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    • 32. 发明授权
    • Guide bush and method of forming hard carbon film over the inner surface of the guide bush
    • 引导衬套和在导套内表面上形成硬质碳膜的方法
    • US06419997B1
    • 2002-07-16
    • US09514896
    • 2000-02-28
    • Yukio MiyaOsamu SugiyamaRyota KoikeTakashi ToidaSosaku KimuraKunihiko Kokubo
    • Yukio MiyaOsamu SugiyamaRyota KoikeTakashi ToidaSosaku KimuraKunihiko Kokubo
    • C23C1626
    • B23B31/202B23B13/125B23B2222/28B23B2222/88B23B2231/2059C23C16/0281C23C16/045C23C16/26Y10T279/17418Y10T279/17452
    • A hard carbon film (15) is formed directly or through an intermediate layer for enhancing adhesion over an inner surface (11b) of a guide bush (11) for holding a workpiece (51) rotatably and axially slidable on an automatic lathe at a position near a cutting tool, to be in sliding contact with the workpiece (51) or directly or through an intermediate layer for enhancing adhesion on the surface of a superhard lining fixed to the inner surface (11b). The guide bush (11) has remarkably enhanced durability and prevents damaging the workpiece (51) and seizing that makes a machining operation impossible even when the guide bush (11) is used for an extended period of time and when the automatic lathe operates for heavy machining. The hard carbon film (15) having satisfactory adhesion to the inner surface (11b) can be efficiently formed in a uniform thickness over the inner surface (11b) by placing the guide bush (11) in a vacuum vessel, extending an auxiliary electrode in the center bore of the guide bush (11) and producing a plasma of a gas containing carbon.
    • 硬质碳膜(15)直接或通过中间层形成,用于增强在导筒(11)的内表面(11b)上的粘合力,用于保持工件(51)在自动车床上可旋转和轴向滑动的位置 靠近切割工具,与工件(51)滑动接触,或直接或通过中间层,以增强固定在内表面(11b)上的超硬衬里的表面上的附着力。 引导衬套(11)具有显着增强的耐久性,并且防止损坏工件(51)并且即使当导套(11)长时间使用时也不可能进行加工操作,并且当自动车床操作重 加工。 通过将引导衬套(11)放置在真空容器中,可以在内表面(11b)上以均匀的厚度有效地形成对内表面(11b)具有令人满意的粘合力的硬质碳膜(15) 引导衬套(11)的中心孔并产生含碳气体的等离子体。
    • 33. 发明授权
    • Jig for forming hard carbon film over inner surface of guide bush using
the jig
    • 夹具用于使用夹具在导套的内表面上形成硬质碳膜
    • US6131533A
    • 2000-10-17
    • US910828
    • 1997-08-15
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi ToidaToshiichi Sekine
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi ToidaToshiichi Sekine
    • C23C16/02C23C16/04C23C16/26C23C16/503C23C16/509C23C16/00
    • C23C16/0281C23C16/045C23C16/26C23C16/503C23C16/509Y10S279/906Y10S427/104Y10T279/17231Y10T279/18Y10T279/29Y10T82/2518Y10T82/2521
    • A hard carbon film is formed over an inner surface of a guide bush by fixing an auxiliary electrode support member for supporting an auxiliary electrode of a jig for forming a film in a center bore of the guide bush by an auxiliary electrode insulation member, disposing an auxiliary electrode in alignment with the axis of the center bore so as to face the inner surface, disposing legs, and a first electrode plate, a second electrode plate, and the insulation member which are fixed to the legs are placed on the bottom of a vacuum vessel placing the guide bush on the first electrode plate contacted electrically with a power source, while the projection of the auxiliary electrode support member projecting out of the auxiliary electrode insulation member is contacted electrically with the second electrode plate. The auxiliary electrode is grounded through the auxiliary electrode support member, the second electrode plate, the legs, and the vacuum vessel, a gas containing carbon is introduced into the vacuum vessel after evacuating the vacuum vessel, and a plasma is produced in the vacuum vessel by supplying electric power to the guide bush through the first electrode plate from the power source.
    • 通过辅助电极绝缘部件固定辅助电极支撑部件,该辅助电极支撑部件通过固定在辅助电极绝缘部件的引导衬套的中心孔中形成膜的夹具的辅助电极而形成在硬质碳膜的内表面上, 辅助电极与中心孔的轴线对准,以面对内表面,设置腿,以及固定到腿部的第一电极板,第二电极板和绝缘构件放置在底部上 真空容器将引导衬套放置在与电源电接触的第一电极板上,而从辅助电极绝缘构件突出的辅助电极支撑构件的突起与第二电极板电接触。 辅助电极通过辅助电极支撑构件,第二电极板,支腿和真空容器接地,抽空真空容器后,将含碳气体引入真空容器中,并在真空容器中产生等离子体 通过第一电极板从电源向引导衬套提供电力。
    • 35. 发明授权
    • Method of forming hard carbon film over the inner surface of guide bush
    • 在导套内表面上形成硬质碳膜的方法
    • US6020036A
    • 2000-02-01
    • US51636
    • 1998-04-16
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi ToidaToshiichi Sekine
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi ToidaToshiichi Sekine
    • C23C16/04C23C16/26B05D3/06B05D7/22
    • C23C16/045C23C16/26Y10S427/103Y10S427/104
    • A guide bush (11), coming in sliding contact with a workpiece, for use in an automatic lathe is placed in a vacuum vessel (61), and after inserting an auxiliary electrode (71), which is grounded or to which a positive DC voltage is applied, in the center bore (11j) of the guide bush (11), forming the inner surface (11b) thereof, the vacuum vessel (61) is evacuated such that an initially reached pressure therein is not higher than a predetermined degree of vacuum. Then, after a DC voltage is applied to an anode (79) and an AC voltage is applied to a filament (81) while applying a DC voltage to the guide bush (11), carbon-containing gas is fed into the vacuum vessel (61), producing a plasma therein and the pressure inside the vacuum vessel (61) is controlled to attain a film-forming pressure higher than the initially reached pressure while forming a hard carbon film over the inner surface of the guide bush (11) by means of a plasma CVD process.
    • PCT No.PCT / JP97 / 02868 Sec。 371日期:1998年4月16日 102(e)1998年4月16日PCT PCT 1997年8月19日PCT公布。 出版物WO98 / 07895 日期1998年2月26日将与工件滑动接触的导向衬套(11)用于自动车床放置在真空容器(61)中,并且在插入辅助电极(71)之后,其被接地或 在该导套(11)的中心孔(11j)中施加正的直流电压,形成其内表面(11b),真空容器(61)被抽真空,使得其中初始达到的压力不在 高于预定的真空度。 然后,在将直流电压施加到阳极(79)上并且向引线衬套(11)施加DC电压的同时向灯丝(81)施加AC电压时,将含碳气体供给到真空容器 61),在其中产生等离子体,并且控制真空容器(61)内部的压力,以获得高于初始达到的压力的成膜压力,同时在导套(11)的内表面上形成硬碳膜,同时通过 等离子体CVD工艺的手段。
    • 36. 发明授权
    • Method of removing hard carbon film formed on inner circumferential
surface of guide bush
    • 去除在导套内周面形成的硬质碳膜的方法
    • US5993680A
    • 1999-11-30
    • US051456
    • 1998-04-13
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi ToidaToshiichi Sekine
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi ToidaToshiichi Sekine
    • C23G5/00B44C1/22
    • C23G5/00
    • The present invention provides a method of removing a hard carbon film (15) from the inner surface of a guide bush (11) through etching. The method comprises the steps of inserting an auxiliary electrode (71) in the center bore (11j) of the guide bush (11) wherein the hard carbon film (15) is formed over the inner surface thereof, in sliding contact with a workpiece, disposing the guide bush (11) with the auxiliary electrode inserted in the center bore thereof in a vacuum vessel (61) provided with an anode (79) and a filament (81) therein, grounding the auxiliary electrode (71) or applying a positive DC voltage thereto, and producing a plasma in the vacuum vessel (61) by feeding an oxygen-containing gas therein and applying a DC voltage to the anode (79) and an AC voltage to the filament (81) respectively, while applying a DC voltage to the guide bush (11) after evacuating the vacuum vessel (61).
    • PCT No.PCT / JP97 / 02840 Sec。 371日期:1998年4月13日 102(e)1998年4月13日PCT PCT 1997年8月15日PCT公布。 公开号WO98 / 06885 日期:1998年2月19日本发明提供一种通过蚀刻从引导衬套(11)的内表面除去硬质碳膜(15)的方法。 该方法包括以下步骤:在导筒(11)的中心孔(11j)中插入辅助电极(71),其中硬质碳膜(15)形成在其内表面上,与工件滑动接触, 将具有插入其中心孔的辅助电极的引导衬套(11)设置在其中设置有阳极(79)和灯丝(81)的真空容器(61)中,使辅助电极(71)接地或施加阳性 DC电压,并通过在其中供给含氧气体而在真空容器(61)中产生等离子体,并将DC电压分别施加到阳极(79)和交流电压至灯丝(81),同时施加DC 在抽空真空容器(61)之后,将电压施加到引导衬套(11)。
    • 37. 发明授权
    • Method of forming DLC films over inner surface of cylindrical member
    • 在圆柱形构件的内表面上形成DLC膜的方法
    • US5965217A
    • 1999-10-12
    • US944442
    • 1997-10-06
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi ToidaToshiichi Sekine
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi ToidaToshiichi Sekine
    • C23C14/04C23C16/02C23C16/04C23C16/26B05D3/06B05D7/22
    • C23C14/046C23C16/0281C23C16/045C23C16/26Y10S427/106
    • The present invention relates to a method of forming a two-layer intermediate film over the inner surface of a cylindrical member, such as a bushing or a cylinder, with a DLC film being formed on the intermediate film with a uniform thickness by using an auxiliary electrode, greatly enhancing of abrasion resistance of the inner surface. The cylindrical member is placed in a vacuum vessel, an auxiliary electrode of a first intermediate film forming material is inserted in the bore of the cylindrical member, a sputtering gas is supplied into the vacuum vessel, keep the auxiliary electrode at ground potential or a negative DC voltage is applied to the auxiliary electrode to produce a plasma around the auxiliary electrode in order that a first intermediate film is formed over the inner surface of the cylindrical member. A gas containing silicon or germanium is supplied into the vacuum vessel in which the cylindrical member and the auxiliary electrode are disposed, and a voltage is applied to the cylindrical member to produce a plasma, thereby forming a second intermediate film on the first intermediate film. Subsequently, a gas containing carbon, such as methane or the like, is supplied into the vacuum vessel in which the cylindrical member and the auxiliary electrode are disposed, and a voltage is applied to the cylindrical member to produce a plasma in the vacuum vessel in order that the DLC film is formed on the previously formed second intermediate film over the inner surface of the cylindrical member.
    • 本发明涉及一种在诸如衬套或圆柱体的圆柱形构件的内表面上形成双层中间膜的方法,其中DLC膜通过使用辅助材料在均匀的厚度上形成在中间膜上 电极,大大增强了内表面的耐磨性。 将圆柱形构件放置在真空容器中,将第一中间成膜材料的辅助电极插入圆柱形构件的孔中,将溅射气体供应到真空容器中,将辅助电极保持在地电位或负极 将DC电压施加到辅助电极以在辅助电极周围产生等离子体,以便在圆柱形构件的内表面上形成第一中间膜。 将含有硅或锗的气体供给到其中设置有圆柱形构件和辅助电极的真空容器中,并且向圆柱形构件施加电压以产生等离子体,从而在第一中间膜上形成第二中间膜。 随后,将含有碳的气体(例如甲烷等)供应到设置有圆柱形构件和辅助电极的真空容器中,并且向圆筒构件施加电压以在真空容器中产生等离子体 命令在圆柱形构件的内表面上在先前形成的第二中间膜上形成DLC膜。
    • 38. 发明授权
    • Method of forming a DLC film over the inner surface of guide bush
    • 在导套内表面上形成DLC膜的方法
    • US5922418A
    • 1999-07-13
    • US912924
    • 1997-08-15
    • Ryota KoikeYukio MiyaOsamu SugiyamaTakashi ToidaToshiichi Sekine
    • Ryota KoikeYukio MiyaOsamu SugiyamaTakashi ToidaToshiichi Sekine
    • C23C16/04C23C16/26C23C16/503B05D3/06B05D7/22
    • C23C16/503C23C16/045C23C16/26
    • An auxiliary electrode which is to be connected to a ground potential or applied with a positive DC voltage is disposed in a center bore which forms an inner surface of a guide bush, and a ringlike dummy member made of a conductive material having an internal diameter equal to or larger than the diameter of the center bore of the guide bush with its both ends having a different diameter is placed on an end face of the guide bush opening the inner surface thereof so that one end having the smaller diameter contacts the end face of the guide bush with its center in alignment with the central axis of the center bore. A DLC film is formed over an inner surface of a guide bush which is in sliding contact with a workpiece held in the guide bush by disposing the guide bush in a vacuum vessel after evacuating the vessel and introducing a gas containing carbon, producing a plasma in a vacuum vessel by applying a DC voltage or a radio frequency power to the guide bush by the plasma CVD process.
    • 要连接到地电位或施加正直流电压的辅助电极设置在形成导套的内表面的中心孔中,以及由具有内径相等的导电材料制成的环状虚拟构件 大于其两端具有不同直径的导套的中心孔的直径被放置在引导衬套的内表面的端面上,使得具有较小直径的一端接触到 引导衬套的中心与中心孔的中心轴线对齐。 在引导衬套的内表面上形成DLC膜,导向衬套的内表面通过在抽空容器之后将引导衬套布置在真空容器中并引入含碳气体,产生等离子体的气体而与保持在引导衬套中的工件滑动接触 通过等离子体CVD工艺将直流电压或射频功率施加到引导衬套的真空容器。
    • 40. 发明授权
    • Electro-optical cell
    • 电光电池
    • US4068923A
    • 1978-01-17
    • US717186
    • 1976-08-24
    • Takashi Toida
    • Takashi Toida
    • G02F1/1333G02F1/1337G02F1/1339G02F1/1345G02F1/13
    • G02F1/133345G02F1/133711G02F1/1339Y10S359/90Y10T428/1023
    • An electro-optical cell for field-effect type liquid crystal display comprises:A pair of electrode base plates each comprising a transparent base plate and an electrode film adhering to one surface thereof;A pair of inorganic electrode-protecting layers respectively provided at least on the peripheral portion of the surface having the electrode film of each electrode base plate, said pair of electrode base plates being assembled with their surfaces having the electrode films facing each other by means of an inorganic sealing agent applied at the peripheral portions of the electrode base plates through the respective inorganic electrode-protecting layers so as to form a cell containing therein a nematic liquid crystal material having a positive dielectric anisotropy, and the cell being to be placed on an optical path so that light passes through the pair of the electrode base plates; andA pair of polyimide resin films respectively orientated in one direction and provided within the cell over each of the electrode films with or without the inorganic electrode-protecting layer interposed between the electrode film and the polyimide resin film so that the directions of the orientations of the polyimide resin films intersect each other as viewed along the optical path.