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    • 31. 发明授权
    • Substrate treatment method
    • 底物处理方法
    • US08110325B2
    • 2012-02-07
    • US13022811
    • 2011-02-08
    • Takafumi NiwaHiroshi NakamuraHideharu Kyouda
    • Takafumi NiwaHiroshi NakamuraHideharu Kyouda
    • G03F9/00G03C5/00
    • H01L21/0273G03F7/0035H01L21/67178H01L22/12H01L22/20H01L2924/0002H01L2924/00
    • A substrate treatment method including a first treatment process (S13 to S16) for exposing, heating, and developing a substrate on which a first resist is formed, thereby forming a first resist pattern, and a second treatment process (S17 to S20) for forming a second resist film on the substrate on which the first resist pattern is formed, exposing, heating, and developing the substrate on which the second resist film is formed, thereby forming a second resist pattern. Also, the substrate treatment method compensates a first treatment condition in a first treatment process (S22 to S25) based on a measured value of a line width of the second resist pattern and a second treatment condition in a second treatment process (S26 to S29) based on a measured value of a line width of the first resist pattern.
    • 一种基板处理方法,包括:第一处理工艺(S13至S16),用于对形成第一抗蚀剂的基板进行曝光,加热和显影,从而形成第一抗蚀剂图案;以及第二处理工艺(S17至S20),用于形成 在其上形成第一抗蚀剂图案的基板上的第二抗蚀剂膜,暴露,加热和显影其上形成有第二抗蚀剂膜的基板,从而形成第二抗蚀剂图案。 此外,基板处理方法在第二处理工序中基于第二抗蚀剂图案的线宽度的测量值和第二处理条件在第一处理工艺(S22至S25)中补偿第一处理条件(S26至S29) 基于第一抗蚀剂图案的线宽的测量值。
    • 34. 发明申请
    • LABEL AUTOMATIC APPLICATION DEVICE AND LABEL AUTOMATIC APPLICATION METHOD
    • 标签自动应用设备和标签自动应用方法
    • US20110284154A1
    • 2011-11-24
    • US13147410
    • 2010-03-01
    • Hiroshi Nakamura
    • Hiroshi Nakamura
    • B32B38/10B32B41/00B32B37/02
    • B65C9/18B65C2009/1888
    • The present invention is to provide a label automatic application device and a label automatic application method capable of easily removing a large number of single labels one by one from a label band body formed by coupling the single labels while displacing and overlapping the labels with each other in the longitudinal direction, so as to automatically apply a large amount of labels to application bodies per unit time.A label band body 8 formed by displacing a little and overlapping many single labels with each other is attached to a label transfer belt conveyor 32. The label transfer belt conveyor 32 to which the label band body 8 is attached and a product transfer belt conveyor 52 for moving application bodies 54 are arranged so that the forward directions thereof are the opposite directions to each other. The air is jetted by an air jet means 38 to a surface onto which a bonding means 5 is coated in a front end 1y of a lead label 1a of the label band body 8. The surface onto which the bonding means 5 is coated in the front end 1y of the lead label 1a is warped in the inversion direction and rolled up outward, so that the application body 54 easily comes into contact with the bonding means 5 of the front end 1y.
    • 本发明提供一种标签自动应用装置和标签自动应用方法,其能够从通过连接单个标签形成的标签带体逐个地移除大量单个标签,同时使标签彼此移位和重叠 在纵向方向上,以便每单位时间自动地向应用体施加大量的标签。 标签转印带式输送机32附着标签带主体8的标签转印带式输送机32和产品转印带式输送机52 用于移动的施加体54被布置成使得其向前方向彼此相反。 空气由空气喷射装置38喷射到在标签带体8的引线标签1a的前端1y中涂覆有粘合装置5的表面。粘合装置5的表面被涂覆在 引线标签1a的前端1y在反转方向上翘曲并向外卷起,使得施加体54容易与前端1y的接合装置5接触。
    • 37. 发明授权
    • Character string recognition method and device
    • 字符串识别方法和装置
    • US07949187B2
    • 2011-05-24
    • US11693139
    • 2007-03-29
    • Hiroshi Nakamura
    • Hiroshi Nakamura
    • G06K9/34G06K9/38G06K9/18G06K9/00G06K15/02H04N1/40
    • G06K9/3283G06K2209/01
    • A character string recognition method for recognizing a character string may include a first step in which a first projection data of image data are calculated in a direction of the character string and a second step in which a position of the character string is detected on the basis of the first projection data. In the first step, the image data are divided into a plurality of segments in the direction of the character string and projection in the segment is calculated. The method may further include a third step in which a second projection data in the segment are calculated on the basis of the position of the character string and a fourth step in which a position where the second projection data exceeds a threshold value is detected as a boundary position of a character, and the threshold value may be changed according to pixel number between both ends of the character string.
    • 用于识别字符串的字符串识别方法可以包括:第一步骤,其中在字符串的方向上计算图像数据的第一投影数据;以及第二步骤,其中基于字符串的位置检测字符串 的第一投影数据。 在第一步骤中,将图像数据沿字符串的方向划分成多个段,并计算段中的投影。 该方法还可以包括第三步骤,其中基于字符串的位置来计算段中的第二投影数据,并且第四步骤,其中第二投影数据超过阈值的位置被检测为 字符的边界位置和阈值可以根据字符串的两端之间的像素数进行改变。
    • 40. 发明授权
    • Substrate processing apparatus
    • 基板加工装置
    • US07854821B2
    • 2010-12-21
    • US11445385
    • 2006-06-02
    • Hiroshi NakamuraSeiichi Kaise
    • Hiroshi NakamuraSeiichi Kaise
    • H01L21/00
    • H01L21/67109H01J37/32082H01J2237/2001H01L21/67253H01L21/67276H01L21/67742Y10T279/23
    • A substrate processing apparatus includes a heat transfer gas supply mechanism to supply a heat transfer gas through a supply passage into a portion between a worktable and a substrate to improve thermal conductivity between therebetween. Under the control of a control section, the pressure inside the supply passage is measured to obtain a pressure measurement value while the substrate is placed on the worktable. Then, a preparatory flow rate of the heat transfer gas to be supplied through the supply passage into the portion between the worktable and substrate is determined, in accordance with the pressure difference between the pressure measurement value and a pressure reference value, prior to a main process to be performed on the substrate. Then, the heat transfer gas is supplied through the supply passage into the portion between the worktable and substrate at the preparatory flow rate, prior to the main process.
    • 基板处理装置包括:传热气体供给机构,用于将传热气体通过供给通道供应到工作台和基板之间的部分,以提高它们之间的导热性。 在控制部分的控制下,测量供给通道内的压力,以便在将基板放置在工作台上时获得压力测量值。 然后,根据压力测量值和压力基准值之间的压力差,在主体之间确定通过供给通道供给到工作台和基板之间的部分的传热气体的预备流量 在基板上进行的处理。 然后,在主工序之前,传热气体以预备流量通过供给通道供给到工作台和基板之间的部分。