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31. 发明授权

US07627942B2 Method for using CVD process to encapsulate coil in a magnetic write head 失效
标题翻译：使用CVD工艺将线圈封装在磁写头中的方法
公开(公告)号：US07627942B2
公开(公告)日：2009-12-08
申请号：US11090457
申请日：2005-03-25
申请人： Richard Hsiao , Wipul Pemsiri Jayasekara , Howard Gordon Zolla
发明人： Richard Hsiao , Wipul Pemsiri Jayasekara , Howard Gordon Zolla
IPC分类号： G11B5/17
CPC分类号： G11B5/3133 , G11B5/17 , G11B5/3136 , G11B5/3163 , Y10T29/49041 , Y10T29/4906 , Y10T29/49064
摘要： A method for fabricating a magnetic write head with a coil with a high aspect ratio using a Chemical Vapor Deposition process such as Atomic Layer Deposition (ALD), High Speed ALD, Plasma Enhanced ALD (PEALD), Plasma Enhanced Chemical Vapor Deposition (PECVD) or Low Pressure Chemical Vapor Deposition (LPCVD) to form encapsulating films over the coils without voids is disclosed. Materials which can be used for encapsulation include Al2O3, SiO2, AlN, Ta2O5, HfO2, ZrO2, and YtO3. The use of an ultra-conformal deposition process allows the pitch of the coils to be smaller than it is possible in the prior art. The method also allows materials with a smaller coefficient of thermal expansion than hardbake photoresist to be used with resulting improvements in thermal protrusion characteristics.
摘要翻译：使用诸如原子层沉积（ALD），高速ALD，等离子体增强ALD（PEALD），等离子体增强化学气相沉积（PECVD）等化学气相沉积工艺制造具有高纵横比的线圈的磁写头的方法，或低压化学气相沉积（LPCVD）以在无空隙的线圈上形成封装膜。可用于封装的材料包括Al2O3，SiO2，AlN，Ta2O5，HfO2，ZrO2和YtO3。使用超适形沉积工艺允许线圈的间距小于现有技术中可能的间距。该方法还允许使用具有比硬质光刻胶更小的热膨胀系数的材料，从而提高热突起特性。

32. 发明授权

US07313858B2 Method for manufacturing a magnetic head coil structure and/or pole tip structure 有权
标题翻译：磁头线圈结构和/或极尖结构的制造方法
公开(公告)号：US07313858B2
公开(公告)日：2008-01-01
申请号：US10815429
申请日：2004-03-31
申请人： Richard Hsiao , Prakash Kasiraj , Quang Le , Paul Phong Nguyen , Son Van Nguyen , Denny D. Tang , Patrick Rush Webb
发明人： Richard Hsiao , Prakash Kasiraj , Quang Le , Paul Phong Nguyen , Son Van Nguyen , Denny D. Tang , Patrick Rush Webb
IPC分类号： G11B5/17 , G11B5/187
CPC分类号： G11B5/3163 , G11B5/17 , G11B5/313 , Y10T29/49043 , Y10T29/49048 , Y10T29/4906 , Y10T29/49064 , Y10T29/49073 , Y10T29/49165
摘要： A Damascene process is provided for manufacturing a coil structure for a magnetic head. During the manufacturing process, an insulating layer is initially deposited after which a photoresist layer is deposited. A silicon dielectric layer is then deposited on the photoresist layer. After masking the silicon dielectric layer, at least one channel is etched in the photoresist layer and the silicon dielectric layer. Then, a conductive seed layer is deposited in the at least one channel. The at least one channel is then ready to be filled with a conductive material and chemically/mechanically polished to define a coil structure.
摘要翻译：提供一种用于制造用于磁头的线圈结构的镶嵌工艺。在制造过程中，首先沉积绝缘层，之后沉积光致抗蚀剂层。然后在光致抗蚀剂层上沉积硅介电层。在掩蔽硅介电层之后，在光致抗蚀剂层和硅介电层中蚀刻至少一个通道。然后，在至少一个通道中沉积导电种子层。然后至少一个通道准备用导电材料填充并进行化学/机械抛光以限定线圈结构。

33. 发明授权

US06944937B2 Method of reducing ESD damage in thin film read heads which enables measurement of gap resistance 失效
标题翻译：降低薄膜读取头中ESD损伤的方法，可测量间隙电阻
公开(公告)号：US06944937B2
公开(公告)日：2005-09-20
申请号：US10611623
申请日：2003-06-30
申请人： Richard Hsiao , James D. Jarratt , Emo Hilbrand Klaassen , Ian Robson McFadyen , Timothy J. Moran
发明人： Richard Hsiao , James D. Jarratt , Emo Hilbrand Klaassen , Ian Robson McFadyen , Timothy J. Moran
IPC分类号： G11B5/00 , G11B5/33 , G11B5/39 , G11B5/40 , G11B5/455 , G11B33/10 , G11B5/127 , H04R31/00
CPC分类号： B82Y10/00 , G11B5/33 , G11B5/3967 , G11B5/40 , G11B5/455 , G11B33/10 , G11B2005/0013 , Y10T29/49032 , Y10T29/49036 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49071 , Y10T29/49073 , Y10T29/49078
摘要： The present invention provides a method of manufacturing a magnetoresistive read head which reduces electrostatic discharge and allows measurement of gap resistances in the head.
摘要翻译：本发明提供一种制造磁阻读头的方法，其减少了静电放电并允许测量磁头中的间隙电阻。

34. 发明授权

US06919280B2 Method of removing magnetoresistive sensor cap by reactive ion etching 失效
标题翻译：通过反应离子蚀刻去除磁阻传感器盖的方法
公开(公告)号：US06919280B2
公开(公告)日：2005-07-19
申请号：US10271804
申请日：2002-10-15
申请人： Richard Hsiao , Wipul Pemsiri Jayasekara , Son Van Nguyen , Sue Zhang
发明人： Richard Hsiao , Wipul Pemsiri Jayasekara , Son Van Nguyen , Sue Zhang
IPC分类号： C23F4/00 , G11B5/31 , G11B5/39 , H01F41/30 , H01L43/08 , H01L43/12 , H01L21/302 , H01L21/461
CPC分类号： B82Y25/00 , B82Y10/00 , C23F4/00 , G11B5/3163 , G11B5/3903 , G11B2005/3996 , H01F41/302
摘要： During manufacture, a magnetoresistive sensor having a ferromagnetic free layer is commonly provided with a tantalum cap layer. The tantalum cap layer provides protection to the sensor during manufacture and then is typically removed after performing annealing. The removal of the tantalum cap with a fluorine reactive ion etch leaves low volatility tantalum/fluorine byproducts. The present invention provides a method of using an argon/hydrogen reactive ion etch to remove the tantalum/fluorine byproducts. The resulting sensor has far less damage resulting from the presence of the fluorine byproducts.
摘要翻译：在制造期间，具有铁磁性自由层的磁阻传感器通常设置有钽帽层。钽帽层在制造过程中为传感器提供保护，然后在退火之后通常被去除。用氟反应离子蚀刻去除钽帽留下低挥发性钽/氟副产物。本发明提供了一种使用氩/氢反应离子蚀刻去除钽/氟副产物的方法。所得到的传感器具有由于氟副产物的存在而造成的损害少得多。

35. 发明授权

US06901653B2 Process for manufacturing a magnetic head coil structure 失效
标题翻译：磁头线圈结构的制造方法
公开(公告)号：US06901653B2
公开(公告)日：2005-06-07
申请号：US10115414
申请日：2002-04-02
申请人： Richard Hsiao , Prakash Kasiraj , Quang Le , Paul Phong Nguyen , Son Van Nguyen , Denny D. Tang , Patrick Rush Webb
发明人： Richard Hsiao , Prakash Kasiraj , Quang Le , Paul Phong Nguyen , Son Van Nguyen , Denny D. Tang , Patrick Rush Webb
IPC分类号： G11B5/17 , G11B5/31
CPC分类号： G11B5/3163 , G11B5/17 , G11B5/313 , Y10T29/49043 , Y10T29/49048 , Y10T29/4906 , Y10T29/49064 , Y10T29/49073 , Y10T29/49165
摘要： A Damascene process is provided for manufacturing a coil structure for a magnetic head. During the manufacturing process, an insulating layer is initially deposited after which a photoresist layer is deposited. A silicon dielectric layer is then deposited on the photoresist layer. After masking the silicon dielectric layer, at least one channel is etched in the photoresist layer and the silicon dielectric layer. Then, a conductive seed layer is deposited in the at least one channel. The at least one channel is then ready to be filled with a conductive material and chemically/mechanically polished to define a coil structure.
摘要翻译：提供一种用于制造用于磁头的线圈结构的镶嵌工艺。在制造过程中，首先沉积绝缘层，之后沉积光致抗蚀剂层。然后在光致抗蚀剂层上沉积硅介电层。在掩蔽硅介电层之后，在光致抗蚀剂层和硅介电层中蚀刻至少一个通道。然后，在至少一个通道中沉积导电种子层。然后至少一个通道准备用导电材料填充并进行化学/机械抛光以限定线圈结构。

36. 发明授权

US06795278B2 Method of protecting read sensors from electrostatic discharge damage during the manufacture of magnetic heads 有权
标题翻译：在磁头制造期间保护读取传感器免受静电放电损坏的方法
公开(公告)号：US06795278B2
公开(公告)日：2004-09-21
申请号：US10109511
申请日：2002-03-28
申请人： James Devereaux Jarrett , Richard Hsiao , Ciaran Avram Fox , Edward Hin Pong Lee , Thomas Robert Albrecht
发明人： James Devereaux Jarrett , Richard Hsiao , Ciaran Avram Fox , Edward Hin Pong Lee , Thomas Robert Albrecht
IPC分类号： G11B5127
CPC分类号： G11B5/3903 , G11B5/11 , G11B5/3163 , G11B5/3173 , G11B5/40
摘要： Methods and apparatus for protecting read sensors from damage caused by electrostatic discharge (ESD) during manufacturing are described. Two electrical connections are formed and utilized for ESD protection: one primarily for early protection of the sensors (i.e. prior to cutting and lapping the wafer to form the ABS) and the other primarily for later protection of the sensors (i.e. after cutting and lapping the wafer to form the ABS). The first electrical connection is created between the read sensor and the first and second shields, and is severed when the wafer is cut and lapped along the ABS. The second electrical connection is formed between the sensor leads and the first and second shields, and is exposed on an outside surface of the magnetic head. The second electrical connection is severed late in the manufacturing process, preferably by laser-deletion.
摘要翻译：描述了用于保护读取传感器免于在制造期间由静电放电（ESD）引起的损害的方法和装置。形成两个电气连接并用于ESD保护：一个主要用于传感器的早期保护（即在切割和研磨晶片以形成ABS之前），另一个主要用于以后保护传感器（即在切割和研磨之后）晶片形成ABS）。在读取传感器和第一和第二屏蔽之间产生第一电连接，并且当沿着ABS切割晶片时被切断。第二电连接形成在传感器引线与第一和第二屏蔽之间，并且暴露在磁头的外表面上。第二电连接在制造过程的后期被切断，优选地通过激光删除。

37. 发明授权

US06631546B1 Self-aligned void filling for mushroomed plating 失效
标题翻译：自对准空隙填充为蘑菇电镀
公开(公告)号：US06631546B1
公开(公告)日：2003-10-14
申请号：US09496070
申请日：2000-02-01
申请人： Thomas Edward Dinan , Richard Hsiao , John I. Kim , Ashok Lahiri , Clinton David Snyder
发明人： Thomas Edward Dinan , Richard Hsiao , John I. Kim , Ashok Lahiri , Clinton David Snyder
IPC分类号： G11R5127
CPC分类号： C25D5/022 , G11B5/127 , G11B5/3163 , Y10T29/49032 , Y10T29/49155 , Y10T29/49156
摘要： A method of manufacturing includes 2 mushroom plating process starts with an overplated component which includes an enlarged mushroom head having outer portions which overhang a resist layer. The next step in the first process embodiment is a heating step in which the resist layer is hard baked. Thereafter, using a dry etch process, such as a reactive ion etch (RIE) process, the hard baked resist layer is removed in all areas except beneath the overhang of the mushroom head. The area beneath the overhang thereby remains filled with hard baked resist. Thereafter, the device is ultimately encapsulated such that no voids and/or redeposition problems exist under the overhang due to the presence of the hard baked resist. In an alternative process embodiment of the present invention the dry etch process is conducted first upon the resist layer, such that the resist layer is removed in all areas except under the overhang. Thereafter, the device is baked, such that hard baked resist remains beneath the overhang. Ultimately, the device is encapsulated and no voids or redeposition problems exist beneath the overhang due to the presence of the hard baked resist.
摘要翻译：一种制造方法包括2个蘑菇电镀工艺，其中包括一个具有外伸部分的扩大的蘑菇头的一个过度的部件，其上覆盖了一个抗蚀剂层。第一工艺实施例中的下一步骤是其中抗蚀剂层被硬烘烤的加热步骤。此后，使用诸如反应离子蚀刻（RIE）工艺的干蚀刻工艺，除了在蘑菇头的突出部以外的所有区域中除去硬烘烤抗蚀剂层。悬挂下方的区域由此保持充满硬烘烤抗蚀剂。此后，装置最终被封装，使得由于存在硬烘烤抗蚀剂而在悬垂下不存在空隙和/或再沉积问题。在本发明的替代方法实施方案中，首先在抗蚀剂层上进行干蚀刻工艺，使得除了在悬垂体之外的所有区域中除去抗蚀剂层。此后，该装置被烘烤，使得硬烘烤抗蚀剂保留在悬垂物的下方。最终，器件被封装，由于存在硬烘烤的抗蚀剂，悬臂下方不存在空隙或再沉积问题。

38. 发明授权

US06377423B2 Planar stitched write head having write coil insulated with inorganic insulation 失效
标题翻译：平面针迹写头，具有用无机绝缘绝缘的写线圈
公开(公告)号：US06377423B2
公开(公告)日：2002-04-23
申请号：US09761034
申请日：2001-01-16
申请人： Frederick Hayes Dill, Jr. , Robert E. Fontana , Richard Hsiao , Hugo Alberto Emilio Santini
发明人： Frederick Hayes Dill, Jr. , Robert E. Fontana , Richard Hsiao , Hugo Alberto Emilio Santini
IPC分类号： G11B5147
CPC分类号： G11B5/313 , B82Y10/00 , G11B5/3967 , Y10T29/49044
摘要： A write head has a second pole tip layer, a coil layer and a write coil insulation layer that are planarized at their top surfaces. A thin top insulation layer insulates the top of the coil layer from a yoke portion of the second pole piece which is connected to the second pole tip layer in the pole tip region and connected to a first pole piece layer in a back gap region. In a preferred embodiment the write gap layer extends throughout the yoke region and provides the only insulation between the first pole piece layer and the coil layer. Further, it is preferred that the write coil insulation layer be an inorganic material such as silicon dioxide (SiO2). Several embodiments of the write head are provided along with novel methods of making.
摘要翻译：写头具有在其顶表面处被平坦化的第二极尖端层，线圈层和写入线圈绝缘层。薄顶部绝缘层将线圈层的顶部与第二极靴的轭部绝缘，该轭部与极尖端区域中的第二极尖端层连接并连接到后隙区域中的第一极靴层。在优选实施例中，写间隙层延伸贯穿磁轭区域，并且在第一极片层和线圈层之间提供唯一的绝缘。此外，写入线圈绝缘层优选为二氧化硅（SiO 2）等无机材料。提供写头的几个实施例以及新颖的制作方法。

39. 发明授权

US06239955B1 Stabilized MR sensor and heat guide joined by contiguous junction 有权
标题翻译：稳定的MR传感器和导热板连接在一起
公开(公告)号：US06239955B1
公开(公告)日：2001-05-29
申请号：US09280497
申请日：1999-03-30
申请人： Moris Musa Dovek , Robert E. Fontana , Richard Hsiao , Mohamad Towfik Krounbi , Hugo Alberto Emilio Santini , Virgil Simon Speriosu
发明人： Moris Musa Dovek , Robert E. Fontana , Richard Hsiao , Mohamad Towfik Krounbi , Hugo Alberto Emilio Santini , Virgil Simon Speriosu
IPC分类号： G11B539
CPC分类号： G11B5/3916 , G01R33/09 , G03F7/00 , G11B5/3163 , G11B5/3903 , G11B5/3919 , G11B5/3932
摘要： The back end of an MR sensor and a flux guide are joined by a contiguous self-aligned junction so that a predictable overlap of the flux guide on the back end of the MR sensor can be achieved for optimizing signal flux density in the MR sensor. Lead/longitudinal bias layers for the MR sensor are also joined by a contiguous selfaligned junction to the flux guide for stabilizing the flux guide. By employing a single lift off resist mask the MR sensor and the lead/longitudinal bias layers can be patterned followed by deposition of the flux guide. The flux guide is a bilayer of an insulation material layer and a flux guide material layer. The insulation material layer is sandwiched between the MR sensor and the flux guide material layer and between the lead/longitudinal bias layers and the flux guide material layer. A heat guide or combined flux guide and heat guide may be substituted for the aforementioned flux guide.
摘要翻译： MR传感器和磁通引导件的后端通过连续的自对准结连接，从而可以实现MR传感器后端的磁通引导件的可预测重叠，以优化MR传感器中的信号通量密度。用于MR传感器的引线/纵向偏置层也通过邻接的自对准结连接到通量引导件，用于稳定通量引导件。通过使用单个剥离抗蚀剂掩模，MR传感器和引导/纵向偏置层可以被图案化，然后沉积助焊剂引导件。助焊剂是绝缘材料层和助焊剂引导材料层的双层。绝缘材料层被夹在MR传感器和磁通引导材料层之间以及引导/纵向偏置层与通量引导材料层之间。导热或组合的磁通引导件和导热件可以代替上述的磁通引导件。

40. 发明授权

US06226149B1 Planar stitched write head having write coil insulated with inorganic insulation 失效
标题翻译：平面针迹写头，具有用无机绝缘绝缘的写线圈
公开(公告)号：US06226149B1
公开(公告)日：2001-05-01
申请号：US09212119
申请日：1998-12-15
申请人： Frederick Hayes Dill, Jr. , Robert E. Fontana , Richard Hsiao , Hugo Alberto Emilio Santini
发明人： Frederick Hayes Dill, Jr. , Robert E. Fontana , Richard Hsiao , Hugo Alberto Emilio Santini
IPC分类号： G11B5147
CPC分类号： G11B5/313 , B82Y10/00 , G11B5/3967 , Y10T29/49044
摘要： A write head has a second pole tip layer, a coil layer and a write coil insulation layer that are planarized at their top surfaces. A thin top insulation layer insulates the top of the coil layer from a yoke portion of the second pole piece which is connected to the second pole tip layer in the pole tip region and connected to a first pole piece layer in a back gap region. In a preferred embodiment the write gap layer extends throughout the yoke region and provides the only insulation between the first pole piece layer and the coil layer. Further, it is preferred that the write coil insulation layer be an inorganic material such as silicon dioxide (SiO2). Several embodiments of the write head are provided along with novel methods of making.
摘要翻译：写头具有在其顶表面处被平坦化的第二极尖端层，线圈层和写入线圈绝缘层。薄顶部绝缘层将线圈层的顶部与第二极靴的轭部绝缘，该轭部与极尖端区域中的第二极尖端层连接并连接到后隙区域中的第一极靴层。在优选实施例中，写间隙层延伸贯穿磁轭区域，并且在第一极片层和线圈层之间提供唯一的绝缘。此外，写入线圈绝缘层优选为二氧化硅（SiO 2）等无机材料。提供写头的几个实施例以及新颖的制作方法。

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