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31. 发明授权

US06837117B2 Device and method for measuring a force component or torque component 有权
标题翻译：用于测量力分量或扭矩分量的装置和方法
公开(公告)号：US06837117B2
公开(公告)日：2005-01-04
申请号：US10470835
申请日：2002-11-27
申请人： Michael Munz , Kurt Weiblen , Andreas Stratmann , Gerhard Wiest , Conrad Haeussermann
发明人： Michael Munz , Kurt Weiblen , Andreas Stratmann , Gerhard Wiest , Conrad Haeussermann
IPC分类号： G01G3/12 , G01G19/414 , G01G23/02 , G01L1/12 , G01L1/14 , G01L1/16 , G01L1/26 , G01L1/04
CPC分类号： G01G19/4142 , G01G3/12
摘要： A device and method for measuring at least one of a force component and a torque component. The device includes a deformation member, for measuring at least one of a force component and torque component, a separate measuring element, configured to measure at least one force component, and an electronics unit, connected to the measuring element configured to evaluate a measuring signal of the measuring element. The deformation member includes a base part and at least one tongue movable with respect to the base part. The base part is arranged so that a gap between the measuring element and the tongue has a gap width variable in response to the force component introduced onto the deformation member. The measuring element is configured to convert a change in the gap width into a measuring signal. The method includes the step of changing the gap width between the tongue and the measuring element by introducing the force component into the deformation member. The method further includes the step of detecting the change in the gap width by the measuring element. The method further includes the step of directing the measuring signal by the measuring element to the electronics unit for further processing as a function of the change in the gap width.
摘要翻译：一种用于测量力分量和扭矩分量中的至少一个的装置和方法。该装置包括用于测量力分量和扭矩分量中的至少一个的变形构件，被配置为测量至少一个力分量的单独的测量元件和连接到测量元件的电子单元，该电子单元被配置为评估测量信号的测量元件。变形构件包括基部和相对于基部可移动的至少一个舌。基部被布置成使得测量元件和舌头之间的间隙具有响应于引入到变形构件上的力分量而变化的间隙宽度。测量元件被配置为将间隙宽度的变化转换为测量信号。该方法包括通过将力分量引入变形构件来改变舌部与测量元件之间的间隙宽度的步骤。该方法还包括通过测量元件检测间隙宽度的变化的步骤。该方法还包括将测量元件引导到电子单元以进一步处理作为间隙宽度变化的函数的步骤。

32. 发明授权

US06354153B1 Pressure sensor connection device 有权
标题翻译：压力传感器连接装置
公开(公告)号：US06354153B1
公开(公告)日：2002-03-12
申请号：US09603074
申请日：2000-06-26
申请人： Kurt Weiblen , Tore Toennesen
发明人： Kurt Weiblen , Tore Toennesen
IPC分类号： G01L700
CPC分类号： G01L19/147 , G01D11/245 , G01L19/003 , G01L19/0038
摘要： A pressure sensor device has a mounting rack and a sensor casing arranged on the mounting rack and closed except for one opening. The pressure sensor includes a pressure pickup that is arranged inside the sensor casing and electrically connected to the mounting rack. Also included in the pressure sensor is a pressure connection which includes a connector and a pressure channel having an inlet and an outlet, with the pressure connection being designed as a molded part produced independently of the sensor casing and securable on the mounting rack. An outlet of the pressure channel designed on the molded part is connected at least indirectly to an opening in the sensor casing.
摘要翻译：压力传感器装置具有安装架和布置在安装架上的传感器壳体，并且除了一个开口之外是封闭的。压力传感器包括压力传感器，该压力拾取器布置在传感器壳体的内部并电连接到安装架。还包括在压力传感器中的是压力连接，其包括连接器和具有入口和出口的压力通道，压力连接被设计为独立于传感器壳体制造并可固定在安装架上的模制部件。设计在模制部件上的压力通道的出口至少间接连接到传感器外壳中的开口。

33. 发明授权

US06300842B1 Arrangement for producing electrical oscillations 失效
标题翻译：电振荡布置
公开(公告)号：US06300842B1
公开(公告)日：2001-10-09
申请号：US09501738
申请日：2000-02-11
申请人： Manfred Leiter , Kurt Weiblen , Berhard Lucas , Frank Schatz , Thomas Beez , Juergen Seiz , Helmeut Baumann , Herbert Olbrich , Heinz Eisenschmid , Eberhard Moess , Joachim Dutzi , Andreas Kugler
发明人： Manfred Leiter , Kurt Weiblen , Berhard Lucas , Frank Schatz , Thomas Beez , Juergen Seiz , Helmeut Baumann , Herbert Olbrich , Heinz Eisenschmid , Eberhard Moess , Joachim Dutzi , Andreas Kugler
IPC分类号： H03B714
CPC分类号： H01L24/72 , H01L2924/01004 , H01L2924/01068 , H01L2924/01079
摘要： The arrangement for producing electrical oscillations in a Giga hertz region has a Gunn element, a housing in which the Gunn element is accommodated and which has an electrically conductive housing cover, the Gunn element being in electrical contact with the electrically conductive housing cover, and an elastic, electrical contact element clamped between a contact surface of the Gunn element and the housing cover.
摘要翻译：用于在千兆赫兹区域中产生电振荡的布置具有Gunn元件，容纳有Gunn元件的壳体，并且具有导电外壳盖，Gunn元件与导电外壳盖电接触，弹性的电接触元件夹在Gunn元件的接触表面和壳体盖之间。

34. 发明授权

US6062088A Pressure sensor 有权
标题翻译：压力传感器
公开(公告)号：US6062088A
公开(公告)日：2000-05-16
申请号：US171035
申请日：1999-03-03
申请人： Kurt Ingrisch , Kurt Weiblen , Hubert Benzel , Botho Ziegenbein , Hans-Peter Trah , Andreas Duell , Karl Bender , Jochen Franz
发明人： Kurt Ingrisch , Kurt Weiblen , Hubert Benzel , Botho Ziegenbein , Hans-Peter Trah , Andreas Duell , Karl Bender , Jochen Franz
IPC分类号： G01L9/04 , G01L9/00 , H01L29/84 , G01L9/06 , G01L7/06
CPC分类号： G01L9/006 , G01L9/0052
摘要： A pressure sensor includes a metallic membrane and a frame. For detecting the deflection of the membrane, a silicon bridge element having piezoresistive resistor elements is arranged on the membrane and the frame.
摘要翻译： PCT No.PCT / DE97 / 00716 Sec。 371日期1999年3月3日 102（e）1999年3月3日PCT PCT 1997年4月9日PCT公布。第WO97 / 39320号公报日期1997年10月23日压力传感器包括金属膜和框架。为了检测膜的挠曲，在膜和框架上布置具有压阻电阻元件的硅桥元件。

35. 发明授权

US6021674A Pressure sensor having at least one connector element arranged flush with a mounting surface and a capillary adhesive layer arranged between a support plate and the mounting surface 失效
标题翻译：压力传感器具有与安装表面齐平的至少一个连接器元件和布置在支撑板和安装表面之间的毛细粘合剂层
公开(公告)号：US6021674A
公开(公告)日：2000-02-08
申请号：US973123
申请日：1997-12-01
申请人： Walter Roethlingshoefer , Kurt Weiblen , Ulrich Goebel
发明人： Walter Roethlingshoefer , Kurt Weiblen , Ulrich Goebel
IPC分类号： G01L19/00 , G01L9/00 , G01L19/04 , G01L19/14 , G01L7/00
CPC分类号： G01L19/143 , G01L19/0084 , G01L19/147
摘要： A pressure sensor includes a housing, a support plate arranged on a mounting surface of the housing, a sensor element arranged in the housing, and at least one connector element joined in electrically conductive fashion to at least one contact surface of the support plate. A method for manufacturing a pressure sensor in such a way that the pressure sensor on the one hand can be manufactured easily and on the other hand is resistant to malfunction and is operational over a long period of time. The at least one connector element is arranged flush with the mounting surface and joined directly to the at least one contact surface. A capillary adhesive layer is arranged between the support plate and the mounting surface.
摘要翻译： PCT No.PCT / DE96 / 02301 Sec。 371 1997年12月1日第 102（e）1997年12月1日PCT PCT 1996年12月2日PCT公布。公开号WO97 / 37204 PCT 日期1997年10月9日压力传感器包括壳体，布置在壳体的安装表面上的支撑板，布置在壳体中的传感器元件，以及至少一个以导电方式连接到至少一个接触表面的连接器元件支撑板。一种压力传感器的制造方法，其一方面可以容易地制造压力传感器，另一方面能够抵抗故障并长时间运行。所述至少一个连接器元件布置成与所述安装表面齐平并且直接连接到所述至少一个接触表面。毛细粘合剂层布置在支撑板和安装表面之间。

36. 发明授权

US5721377A Angular velocity sensor with built-in limit stops 失效
标题翻译：角速度传感器，内置限位件
公开(公告)号：US5721377A
公开(公告)日：1998-02-24
申请号：US681243
申请日：1996-07-22
申请人： Juergen Kurle , Kurt Weiblen , Horst Muenzel , Helmut Baumann , Klaus Heyers , Markus Lutz
发明人： Juergen Kurle , Kurt Weiblen , Horst Muenzel , Helmut Baumann , Klaus Heyers , Markus Lutz
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C19/5712 , G01P2015/0814
摘要： In an angular velocity sensor, an acceleration sensor is arranged on a resonator formed of a multilayer substrate and attached to a resonating bar. The multilayer substrate includes a top silicon layer, an insulating sacrificial layer arranged below the top silicon layer, and a bottom silicon layer arranged below the insulating sacrificial layer. An excitor causes the resonator to vibrate while a limit stop, configured out of the multilayer substrate, limits the movement of the resonator.
摘要翻译：在角速度传感器中，加速度传感器布置在由多层基板形成并且附接到谐振杆的谐振器上。多层基板包括顶部硅层，布置在顶部硅层下方的绝缘牺牲层和布置在绝缘牺牲层下方的底部硅层。激励器使谐振器振动，而由多层基板构成的极限停止限制了谐振器的移动。

37. 发明授权

US5600074A Silicon chip for use in a force-detection sensor 失效
标题翻译：用于力检测传感器的硅芯片
公开(公告)号：US5600074A
公开(公告)日：1997-02-04
申请号：US240740
申请日：1994-05-10
申请人： Jiri Marek , Frank Bantien , Steffen Schmidt , Kurt Weiblen , Matthias Kuesell , Werner Herden
发明人： Jiri Marek , Frank Bantien , Steffen Schmidt , Kurt Weiblen , Matthias Kuesell , Werner Herden
IPC分类号： G01L9/06 , G01L1/18 , G01L9/00 , G01L23/10 , G01L23/18 , G01L1/10
CPC分类号： G01L1/18 , G01L23/18 , G01L9/0054 , Y10S73/04
摘要： A force sensor employing a silicon chip having a force application area on a top surface and attached to a support at a bottom surface. Piezoresistive elements are arranged on the silicon chip in areas of high mechanical tension and produce signals. Circuits, which receive the signals produced by the piezoresistive elements, are arranged on the silicon chip in areas of low mechanical tension. The areas of mechanical tension may be influenced by providing grooves and/or recesses in the bottom surface of the silicon chip and by providing grooves in the top surface of the silicon chip.
摘要翻译： PCT No.PCT / DE92 / 00870 Sec。 371日期1994年5月10日 102（e）日期1994年5月10日PCT提交1992年10月16日PCT公布。出版物WO93 / 10430 日期：1993年5月27日一种力传感器，其采用具有在上表面上的施力区域的硅芯片并且附接到底表面上的支撑件。压敏元件在高度机械张力的区域被布置在硅芯片上并产生信号。接收由压阻元件产生的信号的电路在低机械张力的区域中布置在硅芯片上。可能通过在硅芯片的底表面中提供槽和/或凹槽并且通过在硅芯片的顶表面中提供凹槽来影响机械张力的区域。

38. 发明授权

US5273939A Method of assembling micromechanical sensors 失效
标题翻译：组装微机械传感器的方法
公开(公告)号：US5273939A
公开(公告)日：1993-12-28
申请号：US828106
申请日：1992-01-30
申请人： Rolf Becker , Klaus Jaeckel , Jiri Marek , Frank Bantien , Helmut Baumann , Kurt Weiblen , Martin Willmann
发明人： Rolf Becker , Klaus Jaeckel , Jiri Marek , Frank Bantien , Helmut Baumann , Kurt Weiblen , Martin Willmann
IPC分类号： G01R33/07 , B81B7/00 , G01L9/00 , G01P15/08 , H01L29/84 , H01L43/04 , H10L21/60
CPC分类号： B81B7/0048 , G01L19/147 , G01P15/0802 , G01P2015/0828 , H01L2224/48091 , H01L2224/48227
摘要： A method is proposed for assembling micromechanical sensors, in particular Hall sensors, or pressure or acceleration sensors, in which at least one silicon sensor element is applied to a substrate. The at least one silicon sensor element is joined to the substrate via at least one assembly pedestal, the cap faces of which are kept small compared with the surface of the silicon sensor element, so that a gap exists between the substrate and the silicon sensor element except for the region of the at least one assembly pedestal.
摘要翻译：提出了一种用于组装微机械传感器，特别是霍尔传感器或压力或加速度传感器的方法，其中至少一个硅传感器元件被施加到基板。所述至少一个硅传感器元件经由至少一个组装基座接合到所述基板，所述组件基座的盖面与所述硅传感器元件的表面相比保持较小，使得在所述基板和所述硅传感器元件之间存在间隙除了至少一个组装基座的区域之外。

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