专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

31. 发明授权

US07097744B2 Method and apparatus for controlling darkspace gap in a chamber 有权
标题翻译：用于控制腔室中暗区间隙的方法和装置
公开(公告)号：US07097744B2
公开(公告)日：2006-08-29
申请号：US10460865
申请日：2003-06-12
申请人： Alan Barry Liu , Marc O. Schweitzer , James Stephen Van Gogh , Michael Rosenstein , Jennifer L. Watia , Xinyu Zhang , Yoichiro Tanaka , John C. Forster , Anthony Chen
发明人： Alan Barry Liu , Marc O. Schweitzer , James Stephen Van Gogh , Michael Rosenstein , Jennifer L. Watia , Xinyu Zhang , Yoichiro Tanaka , John C. Forster , Anthony Chen
IPC分类号： C23C14/35
CPC分类号： H01J37/3441 , H01J37/34
摘要： In one embodiment, a target alignment surface disposed on a target support mechanically engages a darkspace shield alignment surface disposed on a darkspace shield as the target is lodged into a chamber body. The respective alignment surfaces are shaped and positioned so that the darkspace shield is physically moved to a desired aligned position as the alignment surfaces engage each other. In this manner a darkspace shield may be directly aligned to a target within a semiconductor fabrication chamber to provide a suitable darkspace gap between the target and the darkspace shield.
摘要翻译：在一个实施例中，设置在目标支架上的目标对准表面机械地接合设置在黑暗空间屏蔽上的暗空屏蔽对准表面，因为目标被放置在腔体中。相应的对准表面被成形和定位成使得当对准表面彼此接合时，暗区屏蔽件物理地移动到期望的对准位置。以这种方式，暗区屏蔽可以直接对齐到半导体制造室内的靶，以在靶和暗空间屏蔽之间提供合适的暗空隙。

32. 发明授权

US5932180A Ozone and other reactive gas generator cell and system 失效
标题翻译：臭氧等反应气体发生器电池及系统
公开(公告)号：US5932180A
公开(公告)日：1999-08-03
申请号：US871088
申请日：1997-06-09
申请人： Xinyu Zhang , Vitaly Berkman , Donald Smith
发明人： Xinyu Zhang , Vitaly Berkman , Donald Smith
IPC分类号： B01J7/00 , B01J19/08 , C01B13/11
CPC分类号： C01B13/11 , B01J19/088 , C01B2201/12 , C01B2201/22 , C01B2201/24 , C01B2201/32 , C01B2201/34 , C01B2201/70 , C01B2201/74
摘要： A reactive gas generator cell includes a high voltage assembly having a high voltage electrode plate and a low voltage assembly having a low voltage electrode plate. Each of the high and low voltage assemblies may include a cover plate and a channel plate. A welded metallic seal may join the high voltage assembly and the low voltage assembly to create a permanently sealed chamber between the assemblies. A refractory metal surface, which may be a tungsten surface, is disposed on at least one of the low voltage electrode plate and the high voltage electrode plate. A dielectric barrier is disposed between the high voltage electrode plate and the low voltage electrode plate. A discharge region for confining a reactive gas is defined, at least in part, by the refractory metal surface and a surface of the dielectric barrier. A spacer, which may be formed from a refractory material, may be positioned between the surface of the dielectric barrier and the refractory metal surface to define a predetermined gap.
摘要翻译：反应气体发生器单元包括具有高电压电极板和具有低电压电极板的低压组件的高压组件。高压组件和低压组件中的每一个可以包括盖板和通道板。焊接的金属密封件可以连接高压组件和低压组件，以在组件之间形成永久密封的腔室。难熔金属表面可以是钨表面，设置在低压电极板和高压电极板中的至少一个上。电介质阻挡层设置在高压电极板和低电压电极板之间。用于限制反应性气体的放电区至少部分地由难熔金属表面和电介质阻挡层的表面限定。可以由耐火材料形成的间隔件可以位于电介质阻挡层的表面和难熔金属表面之间，以限定预定间隙。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式