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    • 32. 发明授权
    • Method and apparatus for cleaning the edge of a thin disc
    • 用于清洁薄盘边缘的方法和装置
    • US6119708A
    • 2000-09-19
    • US191057
    • 1998-11-11
    • Boris FishkinBrian J. BrownJianshe Tang
    • Boris FishkinBrian J. BrownJianshe Tang
    • H01L21/00B08B3/12
    • H01L21/67057Y10S134/902
    • A method and apparatus for cleaning wafer edges is provided. The inventive wafer cleaner employs a transducer equal in length to the diameter of a wafer to be cleaned, and positioned to direct sonic energy in line with the wafer's edge. Supporting and rotating mechanisms are positioned along the wafer's edge, outside of the transducer's high energy field, and preferably such that approximately 50 percent of the wafer is positioned between the wafer supports and the transducer. Therefore, minimal sonic energy is blocked from reaching the wafer's surface. The transducer dimensions relative to the wafer, and the positioning of the wafer supports relative to the transducer enable the system to achieve an approximately 50 percent edge cleaning duty cycle as the wafer is rotated.
    • 提供了一种用于清洁晶片边缘的方法和装置。 本发明的晶片清洁器采用与要清洁的晶片的直径相等的换能器,并定位成引导与晶片边缘一致的声能。 支撑和旋转机构沿着晶片的边缘定位在换能器的高能场外部,并且优选地使得大约50%的晶片位于晶片支架和换能器之间。 因此,最小的声能被阻止到达晶片的表面。 相对于晶片的换能器尺寸以及晶片支撑件相对于换能器的定位使得系统能够在晶片旋转时实现大约50%的边缘清洁占空比。
    • 38. 发明申请
    • STENT
    • US20120265292A1
    • 2012-10-18
    • US13531064
    • 2012-06-22
    • Graig L. KveenTimothy G. J. EhrBrian J. Brown
    • Graig L. KveenTimothy G. J. EhrBrian J. Brown
    • A61F2/82
    • A61F2/915A61F2/91A61F2002/91533A61F2002/91541A61F2002/91583
    • A radially expandable stent comprising a plurality of spaced band-like elements and intersecting links is disclosed. The band-like elements have a generally serpentine configuration to provide continuous waves of generally sinusoidal character to each band-like element. The waves are characterized by a plurality of peaks and troughs taking a generally longitudinal direction along the cylinder such that the waves in the band-like elements open as the stent is expanded from a first diameter to a second diameter. The intersecting links are substantially U-shaped and terminate in first and second shanks. The first shank of a link emanates from a region between a peak and trough on a band-like element and the second shank of the link emanates from a region between a peak and trough on an adjacent band-like element.
    • 公开了一种包括多个间隔开的带状元件和相交连接件的可径向扩张的支架。 带状元件具有大致蛇形结构,以向每个带状元件提供大致正弦曲线的连续波。 波的特征在于沿着圆柱体大致纵向方向的多个峰和谷,使得当支架从第一直径扩展到第二直径时,带状元件中的波浪打开。 交叉连接件基本上为U形并终止在第一和第二柄部中。 链节的第一柄从带状元件上的峰和谷之间的区域发出,并且链节的第二柄从相邻带状元件上的峰和谷之间的区域发出。