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31. 发明授权

US5182615A Exposure apparatus 失效
标题翻译：曝光装置
公开(公告)号：US5182615A
公开(公告)日：1993-01-26
申请号：US563420
申请日：1990-08-07
申请人： Hiroshi Kurosawa , Koji Uda , Kunitaka Ozawa , Shunichi Uzawa , Nobutoshi Mizusawa , Shigeyuki Suda , Noriyuki Nose , Takao Kariya
发明人： Hiroshi Kurosawa , Koji Uda , Kunitaka Ozawa , Shunichi Uzawa , Nobutoshi Mizusawa , Shigeyuki Suda , Noriyuki Nose , Takao Kariya
IPC分类号： G03F7/20 , G03F9/00
CPC分类号： G03F7/70691 , G03F9/7049
摘要： An exposure apparatus for printing a pattern of a mask to a wafer includes a mask moving mechanism for moving the mask; a wafer moving mechanism or moving the wafer along a predetermined movement coordinate; a measuring system for measuring an error with respect to the movement coordinate, resulting from the movement of the mask by the mask moving mechanism; and a memorizing device for memorizing a data table prepared on the basis of the error measured by the measuring system; wherein the wafer moving mechanism uses the data in the data table when it moves the wafer for positioning of the wafer with respect to the mask.

32. 发明授权

US5148038A Device for detecting positional relationship between two objects 失效
标题翻译：用于检测两个对象之间的位置关系的设备
公开(公告)号：US5148038A
公开(公告)日：1992-09-15
申请号：US804514
申请日：1991-12-10
申请人： Noriyuki Nose , Naoto Abe
发明人： Noriyuki Nose , Naoto Abe
IPC分类号： G03F9/00
CPC分类号： G03F9/7076 , G03F9/7023
摘要： A device for detecting a positional relationship between opposed first and second objects. The device includes a light source for projecting light to the first and second objects; a photodetecting system for detecting two lights from one of the first and second objects illuminated by the light from the light source, the photodetecting system detecting those two lights the position of incidence of each of which on a predetermined plane is changeable with the positional relationship between the first and second objects in a direction perpendicular to the direction in which the first and second objects are opposed; a position detecting system for detecting the positional relationship between the first and second objects in a direction perpendicular to the opposing direction of the first and second objects, on the basis of the relationship of the two lights, on the predetermined plane, as detected by the photodetecting system; and an interval detecting system for detecting the positional relationship between the first and second objects in the opposing direction, by using at least one of the two lights detected by the photodetecting system.

33. 发明授权

US5033856A Three-dimensional shape measuring apparatus 失效
标题翻译：三维形状测量仪
公开(公告)号：US5033856A
公开(公告)日：1991-07-23
申请号：US517514
申请日：1990-04-30
申请人： Noriyuki Nose , Yukichi Niwa
发明人： Noriyuki Nose , Yukichi Niwa
IPC分类号： G01B11/24
CPC分类号： G01B11/24
摘要： A three-dimensional shape measuring apparatus having a high performance and a reduced drive energy is disclosed. At least a portion of an in-focus state detection optical system having an internal light source is movable while maintaining a light path near an object lens of the optical system. A distance of movement of the movable portion which is moved with auto-focusing operation for an object is measured and the three-dimensional shape is measured precisely with a high stroke. An inclination angle measuring optical system which shares the light path near the object lens with the in-focus state detection optical system and has an internal light source is provided in a common casing. Thus, the distance of movement of the movable part of the in-focus state detection optical system and an inclination angle are simultaneously measured so that the three-dimensional shape can be more precisely measured.
摘要翻译：公开了具有高性能和降低的驱动能量的三维形状测量装置。具有内部光源的聚焦状态检测光学系统的至少一部分可移动，同时保持靠近光学系统的物镜的光路。测量用于物体的自动聚焦操作移动的可移动部分的移动距离，并且以高冲程精确地测量三维形状。在共同的壳体内设置倾斜角度测量光学系统，该倾斜角度测量光学系统与聚焦状态检测光学系统共享物镜附近的光路并具有内部光源。因此，可以同时测量对焦状态检测光学系统的可动部分的移动距离和倾斜角度，从而可以更精确地测量三维形状。

34. 发明授权

US4783153A Variable-focus optical device 失效
标题翻译：可变焦光学装置
公开(公告)号：US4783153A
公开(公告)日：1988-11-08
申请号：US942791
申请日：1986-12-17
申请人： Nobuo Kushibiki , Noriyuki Nose , Takeshi Baba , Toshiyuki Nakajima , Masahiro Okuda
发明人： Nobuo Kushibiki , Noriyuki Nose , Takeshi Baba , Toshiyuki Nakajima , Masahiro Okuda
IPC分类号： G02B3/00 , G02B1/00 , G02B3/12 , G02B3/14 , G02B26/08 , G02B1/06 , G02B15/00
CPC分类号： G02B1/00 , G02B26/0875 , G02B3/14
摘要： A variable-focus optical device comprises an elastomeric member having a gradient of shear modulus along its optical axis, and a deforming member having an aperture adapted for causing projection or sinking of the elastomeric member therethrough or thereat to deform the surface of the elastomeric member. The gradient of shear modulus is preferably one of continuously decreasing from the surface toward the inside of the elastomeric member. The gradient of shear modulus is provided by a concentration gradient of an inorganic substance such as silica dispersed in an elastomeric substance such as polysilioxane.
摘要翻译：可变焦光学装置包括具有沿其光轴的剪切模量梯度的弹性体构件，以及具有孔的变形构件，其适于使弹性构件穿过其中或在其上突出或下沉以使弹性体构件的表面变形。剪切模量的梯度优选是从弹性体构件的表面向内部连续减小的梯度。剪切模量的梯度由分散在诸如聚硅氧烷的弹性体物质中的无机物质如二氧化硅的浓度梯度提供。

35. 发明授权

US4436398A Device for splitting part of light incident on an image forming optical system 失效
标题翻译：用于分离入射在成像光学系统上的一部分光的装置
公开(公告)号：US4436398A
公开(公告)日：1984-03-13
申请号：US476398
申请日：1983-03-22
申请人： Kiyonobu Endo , Noriyuki Nose
发明人： Kiyonobu Endo , Noriyuki Nose
IPC分类号： G02B27/10 , G03B7/099 , G03B13/08 , G02B5/02
CPC分类号： G02B27/108 , G02B27/1006 , G02B27/1086 , G03B7/09976 , G03B2217/005
摘要： A device for splitting an incident light on an image forming optical system by a relief type diffraction grating. The device is constructed of a transparent substrate and a transparent filling layer having substantially the same refractive index as that of the transparent substrate, and the relief type diffraction grating is formed on the interface between the substrate and the filling layer. With such an arrangement, the reflectively diffracted light is detected by the photodetector without any undue influence in the image-formation based on the transmissively diffracted light.
摘要翻译：一种用于通过浮雕型衍射光栅将入射光分解在成像光学系统上的装置。该装置由透明基板和与透明基板的折射率基本相同的透明填充层构成，并且浮雕型衍射光栅形成在基板和填充层之间的界面上。通过这样的布置，由光检测器检测反射衍射光，而不会在基于透射衍射光的图像形成中产生任何不适当的影响。

36. 发明授权

US6018395A Alignment system 失效
标题翻译：校准系统
公开(公告)号：US6018395A
公开(公告)日：2000-01-25
申请号：US766928
申请日：1996-12-16
申请人： Makiko Mori , Shunichi Uzawa , Kunitaka Ozawa , Hirohisa Ohta , Noriyuki Nose
发明人： Makiko Mori , Shunichi Uzawa , Kunitaka Ozawa , Hirohisa Ohta , Noriyuki Nose
IPC分类号： G03F9/00 , G01B11/00
CPC分类号： G03F9/70
摘要： An alignment method useable with an original having a pattern and a substrate having a surface area on which the pattern of the original is printed. The alignment method comprises detecting plural marks, calculating plural times, the amount of rotational deviation on the basis of different combinations of marks, calculating the quantity of rotational correction of the original and the substrate by using the computed rotational deviations, and aligning on the basis of the calculated quantity of the rotational deviation.
摘要翻译：可用于具有图案的原稿的对准方法和具有印刷原稿图案的表面积的基板。对准方法包括基于不同的标记组合来检测多个标记，多次计算旋转偏差量，通过使用计算出的旋转偏差来计算原件和基板的旋转校正量，并基于的计算量的旋转偏差。

37. 发明授权

US5148037A Position detecting method and apparatus 失效
标题翻译：位置检测方法和装置
公开(公告)号：US5148037A
公开(公告)日：1992-09-15
申请号：US675059
申请日：1991-03-26
申请人： Shigeyuki Suda , Sakae Houryu , Noriyuki Nose
发明人： Shigeyuki Suda , Sakae Houryu , Noriyuki Nose
IPC分类号： G01B11/00 , G01B11/14 , G03F9/00 , H01L21/027 , H01L21/30
CPC分类号： G03F9/7049
摘要： A method and apparatus for detecting a positional relationship between first and second objects is disclosed, which includes a light source for projecting light to the first and second objects, a photodetecting system for detecting light from one of the first and second objects irradiated with the light from the light source, the detecting system being operable to detect first light whose position of incidence upon a predetermined plane is dependent upon the positional relationship of the first and second objects in a direction along the interval therebetween and in a direction perpendicular to the interval, second light whose position of incidence upon the predetermined plane is dependent upon the positional relationship of the first and second objects in the direction of the interval therebetween, and third light whose position of incidence upon the predetermined plane is independent of the positional relationship of the first and second objects in both the direction of the interval and the direction perpendicular to the interval, and a positional relationship detecting system for detecting the positional relationship of the first and second objects in the direction of the interval and the direction perpendicular to the interval, on the basis of the detection by the photodetecting system.

38. 发明授权

US4887897A Eye examining apparatus 失效
标题翻译：眼睛检查装置
公开(公告)号：US4887897A
公开(公告)日：1989-12-19
申请号：US306225
申请日：1989-02-03
申请人： Noriyuki Nose , Yukichi Niwa
发明人： Noriyuki Nose , Yukichi Niwa
IPC分类号： A61B3/02 , A61B3/103
CPC分类号： A61B3/103
摘要： An eye examining apparatus has an eye examining lens of an elastic material opposed to an eye to be examined, and control means for causing the marginal portion of the eye examining lens to protrude or sink to thereby change the lens surface of the eye examining lens.
摘要翻译：眼睛检查装置具有与要检查的眼睛相对的弹性材料的眼睛检查透镜，以及用于使眼睛检查透镜的边缘部分突出或下沉从而改变眼睛检查透镜的透镜表面的控制装置。

39. 发明授权

US4691982A Optical coupler 失效
标题翻译：光耦合器
公开(公告)号：US4691982A
公开(公告)日：1987-09-08
申请号：US709300
申请日：1985-03-07
申请人： Yukuo Nishimura , Mamoru Miyawaki , Noriyuki Nose , Takashi Nakagiri
发明人： Yukuo Nishimura , Mamoru Miyawaki , Noriyuki Nose , Takashi Nakagiri
IPC分类号： G02B6/124 , G02B6/34 , G02B6/10
CPC分类号： G02B6/124 , G02B6/34
摘要： An optical coupler of good efficiency can be prepared at a low cost by making an optical waveguide and a grating of the optical coupler of a monomolecular layer or a monomolecular built-up film.
摘要翻译：通过制造光波导和单分子层或单分子组合膜的光耦合器的光栅，可以以低成本制备效率高的光耦合器。

40. 发明授权

US4595290A Device for measuring light incident on an optical system 失效
标题翻译：用于测量入射在光学系统上的光的装置
公开(公告)号：US4595290A
公开(公告)日：1986-06-17
申请号：US283233
申请日：1981-07-14
申请人： Noriyuki Nose , Kiyonobu Endo
发明人： Noriyuki Nose , Kiyonobu Endo
IPC分类号： G02B27/10 , G03B7/099 , G01J1/42
CPC分类号： G02B27/108 , G02B27/1086 , G03B7/09976
摘要： This invention provides a device for measuring light incident on an optical system. This device includes an optical system defining an optical path, a beam splitter and a photo detector. The beam splitter has a relief type diffraction lattice having a plurality of semireflecting surfaces periodically arranged and included in a transparent body. The diffraction lattice is arranged to split a portion of the incident light by its effect of reflection/diffraction and its beam splitting efficiency having a predetermined distribution within the lattice area. The diffracted light from the diffraction lattice is directed to the photo detector.
摘要翻译：本发明提供一种用于测量入射在光学系统上的光的装置。该装置包括限定光路的光学系统，分束器和光电检测器。分束器具有浮雕型衍射晶格，其具有周期性排列并包含在透明体中的多个半反射面。衍射栅格被布置成通过其反射/衍射效应将入射光的一部分分离，并且其分光效率在晶格区域内具有预定的分布。来自衍射晶格的衍射光被引导到光电检测器。

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