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    • 31. 发明授权
    • Method for detecting end point of titration
    • 检测滴定终点的方法
    • US4582572A
    • 1986-04-15
    • US608965
    • 1984-05-10
    • Seiji Ishikawa
    • Seiji Ishikawa
    • G01N27/26G01N27/44G01N31/16G01N27/42
    • G01N31/164
    • An end point of polarization titration is detected by the steps of passing constant DC pulse having a magnitude of 0.1-100 .mu.A between a pair of detection electrodes immersed in a solution to be titrated, detecting a polarization state generated between the detection electrodes at each current passage before the polarization reaches an equilibrium state and judging the end point based on the detected polarization state. The polarization state is detected by integrating a polarization potential generated at each current passage and the polarization is eliminated by short circuiting the detection electrodes before passing the next DC pulse.
    • 通过在浸没在待滴定溶液中的一对检测电极之间通过使具有0.1-100μA量级的恒定DC脉冲的步骤来检测极化滴定的终点,检测在每个检测电极之间产生的偏振状态 极化前的电流通过达到平衡状态,并根据检测到的极化状态判断终点。 通过积分在每个电流通道处产生的极化电位来检测极化状态,并且通过在通过下一个DC脉冲之前短路检测电极来消除偏振。
    • 35. 发明授权
    • Maskless exposure method
    • 无掩膜曝光方法
    • US08274642B2
    • 2012-09-25
    • US12390687
    • 2009-02-23
    • Hiroyasu MatsuuraSeiji IshikawaTadamichi WachiToshimasa Ishigaki
    • Hiroyasu MatsuuraSeiji IshikawaTadamichi WachiToshimasa Ishigaki
    • G03B27/32G03B27/44G03B27/42
    • G03F7/70791G03F7/70433
    • A maskless exposure method of drawing a circuit pattern includes: moving a substrate with respect to a projection optical system; scanning, by the projection optical system, the substrate in a first direction; shifting a scanning region in a second direction; scanning the substrate in the first direction so that an overlapping part is formed. A plurality of marks different from the circuit pattern are exposed in a vicinity of the overlapping part. The plurality of marks are a set of marks at least including two marks disposed on one side of the overlapping part and two marks disposed on another side of the overlapping part. Deviations between the pair of the scanning regions, an inclination of exposing light, and a yawing angle of a stage are analyzed by measuring deviations of distances among the plurality of marks. Calibration data are obtained from a result of the analyzing.
    • 绘制电路图案的无掩模曝光方法包括:相对于投影光学系统移动基板; 通过投影光学系统沿第一方向扫描基板; 沿第二方向移动扫描区域; 在第一方向扫描基板,从而形成重叠部分。 与电路图案不同的多个标记在重叠部分附近露出。 多个标记是至少包括设置在重叠部分的一侧上的两个标记和设置在重叠部分的另一侧上的两个标记的一组标记。 通过测量多个标记之间的距离的偏差来分析一对扫描区域之间的偏差,曝光的倾斜度和舞台的偏航角度。 校准数据是从分析结果中获得的。
    • 36. 发明授权
    • Semiconductor device yield prediction system and method
    • 半导体器件产量预测系统及方法
    • US07945410B2
    • 2011-05-17
    • US11836199
    • 2007-08-09
    • Natsuyo MoriokaSeiji IshikawaKatsumi IkegayaYasunori YamaguchiKazuo ItoYuichi Hamamura
    • Natsuyo MoriokaSeiji IshikawaKatsumi IkegayaYasunori YamaguchiKazuo ItoYuichi Hamamura
    • G01N37/00G06F19/00
    • G05B15/02G05B17/02
    • An average fault ratio is calculated from product characteristics of a product as a target of yield prediction, in order to predict yield accurately in the course of manufacturing the prediction target product.With respect to a reference product, whose wiring pattern is different from the prediction target product but manufactured by the same manufacturing process, a monthly electric fault density is calculated from actually measured data. Respective average fault ratios are obtained from product characteristics of the prediction target product and the reference product. A monthly electric fault density of the prediction target product is obtained by multiplying the monthly electric fault density of the reference product by the ratio of the average fault ratios. The yield is calculated by using the monthly electric fault density of the month in which a yield prediction target lot of the prediction target product was processed.
    • 从作为产量预测目标的产品的产品特性计算平均故障率,以便在制造预测目标产品的过程中准确地预测产量。 对于其参考产品,其布线图案与预测目标产品不同但通过相同的制造工艺制造,每月电故障密度由实际测量数据计算。 相应的平均故障率是从预测目标产品和参考产品的产品特性获得的。 通过将参考产品的每月电气故障密度乘以平均故障率的比率来获得预测目标乘积的每月电气故障密度。 通过使用处理预测目标产品的产量预测目标批次的月份的每月电气故障密度来计算产量。
    • 38. 发明授权
    • Systems and structures for supporting vibrators
    • 用于支撑振动器的系统和结构
    • US07150386B2
    • 2006-12-19
    • US10346661
    • 2003-01-17
    • Seiji IshikawaTakayuki Kikuchi
    • Seiji IshikawaTakayuki Kikuchi
    • H01L41/053
    • G01C19/5783
    • An object of the present invention is to provide a novel system for supporting a vibrator having a terminal for electrical connection so that the vibrator may be miniaturized and the deviation of vibration property among vibrators mounted on the supporting systems may be prevented. The supporting system has a substrate 11 and bonding wires 9, 10 supported on the substrate 11 and to be joined with a vibrator 1. The vibrator 1 is supported with the bonding wires 9, 10 so that the vibrator 1 does not directly contact the substrate 11 and bonding wires 9, 10 are electrically connected with a terminal 6 of the vibrator 1.
    • 本发明的目的是提供一种用于支撑具有用于电连接的端子的振动器的新型系统,使得振动器可以小型化,并且可以防止安装在支撑系统上的振动器之间的振动特性的偏差。 支撑系统具有基板11和支撑在基板11上并与振动器1接合的接合线9,10。 振动器1由接合线9,10支撑,使得振动器1不直接接触基板11,并且接合线9,10与振动器1的端子6电连接。