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    • 9. 发明申请
    • STRESS-BASED SENSOR, METHOD, AND APPLICATIONS
    • 基于应力的传感器,方法和应用
    • US20130118228A1
    • 2013-05-16
    • US13637861
    • 2011-03-31
    • Jeevak M. ParpiaHarold G. CraigheadDarren R. SouthworthLeon M. Bellan
    • Jeevak M. ParpiaHarold G. CraigheadDarren R. SouthworthLeon M. Bellan
    • G01N33/497
    • G01N33/497G01N29/022
    • A composite, analyte sensor includes a substrate; a micro- or nano-electro-mechanical (MEMS; NEMS) resonator that is coupled to the substrate at least two edge locations (i.e., it is at least doubly-clamped) of the resonator, wherein the resonator is in a statically-buckled state near a buckling transition point of the resonator; and a chemically-responsive substance covering at least a portion of the surface of the resonator that will undergo a conformational change upon exposure to a given analyte. The resonator may be a double-clamped, statically-buckled beam (or bridge), a multiply-clamped, statically-buckled dome (or crater), or other resonator geometry. The sensor may include two or more at least double-clamped, statically-buckled, composite MEMS or NEMS resonators each operating near a buckling transition point of the respective resonator, and each characterized by a different resonant frequency. A method for sensing an analyte in ambient air.
    • 复合分析物传感器包括基底; 谐振器的至少两个边缘位置(即,它至少被双钳位)耦合到衬底的微机械或纳米机电(MEMS; NEMS)谐振器,其中所述谐振器处于静态弯曲 在谐振器的屈曲转变点附近; 以及覆盖谐振器表面的至少一部分的化学响应物质,其在暴露于给定的分析物时将经历构象变化。 谐振器可以是双夹紧,静态弯曲梁(或桥),多夹紧,静态弯曲的圆顶(或火山口)或其他谐振器几何形状。 传感器可以包括两个或更多个至少双夹紧,静态弯曲的复合MEMS或NEMS谐振器,每个谐振器在相应谐振器的屈曲转变点附近操作,并且每个谐振器的特征在于不同的谐振频率。 用于感测环境空气中的分析物的方法。
    • 10. 发明授权
    • Active micromixer using surface acoustic wave streaming
    • 使用表面声波流动的有源微混合器
    • US07942568B1
    • 2011-05-17
    • US11155108
    • 2005-06-17
    • Darren W. BranchGrant D. MeyerHarold G. Craighead
    • Darren W. BranchGrant D. MeyerHarold G. Craighead
    • B01F11/02
    • B01F11/0266B01F13/0059Y10S366/04
    • An active micromixer uses a surface acoustic wave, preferably a Rayleigh wave, propagating on a piezoelectric substrate to induce acoustic streaming in a fluid in a microfluidic channel. The surface acoustic wave can be generated by applying an RF excitation signal to at least one interdigital transducer on the piezoelectric substrate. The active micromixer can rapidly mix quiescent fluids or laminar streams in low Reynolds number flows. The active micromixer has no moving parts (other than the SAW transducer) and is, therefore, more reliable, less damaging to sensitive fluids, and less susceptible to fouling and channel clogging than other types of active and passive micromixers. The active micromixer is adaptable to a wide range of geometries, can be easily fabricated, and can be integrated in a microfluidic system, reducing dead volume. Finally, the active micromixer has on-demand on/off mixing capability and can be operated at low power.
    • 有源微混合器使用在压电衬底上传播的表面声波,优选瑞利波,以在微流体通道中的流体中引起声流。 可以通过将RF激励信号施加到压电基板上的至少一个叉指式换能器来产生表面声波。 活性微混合器可以在低雷诺数流中快速混合静态流体或层流。 活性微混合器没有移动部件(SAW传感器除外),因此比其他类型的有源和无源微混合器更可靠,对敏感流体的损害较小,并且不易受到结垢和通道堵塞的影响。 活性微混合器适用于宽范围的几何形状,可以容易地制造,并且可以集成在微流体系统中,从而减少死体积。 最后,有源微混频器具有按需开/关混合能力,可以低功耗运行。