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    • 42. 发明申请
    • METHOD OF FORMING AN INTEGRATED OPTICAL POLARIZATION GRID ON AN LCD SUBSRATE AND LIQUID CRYSTAL DISPLAY MANUFACTURED TO INCLUDE THE GRID
    • 在液晶显示器上形成集成光学极化网格的方法和液晶显示器制造成包括网格
    • US20080100779A1
    • 2008-05-01
    • US11923978
    • 2007-10-25
    • Dae Ho CHOOYeon Hee YuHong Gyun Kim
    • Dae Ho CHOOYeon Hee YuHong Gyun Kim
    • B29D11/00G02B5/30G02F1/1335
    • B29D11/0074G02B5/3058
    • A method of forming a wire grid polarizing pattern across the relatively large surface area of a display substrate is disclosed where the method includes using a nano imprint lithograph process.According to the disclosure, in forming the wire grid polarizing patterns using nano imprint lithography process, wire grid polarizing patterns are formed by bonding a stamp having a stamping area substantially smaller than that of the substrate with successive reticle areas of the substrate, where the substrate has a photosensitive film deposited thereon and where the stamping is such that recesses having a predetermined depth are formed in the photosensitive film, and then filling the recesses with an insulating film and etching it using the insulating film as a mask.Accordingly, since a mechanical misalignment margin is acceptable from one reticle area to the next when patterning across the entire operational surface of the photosensitive film, a wire grid polarizing pattern with a uniform line width and spacings in each reticle area can be formed on a substrate having a large area for use with a liquid crystal panel.
    • 公开了一种在显示基板的相对大的表面积上形成线栅偏振图案的方法,其中该方法包括使用纳米压印光刻工艺。 根据本公开,在使用纳米压印光刻工艺形成线栅偏振图案时,通过将具有基板上的冲压区域基本上小于基板的冲压区域的印模与基板的相继标线片区域结合而形成线栅偏振图案,其中基板 具有沉积在其上的感光膜,并且其中冲压使得在感光膜中形成具有预定深度的凹部,然后用绝缘膜填充凹部并使用绝缘膜作为掩模进行蚀刻。 因此,由于当在整个感光膜的整个操作表面上图案化时,从一个掩模版区域到下一个掩模版区域的机械未对准裕度是可接受的,因此可以在基板上形成具有均匀线宽的线栅偏振图案和每个掩模版区域中的间隔 具有用于液晶面板的大面积。
    • 43. 发明申请
    • Apparatus and method for treating substrate
    • 底物处理装置及方法
    • US20080060681A1
    • 2008-03-13
    • US11896350
    • 2007-08-31
    • Young-Ho ChooHye-Sun Jung
    • Young-Ho ChooHye-Sun Jung
    • B08B3/10
    • B08B3/10
    • A substrate treating apparatus includes a treating unit including a treating bath which a treating solution is supplied into and stored in and treating solution supply means for supplying the treating solution into the treating bath; and a drying unit including a drying bath into which fluid is supplied and injected and fluid supply means for supplying the fluid into the drying bath, wherein the fluid supply means includes a filter configured to filter the fluid before the fluid is supplied into the drying bath and a first heater configured to heat the filter. According to the substrate treating apparatus, the generation of particles caused by supplying solidified drying fluid into a drying bath is suppressed to treat a substrate without error. As a result, a production or yield increases.
    • 基板处理装置包括处理单元,处理单元包括处理溶液,处理溶液被供应到处理溶液供应装置中并将其处理并将处理溶液供应到处理槽中; 以及干燥单元,其包括供应和注入流体的干燥槽,以及用于将流体供应到干燥槽中的流体供应装置,其中所述流体供应装置包括被配置为在将流体供应到干燥槽中之前过滤流体的过滤器 以及配置成加热过滤器的第一加热器。 根据该基板处理装置,通过将凝固的干燥流体供给到干燥槽中而产生的颗粒的产生被抑制以无错误地处理基板。 结果,生产或产量增加。
    • 48. 发明授权
    • Liquid crystal process defect inspection apparatus and inspection method
    • 液晶工艺缺陷检查装置及检验方法
    • US07113278B2
    • 2006-09-26
    • US10492887
    • 2002-04-22
    • Dae-Ho ChooMin-Young WonHyoo-Hak NamBeak-Keun Jeon
    • Dae-Ho ChooMin-Young WonHyoo-Hak NamBeak-Keun Jeon
    • G01J4/00
    • G01N21/896G01N21/23
    • The glass substrate test apparatus of the liquid crystal cell process comprises a laser unit for generating a laser beam, a beam shaper and beam collimator for shaping the laser beam emitted from the laser unit so as to have an elongated cross section and parallelizing the shaped laser beam, a photo detector for detecting an intensity of double refraction of the shaped laser beam transmitted over the whole glass substrate, a phase defector for measuring the laser double refraction detected by the photo detector and comparing the measured double refraction with a standard laser double refraction, and a polarizer arranged between the laser unit and the beam shaper or between the beam shaper and the beam collimator for polarizing the laser beam to a parallel ray.
    • 液晶单元工艺的玻璃基板测试装置包括用于产生激光束的激光单元,用于使从激光单元发射的激光束成形的光束整形器和光束准直器,以便具有细长的横截面并使成形激光器 光束检测器,用于检测在整个玻璃基板上透射的成形激光束的双折射强度;相位检测器,用于测量由光电检测器检测的激光双折射率,并将测量的双折射与标准激光双折射 以及设置在激光单元和光束整形器之间或者在光束整形器和光束准直器之间的偏振器,用于将激光束偏振到平行光线。