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    • 36. 发明授权
    • Light emitting device and method of manufacturing the same
    • 发光元件及其制造方法
    • US07492012B2
    • 2009-02-17
    • US11276651
    • 2006-03-09
    • Satoshi MurakamiToru TakayamaKengo Akimoto
    • Satoshi MurakamiToru TakayamaKengo Akimoto
    • H01L23/62
    • H01L27/124H01L27/3248H01L27/3258H01L51/5253
    • A light emitting device is provided which has a structure for preventing degradation of a light emitting element due to water and oxygen contained in an interlayer insulating film formed between a TFT and the light emitting element. A TFT is formed on a substrate, an inorganic insulating film is formed on the TFT from an inorganic material and serves as a first insulating film, an organic insulating film is formed on the first insulating film from an organic material and serves as a second insulating film, and an inorganic insulating film is formed on the second insulating film from an inorganic material and serves as a third insulating film. Thus obtained is a structure for preventing the second insulating film from releasing moisture and oxygen. In order to avoid defect in forming the film, a portion of the third insulating film where a contact hole is formed is removed alone. Then, a light emitting element composed of an anode, an organic compound layer, and a cathode is formed on the third insulating film. A TFT and a light emitting element in a light emitting device of this application are connected to each other through a wire formed in a contact hole.
    • 提供了一种发光器件,其具有用于防止由TFT和发光元件之间形成的层间绝缘膜中包含的水和氧引起的发光元件劣化的结构。 在基板上形成TFT,在TFT上由无机材料形成无机绝缘膜,作为第一绝缘膜,在有机绝缘膜上形成有机绝缘膜,作为第二绝缘膜 膜和无机绝缘膜由无机材料形成在第二绝缘膜上并用作第三绝缘膜。 由此获得的是用于防止第二绝缘膜释放水分和氧气的结构。 为了避免形成膜的缺陷,单独除去形成有接触孔的第三绝缘膜的一部分。 然后,在第三绝缘膜上形成由阳极,有机化合物层和阴极构成的发光元件。 本申请的发光器件中的TFT和发光元件通过形成在接触孔中的线彼此连接。