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31. 发明授权

US07141496B2 Method of treating microelectronic substrates 失效
标题翻译：处理微电子基板的方法
公开(公告)号：US07141496B2
公开(公告)日：2006-11-28
申请号：US10762905
申请日：2004-01-22
申请人： James P. DeYoung , James B. McClain , Stephen M. Gross , Doug Taylor , Mark I. Wagner , David Brainard
发明人： James P. DeYoung , James B. McClain , Stephen M. Gross , Doug Taylor , Mark I. Wagner , David Brainard
IPC分类号： H01L21/44
CPC分类号： H01L21/32051 , H01L21/283 , H01L21/288 , H01L21/76814 , H01L21/76843 , H01L21/76871
摘要： A method of treating a dielectric surface portion of a semiconductor substrate, comprising the steps of: (a) providing a semiconductor substrate having a dielectric surface portion; and then (b) treating said dielectric surface portion with a coating reagent, the coating reagent comprising a reactive group coupled to a coordinating group, with the coordinating group having a metal bound thereto, so that the metal is deposited on the dielectric surface portion to produce a surface portion treated with a metal.
摘要翻译：一种处理半导体衬底的电介质表面部分的方法，包括以下步骤：（a）提供具有电介质表面部分的半导体衬底; 然后（b）用涂层试剂处理所述电介质表面部分，所述涂覆试剂包含与配位基团偶联的反应基团，所述配位基团与其结合金属，使得金属沉积在电介质表面部分上产生用金属处理的表面部分。

32. 发明授权

US06919167B2 Positive tone lithography in carbon dioxide solvents 失效
标题翻译：二氧化碳溶剂中的正色光刻技术
公开(公告)号：US06919167B2
公开(公告)日：2005-07-19
申请号：US10294222
申请日：2002-11-14
申请人： James DeYoung , James B. McClain
发明人： James DeYoung , James B. McClain
IPC分类号： G03F20060101 , G03F7/00 , G03F7/32 , G03F7/36
CPC分类号： G03F7/36 , G03F7/32 , G03F7/325 , G03F7/327
摘要： A method for carrying out positive tone lithography with a carbon dioxide solvent system is carried out by (a) providing a substrate having a polymer resist layer formed thereon; (b) exposing at least one portion of the polymer resist layer to radiant energy to form at least one light field region in the polymer resist layer; and then (c) contacting the polymer resist layer to a carbon dioxide solvent system, the solvent system preferably comprising a polar group, under conditions in which the at least one light field region is preferentially removed.
摘要翻译：通过（a）提供其上形成有聚合物抗蚀剂层的基材，进行用二氧化碳溶剂系统进行正色调光刻的方法; （b）将聚合物抗蚀剂层的至少一部分暴露于辐射能以在聚合物抗蚀剂层中形成至少一个光场区域; 然后（c）在其中优选除去所述至少一个光场区域的条件下，使所述聚合物抗蚀剂层与二氧化碳溶剂体系接触，所述溶剂体系优选包含极性基团。

33. 发明授权

US06905555B2 Methods for transferring supercritical fluids in microelectronic and other industrial processes 失效
标题翻译：在微电子和其他工业过程中转移超临界流体的方法
公开(公告)号：US06905555B2
公开(公告)日：2005-06-14
申请号：US10448474
申请日：2003-05-30
申请人： James P. DeYoung , James B. McClain , Stephen M. Gross , Mark I. Wagner
发明人： James P. DeYoung , James B. McClain , Stephen M. Gross , Mark I. Wagner
IPC分类号： B05D1/18 , B08B7/00 , B81B3/00 , B81C1/00 , H01L21/00 , H01L21/306 , B08B3/00
CPC分类号： B08B7/0021 , B05D1/18 , B05D2401/90 , H01L21/02063 , H01L21/02101 , H01L21/67017 , H01L21/67028 , Y10T137/0324
摘要： A method of displacing a supercritical fluid from a pressure vessel (e.g., in a microelectronic manufacturing process), with the steps of: providing an enclosed pressure vessel containing a first supercritical fluid (said supercritical fluid preferably comprising carbon dioxide); adding a second fluid (typically also a supercritical fluid) to said vessel, with said second fluid being added at a pressure greater than the pressure of the first supercritical fluid, and with said second fluid having a density less than that of the first supercritical fluid; forming an interface between the first supercritical fluid and the second fluid; and displacing at least a portion of the first supercritical fluid from the vessel with the pressure of the second, preferably fluid while maintaining the interface therebetween.
摘要翻译：一种从压力容器（例如，在微电子制造过程中）置换超临界流体的方法，其步骤包括：提供包含第一超临界流体（所述超临界流体优选包含二氧化碳）的封闭压力容器; 向所述容器中加入第二流体（通常也是超临界流体），其中所述第二流体以大于第一超临界流体的压力的压力加入，并且所述第二流体的密度小于第一超临界流体的密度 ; 在所述第一超临界流体和所述第二流体之间形成界面; 并且使第二超临界流体的至少一部分与第二流体（优选流体）的压力从容器移位，同时保持其间的界面。

34. 发明授权

US06711773B2 Detergent injection methods for carbon dioxide cleaning apparatus 失效
标题翻译：二氧化碳清洗设备的洗涤剂注射方法
公开(公告)号：US06711773B2
公开(公告)日：2004-03-30
申请号：US10234766
申请日：2002-09-04
申请人： James P. DeYoung , Timothy J. Romack , James B. McClain
发明人： James P. DeYoung , Timothy J. Romack , James B. McClain
IPC分类号： D06B2320
CPC分类号： D06F43/005 , B08B7/0021 , D06F43/007 , D06F43/08
摘要： A system for the controlled addition of detergent formulations and the like to a carbon dioxide cleaning apparatus comprises: (a) a high pressure wash vessel; (b) an auxiliary vessel; (c) a drain line connecting the auxiliary vessel to the wash vessel; (d) optionally but preferably, a separate vent line connecting the auxiliary vessel to the wash vessel; (e) a detergent reservoir; and (f) a detergent supply line connecting the detergent reservoir to the auxiliary vessel. An advantage of this apparatus is that, because the detergent formulation can be pumped into the auxiliary vessel in a predetermined aliquot or amount, which predetermined aliquot or amount can then be transferred into the wash vessel where it combines with the liquid carbon dioxide cleaning solution, the detergent formulation can be added to the cleaning solution in a more controlled or accurate manner. An alternate embodiment adapted for the addition of aqueous detergent formulations and the like to a carbon dioxide dry cleaning system under turbulent conditions comprises: (a) a high pressure wash vessel; (b) a filter; (c) a carbon dioxide cleaning solution drain line interconnecting the wash vessel to the filter; (d) a carbon dioxide cleaning solution supply line connecting the filter to the wash vessel; (e) a first high pressure pump (i.e., a pump that is capable of pumping liquid solutions comprising liquid carbon dioxide) operably connected to the drain line; (f) a detergent formulation reservoir; (g) a detergent formulation supply line connecting the reservoir to the carbon dioxide cleaning solution supply line; and (h) a second high pressure pump operably connected to the detergent formulation supply line for transferring detergent formulation from the detergent formulation reservoir into the carbon dioxide cleaning solution under turbulent conditions.
摘要翻译：用于将二氧化碳清洗装置中洗涤剂配方等控制加入的系统包括：（a）高压洗涤容器; （b）辅助船只; （c）将辅助容器连接到洗涤容器的排水管线; （d）可选地，但优选地，将辅助容器连接到洗涤容器的单独排放管线; （e）洗涤剂储存器; 和（f）将洗涤剂储存器连接到辅助容器的洗涤剂供应管线。该设备的优点在于，由于洗涤剂配方可以以预定的等分试样或数量泵送到辅助容器中，该预定的等分试样或数量可随后被转移到与液体二氧化碳清洗溶液结合的洗涤容器中，洗涤剂配方可以以更受控制或更准确的方式添加到清洁溶液中。适于在湍流条件下将含水洗涤剂配方等添加到二氧化碳干洗系统的替代实施方案包括：（a）高压洗涤容器; （b）过滤器; （c）将洗涤容器与过滤器相互连接的二氧化碳清洗液排出管线; （d）将过滤器连接到洗涤容器的二氧化碳清洗溶液供应管线; （e）可操作地连接到排出管线的第一高压泵（即，能够泵送包含液体二氧化碳的液体溶液的泵）; （f）洗涤剂配制容器; （g）将储存器连接到二氧化碳清洗溶液供应管线的洗涤剂配制剂供应管线; 和（h）第二高压泵，其可操作地连接到洗涤剂配方供应管线，用于将洗涤剂配方从紊乱的条件下将洗涤剂配制剂从洗涤剂配制容器转移到二氧化碳清洗溶液中。

35. 发明授权

US06613157B2 Methods for removing particles from microelectronic structures 失效
公开(公告)号：US06613157B2
公开(公告)日：2003-09-02
申请号：US09951092
申请日：2001-09-13
申请人： James P. DeYoung , James B. McClain , Stephen M. Gross
发明人： James P. DeYoung , James B. McClain , Stephen M. Gross
IPC分类号： B08B300
CPC分类号： B08B7/0021 , C23G5/00 , H01L21/02063 , Y10S134/902 , Y10S438/906
摘要： A method of cleaning and removing solid particles during a manufacturing process from a microelectronic device such as a resist-coated semiconductor substrate, a MEM's device, or an optoelectronic device comprising the steps of: (a) providing a partially fabricated integrated circuit, MEM's device, or optoelectronic device having water and entrained solutes on the substrate; (b) providing a densified (e.g., liquid or supercritical) carbon dioxide cleaning composition, the cleaning composition comprising carbon dioxide and a cleaning adjunct, the cleaning adjunct selected from the group consisting of cosolvents, surfactants, and combinations thereof; (c) immersing the surface portion in the densified carbon dioxide cleaning composition to remove solid particles from the surface portion; and then (d) removing the cleaning composition from the surface portion. Process parameters are controlled so that the cleaning composition is maintained as a homogeneous composition during the immersing step, the removing step, or both the immersing and removing step, without substantial deposition of the drying/cleaning adjunct or solid particles on the substrate.

36. 发明授权

US06491730B1 Pre-treatment methods and compositions for carbon dioxide dry cleaning 有权
标题翻译：用于二氧化碳干洗的预处理方法和组合物
公开(公告)号：US06491730B1
公开(公告)日：2002-12-10
申请号：US09621314
申请日：2000-07-20
申请人： David F. Cauble, Jr. , James P. DeYoung , James B. McClain , Bernadette Storey-Laubach
发明人： David F. Cauble, Jr. , James P. DeYoung , James B. McClain , Bernadette Storey-Laubach
IPC分类号： D06L108
CPC分类号： D06L1/00 , D06L1/16
摘要： A method for dry-cleaning articles such as fabrics and clothing in carbon dioxide. The article includes a stained portion or region, which is pretreated with a pretreatment composition prior to initiating the cleaning cycle. The pretreatment step is followed by contacting the pretreated article to be cleaned with a liquid dry cleaning composition for a time sufficient to clean the article. The liquid dry-cleaning composition comprises a mixture of carbon dioxide, a surfactant, and an organic co-solvent. After the contacting step, the article is separated from the liquid dry cleaning composition. The pretreatment composition, in a preferred embodiment, comprises at least one of (a) a surfactant; (b) d-limonene, and (c) a C12-C15 alkane co-solvent. Preferably the pretreatment composition comprises at least two, and in some particularly preferred embodiments, the pretreatment composition comprises all three, of the aforesaid ingredients.
摘要翻译：用于在二氧化碳中干燥诸如织物和衣服的物品的方法。该制品包括染色部分或区域，其在开始清洁循环之前用预处理组合物预处理。预处理步骤之后，将待处理的待处理制品与液体干洗组合物接触足够时间以清洁制品。液体干洗组合物包含二氧化碳，表面活性剂和有机共溶剂的混合物。在接触步骤之后，将物品与液体干洗组合物分离。在优选实施方案中，预处理组合物包含以下中的至少一种：（a）表面活性剂; （b）d-柠檬烯，和（c）C12-C15烷烃共溶剂。优选地，预处理组合物包含至少两种，在一些特别优选的实施方案中，预处理组合物包含所有三种上述成分。

37. 发明授权

US06397421B1 Methods and apparatus for conserving vapor and collecting liquid carbon dioxide for carbon dioxide dry cleaning 失效
标题翻译：用于保存蒸汽和收集液态二氧化碳进行二氧化碳干洗的方法和装置
公开(公告)号：US06397421B1
公开(公告)日：2002-06-04
申请号：US09404957
申请日：1999-09-24
申请人： David E. Brainard , James B. McClain , Michael E. Cole , Steve L. Worm
发明人： David E. Brainard , James B. McClain , Michael E. Cole , Steve L. Worm
IPC分类号： D06B1500
CPC分类号： D06F43/08 , D06F43/007
摘要： A method for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the method includes removing carbon dioxide vapor from a wash tank to a vapor tank, storing the carbon dioxide vapor in the vapor tank; and charging the wash tank with carbon dioxide vapor from the vapor tank. The method may be performed as part of a wash cycle that includes filling the wash tank with cleaning solution, washing articles to be cleaned in the wash tank, and emptying the cleaning solution out of the wash tank. An apparatus may also be employed for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the apparatus includes a wash tank for contacting the articles to be cleaned with the liquid carbon dioxide cleaning solution, a working tank for storing liquid carbon dioxide cleaning solution, a vapor tank for storing carbon dioxide vapor, a first piping system providing fluid communication between the wash tank and the vapor tank, where the first piping system includes a first line and a first valve residing in the first line, and a second piping system providing fluid communication between the working tank and the wash tank. Methods and apparatus for collecting liquid carbon dioxide in a collecting tank are also provided.
摘要翻译：一种在二氧化碳干洗系统中保存二氧化碳蒸汽的方法，该系统采用液态二氧化碳清洗液清洁物品，其中该方法包括将二氧化碳蒸气从洗涤槽中除去至蒸气罐，将二氧化碳蒸气储存在蒸气中坦克; 并将来自蒸气罐的二氧化碳蒸汽向洗涤槽充电。该方法可以作为洗涤循环的一部分进行，其包括用洗涤溶液填充洗涤槽，在洗涤槽中清洗要清洗的物品，并将清洗溶液从清洗槽中排出。还可以使用一种装置来保存二氧化碳干洗系统中的二氧化碳蒸气，二氧化碳干洗系统采用液态二氧化碳清洗液来清洁物品，其中该设备包括用于将待清洗的物品与液体二氧化碳清洗液接触的洗涤槽，用于储存液体二氧化碳清洗溶液的工作罐，用于储存二氧化碳蒸气的蒸气罐，提供洗涤槽和蒸汽箱之间流体连通的第一管道系统，其中第一管道系统包括第一管线和第一阀居住在第一行，以及第二管道系统，其在工作罐和洗涤槽之间提供流体连通。还提供了用于在收集罐中收集液体二氧化碳的方法和装置。

38. 发明授权

US06351973B1 Internal motor drive liquid carbon dioxide agitation system 失效
标题翻译：内部电机驱动液体二氧化碳搅拌系统
公开(公告)号：US06351973B1
公开(公告)日：2002-03-05
申请号：US09497308
申请日：2000-02-03
申请人： James B. McClain , Gary C. Schrebe
发明人： James B. McClain , Gary C. Schrebe
IPC分类号： D06F4302
CPC分类号： D06F43/02
摘要： A cleaning apparatus adapted for use with a carbon dioxide cleaning medium comprises a body member, a door connected to the body member and together with the body member forming a pressure vessel, a basket disposed within the body member, a motor contained within the pressure vessel, and a drive mechanism contained within the pressure vessel for rotating the basket with the motor. Because the motor and drive mechanism are both contained within the pressure vessel, the need for a rotating shaft that penetrates the pressure vessel, and which must be sealed at least in part against the high pressure liquid contained therein, is obviated.
摘要翻译：适用于二氧化碳清洁介质的清洁装置包括主体构件，连接到主体构件的门，以及形成压力容器的主体构件，设置在主体构件内的篮子，容纳在压力容器内的马达以及包含在压力容器内的驱动机构，用于使电动机旋转筐。因为电动机和驱动机构都被包含在压力容器内，所以需要一个贯穿压力容器的旋转轴，并且必须至少部分地与其中包含的高压液体密封。

39. 发明授权

US06270844B1 Method of impregnating a porous polymer substrate 有权
公开(公告)号：US06270844B1
公开(公告)日：2001-08-07
申请号：US09740779
申请日：2000-12-19
申请人： James B. McClain , Timothy J. Romack , James P. DeYoung
发明人： James B. McClain , Timothy J. Romack , James P. DeYoung
IPC分类号： B05D100
摘要： A method of treating a substrate comprises contacting a surface of said substrate, with a pressurized fluid comprising carbon dioxide and a surface treatment component, the surface treatment component being entrained in the pressurized fluid and contacting the surface so that the surface treatment component lowers the surface tension of the surface of the substrate and treats the substrate. The contacting step is preferably carried out by immersion, the fluid is preferably a liquid or supercritical fluid, the substrate is preferably a metal or fabric substrate, and the surface treatment component is preferably a fluoroacrylate polymer.

40. 发明授权

US06233772B1 Carbon dioxide cleaning apparatus with rotating basket and external drive 失效
标题翻译：带旋转篮和外部驱动器的二氧化碳清洗设备
公开(公告)号：US06233772B1
公开(公告)日：2001-05-22
申请号：US09306360
申请日：1999-05-06
申请人： James B. McClain , Gary Schrebe
发明人： James B. McClain , Gary Schrebe
IPC分类号： D06B2318
CPC分类号： D06F43/007 , D06F37/28 , D06F37/308 , D06F43/00 , D06F43/02 , D06F43/08
摘要： A cleaning apparatus adapted for cleaning fabrics, garments and the like with a carbon dioxide cleaning medium comprises a wash vessel having a wall portion; a rotating basket positioned in the wash vessel; a drive shaft penetrating the wash vessel wall portion, the shaft operatively associated with the rotating basket; a double mechanical seal connected to the wall portion with the drive shaft passing therethrough; a seal liquid reservoir; a seal liquid inlet line connected to the seal liquid reservoir and the double mechanical seal and configured to supply seal liquid to the double mechanical seal; and a pump, compressed gas line, or other pressure supply means operatively associated with the seal liquid reservoir for maintaining the pressure of seal liquid in the double mechanical seal sufficient to seal the rotating shaft when the wash vessel contains a liquid carbon dioxide cleaning medium from escape of cleaning medium around the rotating shaft. Means such as a pump operatively associated with inlet and outlet lines are provided for circulating liquid carbon dioxide cleaning medium through the wash vessel during cleaning of articles therein. A motor or other drive means is operatively associated with the drive shaft for rotating the rotating basket during cleaning of articles therein. The seal liquid is preferably selected to be compatible with (e.g., soluble in) the cleaning medium.
摘要翻译：适于用二氧化碳清洁介质清洁织物，衣服等的清洁装置包括具有壁部分的洗涤容器; 位于洗涤容器内的旋转篮子; 穿过洗涤容器壁部分的驱动轴，所述轴与所述旋转篮可操作地相关联; 连接到壁部分的双重机械密封件，其中驱动轴穿过其中; 密封液储存器; 连接到密封液体储存器的密封液体入口管线和双重机械密封件，并且构造成将密封液体供应到双重机械密封件; 以及与密封液体储存器可操作地相关联的泵，压缩气体管线或其他压力供应装置，用于在双重机械密封件中保持密封液体的压力足以在洗涤容器含有液体二氧化碳清洁介质时密封旋转轴，清洁介质绕旋转轴的逸出。提供诸如与入口管线和出口管线可操作地相关联的泵的装置，用于在其中清洁物品期间循环液体二氧化碳清洁介质通过洗涤容器。马达或其他驱动装置与驱动轴可操作地相关联，用于在清洁物品的过程中转动旋转的筐。优选选择密封液体与（例如溶解于）清洁介质相容。

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