翅片与沿着第一方向布置得更靠近半导体鳍片的多个有源图案中的一个之间以及沿着第一方向布置的多个有源图案之间,以支撑多个有源图案 。 栅极可以布置成在第二方向上跨越多个有源图案并且覆盖多个有源图案中的至少一个的一部分。
    • 45. 发明申请
    • Multibit electro-mechanical memory device and method of manufacturing the same
    • 多位机电记忆体装置及其制造方法
    • US20090097315A1
    • 2009-04-16
    • US12154473
    • 2008-05-23
    • Eun-Jung YunMin-Sang KimSung-Min KimSung-Young LeeJi-Myoung LeeIn-Hyuk Choi
    • Eun-Jung YunMin-Sang KimSung-Min KimSung-Young LeeJi-Myoung LeeIn-Hyuk Choi
    • G11C16/00H01L27/00H01L21/00
    • H01L27/10G11C11/50H01L27/115
    • A multibit electro-mechanical memory device comprises a substrate, a bit line on the substrate, a first interlayer insulating film on the bit line, first and second lower word lines on the first interlayer insulating film, the first and second lower word lines separated horizontally from each other by a trench, a spacer abutting a sidewall of each of the first and second lower word lines, a pad electrode inside a contact hole, first and second cantilever electrodes suspended over first and second lower voids that correspond to upper parts of the first and second lower word lines provided in both sides on the pad electrode, the first and second cantilever electrodes being separated from each other by the trench, and being curved in a third direction that is perpendicular to the first and second direction; a second interlayer insulating film on the pad electrode, first and second trap sites supported by the second interlayer insulating film to have first and second upper voids on the first and second cantilever electrodes, and first and second upper word lines on the first and second trap sites.
    • 多位机电存储器件包括衬底,衬底上的位线,位线上的第一层间绝缘膜,第一层间绝缘膜上的第一和第二下字线,第一和第二下字线水平分开 通过沟槽彼此相邻的间隔件,邻接第一和第二下部字线中的每一个的侧壁的间隔件,接触孔内的焊盘电极,悬挂在第一和第二下部空隙中的第一和第二悬臂电极,其对应于 第一和第二下部字线设置在焊盘电极的两侧,第一和第二悬臂电极通过沟槽彼此分离,并且在垂直于第一和第二方向的第三方向上弯曲; 在所述焊盘电极上的第二层间绝缘膜,由所述第二层间绝缘膜支撑的第一和第二陷阱位置,以在所述第一和第二悬臂电极上具有第一和第二上部空隙,以及在所述第一和第二阱上的第一和第二上部字线 网站。
    • 46. 发明授权
    • Non-volatile memory device and method of fabricating the same
    • 非易失性存储器件及其制造方法
    • US07511998B2
    • 2009-03-31
    • US11803425
    • 2007-05-15
    • Sung-Young LeeDong-Won KimMin-Sang KimDong-Gun ParkEun-Jung Yun
    • Sung-Young LeeDong-Won KimMin-Sang KimDong-Gun ParkEun-Jung Yun
    • G11C16/04
    • H01L27/101H01L27/24
    • A non-volatile memory device, and method of forming the same, increases or maximizes the performance of an ultramicro-structured device. In one embodiment, a non-volatile memory device comprises a first word line and a second word line insulated from each other and positioned to intersect each other with a vacant space therebetween; a bit line in the vacant space between one of the first word line and the second word line and positioned in parallel with one of the first word line and the second word line, the bit line constructed and arranged to be deflected toward one of the first word line and the second word line by an electric field induced between the first word line and the second word line; and a trap site between the bit line and one of the first word line and the second word line intersecting the bit line, the trap site being insulated from the one of the first word line and the second word line intersecting the bit line and spaced apart from the bit line by a portion of the vacant space, the trap site configured to trap a predetermined electric charge to electrostatically fix the bit line in a deflected position in the direction of the one of the word lines.
    • 非易失性存储器件及其形成方法增加或最大化超微结构器件的性能。 在一个实施例中,非易失性存储器件包括第一字线和第二字线,该第一字线和第二字线彼此绝缘并且被定位成彼此相交并具有空隙; 位于第一字线和第二字线中的一个之间的空白空间中的位线,并且与第一字线和第二字线之一平行地定位,位线被构造和布置成朝向第一字线 字线和第二字线由在第一字线和第二字线之间感应的电场; 位线与位线相交的第一字线和第二字线之一之间的陷阱位置,陷阱位置与第一字线和第二字线之一绝缘,与位线相交并间隔开 从位线通过空闲空间的一部分,陷阱位置被配置为捕获预定电荷以将位线静电地固定在一条字线的方向上的偏转位置。
    • 47. 发明申请
    • ELECTROMECHANICAL NON-VOLATILE MEMORY DEVICES
    • 电子非易失性存储器件
    • US20080093686A1
    • 2008-04-24
    • US11876111
    • 2007-10-22
    • Eun-Jung YunSung-Young LeeMin-Sang KimSung-Min Kim
    • Eun-Jung YunSung-Young LeeMin-Sang KimSung-Min Kim
    • H01L45/00
    • H01L27/10G11C23/00
    • Electromechanical non-volatile memory devices are provided including a semiconductor substrate having an upper surface including insulation characteristics. A first electrode pattern is provided on the semiconductor substrate. The first electrode pattern exposes portions of a surface of the semiconductor substrate therethrough. A conformal bit line is provided on the first electrode pattern and the exposed surface of semiconductor substrate. The bit line is spaced apart from a sidewall of the first electrode pattern and includes a conductive material having an elasticity generated by a voltage difference. An insulating layer pattern is provided on an upper surface of the bit line located on the semiconductor substrate. A second electrode pattern is spaced apart from the bit line and provided on the insulating layer pattern. The second electrode pattern faces the first electrode pattern.
    • 提供了包括具有包括绝缘特性的上表面的半导体衬底的机电非易失性存储器件。 第一电极图案设置在半导体衬底上。 第一电极图案暴露半导体衬底的表面的部分通过其中。 在第一电极图案和半导体衬底的暴露表面上提供保形位线。 位线与第一电极图案的侧壁间隔开,并且包括具有由电压差产生的弹性的导电材料。 绝缘层图案设置在位于半导体衬底上的位线的上表面上。 第二电极图案与位线间隔开并设置在绝缘层图案上。 第二电极图案面向第一电极图案。