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31. 发明公开

EP2635884A1 MIKROELEKTROMECHANISCHER SENSOR ZUR MESSUNG EINER KRAFT SOWIE ENTSPRECHENDES VERFAHREN 审中-公开
标题翻译：微机电传感器，用于测量力及相应方法
公开(公告)号：EP2635884A1
公开(公告)日：2013-09-11
申请号：EP11769813.4
申请日：2011-09-21
申请人： Robert Bosch GmbH
发明人： FUCHS, Tino
IPC分类号： G01L1/00 , G01L7/08 , G01L9/00 , G01P15/08
CPC分类号： B81B3/0018 , B81C1/00023 , G01L1/00 , G01L1/005 , G01L7/082 , G01L9/0041 , G01P15/12
摘要： The invention relates to a microelectromechanical sensor for measuring a force, a pressure, or the like. The sensor comprises a substrate with a measuring element. The measuring element comprises at least two electrically conductive regions, at least one of the electrically conductive regions being at least partly connected to the substrate. The sensor also comprises at least one changing region, said changing region lying at least partly between the electrically conductive regions. The changing region is designed in a substantially electrically insulating manner in an unloaded state and in a substantially electrically conductive manner in the loaded state. The invention likewise relates to a corresponding method and to a corresponding method for producing a microelectromechanical sensor.

32. 发明申请

WO2012059266A1 MIKROELEKTROMECHANISCHER SENSOR ZUR MESSUNG EINER KRAFT SOWIE ENTSPRECHENDES VERFAHREN 审中-公开
标题翻译：微机电传感器，用于测量力及相应方法
公开(公告)号：WO2012059266A1
公开(公告)日：2012-05-10
申请号：PCT/EP2011/066393
申请日：2011-09-21
申请人： ROBERT BOSCH GMBH , FUCHS, Tino
发明人： FUCHS, Tino
IPC分类号： G01L1/00 , G01L7/08 , G01L9/00 , G01P15/08
CPC分类号： B81B3/0018 , B81C1/00023 , G01L1/00 , G01L1/005 , G01L7/082 , G01L9/0041 , G01P15/12
摘要： Die Erfindung betrifft einen mikroelektromechanischen Sensor zur Messung einer Kraft, eines Drucks oder dergleichen. Er umfasst ein Substrat mit einem Messelement, wobei das Messelement zumindest zwei elektrisch leitende Bereiche umfasst, wobei zumindest einer der elektrisch leitenden Bereiche mit dem Substrat zumindest teilweise verbunden ist, und zumindest einen Wechselbereich, wobei der Wechselbereich zumindest teilweise zwischen den elektrisch leitenden Bereichen angeordnet ist, wobei der Wechselbereich in einem unbelasteten Zustand im Wesentlichen elektrisch isolierend ausgebildet ist und im belasteten Zustand im Wesentlichen elektrisch leitend ausgebildet ist. Die Erfindung betrifft ebenfalls ein entsprechendes Verfahren sowie ein entsprechendes Verfahren zur Herstellen eines mikroelektromechanischen Sensors.
摘要翻译：本发明涉及一种微机电传感器，用于测量力，压力或类似物。它包括具有测量元件的基板，所述测量元件包括至少两个导电区域，其中，所述衬底的所述导电区域中的至少一个至少部分地连接，并且至少一个交流部分，所述交替区域被布置为至少部分导电区域之间其中，所述切换部被电在无应力条件绝缘基本上并且基本上设计为在加载状态下具有导电性。本发明还涉及一种相应的方法和一种用于制造微机电传感器的相应方法。

33. 发明公开

KR1020120004936A 센서 모듈 및 센서 모듈의 제조 방법 审中-实审
标题翻译：传感器模块和生产传感器模块的方法
公开(公告)号：KR1020120004936A
公开(公告)日：2012-01-13
申请号：KR1020110066837
申请日：2011-07-06
申请人： 로베르트 보쉬 게엠베하
发明人： 샤프,울리히 , 쿠글러,안드레아스 , 브륀델,마티아스 , 준더마이어,프리더
IPC分类号： B81C1/00 , B81B7/00 , G01D21/02 , H01L27/00
CPC分类号： G01R33/0052 , B81B2201/0235 , B81B2207/012 , B81C1/00333 , B81C2203/0154 , G01P15/0802 , H01L2224/32245 , H01L2224/48091 , H01L2224/48247 , H01L2224/73265 , H01L2224/8592 , H01L2924/181 , B81C1/00023 , B81B7/02 , B81B2201/0264 , B81B2201/0292 , B81C1/00261 , B81C2203/01 , G01D21/02 , H01L27/00 , H01L2924/00012 , H01L2924/00014 , H01L2924/00
摘要： PURPOSE: A sensor module and a method of manufacturing the sensor module are provided to enable simple and cheap fixing of a micro-electric machine member and reduce a space to arrange integrated circuit and the micro-electric machine member on a temporary carrier. CONSTITUTION: A method of manufacturing a sensor module(M) is as follows. A metallic carrier is supplied to a temporary carrier. One or more integrated circuits(3a) are arranged on the temporary carrier. One or more micro-electric machine members(3b) are arranged on the temporary carrier. The micro-electric machine members make contact with the contact surface(1) of the metallic carrier using preferably wire bonding(6). The integrated circuits, the micro-electric machine members and the wire bonding are encased(7). The integrated circuits make contact with the contact surface using at least one re-wiring layer(8).
摘要翻译：目的：提供一种传感器模块和制造传感器模块的方法，以使得能够简单且便宜地固定微电机构件，并且减小了将集成电路和微电机构件布置在临时载体上的空间。构成：制造传感器模块（M）的方法如下。金属载体被提供给临时载体。一个或多个集成电路（3a）布置在临时载体上。一个或多个微电机构件（3b）布置在临时载体上。微电机构件使用优选的引线接合（6）与金属载体的接触表面（1）接触。集成电路，微电机构件和引线接合被封装（7）。集成电路使用至少一个再布线层（8）与接触表面接触。

34. 发明公开

KR1020140058972A 다층 마이크로 렌즈의 제조방법 审中-实审
标题翻译：制造多层微透镜的方法
公开(公告)号：KR1020140058972A
公开(公告)日：2014-05-15
申请号：KR1020120125493
申请日：2012-11-07
申请人： 한국전자통신연구원
发明人： 이종무
IPC分类号： G02B3/00 , B81C1/00
CPC分类号： B81C1/00023 , B81B1/006 , G02B3/0012
摘要： A method for manufacturing a multi-layer micro lens is provided. The method for manufacturing the multi-layer micro lens comprises: the formation of a first micro lens comprising a first substance on a substrate; and the formation of a second micro lens comprising a second substance between the substrate and the first micro lens. The first and the second micro lenses are simultaneously formed by an etching process using the etching speed difference of the first and the second substance. The first and the second micro lenses have a different radius of curvature.
摘要翻译：提供一种制造多层微透镜的方法。制造多层微透镜的方法包括：在基底上形成包含第一物质的第一微透镜; 以及在所述基板和所述第一微透镜之间形成包括第二物质的第二微透镜。通过使用第一和第二物质的蚀刻速度差的蚀刻工艺同时形成第一和第二微透镜。第一和第二微透镜具有不同的曲率半径。

35. 发明授权

KR101321103B1 미세 패턴 형성 방법 및 그 장치 有权
标题翻译：精细图案方法及其装置
公开(公告)号：KR101321103B1
公开(公告)日：2013-10-23
申请号：KR1020130013422
申请日：2013-02-06
申请人： 한국기계연구원
发明人： 조정대 , 김광영 , 강동우 , 최영만
IPC分类号： H01L21/027
CPC分类号： H01L21/0273 , B81C1/00023
摘要： PURPOSE: A fine patterning method and an apparatus thereof are provided to easily form a fine thin film pattern by forming a conductive thin film on a substrate and patterning the conductive thin film. CONSTITUTION: A substrate is prepared (ST1). A conductive thin layer is formed on the substrate. The conductive thin layer is patterned (ST2). The conductive thin layer is coated with a photoresist. A photoresist layer is formed on the conductive thin layer. [Reference numerals] (ST1) Substrate with a conductive thin layer (and a photoresist layer) is prepared; (ST2) Conductive thin layer is patterned
摘要翻译：目的：提供精细图案化方法及其装置，通过在基板上形成导电薄膜并图案化导电薄膜来容易地形成精细的薄膜图案。构成：制备底物（ST1）。在基板上形成导电薄层。导电薄层被图案化（ST2）。导电薄层被光致抗蚀剂涂覆。在导电薄层上形成光致抗蚀剂层。（附图标记）（ST1）准备具有导电薄层（和光致抗蚀剂层）的基板; （ST2）导电薄层被图案化

36. 发明授权

KR101388927B1 접착개선된 비정질탄소막을 이용한 ＭＥＭＳ 디바이스 제조방법 有权
标题翻译：使用不规则碳层制造MEMS器件与促进粘合剂的方法
公开(公告)号：KR101388927B1
公开(公告)日：2014-04-25
申请号：KR1020130027538
申请日：2013-03-14
申请人： 한국과학기술원
发明人： 임성규 , 김영수 , 김한흥 , 박상현 , 황욱중 , 이귀로
IPC分类号： B81C1/00 , H01L21/027
CPC分类号： B81C1/00023 , B81C3/007 , H01L21/0274
摘要： Provided is a method for producing an MEMS device using an amorphous carbon film as a sacrificial layer. According to an embodiment of the present invention, the method comprises the steps of: producing a bottom structure including metallic patterns; producing an adhesion reinforcing layer that covers the metallic patterns of the bottom structure and includes at least one among an oxide film, a nitride film, a nitrifying film, and an amorphous silicon film; producing an amorphous carbon film as a sacrificial layer on the adhesion reinforcing layer; producing an insulating and supporting layer on the amorphous carbon film; producing via holes formed in order to penetrate through the insulating and supporting layer and amorphous carbon film and make the bottom structure exposed therethrough sequentially by forming an etching protection film on the insulating and supporting layer, by performing only one photolithography procedure, and by etching the insulating and supporting layer and the amorphous carbon film at a time; producing a top structure including a sensor structure on the insulating and supporting layer; producing at least one through-hole that penetrates through the insulating and supporting layer; and removing the amorphous carbon film through the through-hole so that the bottom structure and top structure are disposed to be separated from each other.
摘要翻译：提供了使用非晶碳膜作为牺牲层来制造MEMS器件的方法。根据本发明的实施例，该方法包括以下步骤：产生包括金属图案的底部结构; 制造覆盖底部结构的金属图案并且包括氧化膜，氮化物膜，硝化膜和非晶硅膜中的至少一种的粘合增强层; 在粘合增强层上制造作为牺牲层的无定形碳膜; 在无定形碳膜上产生绝缘和支撑层; 产生通孔，以穿透绝缘支撑层和非晶碳膜，并通过仅在一个光刻步骤上形成蚀刻保护膜，使底部结构依次暴露于其中，并通过蚀刻绝缘和支撑层和无定形碳膜; 在绝缘和支撑层上产生包括传感器结构的顶部结构; 产生穿过绝缘支撑层的至少一个通孔; 并且通过所述通孔去除所述无定形碳膜，使得所述底部结构和顶部结构被设置成彼此分离。

37. 发明公开

KR1020130111802A 마이크로 유체 채널 제조 방법 및 그 방법으로 제조되는 마이크로 유체 채널 有权
标题翻译：微流通道及其使用印刷技术的制造
公开(公告)号：KR1020130111802A
公开(公告)日：2013-10-11
申请号：KR1020120033985
申请日：2012-04-02
申请人： 한국생산기술연구원
发明人： 유준호 , 이상호 , 강경태
IPC分类号： H01L21/027
CPC分类号： H01L21/0273 , B81B1/006 , B81C1/00023 , B81C1/00119 , B81C1/00388
摘要： PURPOSE: A method for manufacturing a microfluidic channel and the microfluidic channel manufactured by the same are provided to easily change designs by dispensing. CONSTITUTION: A predetermined porous medium receives a cutting control command. The cutting line of a predetermined shape is formed (S21). A dispensing control command is received. At least one hydrophobic barrier line is formed along the cutting line (S22). A curing process is performed on the porous medium (S23). [Reference numerals] (S21) Cutting line of a predetermined shape is formed on a porous medium using a cutting line forming tool upon a cutting control command; (S22) At least one hydrophobic barrier line is formed along the cutting line using a hydrophobic barrier line forming tool upon a dispensing control command; (S23) Curing process is performed on the porous medium with hydrophobic barrier line formed
摘要翻译：目的：提供用于制造微流体通道的方法和由其制造的微流体通道，以便通过分配容易地改变设计。构成：预定的多孔介质接收切割控制命令。形成预定形状的切割线（S21）。接收分配控制命令。沿着切割线形成至少一个疏水屏障线（S22）。在多孔介质上进行固化处理（S23）。（附图标记）（S21）切割控制命令使用切割线形成工具在多孔介质上形成预定形状的切割线; （S22）使用疏水屏障线形成工具，在分配控制命令上沿着切割线形成至少一个疏水屏障线; （S23）在形成有疏水性屏障线的多孔介质上进行固化处理

38. 发明公开

KR1020160035821A 마이크로 히터 및 마이크로 히터 제조방법 및 마이크로 센서 및 마이크로 센서 제조방법 审中-实审
标题翻译：微型加热器微型加热器和微型传感器的制造方法及微型传感器的制造方法
公开(公告)号：KR1020160035821A
公开(公告)日：2016-04-01
申请号：KR1020140127620
申请日：2014-09-24
申请人： (주)포인트엔지니어링
发明人： 안범모 , 박승호 , 변성현
IPC分类号： H05B3/03 , B81C1/00
CPC分类号： B81B7/0087 , B81B7/02 , B81B2201/0278 , B81C1/00023 , G01N33/0027 , H05B3/03 , H05B3/22
摘要： 본발명은마이크로히터및 마이크로히터제조방법및 마이크로센서및 마이크로센서제조방법에관한것으로써, 특히, 다공층기판에는히터배선을둘러싸는에어갭이형성되며, 상기다공층기판하부에는상기히터배선하부에배치되고상기에어갭에연통되는개구부가형성되어, 작은열용량을가질수 있고, 열적으로수직방향으로단열되고, 발열부위두께가얇아져서측방향으로단열효과를가지는마이크로히터및 마이크로히터제조방법및 마이크로센서및 마이크로센서제조방법에관한것이다.
摘要翻译：本发明涉及微加热器，微加热器的制造方法，微型传感器以及微型传感器的制造方法。特别地，在微加热器中，在多孔层基板中形成围绕加热线的气隙。在多孔层基板的下部形成有设置在加热线下部并与气隙连接的开口部。因此，微加热器可能具有低热容量，在垂直方向上被绝热，并且由于放热部分的厚度薄而在横向上具有绝缘效果。

39. 发明公开

KR1020160035820A 마이크로 히터 및 마이크로 센서 审中-实审
标题翻译：微型加热器和微型传感器
公开(公告)号：KR1020160035820A
公开(公告)日：2016-04-01
申请号：KR1020140127619
申请日：2014-09-24
申请人： 엘지전자 주식회사 , (주)포인트엔지니어링
发明人： 안범모 , 박승호 , 변성현
IPC分类号： H05B3/03 , B81C1/00
CPC分类号： G01N27/128 , B81B7/0087 , B81B7/02 , B81B2201/0278 , B81C1/00023 , G01N33/0027 , H05B3/03 , H05B3/22
摘要： 본발명은마이크로히터및 마이크로센서에관한것으로써, 특히, 히터배선을둘러싸는에어갭을형성하고, 히터배선을다공층기판에형성하여, 작은열용량을갖는히터를제공할수 있는마이크로히터및 마이크로센서에관한것이다.
摘要翻译：微型加热器和微型传感器技术领域本发明涉及一种微加热器和微型传感器，更具体地说，涉及一种微加热器和微型传感器，其能够通过在加热器线周围形成气隙并在其上形成加热丝线来提供具有低热容量的加热器多孔基材。微加热器包括：多孔基材; 形成在所述多孔基材上并且包括所述加热丝的加热电极和连接到所述加热丝的加热器电极垫。在多孔基材上形成围绕加热丝的气隙。

40. 发明公开

KR1020040009106A 배리어가 포함된 전자력 추진 마이크로 믹서(ＭＨＤＢＥＭ) 및 그 제조방법 无效
标题翻译：磁网阻尼器嵌入式微型混合器及其制造方法
公开(公告)号：KR1020040009106A
公开(公告)日：2004-01-31
申请号：KR1020020042939
申请日：2002-07-22
申请人： 학교법인 포항공과대학교
发明人： 김동성 , 이석우 , 권태헌 , 이승섭
IPC分类号： B81C99/00
CPC分类号： B81B3/0018 , B01F13/0059 , B81B2201/051 , B81C1/00023 , B81C1/00071
摘要： PURPOSE: A magnetohydrodynamic barrier embedded micro mixer and a method for manufacturing the same are provided to achieve superior chaotic mixing by periodically creating and extinguishing a hyperbolic point based on a spiral flow formed in a micro channel. CONSTITUTION: At least one barrier(161) is aligned on an upper channel plate(162) so as to achieve superior chaotic mixing, thereby forming a magnetohydrodynamic barrier embedded micro mixer(160). Metal is deposited on the surface of a first substrate through thermal deposition. Then, an electrode is formed through an ultraviolet photo process. A protective layer is formed on a surface of the first substrate. A micro channel wall is formed on the protective layer through a photo process. An aluminum film is formed on the micro channel through a sputtering process. After coating photosensitive material on a second substrate, a space for forming a barrier is formed through an ultraviolet photo process. An upper micro channel plate is formed on the second substrate.
摘要翻译：目的：提供一种磁流体动力学屏障嵌入式微型混合器及其制造方法，以通过基于在微通道中形成的螺旋流周期性地创建和熄灭双曲线点来获得优异的混沌混合。构成：至少一个屏障（161）在上通道板（162）上对准，以实现优异的混沌混合，由此形成磁流体动力学屏障嵌入式微混合器（160）。金属通过热沉积沉积在第一衬底的表面上。然后，通过紫外线照相工艺形成电极。在第一基板的表面上形成保护层。通过照相工艺在保护层上形成微通道壁。通过溅射工艺在微通道上形成铝膜。在第二基板上涂布感光材料之后，通过紫外线照相工艺形成用于形成屏障的空间。在第二基板上形成上部微通道板。

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