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    • 1. 发明申请
    • METHOD OF FORMING AN INTEGRATED OPTICAL POLARIZATION GRID ON AN LCD SUBSRATE AND LIQUID CRYSTAL DISPLAY MANUFACTURED TO INCLUDE THE GRID
    • 在液晶显示器上形成集成光学极化网格的方法和液晶显示器制造成包括网格
    • US20080100779A1
    • 2008-05-01
    • US11923978
    • 2007-10-25
    • Dae Ho CHOOYeon Hee YuHong Gyun Kim
    • Dae Ho CHOOYeon Hee YuHong Gyun Kim
    • B29D11/00G02B5/30G02F1/1335
    • B29D11/0074G02B5/3058
    • A method of forming a wire grid polarizing pattern across the relatively large surface area of a display substrate is disclosed where the method includes using a nano imprint lithograph process.According to the disclosure, in forming the wire grid polarizing patterns using nano imprint lithography process, wire grid polarizing patterns are formed by bonding a stamp having a stamping area substantially smaller than that of the substrate with successive reticle areas of the substrate, where the substrate has a photosensitive film deposited thereon and where the stamping is such that recesses having a predetermined depth are formed in the photosensitive film, and then filling the recesses with an insulating film and etching it using the insulating film as a mask.Accordingly, since a mechanical misalignment margin is acceptable from one reticle area to the next when patterning across the entire operational surface of the photosensitive film, a wire grid polarizing pattern with a uniform line width and spacings in each reticle area can be formed on a substrate having a large area for use with a liquid crystal panel.
    • 公开了一种在显示基板的相对大的表面积上形成线栅偏振图案的方法,其中该方法包括使用纳米压印光刻工艺。 根据本公开,在使用纳米压印光刻工艺形成线栅偏振图案时,通过将具有基板上的冲压区域基本上小于基板的冲压区域的印模与基板的相继标线片区域结合而形成线栅偏振图案,其中基板 具有沉积在其上的感光膜,并且其中冲压使得在感光膜中形成具有预定深度的凹部,然后用绝缘膜填充凹部并使用绝缘膜作为掩模进行蚀刻。 因此,由于当在整个感光膜的整个操作表面上图案化时,从一个掩模版区域到下一个掩模版区域的机械未对准裕度是可接受的,因此可以在基板上形成具有均匀线宽的线栅偏振图案和每个掩模版区域中的间隔 具有用于液晶面板的大面积。
    • 2. 发明授权
    • Method of forming an integrated optical polarization grid on an LCD substrate and liquid crystal display manufactured to include the grid
    • 在LCD基板上形成集成的偏光栅格的方法和制造成包括栅格的液晶显示器
    • US07951527B2
    • 2011-05-31
    • US11923978
    • 2007-10-25
    • Dae Ho ChooYeon Hee YuHong Gyun Kim
    • Dae Ho ChooYeon Hee YuHong Gyun Kim
    • G02B5/30G03F7/36
    • B29D11/0074G02B5/3058
    • A method of forming a wire grid polarizing pattern across the relatively large surface area of a display substrate includes using a nano imprint lithograph process wherein wire grid polarizing patterns are formed by bonding a stamp having a stamping area substantially smaller than that of the substrate with successive reticle areas of the substrate, where the substrate has a photosensitive film deposited thereon and where the stamping is such that recesses having a predetermined depth are formed in the photosensitive film, and then filling the recesses with an insulating film and etching it using the insulating film as a mask. Since mechanical misalignment margin is acceptable from one reticle area to the next, a wire grid polarizing pattern with a uniform line width and spacings in each reticle area can be formed on a substrate having a large area.
    • 在显示基板的相对大的表面区域上形成线栅偏振图案的方法包括使用纳米压印光刻工艺,其中线栅偏振图案是通过将具有基本上小于基板的冲压区域的印模与连续的 衬底的掩模版区域,其中衬底具有沉积在其上的感光膜并且其中冲压使得在感光膜中形成具有预定深度的凹部,然后用绝缘膜填充凹部并使用绝缘膜进行蚀刻 作为面具。 由于从一个掩模版区域到下一个掩模版区域的机械未对准边缘是可接受的,所以可以在具有大面积的基板上形成具有均匀的线宽和每个掩模版区域中的间隔的线栅偏振图案。