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31. 发明授权

US07176700B2 Moisture sensor device and self-diagnosing method therefor 有权
标题翻译：水分传感器装置及其自诊断方法
公开(公告)号：US07176700B2
公开(公告)日：2007-02-13
申请号：US11353065
申请日：2006-02-14
申请人： Toshikazu Itakura , Toshiki Isogai
发明人： Toshikazu Itakura , Toshiki Isogai
IPC分类号： G01R27/26 , G01N27/22
CPC分类号： G01N27/223
摘要： A moisture sensor device includes a sensor portion having a capacitance that is varied in accordance with surrounding humidity, a signal processor for processing a detection signal of the sensor portion and outputting the signal corresponding to the humidity, a heating portion for heating the sensor portion, and a controller for controlling heating of the heating portion so that the capacitance of the sensor portion is substantially equal to a value under predetermined humidity at least during a self-diagnosis period.
摘要翻译：一种湿度传感器装置包括具有根据周围湿度变化的电容的传感器部分，用于处理传感器部分的检测信号并输出对应于湿度的信号的信号处理器，用于加热传感器部分的加热部分，以及控制器，用于控制加热部分的加热，使得传感器部分的电容至少在自诊断周期期间基本上等于预定湿度下的值。

32. 发明授权

US07222531B2 Capacitive humidity sensor 有权
标题翻译：电容式湿度传感器
公开(公告)号：US07222531B2
公开(公告)日：2007-05-29
申请号：US11253703
申请日：2005-10-20
申请人： Toshiki Isogai , Toshikazu Itakura
发明人： Toshiki Isogai , Toshikazu Itakura
IPC分类号： G01N22/27
CPC分类号： G01N27/223
摘要： A capacitive humidity sensor for detecting a humidity change includes a first sensor element having a first capacitance, a second sensor element having a second capacitance and connected in series with the first sensor element, and a humidity sensitive layer having a dielectric constant, which changes in accordance with humidity. The first and the second capacitances change with respect to the humidity change at a different rate. The humidity is detected using the different capacitances of the first and the second sensor elements. The humidity sensitive layer is formed to each sensor element so that each sensor element can be effectively protected.
摘要翻译：用于检测湿度变化的电容式湿度传感器包括具有第一电容的第一传感器元件，具有第二电容并与第一传感器元件串联连接的第二传感器元件和具有介电常数的湿度敏感层，按照湿度。第一和第二电容以不同的速率相对于湿度变化而变化。使用第一和第二传感器元件的不同电容来检测湿度。对每个传感器元件形成湿度敏感层，从而可以有效地保护每个传感器元件。

33. 发明申请

US20060048572A1 Physical quantity sensor and method for manufacturing the same 有权
标题翻译：物理量传感器及其制造方法
公开(公告)号：US20060048572A1
公开(公告)日：2006-03-09
申请号：US11220543
申请日：2005-09-08
申请人： Toshiki Isogai , Masato Ishihara , Michitaka Hayashi , Toshikazu Itakura
发明人： Toshiki Isogai , Masato Ishihara , Michitaka Hayashi , Toshikazu Itakura
IPC分类号： G01N27/22 , H01L21/4763
CPC分类号： G01N27/223 , Y10T29/49007
摘要： A capacitance type humidity sensor includes: a detection substrate including a detection portion on a first side of the detection substrate; and a circuit board including a circuit portion. The detection portion detects humidity on the basis of capacitance change of the detection portion. The circuit portion processes the capacitance change as an electric signal. The detection substrate further includes a sensor pad on a second side of the detection substrate. The sensor pad is electrically connected to the detection portion through a conductor in a through hole of the detection substrate.
摘要翻译：电容式湿度传感器包括：检测基板，其包括在检测基板的第一侧上的检测部分; 以及包括电路部分的电路板。检测部根据检测部的电容变化来检测湿度。电路部分将电容变化作为电信号进行处理。检测基板还包括在检测基板的第二侧上的传感器焊盘。传感器垫通过检测基板的通孔中的导体与检测部电连接。

34. 发明授权

US06768291B2 Fluid flow sensor and method of fabricating the same 失效
标题翻译：流体流量传感器及其制造方法
公开(公告)号：US06768291B2
公开(公告)日：2004-07-27
申请号：US10107443
申请日：2002-03-28
申请人： Toshiki Isogai , Yasushi Kohno , Toshimasa Yamamoto , Hiroyuki Wado
发明人： Toshiki Isogai , Yasushi Kohno , Toshimasa Yamamoto , Hiroyuki Wado
IPC分类号： G01N2700
CPC分类号： G01F1/6845
摘要： In a sensor chip for a fluid flow sensor, a thin film portion is formed above a hollow cavity portion while leaving thin film layers formed on the surface of a substrate. A conductor is provided on the inner wall face of a through hole formed to penetrate the substrate to thereby electrically connect a detecting portion constituted by a conductor film in the thin film layers and a substrate conductor portion formed on the rear face side of the through hole. The surface of a circuit board is formed with a control circuit and a base conductor portion electrically connected to the control circuit. The sensor chip and the circuit board are layered and the substrate conductor portion and the base conductor portion are electrically connected.
摘要翻译：在用于流体流量传感器的传感器芯片中，在中空空腔部分的上方形成薄膜部分，同时留下形成在基板表面上的薄膜层。在形成为穿透基板的通孔的内壁面上设置有导体，由此将由薄膜层中的导体膜构成的检测部和形成在通孔的背面侧的基板导体部电连接。电路板的表面形成有电连接到控制电路的控制电路和基底导体部分。传感器芯片和电路板被层叠，并且基板导体部分和基底导体部分电连接。

35. 发明授权

US07971482B2 Humidity sensor 有权
标题翻译：湿度传感器
公开(公告)号：US07971482B2
公开(公告)日：2011-07-05
申请号：US12081513
申请日：2008-04-17
申请人： Toshiki Isogai , Toshikazu Itakura
发明人： Toshiki Isogai , Toshikazu Itakura
IPC分类号： G01N27/22
CPC分类号： G01N27/225
摘要： A capacitive humidity sensor includes: a humidity sensing element with a humidity sensitive film and electrodes; and a processing circuit. The film has a dielectric constant variable in accordance with moisture. The electrodes detect capacitance of the film and outputs a signal corresponding to the capacitance. The processing circuit processes the signal. The film is made of inorganic material having fine pores for adsorbing the moisture. A diameter of the fine pores is set to be a predetermined diameter so that capillary tube aggregation phenomenon occurs at a predetermined relative humidity. The capacitance of the film has a change rate with respect to the relative humidity. The change rate in case of the relative humidity higher than the predetermined relative humidity is larger than that in case of the relative humidity lower than the predetermined relative humidity.
摘要翻译：电容式湿度传感器包括：具有湿敏膜和电极的湿度感测元件; 和处理电路。该膜具有根据水分变化的介电常数。电极检测胶片的电容并输出对应于电容的信号。处理电路处理该信号。该膜由具有用于吸附水分的细孔的无机材料制成。细孔的直径设定为规定的直径，使得在规定的相对湿度下发生毛细管聚集现象。膜的电容相对于相对湿度具有变化率。在相对湿度高于预定相对湿度的情况下的变化率大于相对湿度低于预定相对湿度的情况。

36. 发明授权

US07404312B2 Humidity-sensitive element for humidity sensor 有权
标题翻译：用于湿度传感器的湿度敏感元件
公开(公告)号：US07404312B2
公开(公告)日：2008-07-29
申请号：US10864361
申请日：2004-06-10
申请人： Toshiki Isogai , Takahiko Yoshida , Inao Toyoda
发明人： Toshiki Isogai , Takahiko Yoshida , Inao Toyoda
IPC分类号： G01N7/00
CPC分类号： G01N27/121 , G01N27/126 , G01N27/225
摘要： The invention provides a humidity-sensitive element using, as a humidity-sensitive film, a polyimide having a molecular structure capable of forming a network structure at a high density, exhibiting less drift after being left standing at a high temperature and a high humidity and having excellent characteristics. A humidity-sensitive element according to the invention uses the polyimide obtained by dehydrating and ring closing a polyamide acid forming a network structure in which terminals of basic molecular chains are interconnected with one another, as a humidity-sensitive film. The humidity-sensitive element of the invention suitably uses a polyimide, in which terminals of basic molecular chains are interconnected with one another by use of triamine or a tricarboxylic acid, as a humidity sensitive film.
摘要翻译：本发明提供了一种湿度敏感元件，其使用具有能够以高密度形成网络结构的分子结构的聚酰亚胺作为湿敏膜，在高温和高湿度下静置后具有较少的漂移，具有优异的特性。根据本发明的湿度敏感元件使用通过使形成网络结构的聚酰胺酸脱水和闭环而获得的聚酰亚胺，其中碱性分子链的末端彼此互连，作为湿敏膜。本发明的湿度敏感元件适当地使用聚酰亚胺，其中碱性分子链的末端通过使用三胺或三羧酸彼此互连，作为湿敏膜。

37. 发明授权

US07181966B2 Physical quantity sensor and method for manufacturing the same 有权
标题翻译：物理量传感器及其制造方法
公开(公告)号：US07181966B2
公开(公告)日：2007-02-27
申请号：US11220543
申请日：2005-09-08
申请人： Toshiki Isogai , Masato Ishihara , Michitaka Hayashi , Toshikazu Itakura
发明人： Toshiki Isogai , Masato Ishihara , Michitaka Hayashi , Toshikazu Itakura
IPC分类号： G01N19/10 , G01N27/22 , G11C8/10
CPC分类号： G01N27/223 , Y10T29/49007
摘要： A capacitance type humidity sensor includes: a detection substrate including a detection portion on a first side of the detection substrate; and a circuit board including a circuit portion. The detection portion detects humidity on the basis of capacitance change of the detection portion. The circuit portion processes the capacitance change as an electric signal. The detection substrate further includes a sensor pad on a second side of the detection substrate. The sensor pad is electrically connected to the detection portion through a conductor in a through hole of the detection substrate.
摘要翻译：电容式湿度传感器包括：检测基板，其包括在检测基板的第一侧上的检测部分; 以及包括电路部分的电路板。检测部根据检测部的电容变化来检测湿度。电路部分将电容变化作为电信号进行处理。检测基板还包括在检测基板的第二侧上的传感器焊盘。传感器垫通过检测基板的通孔中的导体与检测部电连接。

38. 发明申请

US20060260107A1 Manufacturing method of humidity sensor 审中-公开
标题翻译：湿度传感器的制造方法
公开(公告)号：US20060260107A1
公开(公告)日：2006-11-23
申请号：US11435862
申请日：2006-05-18
申请人： Toshikazu Itakura , Toshiki Isogai
发明人： Toshikazu Itakura , Toshiki Isogai
IPC分类号： H01G9/00
CPC分类号： G01N27/225
摘要： A manufacturing method of a humidity sensor having a moisture-sensitive film formed of a polymer membrane is disclosed. The method involves performing a first heat treatment process in which the polymer membrane is heat treated at a temperature that is at least approximately equal to a glass transition temperature of the polymer membrane. The method also involves performing a second heat treatment process in which the polymer membrane is heat treated at a temperature that is at most approximately equal to the glass transition temperature of the polymer membrane in a predetermined ambient humidity.
摘要翻译：公开了一种具有由聚合物膜形成的湿敏膜的湿度传感器的制造方法。该方法包括进行第一热处理工艺，其中聚合物膜在至少近似等于聚合物膜的玻璃化转变温度的温度下进行热处理。该方法还包括进行第二热处理工艺，其中聚合物膜在预定的环境湿度下，在最高约等于聚合物膜的玻璃化转变温度的温度下进行热处理。

39. 发明申请

US20060186901A1 Moisture sensor device and self-diagnosing method therefor 有权
标题翻译：水分传感器装置及其自诊断方法
公开(公告)号：US20060186901A1
公开(公告)日：2006-08-24
申请号：US11353065
申请日：2006-02-14
申请人： Toshikazu Itakura , Toshiki Isogai
发明人： Toshikazu Itakura , Toshiki Isogai
IPC分类号： G01R27/26
CPC分类号： G01N27/223
摘要： A moisture sensor device includes a sensor portion having a capacitance that is varied in accordance with surrounding humidity, a signal processor for processing a detection signal of the sensor portion and outputting the signal corresponding to the humidity, a heating portion for heating the sensor portion, and a controller for controlling heating of the heating portion so that the capacitance of the sensor portion is substantially equal to a value under predetermined humidity at least during a self-diagnosis period.
摘要翻译：一种湿度传感器装置包括具有根据周围湿度变化的电容的传感器部分，用于处理传感器部分的检测信号并输出对应于湿度的信号的信号处理器，用于加热传感器部分的加热部分，以及控制器，用于控制加热部分的加热，使得传感器部分的电容至少在自诊断周期期间基本上等于预定湿度下的值。

40. 发明申请

US20060096370A1 Capacitive humidity sensor 有权
标题翻译：电容式湿度传感器
公开(公告)号：US20060096370A1
公开(公告)日：2006-05-11
申请号：US11253703
申请日：2005-10-20
申请人： Toshiki Isogai , Toshikazu Itakura
发明人： Toshiki Isogai , Toshikazu Itakura
IPC分类号： G01N27/22 , G01N19/00
CPC分类号： G01N27/223
摘要： A capacitive humidity sensor for detecting a humidity change includes a first sensor element having a first capacitance, a second sensor element having a second capacitance and connected in series with the first sensor element, and a humidity sensitive layer having a dielectric constant, which changes in accordance with humidity. The first and the second capacitances change with respect to the humidity change at a different rate. The humidity is detected using the different capacitances of the first and the second sensor elements. The humidity sensitive layer is formed to each sensor element so that each sensor element can be effectively protected.
摘要翻译：用于检测湿度变化的电容式湿度传感器包括具有第一电容的第一传感器元件，具有第二电容并与第一传感器元件串联连接的第二传感器元件和具有介电常数的湿度敏感层，按照湿度。第一和第二电容以不同的速率相对于湿度变化而变化。使用第一和第二传感器元件的不同电容来检测湿度。对每个传感器元件形成湿度敏感层，从而可以有效地保护每个传感器元件。

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