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    • 31. 发明申请
    • III-Nitride current control device and method of manufacture
    • III型氮化物电流控制装置及其制造方法
    • US20050194612A1
    • 2005-09-08
    • US11040312
    • 2005-01-21
    • Robert Beach
    • Robert Beach
    • H01L21/335H01L29/20H01L29/423H01L29/778H01L29/872H01L31/0328H01L31/0336
    • H01L29/7787H01L29/2003H01L29/42316H01L29/66462H01L29/872
    • A III-nitride device includes a recessed electrode to produce a nominally off, or an enhancement mode, device. By providing a recessed electrode, a conduction channel formed at the interface of two III-nitride materials is interrupted when the electrode contact is inactive to prevent current flow in the device. The electrode can be a schottky contact or an insulated metal contact. Two ohmic contacts can be provided to form a rectifier device with nominally off characteristics. The recesses formed with the electrode can have sloped sides. The electrode can be formed in a number of geometries in conjunction with current carrying electrodes of the device. A nominally on device, or pinch resistor, is formed when the electrode is not recessed. A diode is also formed by providing non-recessed ohmic and schottky contacts through an insulator to an AlGaN layer.
    • III族氮化物器件包括用于产生名义上关闭的凹陷电极或增强模式的器件。 通过设置凹陷电极,当电极接触不活动以阻止电流在器件中时,形成在两个III族氮化物材料的界面处的导电通道被中断。 电极可以是肖特基接触或绝缘金属接触。 可以提供两个欧姆接触以形成具有标称关闭特性的整流器件。 形成有电极的凹部可以具有倾斜的侧面。 电极可以结合设备的载流电极以多种几何形状形成。 当电极不凹陷时,形成标称的器件或夹持电阻器。 还通过将绝缘体提供非凹入的欧姆和肖特基接触到AlGaN层来形成二极管。
    • 33. 发明申请
    • Field effect transistor with enhanced insulator structure
    • 具有增强的绝缘体结构的场效应晶体管
    • US20050121661A1
    • 2005-06-09
    • US11004187
    • 2004-12-03
    • Robert Beach
    • Robert Beach
    • H01L29/20H01L29/778H01L29/06
    • H01L29/7787H01L29/2003
    • A III-nitride based field effect transistor obtains improved performance characteristics through manipulation of the relationship between the in-plane lattice constant of the interface of material layers. A high mobility two dimensional electron gas generated at the interface of the III-nitride materials permits high current conduction with low ON resistance, and is controllable through the manipulation of spontaneous polarization fields obtained according to the characteristics of the III-nitride material. The field effect transistor produced can be made to be a nominally on device where the in-plane lattice constants of the material forming the interface match. A nominally off device may be produced where one of the material layers has an in-plane lattice constant that is larger than that of the other layer material. The layer materials are preferably InAlGaN/GaN layers that are particularly tailored to the characteristics of the present invention.
    • 基于III族氮化物的场效应晶体管通过处理材料层的界面的面内晶格常数之间的关系来获得改进的性能特性。 在III族氮化物材料的界面处产生的高迁移率二维电子气体允许具有低导通电阻的高电流传导,并且可以通过操纵根据III族氮化物材料的特性获得的自发极化场来控制。 所产生的场效应晶体管可以在名义上成为形成界面的材料的面内晶格常数匹配的器件上。 可以制造名义上关闭的装置,其中材料层之一的面内晶格常数大于其它层材料的面内晶格常数。 层材料优选是特别适合于本发明特征的InAlGaN / GaN层。