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    • 35. 发明授权
    • MEMS controlled oscillator
    • MEMS控制振荡器
    • US08049580B2
    • 2011-11-01
    • US12938126
    • 2010-11-02
    • Robert B. ReichenbachKeith AubinMaxim ZalalutdinovJeevak M. ParpiaHarold G. Craighead
    • Robert B. ReichenbachKeith AubinMaxim ZalalutdinovJeevak M. ParpiaHarold G. Craighead
    • H03H9/00H01P7/00
    • H03H9/02401G01S7/032H01Q3/26H03H3/0072H03H9/2436
    • An array of micromechanical oscillators have different resonant frequencies based on their geometries. In one embodiment, a micromechanical oscillator has a resonant frequency defined by an effective spring constant that is modified by application of heat. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated to modify the resonant frequency (or equivalently the spring constant or stiffness) of the disc. Continuous control of the output phase and frequency may be achieved when the oscillator becomes synchronized with an imposed sinusoidal force of close frequency. The oscillator frequency can be detuned to produce an easily controlled phase differential between the injected signal and the oscillator feedback. A phased array radar may be produced using independent phase controllable oscillators.
    • 微机械振荡器阵列根据其几何形状具有不同的谐振频率。 在一个实施例中,微机械振荡器具有由通过施加热来修改的有效弹簧常数限定的谐振频率。 在一个实施例中,振荡器是由比该盘小得多的直径支柱支撑的材料盘。 加热盘的周边以改变盘的共振频率(或等效地为弹簧常数或刚度)。 当振荡器与施加的接近频率的正弦力同步时,可以实现输出相位和频率的连续控制。 振荡器频率可以失谐,以在注入的信号和振荡器反馈之间产生容易控制的相位差。 可以使用独立的相位可控振荡器来产生相控阵雷达。
    • 37. 发明授权
    • MEMS controlled oscillator
    • MEMS控制振荡器
    • US07843283B2
    • 2010-11-30
    • US11598097
    • 2006-11-09
    • Robert B. ReichenbachKeith AubinMaxim ZalalutdinovJeevak M. ParpiaHarold G. Craighead
    • Robert B. ReichenbachKeith AubinMaxim ZalalutdinovJeevak M. ParpiaHarold G. Craighead
    • H03H9/00H01P7/00
    • H03H9/02401G01S7/032H01Q3/26H03H3/0072H03H9/2436
    • An array of micromechanical oscillators have different resonant frequencies based on their geometries. In one embodiment, a micromechanical oscillator has a resonant frequency defined by an effective spring constant that is modified by application of heat. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated to modify the resonant frequency (or equivalently the spring constant or stiffness) of the disc. Continuous control of the output phase and frequency may be achieved when the oscillator becomes synchronized with an imposed sinusoidal force of close frequency. The oscillator frequency can be detuned to produce an easily controlled phase differential between the injected signal and the oscillator feedback. A phased array radar may be produced using independent phase controllable oscillators.
    • 微机械振荡器阵列根据其几何形状具有不同的谐振频率。 在一个实施例中,微机械振荡器具有由通过施加热来修改的有效弹簧常数限定的谐振频率。 在一个实施例中,振荡器是由比该盘小得多的直径支柱支撑的材料盘。 加热盘的周边以改变盘的共振频率(或等效地为弹簧常数或刚度)。 当振荡器与施加的接近频率的正弦力同步时,可以实现输出相位和频率的连续控制。 振荡器频率可以失谐,以在注入的信号和振荡器反馈之间产生容易控制的相位差。 可以使用独立的相位可控振荡器来产生相控阵雷达。
    • 40. 发明授权
    • Unitary microcapiliary and waveguide structure and method of fabrication
    • 单体微毛细管和波导结构及其制造方法
    • US06438279B1
    • 2002-08-20
    • US09448413
    • 1999-11-23
    • Harold G. CraigheadMathieu E. FoquetWarren Wright
    • Harold G. CraigheadMathieu E. FoquetWarren Wright
    • G02B610
    • G01N21/0303B01L3/5027G01N2021/0346G01N2021/058G02B6/10G02B6/136G02B2006/12173G02B2006/12176
    • Fabrication techniques for forming arbitrarily shaped fluid capillaries at dimensions below 1 &mgr;m and for forming optical waveguides in the same devices with the same fabrication processes include methods to make integral optical waveguide/fluid-flow systems for greater miniaturization, integration and parallelism of optical excitation and detection systems for the sampling of small volumes. Capillaries with widths below 1 &mgr;m dimensions are fabricated using photolithography and reactive ion etching on glass substrates or by provision of a sacrificial layer, having the configuration desired for a microchannel, covered by a high refractive index material in which a waveguide is formed. Removal of the sacrificial layer produces a microchannel aligned with the waveguide. Dye labeled DNA molecules are driven electrophoretically through the micrometer size channels light emission from and individual molecules can be observed.
    • 用于形成尺寸小于1um的任意形状的流体毛细管和用于在相同装置中用相同制造工艺形成光波导的制造技术包括制造用于光学激发的更小的化,集成和并行化的集成光波导/流体流动系统的方法,以及 用于小体积取样的检测系统。 宽度小于1um的尺寸的毛细管使用在玻璃基板上的光刻和反应离子蚀刻来制造,或通过提供具有由形成波导的高折射率材料覆盖的微通道所需的构造的牺牲层制造。 去除牺牲层产生与波导对准的微通道。 染料标记的DNA分子通过微米尺寸通道电泳驱动,可以观察到来自各个分子的光发射。