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    • 35. 发明专利
    • SUPERCONDUCTING TRANSFORMER
    • JPH0427107A
    • 1992-01-30
    • JP13133190
    • 1990-05-23
    • TOSHIBA CORP
    • HAMASHIMA KOTARO
    • H01F36/00
    • PURPOSE:To achieve recovery to superconduction promptly even when short-circuiting is canceled and prevent a steady heat from entering easily by using a commercial frequency and by connecting a thermal type permanent current switch in series with a main coil winding in a four coil winding structure which is equipped with the primary and secondary main coil windings and primary and secondary auxiliary coil windings which are connected in parallel with them. CONSTITUTION:A main coil winding 1 on a primary side and a main coil winding 2 on a secondary side are wound on a core 3. Thermal type permanent current switches 41 and 42 are connected in series with the main coil winding. Also, Auxiliary coil windings 11 and 21 whose leakage reactance is increased are connected in parallel with the main coil winding and the thermal type permanent current switch. These coil windings and thermal type permanent current switches are placed within a cryostat 5 and are cooled to a liquid helium temperature. When a large amount of current flows, the thermal type permanent current switches 41 and 42 are turned off for high-resistance state at the same time when quench of the main coil winding occurs. After short-circuiting is canceled, current flowing to the main coil winding is further reduced and superconductive state is recovered. The permanent current switch is recovered to be on and current flowing to the auxiliary coil winding is shifted to the main coil winding for returning to the initial steady state.
    • 36. 发明专利
    • SUPERCONDUCTOR
    • JPH03150806A
    • 1991-06-27
    • JP28874989
    • 1989-11-08
    • TOSHIBA CORP
    • HAMASHIMA KOTARO
    • H01F6/06
    • PURPOSE:To provide a superconductor with less degradation due to strain, with good superconducting characteristics, and with good cryogenic stability in high flux density by arranging superconducting monolithic wire and stabilizer symmetrically with respect to a neutral axis. CONSTITUTION:Superconducting monolithic wire 1 is composed of thin superconducting conductors of NbTi or Nb3Sn. The monolithic wire and a stabilizer 2 of 99.99% or purer aluminum are set in two-piece copper housing 3 made of oxygen free copper. The conductors are arranged symmetrically with respect to a neutral axis and joined by soldering to form a superconductor. Since the bending strain caused by winding the conductor is substantially equal on both sides of the superconductor 1, a minimized strain is suffered, thereby minimizing the degradation of superconducting characteristics due to the strain. It is possible to provide a superconductor which has good cryogenic stability and good superconducting characteristics.
    • 37. 发明专利
    • NUCLEAR FUSION REACTION DEVICE
    • JPH01138492A
    • 1989-05-31
    • JP29511687
    • 1987-11-25
    • TOSHIBA CORP
    • HAMASHIMA KOTARO
    • G21B1/11G21B1/00G21B1/17
    • PURPOSE:To suppress an unstable mode wherein a growing speed is slow by a simple device by forming a shell for plasma stabilization of a material containing an oxide superconductor around a high-temperature plasma generated by the title nuclear fusion reaction device. CONSTITUTION:Plasma 1 is generated by a poloidal coil and confined to the magnetic field of a toroidal coil. The shell 2 containing the oxide superconductor is arranged at the periphery of the plasma 1. This superconductor is made of stainless steel, copper, etc. Consequently, the shell 2 traps magnetic flux between the plasma 1 and shell 2 and even if the plasma 1 deforms owing to some disturbance, the magnetic pressure at the part rises to restore the plasma 1 to its original shape. The oxide superconductor is effective when the growing speed of the deformation of the plasma is slow because of the magnetic field can not be diffused therein because of Meissner effect.
    • 38. 发明专利
    • PLASMA ETCHING APPARATUS
    • JPH01123421A
    • 1989-05-16
    • JP28100287
    • 1987-11-09
    • TOSHIBA CORP
    • FUJIWARA NAOYOSHIHAMASHIMA KOTAROHIKICHI TAKASHI
    • H01L21/302H01L21/3065
    • PURPOSE:To perform high speed etching characterized by less damages to a pattern on a wafer, by attaching a diamagnetic material to a wafer stage, and enhancing a magnetic field required for ECR discharge by the magnetic shield effect of the diamagnetic material. CONSTITUTION:A diamagnetic material 13 comprising a ceramic based or oxide based high temperature superconductor and the like is attached in a wafer stage 5. A magnetic field coil 14 generates a magnetic field for ECR discharge. At the same time, generated magnetic lines of force are going to pass through the wafer stage 5. The magnetic lines of force M are extremely diverged on the wafer stage 5 by the diamagnetic action of the diamagnetic material 3, which is provided in the wafer stage 5. Plasma is drifted by the magnetic field formed by the magnetic lines of force M and an electric field E, which is generated by conventional high frequency discharge. The plasma acts on a wafer 5 effectively. Thus, high speed etching characterized by less damages of the pattern on the wafer 5 can be performed.
    • 39. 发明专利
    • MEASURING WIRE FOR CRYOGENIC DEVICE
    • JPS6436003A
    • 1989-02-07
    • JP19035687
    • 1987-07-31
    • TOSHIBA CORP
    • HAMASHIMA KOTARO
    • H01F6/00G01K7/16G01L1/22G01R19/00G01R33/035H01L39/00
    • PURPOSE:To keep an evaporation quantity of a cooling medium with little latent heat such as liquid helium or the like at an extremely low value and to execute an accurate measuring operation by a method wherein an oxide superconducting conductor is connected to a measuring element set at an extremely low temperature and a wire of copper, Al or an alloy of these is connected to a region whose temperature is higher than a critical temperature of the oxide superconducting conductor. CONSTITUTION:Terminals of a measuring element 2 installed in an extremely low temperature region 1 are connected to oxide superconducting conductors 3. Wires of copper or Al or an alloy of these are connected to the oxide superconducting conductors 3 in a temperature region 4 of a cooling medium whose critical temperature is lower than that of the oxide superconducting conductors 3, whose latent heat is large, whose cost is low and which is not dangerous and in another region whose temperature is higher than that temperature. If the oxide superconducting conductors 3 are composed of a Y-Ba-Cu-O-based material, the temperature region 4 of the cooling medium can be set at a temperature of liquid nitrogen. By this setup, because the oxide superconducting conductors 3 display a superconducting state at a temperature of lower than their critical temperature, a large electric current which is lower than a critical current value can be supplied to the measuring element without generating the heat.