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31. 发明专利

JPS61214399A NEUTRAL PARTICLE INCIDENT HEATER 失效
公开(公告)号：JPS61214399A
公开(公告)日：1986-09-24
申请号：JP5452685
申请日：1985-03-20
申请人： HITACHI LTD
发明人： KAMIIDE YASUO , YAMASHITA YASUO
IPC分类号： H05H1/22 , G21B1/00 , G21B1/11 , H05H3/00

32. 发明专利

JPS5643000A HIGH ENERGY PARTICLES RECEIVING PLATE 失效
公开(公告)号：JPS5643000A
公开(公告)日：1981-04-21
申请号：JP11794179
申请日：1979-09-17
申请人： HITACHI LTD , HITACHI CABLE
发明人： KAMIIDE YASUO , ISOBE SHIYOUJI , NOGUCHI KOUJI
IPC分类号： H05H1/22 , G21B1/00 , H05H1/12

33. 发明专利

JPS5551275A NATURALLCIRCULATION COOLER 失效
公开(公告)号：JPS5551275A
公开(公告)日：1980-04-14
申请号：JP12361878
申请日：1978-10-09
申请人： HITACHI LTD
发明人： OGATA HISANAO , NAKAYAMA HISASHI , ISOBE SHIYOUJI , KAMIIDE YASUO , SATOU SHINTAROU
IPC分类号： H05K7/20 , F25B23/00 , F25D9/00 , F25D31/00

34. 发明专利

JPH09222487A BEAM DAMP 失效
公开(公告)号：JPH09222487A
公开(公告)日：1997-08-26
申请号：JP2894996
申请日：1996-02-16
申请人： HITACHI LTD
发明人： SEKI HIROBUMI , SATO TADASHI , KAMIIDE YASUO , KAWAKAMI HIROYUKI
IPC分类号： G21B1/11 , G21B1/00
摘要： PROBLEM TO BE SOLVED: To reduce heat load received by a heat receiver plate by shortening the distance between facing magnetic poles of a deflection magnet at the ends of the poles and lengthening at the center part. SOLUTION: The distance between magnetic poles 7 of deflection magnet 4 which are facing to each other, is made short at the ends of the magnetic poles 7 and long at the center part. By this, the bend of magnetic flux is reduced and converging of remaining ion beam is prevented and so the heat load on the heat receiver plate is reduced. The magnetic pole surface in this case can be a shape with projection at the end and needs not to be a curved surface. If the magnitude of the magnetic field of the magnet 4 is increased and the beam is impinged on the heat receiver plate at a close position to the magnet 4, heat load on the heat receiver plate at a distant position from the magnet 4 can be reduced. By controlling the magnitude of magnetic field of the magnet 4 to be the value immediately before the impinging of the beam to the magnet 4, the heat load of the heat receiver plate can be minimized.

35. 发明专利

JPH0749084A CRYOPUMP 失效
公开(公告)号：JPH0749084A
公开(公告)日：1995-02-21
申请号：JP19441693
申请日：1993-08-05
申请人： HITACHI LTD , JAPAN ATOMIC ENERGY RES INST
发明人： SAHO NORIHIDE , ISOKAMI HISASHI , YAMASHITA YASUO , KAMIIDE YASUO , OKUMURA YOSHIKAZU , HANADA MASAYA
IPC分类号： F04B37/08
摘要： PURPOSE:To realize suitable regenerating operation of a cryopump by providing a shutter a drive means moving between a gas inlet surface of the cryopump and the deep portion thereof, on a back or side portion inside the cryopump. CONSTITUTION:In regenerating a cryopump, electric motors 25, 26 are rotated leftward and rightward, respectively, connecting portions 29, 30 of the tips or rods 27, 28 are moved leftward, and a shutter 14 is pushed leftward, thus closing an opening surface 12. Liquid nitrogen inside a cooling nitrogen tank 11 is supplied via a flexible tube 39 for cooling the shutter 14 even when moving. After the inside of the cryopump is separated from the outside by the shutter 14, supplying of liquid helium to a cryopanel is stopped. Consequently, a temperature at the cryopump is increased so that gas to be exhausted, which is coagulated on the cryopanel, is discharged into the cryopump. At this time, a pressure inside the cryopump becomes higher than an outside pressure. Therefore, the shutter 14 is further uniformly pressed at plural points in the center in the longitudinal direction thereof against a seal ring 38.

36. 发明专利

JPH0626459A CRYOGENIC COOLING DEVICE AND COOLING METHOD THEREON 失效
公开(公告)号：JPH0626459A
公开(公告)日：1994-02-01
申请号：JP18211092
申请日：1992-07-09
申请人： HITACHI LTD
发明人： SAHO NORIHIDE , ISOKAMI HISASHI , YAMASHITA YASUO , KAWAKAMI HIROYUKI , KAMIIDE YASUO
IPC分类号： F04B37/08 , F25B9/00 , F25B19/00 , G21B1/17
摘要： PURPOSE:To reduce electric power necessary for cooling and improve the reliability of cooling system operation by cooling plural cryopumps installed at a neutral particle implanting device in a short time. CONSTITUTION:The cryopanels 26, 28 of plural cryopumps installed in a neutral particle implanting device are cooled by a small-sized helium refrigerating machine 23. Various types of valves and the small-sized helium refrigerating machine 23 are arranged so that cooling of the cryopanels 26, 28 from room temperature may be carried out by cold cooling of liquid nitrogen used to cool a thermal shield plate 32, cold cooling of the small-sized helium refrigerating machine 23, and cold cooling of liquid helium itself.

37. 发明专利

JPH04194378A CRYOPUMP 失效
公开(公告)号：JPH04194378A
公开(公告)日：1992-07-14
申请号：JP32287790
申请日：1990-11-28
申请人： HITACHI LTD
发明人： KAWAKAMI HIROYUKI , KAMIIDE YASUO , YAMASHITA YASUO , SAHO NORIHIDE
IPC分类号： F04B37/08
摘要： PURPOSE:To reduce the number of shield sheets by setting the dimensions of a louver blind type radiant heat shield of a cryopump to the deeper, the longer. CONSTITUTION:A gas molecule flows in an arrow direction from a gap between front heat shield plates 1 of a cryopump. A group of louvers 3 is installed at the symmetrical sides of a main cryopanel 5, and each size L is lengthened so far as going toward a rear heat shield plate 6. A screen plate 4 is set up to the back of the louver group 3. Thus, the number of louver blind type heat shield sheets is reduced and thereby the cost of production is reduced.

38. 发明专利

JPH0364842A NEGATIVE ION SOURCE 失效
公开(公告)号：JPH0364842A
公开(公告)日：1991-03-20
申请号：JP19940489
申请日：1989-08-02
申请人： HITACHI LTD
发明人： YAMASHITA YASUO , ONO YOICHI , GOTO SADANOBU , KAMIIDE YASUO
IPC分类号： H01J27/08 , H01J37/08
摘要： PURPOSE:To raise the transparency of an electrode while keeping an angle of divergence, exclude trouble resulting from material deterioration due to brazing and reduce the number of processes by making up a drawing electrode with a number of square pipes combined, each of which has holes for incorporating a permanent magnet and for carrying electrode cooling water. CONSTITUTION:A drawing electrode, in which permanent magnets are built to separate and remove electrons, drawn out of a plasma together with negative ions, from the negative ions is made up with a number of square pipes 1 combined, each of which has holes 2, 3 for incorporating the permanent magnet and for carrying electrode cooling water. Accordingly, there is no need to braze cooling pipes on the surface of an electrode plate, eliminating trouble such as water leakage and vacuum leak resulting from material deterioration due to brazing. It is thus possible to reduce the number of electrode processes and raise the reliability of ion source because of previous removal of trouble factor.

39. 发明专利

JPH02191877A CRYOPUMP 失效
公开(公告)号：JPH02191877A
公开(公告)日：1990-07-27
申请号：JP975889
申请日：1989-01-20
申请人： HITACHI LTD
发明人： SAHO NORIHIDE , KAMIIDE YASUO , ONO YOICHI , OGATA HISANAO , NEMOTO TAKEO
IPC分类号： F04B37/08
摘要： PURPOSE:To enable an exhaust speed to be increased with passing probability increased by arranging a radiation shield plate parallelly with a gas molecular inflow port surface further with equal width in a multi-stage in the interior direction of a cryopump and providing a cryopanel in a shield plate back surface. CONSTITUTION:A gas molecule to be exhausted in a direction of arrow head from between radiation heat shield plates 1, arranged in a front surface, is allowed to flow in a cryopump. Here the shield plate 1 is arranged in an interior direction of the pump further with a predetermined space on an equal line and cooled by liquid nitrogen or the like to a low temperature held to about 80K. The shield plate 1 arranges in its back surface a cryopanel 2 cooled by liquid helium or the like to a very low temperature, and the cryopump provides in its behind and upper and lower surfaces respectively cooled radiation heat shield plate 3. Black color surface treatment is applied to a pump internal surface side of the shield plates 1 and 3 after the second row increasing a radiation factor. Consequently, the gas molecule is drawn deeper into the pump, further the gas molecule, reflected by the shield plate 1, increases the probability of arriving at the panel 2 opposed facing in a preceding stage.

40. 发明专利

JPH01283743A ACCELERATION POWER SOURCE FOR ION SOURCE 失效
公开(公告)号：JPH01283743A
公开(公告)日：1989-11-15
申请号：JP11274788
申请日：1988-05-10
申请人： HITACHI LTD
发明人： YAMASHITA YASUO , ONO YOICHI , GOTO SADANOBU , KAMIIDE YASUO
IPC分类号： H05H5/02 , H01J27/02 , H01J37/248 , H02M9/00
摘要： PURPOSE:To make it possible to control the voltage to be applied to an acceleration electrode with a voltage lower than the voltage applied to the acceleration electrode, by controlling a converter and a high-frequency inverter so as to regulate the output voltage. CONSTITUTION:Converters 10, 20A, and 20B to convert an AC power into a DC power, high-frequency inverters 11, 21A, and 21B to convert the DC power to a DC power of the high-frequency higher than that of the converters, high-frequency transformers 12, 22A, and 22B to raise the output voltage of the high-frequency inverters, and, high-frequency converters 13, 23A, and 23B to convert the AC power into a high voltage of DC power are provided. As a result, the output voltage in each phase can be controlled with a low voltage, and a smoothed AC voltage can be applied to each acceleration electrode. Consequently, each DC power source can be controlled by a voltage lower than the voltage to be applied to each acceleration electrode, and the loss of the total power sources can be reduced.

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