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    • 1. 发明申请
    • MASKLESS EXPOSURE METHOD
    • MASKLESS曝光方法
    • US20090262319A1
    • 2009-10-22
    • US12390687
    • 2009-02-23
    • Hiroyasu MatsuuraSeiji IshikawaTadamichi WachiToshimasa Ishigaki
    • Hiroyasu MatsuuraSeiji IshikawaTadamichi WachiToshimasa Ishigaki
    • G03B27/42
    • G03F7/70791G03F7/70433
    • A maskless exposure method of drawing a circuit pattern includes: moving a substrate with respect to a projection optical system; scanning, by the projection optical system, the substrate in a first direction; shifting a scanning region in a second direction; scanning the substrate in the first direction so that an overlapping part is formed. A plurality of marks different from the circuit pattern are exposed in a vicinity of the overlapping part. The plurality of marks are a set of marks at least including two marks disposed on one side of the overlapping part and two marks disposed on another side of the overlapping part. Deviations between the pair of the scanning regions, an inclination of exposing light, and a yawing angle of a stage are analyzed by measuring deviations of distances among the plurality of marks. Calibration data are obtained from a result of the analyzing.
    • 绘制电路图案的无掩模曝光方法包括:相对于投影光学系统移动基板; 通过投影光学系统沿第一方向扫描基板; 沿第二方向移动扫描区域; 在第一方向扫描基板,从而形成重叠部分。 与电路图案不同的多个标记在重叠部分附近露出。 多个标记是至少包括设置在重叠部分的一侧上的两个标记和设置在重叠部分的另一侧上的两个标记的一组标记。 通过测量多个标记之间的距离的偏差来分析一对扫描区域之间的偏差,曝光的倾斜度和舞台的偏航角度。 校准数据是从分析结果中获得的。
    • 2. 发明授权
    • Maskless exposure method
    • 无掩膜曝光方法
    • US08274642B2
    • 2012-09-25
    • US12390687
    • 2009-02-23
    • Hiroyasu MatsuuraSeiji IshikawaTadamichi WachiToshimasa Ishigaki
    • Hiroyasu MatsuuraSeiji IshikawaTadamichi WachiToshimasa Ishigaki
    • G03B27/32G03B27/44G03B27/42
    • G03F7/70791G03F7/70433
    • A maskless exposure method of drawing a circuit pattern includes: moving a substrate with respect to a projection optical system; scanning, by the projection optical system, the substrate in a first direction; shifting a scanning region in a second direction; scanning the substrate in the first direction so that an overlapping part is formed. A plurality of marks different from the circuit pattern are exposed in a vicinity of the overlapping part. The plurality of marks are a set of marks at least including two marks disposed on one side of the overlapping part and two marks disposed on another side of the overlapping part. Deviations between the pair of the scanning regions, an inclination of exposing light, and a yawing angle of a stage are analyzed by measuring deviations of distances among the plurality of marks. Calibration data are obtained from a result of the analyzing.
    • 绘制电路图案的无掩模曝光方法包括:相对于投影光学系统移动基板; 通过投影光学系统沿第一方向扫描基板; 沿第二方向移动扫描区域; 在第一方向扫描基板,从而形成重叠部分。 与电路图案不同的多个标记在重叠部分附近露出。 多个标记是至少包括设置在重叠部分的一侧上的两个标记和设置在重叠部分的另一侧上的两个标记的一组标记。 通过测量多个标记之间的距离的偏差来分析一对扫描区域之间的偏差,曝光的倾斜度和舞台的偏航角度。 校准数据是从分析结果中获得的。
    • 3. 发明申请
    • MANUFACTURING METHOD OF DISPLAY DEVICE
    • 显示装置的制造方法
    • US20120082941A1
    • 2012-04-05
    • US13251353
    • 2011-10-03
    • Toshimasa IshigakiFumio TakahashiToshiki Kaneko
    • Toshimasa IshigakiFumio TakahashiToshiki Kaneko
    • G03F7/20
    • G03F7/0392G03F7/40
    • An organic passivation film having a high transmittance and capable of setting a taper angle of a through hole within a predetermined range in a liquid crystal display device. A pixel electrode and a source electrode of a TFT are connected by way of a through hole formed in an organic passivation film. The organic passivation film having high productivity, high transmittance, and a predetermined taper angle θ of a through hole can be formed by using a chemical amplification photosensitive resin composition comprising, as a base material, an acrylic resin having a molecular weight of 4,000 to 20,000 and containing 1 to 6 wt % of a photoacid generator as the material for the organic passivation film, performing exposure and development for forming a through hole, and then performing post exposure, prebaking, and baking under appropriate conditions.
    • 一种具有高透射率并且能够将通孔的锥角设定在液晶显示装置内的预定范围内的有机钝化膜。 TFT的像素电极和源电极通过形成在有机钝化膜中的通孔连接。 有机钝化膜具有高生产率,高透射率和预定的锥角度; 可以通过使用化学增幅感光性树脂组合物形成化学增幅感光性树脂组合物,其包含作为基材的分子量为4,000〜20,000的丙烯酸树脂,含有1〜6重量%的光酸产生剂作为有机物质 钝化膜,进行曝光和显影以形成通孔,然后在合适的条件下进行后曝光,预烘烤和烘烤。
    • 5. 发明授权
    • Manufacturing method of display device
    • 显示装置的制造方法
    • US08652766B2
    • 2014-02-18
    • US13251353
    • 2011-10-03
    • Toshimasa IshigakiFumio TakahashiToshiki Kaneko
    • Toshimasa IshigakiFumio TakahashiToshiki Kaneko
    • G03F1/00G03F7/00
    • G03F7/0392G03F7/40
    • An organic passivation film having a high transmittance and capable of setting a taper angle of a through hole within a predetermined range in a liquid crystal display device. A pixel electrode and a source electrode of a TFT are connected by way of a through hole formed in an organic passivation film. The organic passivation film having high productivity, high transmittance, and a predetermined taper angle θ of a through hole can be formed by using a chemical amplification photosensitive resin composition comprising, as a base material, an acrylic resin having a molecular weight of 4,000 to 20,000 and containing 1 to 6 wt % of a photoacid generator as the material for the organic passivation film, performing exposure and development for forming a through hole, and then performing post exposure, prebaking, and baking under appropriate conditions.
    • 一种具有高透射率并且能够将通孔的锥角设定在液晶显示装置内的预定范围内的有机钝化膜。 TFT的像素电极和源电极通过形成在有机钝化膜中的通孔连接。 可以通过使用化学放大型感光性树脂组合物形成具有高生产率,高透射率和预定锥形角度的有机钝化膜,该化学增幅感光性树脂组合物包含分子量为4000〜20,000的丙烯酸树脂作为基材 并含有1至6重量%的光酸产生剂作为有机钝化膜的材料,进行用于形成通孔的曝光和显影,然后在合适的条件下进行后曝光,预烘烤和烘烤。
    • 6. 发明授权
    • Liquid crystal display device and manufacturing method for same
    • 液晶显示装置及其制造方法
    • US08325299B2
    • 2012-12-04
    • US12759120
    • 2010-04-13
    • Toshimasa IshigakiYasukazu KimuraJun Fujiyoshi
    • Toshimasa IshigakiYasukazu KimuraJun Fujiyoshi
    • G02F1/1335G02F1/13
    • G02F1/1333G02F1/133516
    • The present invention provides a manufacturing method for a liquid crystal display device, wherein the liquid crystal display device comprises first and second color filters provided on the liquid crystal side of one of a pair of substrates which are positioned so as to face each other and sandwich liquid crystal in between so as to be adjacent to each other, and a first side portion of the first color filter on the second color filter side overlaps with a second side portion of the second color filter on the first color filter side, characterized in that the border between the light blocking region and the non-light blocking region in a photomask for forming the first color filter, which corresponds to the first side portion, has a zigzag pattern with repeating mountains and valleys along this border, and the border between the light blocking region and the non-light blocking region in a photomask for forming the second color filter, which corresponds to the second side portion, has a zigzag pattern with repeating mountains and valleys along this border.
    • 本发明提供了一种液晶显示装置的制造方法,其中液晶显示装置包括设置在一对基板中的一个基板的液晶侧的第一和第二滤色器,它们彼此面对并夹在 液晶彼此相邻,并且第二滤色器侧的第一滤色器的第一侧部与第一滤色器侧的第二滤色器的第二侧部重叠,其特征在于, 与第一侧部对应的用于形成第一滤色器的光掩模中的遮光区域与非遮光区域之间的边界具有沿该边界重复山脉和山谷的锯齿形图案, 用于形成与第二侧部对应的第二滤色器的光掩模中的遮光区域和非遮光区域具有 沿着这个边界重复山脉和山谷的曲折图案。
    • 7. 发明授权
    • Color cathode-ray tube having nonglare means on internal surface of faceplate
    • 具有不透明的彩色阴极射线管在面板的内表面上
    • US06424086B1
    • 2002-07-23
    • US08548759
    • 1995-10-26
    • Yoshiyuki OdakaMasahiro NishizawaToshimasa Ishigaki
    • Yoshiyuki OdakaMasahiro NishizawaToshimasa Ishigaki
    • H01J2928
    • H01J29/327H01J29/28H01J29/896
    • A color cathode-ray tube providing a nonglare effect which can be regenerated without degradation of its nonglare function and which can be inexpensively formed. A light scattering film composed of metal containing compound micro-particles having a high index of refraction and a particle size of 0.1 &mgr;m to 2 &mgr;m is formed in contact with the internal surface of a faceplate of the color cathode-ray tube, and a black matrix having a multiplicity of holes is formed on the light scattering film. A red phosphor layer, a green phosphor layer and a blue phosphor-layer are formed in the holes of the black matrix on the light scattering film in such a manner that the phosphor layers of red, green and blue are disposed cyclically in that order. External light incident on the faceplate is partly reflected by the external surface of the faceplate, and the remainder of the external light passes through the faceplate and is made incident on the light scattering film. The external light is scattered by the metal containing compound micro-particles having a high index of refraction, so that no substantial light components of the external light again penetrate into the face plate thereby providing a nonglare effect.
    • 该彩色阴极射线管提供了无损效果,可以在不破坏其不透明功能的情况下再生而且可以廉价地形成。 与彩色阴极射线管的面板的内表面接触形成由具有高折射率和0.1μm〜2μm的粒子的含金属化合物微粒构成的光散射膜, 在光散射膜上形成具有多个孔的矩阵。 红色荧光体层,绿色荧光体层和蓝色荧光体层以这样的方式形成在光散射膜上的黑色矩阵的孔中,使得红色,绿色和蓝色的荧光体层依次循环设置。 入射在面板上的外部光部分地被面板的外表面反射,并且外部光的其余部分通过面板并入射到光散射膜上。 外部光被具有高折射率的含金属化合物微粒子散射,使得外部光线的实质的光分量再次不会渗透到面板中,从而提供非光滑效果。