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31. 发明申请

US20090101995A1 PROCESS FOR FABRICATION OF FINFETs 有权
标题翻译： FINFET制造工艺
公开(公告)号：US20090101995A1
公开(公告)日：2009-04-23
申请号：US12342655
申请日：2008-12-23
申请人： Jochen Beintner , Gary B. Bronner , Ramachandra Divakaruni , Yujun Li
发明人： Jochen Beintner , Gary B. Bronner , Ramachandra Divakaruni , Yujun Li
IPC分类号： H01L29/78
CPC分类号： H01L29/7851 , H01L29/66795
摘要： A method of fabricating a plurality of FinFETs on a semiconductor substrate in which the gate width of each individual FinFET is defined utilizing only a single etching process, instead of two or more, is provided. The inventive method results in improved gate width control and less variation of the gate width of each individual gate across the entire surface of the substrate. The inventive method achieves the above by utilizing a modified sidewall image transfer (SIT) process in which an insulating spacer that is later replaced by a gate conductor is employed and a high-density bottom up oxide fill is used to isolate the gate from the substrate.
摘要翻译：提供了在半导体衬底上制造多个FinFET的方法，其中仅使用单个蚀刻工艺限定每个单个FinFET的栅极宽度，而不是两个或更多个。本发明的方法导致改善的栅极宽度控制和在基板的整个表面上每个单独栅极的栅极宽度的变化较小。本发明的方法通过利用改进的侧壁图像转印（SIT）工艺实现上述，其中采用稍后被栅极导体替代的绝缘间隔物，并且使用高密度底部向上氧化物填充物将栅极与衬底隔离。

32. 发明授权

US07348641B2 Structure and method of making double-gated self-aligned finFET having gates of different lengths 有权
标题翻译：制造具有不同长度的栅极的双门控自对准finFET的结构和方法
公开(公告)号：US07348641B2
公开(公告)日：2008-03-25
申请号：US10711182
申请日：2004-08-31
申请人： Huilong Zhu , Bruce B. Doris , Xinlin Wang , Jochen Beintner , Ying Zhang , Philip J. Oldiges
发明人： Huilong Zhu , Bruce B. Doris , Xinlin Wang , Jochen Beintner , Ying Zhang , Philip J. Oldiges
IPC分类号： H01L29/94
CPC分类号： H01L29/785 , H01L29/66795 , H01L29/7855 , H01L29/7856
摘要： A gated semiconductor device is provided, in which the body has a first dimension extending in a lateral direction parallel to a major surface of a substrate, and second dimension extending in a direction at least substantially vertical and at least substantially perpendicular to the major surface, the body having a first side and a second side opposite the first side. The gated semiconductor device includes a first gate overlying the first side, and having a first gate length in the lateral direction. The gated semiconductor device further includes a second gate overlying the second side, the second gate having a second gate length in the lateral direction which is different from, and preferably shorter than the first gate length. In one embodiment, the first gate and the second gate being electrically isolated from each other. In another embodiment the first gate consists essentially of polycrystalline silicon germanium and the second gate consists essentially of polysilicon.
摘要翻译：提供了门控半导体器件，其中主体具有在平行于衬底的主表面的横向方向上延伸的第一尺寸，以及在至少基本上垂直且至少基本垂直于主表面的方向上延伸的第二尺寸，所述主体具有与所述第一侧相对的第一侧和第二侧。门控半导体器件包括覆盖第一侧的第一栅极，并且在横向上具有第一栅极长度。门控半导体器件还包括覆盖第二侧的第二栅极，第二栅极在横向上具有不同于第一栅极长度的第二栅极长度，并且优选地短于第一栅极长度。在一个实施例中，第一栅极和第二栅极彼此电隔离。在另一个实施例中，第一栅极主要由多晶硅锗组成，第二栅极主要由多晶硅组成。

33. 发明申请

US20070166900A1 Device fabrication by anisotropic wet etch 失效
标题翻译：通过各向异性湿法蚀刻的器件制造
公开(公告)号：US20070166900A1
公开(公告)日：2007-07-19
申请号：US11333108
申请日：2006-01-17
申请人： Yujun Li , Kenneth Settlemyer , Jochen Beintner
发明人： Yujun Li , Kenneth Settlemyer , Jochen Beintner
IPC分类号： H01L21/8232 , H01L21/335 , H01L21/84 , H01L21/00
CPC分类号： H01L21/84 , H01L21/30608 , H01L27/1203 , H01L29/045 , H01L29/66772 , H01L29/66818 , H01L29/785
摘要： A method of fabrication and a field effect device structure are presented that reduce source/drain capacitance and allow for device body contact. A Si based material pedestal is produced, the top surface and the sidewalls of which are oriented in a way to be substantially parallel with selected crystallographic planes of the pedestal and of a supporting member. The pedestal is wet etched with an anisotropic solution containing ammonium hydroxide. The sidewalls of the pedestal become faceted forming a segment in the pedestal with a reduced cross section. The dopant concentration in the reduced cross section segment is chosen to be sufficiently high for it to provide for electrical continuity through the pedestal.
摘要翻译：提出了一种制造方法和场效应器件结构，其减少源/漏电容并允许器件接触。制造基于Si的材料基座，其顶表面和其侧壁的取向方向基本上平行于基座和支撑构件的选定结晶平面。用包含氢氧化铵的各向异性溶液湿式蚀刻基座。基座的侧壁变小，在基座上形成截面减小的部分。选择减小的横截面段中的掺杂剂浓度足够高以使其提供穿过基座的电连续性。

34. 发明申请

US20070063276A1 DENSE CHEVRON finFET AND METHOD OF MANUFACTURING SAME 有权
标题翻译： DENSE CHEVRON finFET及其制造方法
公开(公告)号：US20070063276A1
公开(公告)日：2007-03-22
申请号：US11162663
申请日：2005-09-19
申请人： Jochen Beintner , Thomas Ludwig , Edward Nowak
发明人： Jochen Beintner , Thomas Ludwig , Edward Nowak
IPC分类号： H01L27/12 , H01L21/20
CPC分类号： H01L21/845 , H01L27/1211 , H01L29/66795 , H01L29/785
摘要： A method, structure and alignment procedure, for forming a finFET. The method including, defining a first fin of the finFET with a first mask and defining a second fin of the finFET with a second mask. The structure including integral first and second fins of single-crystal semiconductor material and longitudinal axes of the first and second fins aligned in the same crystal direction but offset from each other. The alignment procedure including simultaneously aligning alignment marks on a gate mask to alignment targets formed separately by a first masked used to define the first fin and a second mask used to define the second fin.
摘要翻译：用于形成finFET的方法，结构和取向程序。该方法包括：用第一掩模限定finFET的第一鳍片，并用第二掩模限定finFET的第二鳍片。该结构包括单晶半导体材料的整体第一和第二鳍片以及第一和第二鳍片的纵向轴线在相同的晶体方向上排列但彼此偏移。对准过程包括同时将栅极掩模上的对准标记对准由通过用于限定第一鳍片的第一掩模单独形成的对准靶和用于限定第二鳍片的第二掩模。

35. 发明授权

US07091566B2 Dual gate FinFet 有权
标题翻译：双门FinFet
公开(公告)号：US07091566B2
公开(公告)日：2006-08-15
申请号：US10717737
申请日：2003-11-20
申请人： Huilong Zhu , Jochen Beintner , Bruce B. Doris , Ying Zhang
发明人： Huilong Zhu , Jochen Beintner , Bruce B. Doris , Ying Zhang
IPC分类号： H01L29/76 , H01L29/94 , H01L31/062 , H01L31/113 , H01L31/119
CPC分类号： H01L29/785 , H01L29/66795 , H01L29/7856
摘要： A field effect transistor (FET), integrated circuit (IC) chip including the FETs and a method of forming the FETS. Each FET includes a device gate along one side of a semiconductor (e.g., silicon) fin and a back bias gate along an opposite of the fin. Back bias gate dielectric differs from the device gate dielectric either in its material and/or thickness. Device thresholds can be adjusted by adjusting back bias gate voltage.
摘要翻译：包括FET的场效应晶体管（FET），集成电路（IC）芯片和形成FET的方法。每个FET包括沿半导体（例如，硅）翅片的一侧的器件栅极和沿鳍片相对的背偏置栅极。背偏置栅极电介质的不同之处在于器件栅极电介质的材料和/或厚度。可以通过调整背偏置栅极电压来调整器件阈值。

36. 发明申请

US20060157805A1 Structure and method of forming a notched gate field effect transistor 审中-公开
标题翻译：形成陷波栅场效应晶体管的结构和方法
公开(公告)号：US20060157805A1
公开(公告)日：2006-07-20
申请号：US11266245
申请日：2005-11-04
申请人： Jochen Beintner , Yujun Li , Naim Moumen , Porshia Wrschka
发明人： Jochen Beintner , Yujun Li , Naim Moumen , Porshia Wrschka
IPC分类号： H01L29/94
CPC分类号： H01L29/6659 , H01L21/26586 , H01L21/28044 , H01L21/28114 , H01L29/42376 , H01L29/49 , H01L29/665 , Y10S438/933
摘要： A structure and method of forming a notched gate MOSFET. A gate dielectric is formed on the surface of an active area on the semiconductor substrate. A layer of polysilicon is then deposited on the gate dielectric. This step is followed by depositing a layer of silicon germanium. The sidewalls of the polysilicon layer are then laterally etched, selective to the SiGe layer to create a notched gate conductor structure, with the SiGe layer being broader than the underlying polysilicon layer. Sidewall spacers are preferably formed on sidewalls of the SiGe layer and the polysilicon layer. A silicide layer is preferably formed as a self-aligned silicide from a polysilicon layer deposited over the SiGe layer. One or more other processing steps are preferably performed in completing the transistor.
摘要翻译：形成缺口栅极MOSFET的结构和方法。栅电介质形成在半导体衬底上的有源区的表面上。然后在栅极电介质上沉积多晶硅层。该步骤之后是沉积一层硅锗。然后横向蚀刻多晶硅层的侧壁，对SiGe层有选择性，以产生刻蚀的栅极导体结构，其中SiGe层比下面的多晶硅层宽。侧壁间隔物优选形成在SiGe层和多晶硅层的侧壁上。硅化物层优选从沉积在SiGe层上的多晶硅层形成为自对准硅化物。优选在完成晶体管时执行一个或多个其它处理步骤。

37. 发明申请

US20050277271A1 RAISED STI PROCESS FOR MULTIPLE GATE OX AND SIDEWALL PROTECTION ON STRAINED Si/SGOI STRUCTURE WITH ELEVATED SOURCE/DRAIN 失效
标题翻译：用于高压源/排水的应变Si / SGOI结构的多栅极氧化物和栅极保护的提高过程
公开(公告)号：US20050277271A1
公开(公告)日：2005-12-15
申请号：US10709963
申请日：2004-06-09
申请人： Jochen Beintner , Gary Bronner , Ramachandra Divakaruni , Byeong Kim
发明人： Jochen Beintner , Gary Bronner , Ramachandra Divakaruni , Byeong Kim
IPC分类号： C30B1/00 , H01L21/20 , H01L21/336 , H01L21/36 , H01L21/762 , H01L29/10 , H01L29/51 , H01L29/786
CPC分类号： H01L29/66628 , H01L21/76243 , H01L21/76251 , H01L29/1054 , H01L29/41783 , H01L29/516 , H01L29/517 , H01L29/6653 , H01L29/66742 , H01L29/7842 , H01L29/78687 , Y10S438/938
摘要： The present invention provides a strained/SGOI structure that includes an active device region of a relaxed SiGe layer, a strained Si layer located atop the relaxed SiGe layer, a raised source/drain region located atop a portion of the strained Si layer, and a stack comprising at least a gate dielectric and a gate polySi located on another portion of the strained Si layer; and a raised trench oxide region surrounding the active device region. The present invention also provides a method of forming such a structure. In the inventive method, the gate dielectric is formed prior to trench isolation formation thereby avoiding many of the problems associated with prior art processes in which the trench oxide is formed prior to gate dielectric formation.
摘要翻译：本发明提供了一种应变/ SGOI结构，其包括弛豫SiGe层的有源器件区，位于松弛SiGe层顶部的应变Si层，位于应变Si层的一部分顶部的凸起的源/漏区，以及包括位于应变Si层的另一部分上的至少栅极电介质和栅极多晶硅的堆叠; 以及围绕有源器件区域的凸起的沟槽氧化物区域。本发明还提供了一种形成这种结构的方法。在本发明的方法中，在沟槽隔离形成之前形成栅极电介质，从而避免了与在栅极电介质形成之前形成沟槽氧化物的现有技术工艺相关的许多问题。

38. 发明授权

US06759291B2 Self-aligned near surface strap for high density trench DRAMS 失效
标题翻译：用于高密度沟槽DRAMS的自对准近表面带
公开(公告)号：US06759291B2
公开(公告)日：2004-07-06
申请号：US10045499
申请日：2002-01-14
申请人： Ramachandra Divakaruni , Jochen Beintner , Jack A. Mandelman , Ulrike Gruening , Johann Alsmeier , Gary Bronner
发明人： Ramachandra Divakaruni , Jochen Beintner , Jack A. Mandelman , Ulrike Gruening , Johann Alsmeier , Gary Bronner
IPC分类号： H01L218234
CPC分类号： H01L27/10867
摘要： A method and structure for a dynamic random access memory device comprising a storage trench, a storage conductor within the storage trench, a lip strap connected to the storage conductor, and a control device electrically connected to the storage conductor through the lip strap. The trench contains a corner adjacent the control device and the lip strap and has a conductor surrounding the corner. The control device has a control device conductive region adjacent the trench and the lip strap and has a conductor extending along a side of the trench and along a portion of the control device conductive region. In addition, the device can have a collar insulator along a top portion of the trench, wherein the lip strap includes a conductor extending from a top of the collar to a top of the trench. The lip strap can also extend along a surface of the device adjacent the trench and perpendicular to the trench. A node dielectric, lining the trench where the lip strap surrounds an upper portion of the node dielectric, is adjacent the top portion of the trench and can have a trench top oxide where the lip strap extends into the trench top oxide and forms an inverted U-shaped structure. Further, the lip strap can include a conductor extending along two perpendicular portions of a top corner of the trench.
摘要翻译：一种用于动态随机存取存储器件的方法和结构，包括存储沟槽，存储沟槽内的存储导体，连接到存储导体的唇带，以及通过唇带电连接到存储导体的控制装置。沟槽包含一个与控制装置和唇带相邻的拐角，并具有围绕拐角的导体。控制装置具有与沟槽和唇缘相邻的控制装置导电区域，并且具有沿着沟槽的一侧沿着控制装置导电区域的一部分延伸的导体。此外，该装置可以沿着沟槽的顶部具有环形绝缘体，其中，唇缘带包括从套环的顶部延伸到沟槽的顶部的导体。唇带还可以沿邻近沟槽的表面延伸并垂直于沟槽。衬垫在沟槽上的节点电介质，其中唇缘带围绕节点电介质的上部，与沟槽的顶部部分相邻，并且可以具有沟槽顶部氧化物，其中唇缘带延伸到沟槽顶部氧化物中并形成倒U形形结构。此外，唇带可以包括沿着沟槽的顶角的两个垂直部分延伸的导体。

39. 发明授权

US06607984B1 Removable inorganic anti-reflection coating process 有权
标题翻译：可拆卸的无机防反射涂层工艺
公开(公告)号：US06607984B1
公开(公告)日：2003-08-19
申请号：US09597122
申请日：2000-06-20
申请人： Gill Yong Lee , Scott D. Halle , Jochen Beintner
发明人： Gill Yong Lee , Scott D. Halle , Jochen Beintner
IPC分类号： H01L21302
CPC分类号： H01L21/0276 , G03F7/091 , H01L21/31116 , H01L21/31133 , H01L21/3145 , H01L27/10861
摘要： In accordance with the present invention, a method for employing and removing inorganic anti-reflection coatings, includes the steps of providing a first dielectric layer on a semiconductor device structure to be processed, the first dielectric layer being selectively removable relative to the semiconductor device structure, and forming an inorganic dielectric anti-reflection coating (DARC) on the first dielectric layer, the DARC being selectively removable relative to the first dielectric layer. A resist layer is patterned on the DARC. The resist is selectively removable relative to the DARC. The semiconductor device structure is etched, and the resist layer, the DARC and the first dielectric layer are selectively removed.
摘要翻译：根据本发明，一种采用和去除无机抗反射涂层的方法包括以下步骤：在要加工的半导体器件结构上提供第一介电层，第一介电层可相对于半导体器件结构选择性地去除，并且在所述第一电介质层上形成无机介电抗反射涂层（DARC），所述DARC可相对于所述第一介电层选择性地去除。抗蚀剂层在DARC上图案化。抗蚀剂相对于DARC有选择性地可去除。蚀刻半导体器件结构，并且选择性地去除抗蚀剂层，DARC和第一介电层。

40. 发明授权

US06369419B1 Self-aligned near surface strap for high density trench DRAMS 失效
标题翻译：用于高密度沟槽DRAMS的自对准近表面带
公开(公告)号：US06369419B1
公开(公告)日：2002-04-09
申请号：US09603657
申请日：2000-06-23
申请人： Ramachandra Divakaruni , Jochen Beintner , Jack A. Mandelman , Ulrike Gruening , Johann Alsmeier , Gary Bronner
发明人： Ramachandra Divakaruni , Jochen Beintner , Jack A. Mandelman , Ulrike Gruening , Johann Alsmeier , Gary Bronner
IPC分类号： H01L2994
CPC分类号： H01L27/10867
摘要： A method and structure for a dynamic random access memory device comprising a storage trench, a storage conductor within the storage trench, a lip strap connected to the storage conductor, and a control device electrically connected to the storage conductor through the lip strap. The trench contains a corner adjacent the control device and the lip strap and has a conductor surrounding the corner. The control device has a control device conductive region adjacent the trench and the lip strap and has a conductor extending along a side of the trench and along a portion of the control device conductive region. In addition, the device can have a collar insulator along a top portion of the trench, wherein the lip strap includes a conductor extending from a top of the collar to a top of the trench. The lip strap can also extend along a surface of the device adjacent the trench and perpendicular to the trench. A node dielectric, lining the trench where the lip strap surrounds an upper portion of the node dielectric, is adjacent the top portion of the trench and can have a trench top oxide where the lip strap extends into the trench top oxide and forms an inverted U-shaped structure. Further, the lip strap can include a conductor extending along two perpendicular portions of a top corner of the trench.
摘要翻译：一种用于动态随机存取存储器件的方法和结构，包括存储沟槽，存储沟槽内的存储导体，连接到存储导体的唇带，以及通过唇带电连接到存储导体的控制装置。沟槽包含一个与控制装置和唇带相邻的拐角，并具有围绕拐角的导体。控制装置具有与沟槽和唇缘相邻的控制装置导电区域，并且具有沿着沟槽的一侧沿着控制装置导电区域的一部分延伸的导体。此外，该装置可以沿着沟槽的顶部具有环形绝缘体，其中，唇缘带包括从套环的顶部延伸到沟槽的顶部的导体。唇带还可以沿邻近沟槽的表面延伸并垂直于沟槽。衬垫在沟槽上的节点电介质，其中唇缘带围绕节点电介质的上部，与沟槽的顶部部分相邻，并且可以具有沟槽顶部氧化物，其中唇缘带延伸到沟槽顶部氧化物中并形成倒U形形结构。此外，唇带可以包括沿着沟槽的顶角的两个垂直部分延伸的导体。

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