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31. 发明授权

US07817261B2 Method of apparatus for detecting particles on a specimen 有权
标题翻译：用于检测样品上的颗粒的装置的方法
公开(公告)号：US07817261B2
公开(公告)日：2010-10-19
申请号：US12114139
申请日：2008-05-02
申请人： Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
发明人： Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
IPC分类号： G01N21/00
CPC分类号： G01N21/956
摘要： A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.
摘要翻译：通过检查其中形成有多个图案的样本的表面的样本来检测缺陷的方法和装置，通过从仰角不同的多个方向之一的细长形状的光束照射，根据要检测的缺陷的种类从照明光源发射的光束。通过用安装在不同仰角方向上的多个图像传感器捕获由细长形状光束照射的样本的多个光学图像，通过根据在照射细长的照射区域中在样品上形成的图案的密度来改变放大倍率形状光通量。通过处理由多个图像传感器捕获的图像来检测样本上的缺陷。

32. 发明申请

US20100103409A1 METHOD AND APPARATUS FOR DETECTING DEFECTS 审中-公开
标题翻译：检测缺陷的方法和装置
公开(公告)号：US20100103409A1
公开(公告)日：2010-04-29
申请号：US12652452
申请日：2010-01-05
申请人： Yoshimasa OHSHIMA , Minori Noguchi , Hiroyuki Nakano
发明人： Yoshimasa OHSHIMA , Minori Noguchi , Hiroyuki Nakano
IPC分类号： G01N21/88
CPC分类号： G01N21/9505 , G01N21/47 , G01N21/94 , G01N21/9501
摘要： An inspection apparatus projects a laser beam on the surface of a SOI wafer and detects foreign matter on and defects in the surface of the SOI wafer by receiving scattered light reflected from the surface of the SOI wafer. The wavelength of the laser beam used by the inspection apparatus is determined so that a penetration depth of the laser beam in a Si thin film may be 10 nm or below to detect only foreign matter on and defects in the outermost surface and not to detect foreign matter and defects in a BOX layer. Only the foreign matter on and defects in the outermost surface layer can be detected without being influenced by thin-film interference by projecting the laser beam on the surface of the SOI wafer and receiving scattered light rays.
摘要翻译：检查装置将激光束投射在SOI晶片的表面上，通过接收从SOI晶片的表面反射的散射光来检测SOI晶片的异物和表面的缺陷。确定检查装置使用的激光束的波长，使得Si薄膜中的激光束的穿透深度可以为10nm以下，仅检测异物和最外表面的缺陷，并且不检测外部 BOX层的物质和缺陷。只有通过将激光束投射在SOI晶片的表面上并且接收散射光线，才能够检测出最外层的异物和缺陷，而不受薄膜干涉的影响。

33. 发明申请

US20090257647A1 Method and Apparatus for Inspecting Defects 有权
标题翻译：检查缺陷的方法和装置
公开(公告)号：US20090257647A1
公开(公告)日：2009-10-15
申请号：US12420932
申请日：2009-04-09
申请人： Yasuhiro Yoshitake , Hiroyuki Nakano , Yukihiro Shibata
发明人： Yasuhiro Yoshitake , Hiroyuki Nakano , Yukihiro Shibata
IPC分类号： G06K9/00 , H04N5/335
CPC分类号： G06K9/00 , G01N21/9501 , G06T7/0004 , G06T2207/30148 , H04N5/341 , H04N5/3743 , H04N5/378
摘要： A two-dimensional sensor is installed inclining at a predetermined angle to a moving direction of a stage on which an object to be inspected is mounted and, in synchronism with the movement of the stage, a picked up image is rearranged so that there can be obtained an image in high-density sampling with a picture-element size or less of the two-dimensional sensor with respect to a wafer. Thus, interpolation calculation during position alignment becomes unnecessary, and size calculation and classification of a defect can be performed with high accuracy.
摘要翻译：将二维传感器安装成倾斜预定角度，使其与安装被检查物体的平台的移动方向倾斜，并且与舞台的移动同步，拾取图像被重新排列，使得可以以相对于晶片的二维传感器的像素大小或更小的高密度采样获得图像。因此，位置对准中的插补计算变得不必要，可以高精度地执行缺陷的尺寸计算和分类。

34. 发明授权

US07528942B2 Method and apparatus for detecting defects 失效
标题翻译：检测缺陷的方法和装置
公开(公告)号：US07528942B2
公开(公告)日：2009-05-05
申请号：US11472426
申请日：2006-06-22
申请人： Hiroyuki Nakano , Toshihiko Nakata , Sachio Uto , Akira Hamamatsu , Shunji Maeda , Yuta Urano
发明人： Hiroyuki Nakano , Toshihiko Nakata , Sachio Uto , Akira Hamamatsu , Shunji Maeda , Yuta Urano
IPC分类号： G01N21/88
CPC分类号： G01N21/956 , G01N21/47 , G01N21/94 , G01N21/9501 , G01N2021/8822
摘要： A method and apparatus for detecting defects are provided for detecting harmful defects or foreign matter with high sensitivity on an object to be inspected with a transparent film, such as an oxide film, by reducing noise due to a circuit pattern. The apparatus for detecting defects includes a stage part on which a substrate specimen is put and which is arbitrarily movable in each of the X-Y-Z-θ directions, an illumination system for irradiating the circuit pattern with light from an inclined direction, and an image-forming optical system for forming an image of an irradiated detection area on a detector from the upward and oblique directions. With this arrangement, diffracted light and scattered light caused on the circuit pattern through the illumination by the illumination system is collected. Furthermore, a spatial filter is provided on a Fourier transform surface for blocking the diffracted light from a linear part of the circuit pattern. The scattered and reflected light received by the detector from the specimen is converted into an electrical signal. The converted electrical signal of one chip is compared with that of the other adjacent chip. If these signals are not identical to each other, the foreign matter is determined to exist on the specimen in detection.
摘要翻译：提供一种用于检测缺陷的方法和装置，用于通过减少由于电路图案引起的噪声来检测对诸如氧化物膜的透明膜在内的待检查物体的高灵敏度的有害缺陷或异物。用于检测缺陷的装置包括：载置基板试样的载台部分，其可以在XYZ-θ方向中任意移动;照射系统，用于利用来自倾斜方向的光照射电路图案;以及图像形成光学系统，用于从上下方向在检测器上形成照射的检测区域的图像。利用这种布置，收集通过照明系统的照明在电路图案上产生的衍射光和散射光。此外，在傅立叶变换表面上提供空间滤波器，用于阻挡来自电路图形的线性部分的衍射光。由检测器从样本接收的散射和反射光被转换成电信号。将一个芯片的转换电信号与另一个芯片的转换电信号进行比较。如果这些信号彼此不相同，则检测到异物被确定为存在于样品上。

35. 发明授权

US07526200B2 Wavelength-division multiplexing optical transmitter 失效
标题翻译：波分复用光发射机
公开(公告)号：US07526200B2
公开(公告)日：2009-04-28
申请号：US11212576
申请日：2005-08-29
申请人： Hiroyuki Nakano , Yasuyuki Fukashiro
发明人： Hiroyuki Nakano , Yasuyuki Fukashiro
IPC分类号： H04B10/08
CPC分类号： H04B10/506 , H04J14/021 , H04J14/0221
摘要： An optical transmission apparatus includes optical transmitters for transmitting optical signals and first monitor units for monitoring optical signals from the optical transmitters. A multiplexer is provided for multiplexing the optical signals from the optical transmitters into a multiplexed signal. A second monitor unit is provided for monitoring each optical signal which is multiplexed in the multiplexed signal from the multiplexer. A processing unit is provided for comparing a first number of optical signals detected by the first monitor units and a second number of optical signals detected by the second monitor unit.
摘要翻译：光传输装置包括用于发送光信号的光发射机和用于监测来自光发射机的光信号的第一监视单元。提供多路复用器用于将来自光发射机的光信号复用成多路复用信号。提供了第二监视器单元，用于监视从复用器复用的复用信号中复用的每个光信号。提供处理单元，用于比较由第一监视单元检测到的第一数量的光信号和由第二监视单元检测的第二数量的光信号。

36. 发明申请

US20080310855A1 Optical Transmission Equipment and Method for Controlling Thereof 失效
标题翻译：光传输设备及其控制方法
公开(公告)号：US20080310855A1
公开(公告)日：2008-12-18
申请号：US12136155
申请日：2008-06-10
申请人： Kenichi Ogawa , Kazuhiro Watanabe , Hiroyuki Nakano
发明人： Kenichi Ogawa , Kazuhiro Watanabe , Hiroyuki Nakano
IPC分类号： H04B10/12
CPC分类号： H04B10/25133 , H04B2210/252
摘要： The optical transmission equipment includes: a demultiplexer for demultiplexing a transmitted wavelength-multiplexed optical signal to first and second optical signals; a first variable dispersion compensation unit; a second variable dispersion compensation unit; a first error detector; a second error detector; and a dispersion compensation control unit for controlling dispersion compensation amounts of the first and second variable dispersion compensation units based on the detection result of the first or second error detector. Upon detection of a signal error in the first optical signal, the first variable dispersion compensation unit is controlled to change from a first compensation amount to a third compensation amount, and the second variable dispersion compensation unit is controlled to change from a second compensation amount to a fourth compensation amount.
摘要翻译：光传输设备包括：解复用器，用于将传输的波分复用光信号解复用到第一和第二光信号; 第一可变色散补偿单元; 第二可变色散补偿单元; 第一个误差检测器; 第二误差检测器; 以及色散补偿控制单元，用于基于第一或第二误差检测器的检测结果来控制第一和第二可变色散补偿单元的色散补偿量。在检测到第一光信号中的信号误差时，控制第一可变色散补偿单元从第一补偿量变为第三补偿量，并且控制第二可变色散补偿单元从第二补偿量变为第四补偿金额。

37. 发明授权

US07463829B2 Optical transmission apparatus and control method therefor 失效
标题翻译：光传输装置及其控制方法
公开(公告)号：US07463829B2
公开(公告)日：2008-12-09
申请号：US11019736
申请日：2004-12-23
申请人： Tetsuya Uda , Kenta Noda , Yasuhiro Uchiyama , Hiroshi Masuda , Hiroyuki Nakano
发明人： Tetsuya Uda , Kenta Noda , Yasuhiro Uchiyama , Hiroshi Masuda , Hiroyuki Nakano
IPC分类号： H04J14/02 , H04B10/16
CPC分类号： H04B10/00
摘要： An optical transmission apparatus comprising a first detector for detecting the power of the supervisory signal light separated from received wavelength-division multiplexed signal lights; a second detector for detecting the power of the wavelength-division multiplexed signal lights after the separation of the supervisory signal light; a gain-controlled type optical amplifier for amplifying the wavelength-division multiplexed signal lights; an optical attenuator coupled to the amplifier; and a control unit for controlling the optical amplifier and the optical attenuator so as to keep the output level of the wavelength-division multiplexed signal lights to a predetermined target value, wherein the control unit restrains automatic output level control by the optical attenuator when the supervisory signal light power fluctuates within its permissible range and fluctuations in the signal light power have deviated from its permissible range.
摘要翻译：一种光传输装置，包括：第一检测器，用于检测从接收的波分复用信号光分离的监控信号光的功率; 第二检测器，用于在分离监控信号光之后检测波分复用信号光的功率; 用于放大波分复用信号光的增益控制型光放大器; 耦合到所述放大器的光衰减器; 以及控制单元，用于控制光放大器和光衰减器，以便将波分复用信号光的输出电平保持在预定目标值，其中当监视器控制单元抑制光衰减器的自动输出电平控制信号光功率在允许范围内波动，信号光功率的波动偏离其允许范围。

38. 发明申请

US20080204724A1 Method Of Apparatus For Detecting Particles On A Specimen 有权
标题翻译：检测样品中颗粒物的方法
公开(公告)号：US20080204724A1
公开(公告)日：2008-08-28
申请号：US12114139
申请日：2008-05-02
申请人： Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
发明人： Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
IPC分类号： G01N21/00
CPC分类号： G01N21/956
摘要： A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.
摘要翻译：通过检查其中形成有多个图案的样本的表面的样本来检测缺陷的方法和装置，通过从仰角不同的多个方向之一的细长形状的光束照射，根据要检测的缺陷的种类从照明光源发射的光束。通过用安装在不同仰角方向上的多个图像传感器捕获由细长形状光束照射的样本的多个光学图像，通过根据在照射细长的照射区域中在样品上形成的图案的密度来改变放大倍率形状光通量。通过处理由多个图像传感器捕获的图像来检测样本上的缺陷。

39. 发明授权

US07292785B2 Optical transmission system constructing method and system 失效
公开(公告)号：US07292785B2
公开(公告)日：2007-11-06
申请号：US11593518
申请日：2006-11-07
申请人： Keiji Tomooka , Naohiro Sakakida , Shin Nishimura , Yoshihiro Ashi , Hironari Matsuda , Satoshi Aoki , Yukio Nakano , Masahiro Takatori , Toru Kazawa , Shinya Sasaki , Ryoji Takeyari , Hiroyuki Nakano
发明人： Keiji Tomooka , Naohiro Sakakida , Shin Nishimura , Yoshihiro Ashi , Hironari Matsuda , Satoshi Aoki , Yukio Nakano , Masahiro Takatori , Toru Kazawa , Shinya Sasaki , Ryoji Takeyari , Hiroyuki Nakano
IPC分类号： H04B10/20
CPC分类号： H04B10/275 , H04B10/077 , H04B10/0773 , H04B10/25137 , H04B10/27 , H04J14/0221 , H04J14/0227 , H04J14/0279 , H04J14/0283 , H04J14/0286
摘要： An optical transmission system accomplishes optical transmission over a long distance by combining a multiplexing line terminal with optical amplifiers, linear repeaters, and regenerators with optical amplifiers combined together. The system also accomplishes the optical transmission over a short distance by directly connecting the linear terminals therebetween, with an electric-to-optic converter replaced by an electric-to-optic converter having a semiconductor amplifier, with an optic-toelectric converter by an optic-to-electric converter having an avalanche photodiode as light receiver, and with no use of any optical booster amplifier and optical preamplifier in multiplexing line terminal. With these, the optical transmission system can be easily constructed depending on the transmission distance required.

40. 发明申请

US20070223926A1 Dispersion compensation device and dispersion compensation method 失效
标题翻译：色散补偿装置和色散补偿方法
公开(公告)号：US20070223926A1
公开(公告)日：2007-09-27
申请号：US11798645
申请日：2007-05-15
申请人： Yasuyuki Fukashiro , Hiroyuki Nakano , Tetsuya Uda , Tooru Hirai
发明人： Yasuyuki Fukashiro , Hiroyuki Nakano , Tetsuya Uda , Tooru Hirai
IPC分类号： H04J14/02
CPC分类号： H04B10/2525
摘要： A dispersion compensating fiber whose chromatic dispersion is positive and a negative dispersion compensating fiber whose chromatic dispersion is negative are prepared, and division-multiplexed optical signals, after being guided to either dispersion compensating fiber to once shift the whole wavelength band to positivity or negativity, are subjected to fine adjustment with a dispersion compensating fiber of a reverse sign.
摘要翻译：准备色散为正的色散补偿光纤和色散为负的负色散补偿光纤，并且在被分配复用光信号被引导到任一色散补偿光纤之后，将整个波长带一次移动到积极性或消极性，用相反符号的色散补偿光纤进行微调。

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