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    • 35. 发明授权
    • Formation of magnesium vapor with high evaporation speed
    • 高蒸发速度的镁蒸气的形成
    • US5705226A
    • 1998-01-06
    • US622822
    • 1996-03-27
    • Yasushi FukuiTadaaki MionoMinoru Saito
    • Yasushi FukuiTadaaki MionoMinoru Saito
    • C23C14/14C23C14/16C23C14/24C23C16/06
    • C23C14/243C23C14/16
    • A Mg source 3 is received in a vessel 1 having an opening 8, and the vessel 1 is heated at 670.degree. C. or higher to effuse Mg vapor through the opening 8. Since the vessel 1 is filled with Mg vapor, Mg is evaporated from molten state under stable condition without fluctuations in evaporation speed. The Mg vapor is effectively consumed for vapor deposition. A reflector plate may be provided at the outlet of the opening 8, or a duct for introducing Mg vapor from the vessel to the surface of a substrate sheet may be provided. In order to evaporate Mg from stabilized molten state, operational conditions are preferably determined so as to satisfy the relationships of W.sub.1 /W.sub.2
    • 将Mg源3接收在具有开口8的容器1中,并且将容器1加热至670℃以上以通过开口8喷射Mg蒸汽。由于容器1填充有Mg蒸气,所以Mg蒸发 从稳定状态下的熔融状态,蒸发速度不变。 Mg蒸汽被有效地用于气相沉积。 可以在开口8的出口处设置反射板,或者可以提供用于将Mg蒸汽从容器引入到基板的表面的管道。 为了从稳定的熔融状态蒸发Mg,优选确定操作条件以满足W1 / W2 <0.6x(PMg / V3)和W1 / W2 <0.04xPMg的关系,其中W1表示 开口8,W2表示Mg源3的蒸发面积(mm2),PMg表示Mg蒸气压(乇),V表示真空度。