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    • 32. 发明申请
    • MEMS device and manufacturing process thereof
    • MEMS器件及其制造工艺
    • US20070190680A1
    • 2007-08-16
    • US11650430
    • 2007-01-08
    • Hiroshi FukudaJeong Hee Won
    • Hiroshi FukudaJeong Hee Won
    • H01L21/00
    • B81C1/0023B81B3/0072B81C2203/0136
    • MEMS devices require special cavity formation and sealing steps such as wafer bonding which reduce the yield and increase the cost. In addition, it is difficult to form a cavity of a large area by the LSI process owing to a residual stress of a sealing film which will be a lid. This leads to a difficulty of realizing an integrated MEMS having a MEMS and a high-performance LSI mounted on one substrate. The lid (or diaphragm) covering therewith a cavity is equipped with slits or beams. During the formation of the cavity, the slits are deformed to absorb and relax the internal stress of the thin sealing film. Then, the cavity is sealed by filling the open portions of the film overlying the cavity between the inside and outside of the cavity. The cavity is formed by removing a portion of the interlayer film of LSI multilevel interconnects and the lid is made of a LSI-process thin film.
    • MEMS器件需要特殊的空腔形成和密封步骤,例如晶片接合,这降低了产量并增加了成本。 此外,由于作为盖子的密封膜的残留应力,难以通过LSI工艺形成大面积的空腔。 这导致难以实现具有安装在一个基板上的MEMS和高性能LSI的集成MEMS。 用空腔覆盖的盖子(或隔膜)配有狭缝或横梁。 在空腔形成期间,狭缝变形以吸收和松弛薄密封膜的内应力。 然后,通过在空腔的内部和外部之间填充覆盖空腔的膜的开口部分来密封空腔。 通过去除LSI多层互连的中间膜的一部分形成空腔,盖由LSI工艺薄膜制成。
    • 33. 发明申请
    • Disk array apparatus
    • 磁盘阵列设备
    • US20070109744A1
    • 2007-05-17
    • US11345545
    • 2006-02-02
    • Hitoshi MatsushimaHiroshi Fukuda
    • Hitoshi MatsushimaHiroshi Fukuda
    • H05K7/20
    • H05K7/20836G11B33/12
    • A disk array apparatus comprises a casing, a disk drive group configured by a plurality of disk drives, a controller unit configured by a plurality of circuit substrates, a plurality of cooling fans, and backflow prevention members. The plurality of cooling fans is provided so as to be aligned between the disk drive group and the controller unit in the casing. The backflow prevention members are provided so as to protrude on the side of the disk drive group or on the side of the controller unit from between the cooling fans while extending to define a space on the inlet side or the outlet side of the cooling fans
    • 磁盘阵列装置包括壳体,由多个磁盘驱动器构成的磁盘驱动器组,由多个电路基板构成的控制单元,多个冷却风扇和防回流部件。 多个冷却风扇被设置为在盘驱动组和壳体中的控制器单元之间对准。 防回流构件设置成在冷却风扇之间从盘驱动组侧面或控制器单元侧突出,同时延伸以限定冷却风扇的入口侧或出口侧的空间
    • 34. 发明申请
    • Sensor and sensor module
    • 传感器和传感器模块
    • US20070068266A1
    • 2007-03-29
    • US11492961
    • 2006-07-26
    • Tsukasa FujimoriNatsuki YokoyamaHiroshi FukudaYuko HanaokaTakashi Azuma
    • Tsukasa FujimoriNatsuki YokoyamaHiroshi FukudaYuko HanaokaTakashi Azuma
    • G01L9/12
    • G01L9/0073B60C23/0408G01D5/2417G01L9/12G01L27/007
    • A sensor and sensor module with small power consumption and high reliability are disclosed. The sensor includes a capacitor having a capacitance varying with a physical quantity, a capacitance-voltage conversion circuit for converting the capacitance of the capacitor into a voltage, and a control signal generation circuit for generating a plurality of control signals. The capacitor has a frequency-capacitance characteristic with a resonant frequency. In a measurement of the physical quantity, the capacitance of the capacitor is measured with one of the control signals having a first frequency which is much higher or much lower than the resonant frequency. In a self-diagnosis of the sensor, the capacitance of the capacitor is measured with another one of the control signals having a second frequency which is equal or close to the resonant frequency.
    • 公开了具有小功耗和高可靠性的传感器和传感器模块。 传感器包括具有物理量变化的电容的电容器,用于将电容器的电容转换为电压的电容 - 电压转换电路,以及用于产生多个控制信号的控制信号产生电路。 电容器具有谐振频率的频率 - 电容特性。 在物理量的测量中,电容器的电容被测量,其中一个控制信号具有比谐振频率高得多或低得多的第一频率。 在传感器的自诊断中,电容器的电容用另一个控制信号测量,其中第二频率等于或接近谐振频率。
    • 38. 发明申请
    • Sound-electricity conversion device, array-type ultrasonic transducer, and ultrasonic diagnostic apparatus
    • 声电转换装置,阵列式超声波换能器和超声波诊断装置
    • US20060284519A1
    • 2006-12-21
    • US11341655
    • 2006-01-30
    • Shinichiro UmemuraTakashi AzumaTatsuya NagataHiroshi FukudaToshiyuki MineSyuntaro Machida
    • Shinichiro UmemuraTakashi AzumaTatsuya NagataHiroshi FukudaToshiyuki MineSyuntaro Machida
    • H01L41/00
    • B06B1/0292
    • The present invention aims to stabilize sound-electricity conversion characteristics of a diaphragm-type sound-electricity conversion device as well as to decrease the noise level of an ultrasonic diagnostic apparatus using the sound-electricity conversion device. The sound-electricity conversion device is configured by a capacitor cell including a lower electrode formed on a silicon substrate and an upper electrode over the lower electrode, the lower and upper electrodes sandwiching a cavity. An electrode short-circuit prevention film is formed on the upper electrode on the cavity side. The electrode short-circuit prevention film is formed of a material with an electrical time constant shorter than 1 second and longer than 10 microseconds, such as silicon nitride containing a stoichiometrically excessive amount of silicon. As a result, the electrode short-circuit prevention film has small electric conductivity, and thus it is made possible to prevent the film from being charged with electric charge and to avoid the drift of the electric charge. Consequently, the sound-electricity conversion characteristics of the sound-electricity conversion device stabilize, and further the sound noise level of the ultrasonic diagnostic apparatus decreases.
    • 本发明旨在稳定隔膜式声电转换装置的声电转换特性,并且降低使用声电转换装置的超声波诊断装置的噪声水平。 声电转换装置由包括形成在硅基板上的下电极和下电极上的上电极的电容器单元构成,下电极和上电极夹着空腔。 在空腔侧的上部电极上形成电极短路防止膜。 电极短路防止膜由电气时间常数短于1秒且长于10微秒的材料形成,例如含有化学计量过量的硅的氮化硅。 结果,电极短路防止膜具有小的导电性,因此可以防止膜被充电并避免电荷的漂移。 因此,声电转换装置的声电转换特性稳定,超声波诊断装置的声音噪声水平进一步降低。