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31. 发明授权

US08398319B2 Developing apparatus, developing method, and storage medium 有权
标题翻译：显影装置，显影方法和存储介质
公开(公告)号：US08398319B2
公开(公告)日：2013-03-19
申请号：US12718104
申请日：2010-03-05
申请人： Hiroshi Arima , Yuichi Yoshida , Taro Yamamoto , Kousuke Yoshihara
发明人： Hiroshi Arima , Yuichi Yoshida , Taro Yamamoto , Kousuke Yoshihara
IPC分类号： G03D5/00
CPC分类号： G03F7/3021 , H01L21/6715
摘要： A developing apparatus including a substrate holder that holds a substrate horizontally; means for atomizing a surface treatment liquid used to improve wettability of the substrate with a developer; a first spray nozzle that sprays the atomized surface treatment liquid onto the substrate; and a developer supply nozzle that supplies a developer onto the substrate to which the substrate treatment liquid has been sprayed. The surface tension of the atomized surface treatment liquid with respect to the substrate is lower than the surface tension of the surface treatment liquid with respect to the substrate. The atomization suppresses the fact that the surface treatment liquid gathers on a certain portion of the surface of the substrate. The surface treatment liquid can be easily supplied onto the entire surface of the substrate, and improve wettability of the substrate with the developer.
摘要翻译：一种显影装置，包括：水平保持基板的基板支架; 用于使用显影剂使用于改善基材的润湿性的表面处理液体雾化的装置; 将雾化的表面处理液体喷射到基板上的第一喷嘴; 以及将显影剂供给到已经喷射了基板处理液的基板上的显影剂供给喷嘴。雾化表面处理液相对于基材的表面张力低于表面处理液相对于基材的表面张力。雾化抑制了表面处理液体聚集在基材表面的某一部分上的事实。可以容易地将表面处理液体提供到基板的整个表面上，并且改善基板与显影剂的润湿性。

32. 发明授权

US08216389B2 Substrate cleaning method and substrate cleaning apparatus 有权
标题翻译：基板清洗方法和基板清洗装置
公开(公告)号：US08216389B2
公开(公告)日：2012-07-10
申请号：US12400419
申请日：2009-03-09
申请人： Kousuke Yoshihara , Yuichi Yoshida , Taro Yamamoto
发明人： Kousuke Yoshihara , Yuichi Yoshida , Taro Yamamoto
IPC分类号： B08B7/00 , B08B3/02
CPC分类号： G03F7/168 , B08B3/024 , G03F7/3021 , H01L21/67051
摘要： A substrate cleaning method that includes: a step in which, while a substrate holder is being continuously rotated, a to-be-discharged position of the cleaning liquid on the substrate is changed to an eccentric position deviated from the central part of the substrate, and a gas is discharged from a gas nozzle to the central part of the substrate so as to form a dried area of the cleaning liquid under a condition in which a shortest distance between an edge of a cleaning liquid flow output from the cleaning-liquid nozzle and an edge of a gas flow output from the gas nozzle is set between 9 mm and 15 mm.
摘要翻译：一种基板清洗方法，其特征在于，包括：在基板保持件持续旋转的同时，将基板上的清洗液的排出位置变更为偏离基板的中心部的偏心位置，气体从气体喷嘴排出到基板的中心部分，以便在从清洗液喷嘴输出的清洗液流的边缘之间的最短距离的条件下形成清洁液体的干燥区域并且从气体喷嘴输出的气流的边缘被设定在9mm和15mm之间。

33. 发明申请

US20110200321A1 COATING AND DEVELOPING APPARATUS, DEVELOPING METHOD AND NON-TRANSITORY MEDIUM 有权
标题翻译：涂料和开发设备，开发方法和非交联介质
公开(公告)号：US20110200321A1
公开(公告)日：2011-08-18
申请号：US13025300
申请日：2011-02-11
申请人： Yasushi Takiguchi , Taro Yamamoto , Hiroshi Arima , Kousuke Yoshihara , Yuichi Yoshida
发明人： Yasushi Takiguchi , Taro Yamamoto , Hiroshi Arima , Kousuke Yoshihara , Yuichi Yoshida
IPC分类号： G03B13/00
CPC分类号： G03B27/52 , G03F7/3021 , H01L21/6715 , H01L21/67178 , H01L21/6719 , H01L21/67745 , H01L21/67748 , H01L21/68742 , H01L21/68785
摘要： There is provided a coating and developing apparatus that develops a substrate of which surface is coated with resist and exposed to lights. The coating and developing apparatus includes a developing module; a cleaning module; and a transfer mechanism configured to transfer a substrate developed by the developing module to the cleaning module. The developing module includes an airtightly sealed processing vessel configured to form a processing atmosphere; a temperature control plate provided in the processing vessel and mounts thereon the substrate and cools the substrate; and an atmosphere gas supply unit configured to supply an atmosphere gas including mist of a developing solution to a surface of the substrate within the processing vessel. The cleaning module includes a mounting table configured to mount thereon the substrate; and a cleaning solution supply unit configured to supply a cleaning solution to the substrate mounted on the mounting table.
摘要翻译：提供了一种涂覆和显影装置，其显影其表面被抗蚀剂涂覆并暴露于光的基底。涂料和显影装置包括显影模块; 清洁模块; 以及传送机构，其构造成将由显影模块显影的基板传送到清洁模块。显影模块包括构造成形成处理气氛的气密密封处理容器; 设置在处理容器中并安装在其上的温度控制板并冷却基板; 以及气氛气体供给单元，被构造成将处理容器内的显影液的气雾气体气体供给至基板的表面。清洁模块包括：安装台，其安装在其上; 以及清洗液供给单元，其构造成将清洗液供给到安装在所述安装台上的基板。

34. 发明授权

US07742146B2 Coating and developing method, coating and developing system and storage medium 有权
标题翻译：涂层和显影方法，涂层和显影系统和储存介质
公开(公告)号：US07742146B2
公开(公告)日：2010-06-22
申请号：US11623481
申请日：2007-01-16
申请人： Hideharu Kyouda , Kousuke Yoshihara , Taro Yamamoto
发明人： Hideharu Kyouda , Kousuke Yoshihara , Taro Yamamoto
IPC分类号： G03B27/52 , G03D5/00 , H01L21/00
CPC分类号： G03F7/2041 , G03F7/11 , G03F7/38
摘要： A resist film formed on a substrate is coated with a water-repellent protective film and the substrate is subjected to a developing process after the substrate has been processed by an immersion exposure process. The protective film is removed from the substrate after the resist film has been processed by the immersion exposure process, the substrate is processed by a heating process, and then the substrate is subjected to a developing process. The surface of the substrate is cleaned with a cleaning liquid before the protective film is removed and after the substrate has been processed by the immersion exposure process or the surface of the substrate is cleaned with a cleaning liquid after removing the protective film and before the substrate is subjected to the heating process.
摘要翻译：在基板上形成的抗蚀剂膜涂覆有防水保护膜，并且在通过浸没曝光工艺处理基板之后对基板进行显影处理。在通过浸渍曝光工艺处理了抗蚀剂膜之后，从基板上除去保护膜，通过加热工艺处理基板，然后对基板进行显影处理。在除去保护膜之前，用浸渍曝光工序处理基板后，用清洗液清洗基板的表面，在除去保护膜之后和基板之前用清洗液清洗基板的表面进行加热处理。

35. 发明授权

US08980013B2 Substrate cleaning method and substrate cleaning apparatus 有权
标题翻译：基板清洗方法和基板清洗装置
公开(公告)号：US08980013B2
公开(公告)日：2015-03-17
申请号：US13486084
申请日：2012-06-01
申请人： Kousuke Yoshihara , Yuichi Yoshida , Taro Yamamoto
发明人： Kousuke Yoshihara , Yuichi Yoshida , Taro Yamamoto
IPC分类号： B08B3/08 , G03F7/16 , B08B3/02 , G03F7/30 , H01L21/67
CPC分类号： G03F7/168 , B08B3/024 , G03F7/3021 , H01L21/67051
摘要： A substrate cleaning method that includes: a step in which, while a substrate holder is being continuously rotated, a to-be-discharged position of the cleaning liquid on the substrate is changed to an eccentric position deviated from the central part of the substrate, and a gas is discharged from a gas nozzle to the central part of the substrate so as to form a dried area of the cleaning liquid under a condition in which a shortest distance between an edge of a cleaning liquid flow output from the cleaning-liquid nozzle and an edge of a gas flow output from the gas nozzle is set between 9 mm and 15 mm.
摘要翻译：一种基板清洗方法，其特征在于，包括：在基板保持件持续旋转的同时，将基板上的清洗液的排出位置变更为偏离基板的中心部的偏心位置，气体从气体喷嘴排出到基板的中心部分，以便在从清洗液喷嘴输出的清洗液流的边缘之间的最短距离的条件下形成清洁液体的干燥区域并且从气体喷嘴输出的气流的边缘被设定在9mm和15mm之间。

36. 发明申请

US20120234362A1 SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS 审中-公开
标题翻译：基板清洗方法和基板清洗装置
公开(公告)号：US20120234362A1
公开(公告)日：2012-09-20
申请号：US13486084
申请日：2012-06-01
申请人： Kousuke Yoshihara , Yuichi Yoshida , Taro Yamamoto
发明人： Kousuke Yoshihara , Yuichi Yoshida , Taro Yamamoto
IPC分类号： B08B7/04 , B08B3/02 , B08B5/02
CPC分类号： G03F7/168 , B08B3/024 , G03F7/3021 , H01L21/67051
摘要： A substrate cleaning method that includes: a step in which, while a substrate holder is being continuously rotated, a to-be-discharged position of the cleaning liquid on the substrate is changed to an eccentric position deviated from the central part of the substrate, and a gas is discharged from a gas nozzle to the central part of the substrate so as to form a dried area of the cleaning liquid under a condition in which a shortest distance between an edge of a cleaning liquid flow output from the cleaning-liquid nozzle and an edge of a gas flow output from the gas nozzle is set between 9 mm and 15 mm.
摘要翻译：一种基板清洗方法，其特征在于，包括：在基板保持件持续旋转的同时，将基板上的清洗液的排出位置变更为偏离基板的中心部的偏心位置，气体从气体喷嘴排出到基板的中心部分，以便在从清洗液喷嘴输出的清洗液流的边缘之间的最短距离的条件下形成清洁液体的干燥区域并且从气体喷嘴输出的气流的边缘被设定在9mm和15mm之间。

37. 发明授权

US08262300B2 Coating and developing apparatus, developing method and non-transitory medium 有权
标题翻译：涂层和显影装置，显影方法和非暂时介质
公开(公告)号：US08262300B2
公开(公告)日：2012-09-11
申请号：US13025300
申请日：2011-02-11
申请人： Yasushi Takiguchi , Taro Yamamoto , Hiroshi Arima , Kousuke Yoshihara , Yuichi Yoshida
发明人： Yasushi Takiguchi , Taro Yamamoto , Hiroshi Arima , Kousuke Yoshihara , Yuichi Yoshida
IPC分类号： G03B13/00 , G03D5/00
CPC分类号： G03B27/52 , G03F7/3021 , H01L21/6715 , H01L21/67178 , H01L21/6719 , H01L21/67745 , H01L21/67748 , H01L21/68742 , H01L21/68785
摘要： A coating and developing apparatus develops a substrate of which surface is coated with resist and exposed to lights. The coating and developing apparatus includes a developing module; a cleaning module; and a transfer mechanism configured to transfer a substrate developed by the developing module to the cleaning module. The developing module includes an airtightly sealed processing vessel configured to form a processing atmosphere; a temperature control plate provided in the processing vessel and mounts thereon the substrate and cools the substrate; and an atmosphere gas supply unit configured to supply an atmosphere gas including mist of a developing solution to a surface of the substrate within the processing vessel. The cleaning module includes a mounting table configured to mount thereon the substrate; and a cleaning solution supply unit configured to supply a cleaning solution to the substrate mounted on the mounting table.
摘要翻译：涂层和显影设备开发其表面被抗蚀剂涂覆并暴露于光的基底。涂料和显影装置包括显影模块; 清洁模块; 以及传送机构，其构造成将由显影模块显影的基板传送到清洁模块。显影模块包括构造成形成处理气氛的气密密封处理容器; 设置在处理容器中并安装在其上的温度控制板并冷却基板; 以及气氛气体供给单元，被构造成将处理容器内的显影液的气雾气体气体供给至基板的表面。清洁模块包括：安装台，其安装在其上; 以及清洗液供给单元，其构造成将清洗液供给到安装在所述安装台上的基板。

38. 发明授权

US08069816B2 Coating film processing method and apparatus 有权
标题翻译：涂膜处理方法和装置
公开(公告)号：US08069816B2
公开(公告)日：2011-12-06
申请号：US11950122
申请日：2007-12-04
申请人： Taro Yamamoto , Kousuke Yoshihara
发明人： Taro Yamamoto , Kousuke Yoshihara
IPC分类号： B05C11/02 , B05C11/00 , B05B7/06 , G03D5/00
CPC分类号： H01L21/6715 , G03F7/70341 , H01L21/67051
摘要： A coating film processing method is used for processing a coating film formed on a surface of a substrate to prepare for an immersion light exposure process arranged to perform light exposure through a liquid. The method includes supplying a solvent-containing liquid comprising a combination of a solvent and a solvent-ability decreasing agent for decreasing solvent ability, or a diluted solvent, onto an edge portion of the coating film, thereby performing edge portion cutting; and supplying a cleaning liquid onto the edge portion of the coating film, thereby performing edge portion cleaning, subsequently to the edge portion cutting.
摘要翻译：使用涂膜处理方法来处理形成在基板的表面上的涂膜，以准备用于通过液体进行曝光的浸没曝光处理。该方法包括将包含溶剂和溶剂能力降低剂的组合的含溶剂的液体或稀释的溶剂供应到涂膜的边缘部分上，从而进行边缘部分切割; 并将清洗液供给到涂膜的边缘部分上，从而进行边缘部分的清洁。

39. 发明申请

US20100233637A1 DEVELOPING APPARATUS, DEVELOPING METHOD, AND STORAGE MEDIUM 有权
标题翻译：开发设备，开发方法和存储介质
公开(公告)号：US20100233637A1
公开(公告)日：2010-09-16
申请号：US12718104
申请日：2010-03-05
申请人： Hiroshi ARIMA , Yuichi Yoshida , Taro Yamamoto , Kousuke Yoshihara
发明人： Hiroshi ARIMA , Yuichi Yoshida , Taro Yamamoto , Kousuke Yoshihara
IPC分类号： G03F7/20 , G03B27/52 , G06F17/00
CPC分类号： G03F7/3021 , H01L21/6715
摘要： A developing apparatus including a substrate holder that holds a substrate horizontally; means for atomizing a surface treatment liquid used to improve wettability of the substrate with a developer; a first spray nozzle that sprays the atomized surface treatment liquid onto the substrate; and a developer supply nozzle that supplies a developer onto the substrate to which the substrate treatment liquid has been sprayed. The surface tension of the atomized surface treatment liquid with respect to the substrate is lower than the surface tension of the surface treatment liquid with respect to the substrate. The atomization suppresses the fact that the surface treatment liquid gathers on a certain portion of the surface of the substrate. The surface treatment liquid can be easily supplied onto the entire surface of the substrate, and improve wettability of the substrate with the developer.
摘要翻译：一种显影装置，包括：水平保持基板的基板支架; 用于使用显影剂使用于改善基材的润湿性的表面处理液体雾化的装置; 将雾化的表面处理液体喷射到基板上的第一喷嘴; 以及将显影剂供给到已经喷射了基板处理液的基板上的显影剂供给喷嘴。雾化表面处理液相对于基材的表面张力低于表面处理液相对于基材的表面张力。雾化抑制了表面处理液体聚集在基材表面的某一部分上的事实。可以容易地将表面处理液体提供到基板的整个表面上，并且改善基板与显影剂的润湿性。

40. 发明申请

US20080142043A1 COATING FILM PROCESSING METHOD AND APPARATUS 有权
标题翻译：涂膜处理方法和装置
公开(公告)号：US20080142043A1
公开(公告)日：2008-06-19
申请号：US11950122
申请日：2007-12-04
申请人： Taro YAMAMOTO , Kousuke Yoshihara
发明人： Taro YAMAMOTO , Kousuke Yoshihara
IPC分类号： B08B7/04
CPC分类号： H01L21/6715 , G03F7/70341 , H01L21/67051
摘要： A coating film processing method is used for processing a coating film formed on a surface of a substrate to prepare for an immersion light exposure process arranged to perform light exposure through a liquid. The method includes supplying a solvent-containing liquid comprising a combination of a solvent and a solvent-ability decreasing agent for decreasing solvent ability, or a diluted solvent, onto an edge portion of the coating film, thereby performing edge portion cutting; and supplying a cleaning liquid onto the edge portion of the coating film, thereby performing edge portion cleaning, subsequently to the edge portion cutting.
摘要翻译：使用涂膜处理方法来处理形成在基板的表面上的涂膜，以准备用于通过液体进行曝光的浸没曝光处理。该方法包括将包含溶剂和溶剂能力降低剂的组合的含溶剂的液体或稀释溶剂供给到涂膜的边缘部分上，从而进行边缘部分切割; 并将清洗液供给到涂膜的边缘部分上，从而进行边缘部分的清洁。

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