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31. 发明授权

US07450797B2 Beam switch structures and methods 失效
标题翻译：光束开关结构和方法
公开(公告)号：US07450797B2
公开(公告)日：2008-11-11
申请号：US11734419
申请日：2007-04-12
申请人： Kristine A. German , Peter M. Gulvin , Joel A. Kubby
发明人： Kristine A. German , Peter M. Gulvin , Joel A. Kubby
IPC分类号： G02B6/42 , H01L29/82 , H01H37/52
CPC分类号： H01H1/0036 , G02B6/3566 , G02B6/3574 , G02B6/3576 , G02B6/358 , G02B6/3584 , H01H50/005 , H01H59/0009 , H01H2001/0042 , H01H2037/008 , H01H2061/006
摘要： A substantially straight beam in an unbuckled state is compressed to cause the beam to buckle using an adjustable compressor. The adjustable compressor applies force to one or both ends of the beam and limits compression on the beam to allow the beam to move between a first buckled state and a second buckled state. The first buckled state and the second buckled state comprise substantially equal magnitude and opposite direction buckling movements from the unbuckled state.
摘要翻译：在无松开状态下的基本上直的梁被压缩以使得可以使用可调节的压缩机来使梁弯曲。可调压缩机对梁的一端或两端施加力，并限制梁上的压缩，以允许梁在第一弯曲状态和第二弯曲状态之间移动。第一弯曲状态和第二弯曲状态包括基本上相等的幅度和相对的方向从非卷曲状态的弯曲运动。

32. 发明授权

US07242825B2 Cantilever beam MEMS variable optical attenuator 失效
标题翻译：悬臂梁MEMS可变光衰减器
公开(公告)号：US07242825B2
公开(公告)日：2007-07-10
申请号：US11010769
申请日：2004-12-13
申请人： Pinyen Lin , Yao Rong Wang , Jun Ma , Xueyuan Liu , Peter M. Gulvin , Kristine A. German , Joel A. Kubby
发明人： Pinyen Lin , Yao Rong Wang , Jun Ma , Xueyuan Liu , Peter M. Gulvin , Kristine A. German , Joel A. Kubby
IPC分类号： G02B6/35
CPC分类号： G02B6/3508 , G02B6/266 , G02B6/3566 , G02B6/357 , G02B6/358 , G02B6/3594 , G02B6/3596
摘要： An improved cantilever beam optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.
摘要翻译：改进的悬臂光束开关设计，提供可变光衰减器（VOA）的功能。波导的有意的不对准会导致不同程度的光衰减。通过精细地控制所选择的切换位置的未对准，可以实现单个设备，其将提供单独切换和衰减或仅仅衰减的功能。光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。开关功能和VOA功能的集成减少了当必须采用单独的开关和单独的VOA的不可避免的替代时否则不可避免的光损耗。所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。

33. 发明授权

US07116855B2 Optical shuttle system and method used in an optical switch 失效
标题翻译：用于光开关的光梭系统和方法
公开(公告)号：US07116855B2
公开(公告)日：2006-10-03
申请号：US10879094
申请日：2004-06-30
申请人： Fuqian Yang , Joel A. Kubby , Alex T. Tran , Jun Ma
发明人： Fuqian Yang , Joel A. Kubby , Alex T. Tran , Jun Ma
IPC分类号： G02B6/35
CPC分类号： G02B6/3508 , G02B6/3546 , G02B6/3548 , G02B6/3576 , G02B6/358 , G02B6/3584 , G02B6/3596
摘要： An optical shuttle system for routing signals in a communications system that includes a terminal connected to a power source, a shuttle that includes waveguides used for routing the signals, and a beam connected to the terminal and the shuttle so that the beam suspends the shuttle. When power from the power source is applied to the terminal, the beam drives a movement of the shuttle. Furthermore, a method of using an optical shuttle system for routing signals in a communications system, the method includes connecting a terminal to a power source, connecting a shuttle to a beam to suspend the shuttle, and applying power from the power source to the terminal so that the beam drives a movement of the shuttle in a direction substantially perpendicular to a direction of the beam.
摘要翻译：一种用于在通信系统中路由信号的光梭系统，其包括连接到电源的终端，包括用于路由信号的波导的梭，以及连接到终端和梭的梁，使得梁悬挂在梭上。当来自电源的电力施加到端子时，梁驱动梭子的运动。此外，一种使用光梭系统在通信系统中路由信号的方法，所述方法包括将终端连接到电源，将梭子连接到波束以暂停梭子，以及将来自电源的功率施加到终端使得光束在基本上垂直于光束的方向的方向上驱动梭子的运动。

34. 发明授权

US07106441B2 Structure and method for a microelectromechanic cylindrical reflective diffraction grating spectrophotometer 有权
$Structure and method for a microelectromechanic cylindrical reflective diffraction grating spectrophotometer$
标题翻译：微机电圆柱反射衍射光栅分光光度计的结构与方法
公开(公告)号：US07106441B2
公开(公告)日：2006-09-12
申请号：US10672207
申请日：2003-09-26
申请人： Decai Sun , Joel A. Kubby , Jingkuang Chen , Alex T. Tran , Patrick Y. Maeda
发明人： Decai Sun , Joel A. Kubby , Jingkuang Chen , Alex T. Tran , Patrick Y. Maeda
IPC分类号： G01J3/20
CPC分类号： G01J3/06 , G01J3/02 , G01J3/0256 , G01J3/20
摘要： A tunable microelectromechanical (MEMS) spectrophotometer with a rotating cylindrical reflective diffraction grating is integrated with a photodetector and an optical fiber light source on a Rowland circle on a monolithic silicon substrate.
摘要翻译：具有旋转圆柱反射衍射光栅的可调谐微机电（MEMS）分光光度计与单片硅衬底上的Rowland圆上的光电检测器和光纤光源集成。

35. 再颁专利

USRE39261E1 Method and apparatus for an integrated laser beam scanner 有权
标题翻译：集成激光束扫描仪的方法和装置
公开(公告)号：USRE39261E1
公开(公告)日：2006-09-05
申请号：US10014563
申请日：2001-12-14
申请人： Philip D. Floyd , Decai Sun , Joel A. Kubby
发明人： Philip D. Floyd , Decai Sun , Joel A. Kubby
IPC分类号： G02B26/08
CPC分类号： G02B26/10 , G02B26/0833 , G02B26/0841 , G02B26/085
摘要： A solid state laser beam scanning system having a single crystal silicon deflection and scanning mirror integrated with a laser diode. By combining the techniques of deep reactive ion etching of silicon with solder bump bonding techniques, completed and tested laser diodes are integrated with silicon substrates supporting micro-electro-mechanical systems layers.
摘要翻译：具有与激光二极管集成的单晶硅偏转和扫描反射镜的固态激光束扫描系统。通过将硅的深反应离子蚀刻技术与焊料凸块接合技术相结合，完成和测试的激光二极管与支持微电子机械系统层的硅衬底集成。

36. 发明授权

US07070699B2 Bistable microelectromechanical system based structures, systems and methods 失效
公开(公告)号：US07070699B2
公开(公告)日：2006-07-04
申请号：US10727191
申请日：2003-12-03
申请人： Joel A. Kubby , Fuqian Yang , Jun Ma , Kristine A. German , Peter M. Gulvin
发明人： Joel A. Kubby , Fuqian Yang , Jun Ma , Kristine A. German , Peter M. Gulvin
IPC分类号： B29D11/00 , C23F1/00
CPC分类号： G02B6/3508 , B81B3/0054 , B81B2201/032 , G02B6/3546 , G02B6/3568 , G02B6/3582 , G02B6/3596 , H01H2001/0042
摘要： A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.

37. 发明授权

US06985650B2 Thermal actuator and an optical waveguide switch including the same 失效
标题翻译：热致动器和包括其的光波导开关
公开(公告)号：US06985650B2
公开(公告)日：2006-01-10
申请号：US10772564
申请日：2004-02-05
申请人： Jun Ma , Joel A. Kubby , Kristine A. German , Peter M. Gulvin , Pinyen Lin
发明人： Jun Ma , Joel A. Kubby , Kristine A. German , Peter M. Gulvin , Pinyen Lin
IPC分类号： G02B6/26 , G02B6/42 , H01H37/00
CPC分类号： B81B3/0018 , G02B6/3566 , G02B6/3576 , G02B6/3584
摘要： A thermal actuator comprises a substantially straight beam. The beam has a beam length and a beam mid-point. The beam comprises a plurality of beam segments. Each beam segment has a beam segment width, the beam thus forming a corresponding plurality of beam segment widths. The beam segment widths vary along the beam length based on a predetermined pattern. As the beam is heated by an included heating means, the beam buckles. The buckling of the beam, in turn, causes the beam mid-point to translate or move in a predetermined direction. The beam mid-point movement, in turn, operates an included optical waveguide switch. The heating means comprises any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.
摘要翻译：热致动器包括基本上直的梁。光束具有光束长度和光束中点。梁包括多个梁段。每个光束段具有光束段宽度，因此光束形成相应的多个光束段宽度。光束段宽度基于预定图案沿着光束长度变化。当束被加热装置加热时，光束弯曲。光束的弯曲又使光束中点在预定方向上平移或移动。光束中点运动依次运行附带的光波导开关。加热装置包括焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种。

38. 再颁专利

USRE38437E1 Method and apparatus for an integrated laser beam scanner using a carrier substrate 有权
标题翻译：使用载体衬底的集成激光束扫描器的方法和装置
公开(公告)号：USRE38437E1
公开(公告)日：2004-02-24
申请号：US10022917
申请日：2001-12-20
申请人： Philip D. Floyd , Decai Sun , Joel A. Kubby
发明人： Philip D. Floyd , Decai Sun , Joel A. Kubby
IPC分类号： G02B2608
CPC分类号： G02B26/085 , G02B26/0833 , G02B26/0841 , G02B26/105 , G06K7/10653 , H01L2224/16225
摘要： An solid state scanning system having a single crystal silicon deflection mirror and scanning mirror is integrated with a light source. Separation of the micro-electro-mechanical systems and light emitters on separate substrates allows the use of flip-chip and solder bump bonding techniques for mounting of the light sources. The separate substrates are subsequently full wafer bonded together to create an integrated solid state scanning system.

39. 发明授权

US06662448B2 Method of fabricating a micro-electro-mechanical fluid ejector 失效
标题翻译：微机电液体喷射器的制造方法
公开(公告)号：US06662448B2
公开(公告)日：2003-12-16
申请号：US09863637
申请日：2001-05-23
申请人： Joel A. Kubby , Jingkuang Chen , Feixia Pan
发明人： Joel A. Kubby , Jingkuang Chen , Feixia Pan
IPC分类号： B21D5376
CPC分类号： H04R17/00 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2002/041 , Y10T29/42 , Y10T29/49128 , Y10T29/49156 , Y10T29/49401
摘要： A micro-electromechanical fluid ejector that is easily fabricated in a standard polysilicon surface micromachining process is disclosed, which can be batch fabricated at low cost using existing external foundry capabilities. In addition, the surface micromachining process has proven to be compatible with integrated microelectronics, allowing for the monolithic integration of the actuator with addressing electronics. A voltage drive mode and a charge drive mode for the power source actuating a deformable membrane is also disclosed.
摘要翻译：公开了容易在标准多晶硅表面微加工工艺中制造的微机电流体喷射器，其可以使用现有的外部铸造能力以低成本批量制造。此外，表面微加工工艺已被证明与集成的微电子学兼容，允许致动器与寻址电子器件的单片集成。还公开了用于致动可变形膜的电源的电压驱动模式和充电驱动模式。

40. 发明授权

US06567448B1 Scanning III-V compound light emitters integrated with Si-based actuators 有权
标题翻译：扫描III-V复合发光体与Si基致动器集成
公开(公告)号：US06567448B1
公开(公告)日：2003-05-20
申请号：US09210315
申请日：1998-12-11
申请人： Decai Sun , Ross D. Bringans , Christopher L. Chua , Philip D. Floyd , Eric Peeters , Joel A. Kubby , Alex T. Tran
发明人： Decai Sun , Ross D. Bringans , Christopher L. Chua , Philip D. Floyd , Eric Peeters , Joel A. Kubby , Alex T. Tran
IPC分类号： H01S500
CPC分类号： H01S5/18308 , H01S5/021 , H01S5/02252 , H01S5/02288 , H01S5/4087 , H01S5/423 , H01S5/426
摘要： A III-V compound light emitter is integrated with Si-based actuators. The proposed devices take advantage of the superior optical properties of III-V compounds and the superior mechanical properties of Si, as well as mature fabrication technologies of Si-Micro-Electro-Mechanical Systems (MEMS). The emitter can be a light emitting diode (LED), a vertical cavity surface emitting laser (VCSEL) or an edge emitting laser. Electro or magnetic based actuation from Si-based actuators provides
摘要翻译： III-V复合光发射器与Si基致动器集成。所提出的器件利用了III-V化合物的优异光学性能和Si的优异机械性能，以及Si-Micro-Electro-Mechanical Systems（MEMS）的成熟制造技术。发射极可以是发光二极管（LED），垂直腔表面发射激光器（VCSEL）或边缘发射激光器。基于Si的致动器的基于电或磁的致动器提供

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