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31. 发明授权

US07957066B2 Split field inspection system using small catadioptric objectives 有权
标题翻译：使用小反射折射目标的分体现场检查系统
公开(公告)号：US07957066B2
公开(公告)日：2011-06-07
申请号：US12220983
申请日：2008-07-29
申请人： J. Joseph Armstrong , Yung-Ho Chuang
发明人： J. Joseph Armstrong , Yung-Ho Chuang
IPC分类号： G02B27/10 , G01B11/30 , G01N21/00
CPC分类号： G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G03F7/70225 , G03F7/70341
摘要： A system for inspecting a specimen is provided. The system includes an illumination subsystem configured to produce a plurality of channels of light energy, each channel of light energy produced having differing characteristics (type, wavelength, etc.) from at least one other channel of light energy. Optics are configured to receive the plurality of channels of light energy and combine them into a spatially separated combined light energy beam and direct it toward the specimen. A data acquisition subsystem comprising at least one detector is provided, configured to separate reflected light energy into a plurality of received channels corresponding to the plurality of channels of light energy and detect the received channels.
摘要翻译：提供了一种用于检查样本的系统。该系统包括被配置为产生多个光能通道的照明子系统，每个产生的光能通道具有与至少一个其它光能通道不同的特性（类型，波长等）。光学器件被配置为接收多个光能通道并将它们组合成空间分离的组合光能束并将其引导到样本。提供了包括至少一个检测器的数据采集子系统，其被配置为将反射的光能分离成对应于多个光能通道的多个接收信道，并检测所接收的信道。

32. 发明申请

US20110073982A1 Inspection system using back side illuminated linear sensor 审中-公开
标题翻译：使用背面照明线性传感器的检查系统
公开(公告)号：US20110073982A1
公开(公告)日：2011-03-31
申请号：US11805907
申请日：2007-05-25
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David L. Brown
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David L. Brown
IPC分类号： H01L31/00 , G01N21/00
CPC分类号： G01N21/9501 , G01N21/95623 , G01N2021/8822 , G01N2021/95676
摘要： An improved inspection system using back-side illuminated linear sensing for propagating charge through a sensor is provided. Focusing optics may be used with a back side illuminated linear sensor to inspect specimens, the back side illuminated linear sensor operating to advance an accumulated charge from one side of each pixel to the other side. The design comprises controlling voltage profiles across pixel gates from one side to the other side in order to advance charge between to a charge accumulation region. Controlling voltage profiles comprises attaching a continuous polysilicon gate across each pixel within a back side illuminated linear sensor array. Polysilicon gates and voltages applied thereto enable efficient electron advancement using a controlled voltage profile.
摘要翻译：提供了一种使用背面照明线性检测的改进的检测系统，用于通过传感器传播电荷。聚焦光学元件可以与背面照明的线性传感器一起使用以检查样品，背面照射的线性传感器操作以将累积的电荷从每个像素的一侧推进到另一侧。该设计包括控制从一侧到另一侧的像素栅极之间的电压分布，以便在电荷累积区域之间推进电荷。控制电压分布包括在背侧照明线性传感器阵列内的每个像素上连接连续的多晶硅栅极。多晶硅栅极和施加于其上的电压使得能够使用受控电压分布进行有效的电子前进。

33. 发明申请

US20080225282A1 Beam delivery system for laser dark-field illumination in a catadioptric optical system 有权
标题翻译：反射折射光学系统激光暗场照明光束传输系统
公开(公告)号：US20080225282A1
公开(公告)日：2008-09-18
申请号：US12074405
申请日：2008-03-03
申请人： Yung-Ho Chuang , J. Joseph Armstrong
发明人： Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G01N21/88
CPC分类号： G02B21/10 , G02B17/0856
摘要： A method and apparatus for inspecting a specimen are provided. The apparatus comprises a primary illumination source, a catadioptric objective exhibiting central obscuration that directs light energy received from the primary illumination source at a substantially normal angle toward the specimen, and an optical device, such as a prism or reflective surface, positioned within the central obscuration resulting from the catadioptric objective for receiving further illumination from a secondary illumination source and diverting the further illumination to the specimen. The method comprises illuminating a surface of the specimen at a variety of angles using a primary illumination source, illuminating the surface using a secondary illumination source, the illuminating by the secondary illumination source occurring at a substantially normal angle of incidence; and imaging all reflected, scattered, and diffracted light energy received from the surface onto a detector.
摘要翻译：提供了一种用于检查样本的方法和装置。该装置包括初级照明源，显示中心遮蔽的反折射物镜，其将从主照明源接收的光能以基本上垂直的角度朝向样本引导，以及位于中心内的光学装置，例如棱镜或反射表面由反射折射物镜产生的遮挡，用于接收来自次级照明源的进一步照明并将另外的照明转移到样本。该方法包括使用主照明源以各种角度照射样本的表面，使用次级照明源照亮表面，由次级照明源以基本上正常的入射角发射; 并将从表面接收的所有反射，散射和衍射的光能成像到检测器上。

34. 发明授权

US07345825B2 Beam delivery system for laser dark-field illumination in a catadioptric optical system 有权
公开(公告)号：US07345825B2
公开(公告)日：2008-03-18
申请号：US11171079
申请日：2005-06-30
申请人： Yung-Ho Chuang , J. Joseph Armstrong
发明人： Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B17/00
CPC分类号： G02B21/10 , G02B17/0856
摘要： A method and apparatus for inspecting a specimen are provided. The apparatus comprises a primary illumination source, a catadioptric objective exhibiting central obscuration that directs light energy received from the primary illumination source at a substantially normal angle toward the specimen, and an optical device, such as a prism or reflective surface, positioned within the central obscuration resulting from the catadioptric objective for receiving further illumination from a secondary illumination source and diverting the further illumination to the specimen. The method comprises illuminating a surface of the specimen at a variety of angles using a primary illumination source, illuminating the surface using a secondary illumination source, the illuminating by the secondary illumination source occurring at a substantially normal angle of incidence; and imaging all reflected, scattered, and diffracted light energy received from the surface onto a detector.

35. 发明申请

US20070002465A1 Beam delivery system for laser dark-field illumination in a catadioptric optical system 有权
标题翻译：反射折射光学系统激光暗场照明光束传输系统
公开(公告)号：US20070002465A1
公开(公告)日：2007-01-04
申请号：US11171079
申请日：2005-06-30
申请人： Yung-Ho Chuang , J. Joseph Armstrong
发明人： Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B17/00
CPC分类号： G02B21/10 , G02B17/0856
摘要： A method and apparatus for inspecting a specimen are provided. The apparatus comprises a primary illumination source, a catadioptric objective exhibiting central obscuration that directs light energy received from the primary illumination source at a substantially normal angle toward the specimen, and an optical device, such as a prism or reflective surface, positioned within the central obscuration resulting from the catadioptric objective for receiving further illumination from a secondary illumination source and diverting the further illumination to the specimen. The method comprises illuminating a surface of the specimen at a variety of angles using a primary illumination source, illuminating the surface using a secondary illumination source, the illuminating by the secondary illumination source occurring at a substantially normal angle of incidence; and imaging all reflected, scattered, and diffracted light energy received from the surface onto a detector.
摘要翻译：提供了一种用于检查样本的方法和装置。该装置包括初级照明源，显示中心遮蔽的反折射物镜，其将从主照明源接收的光能以基本上垂直的角度朝向样本引导，以及位于中心内的光学装置，例如棱镜或反射表面由反射折射物镜产生的遮挡，用于接收来自次级照明源的进一步照明并将另外的照明转移到样本。该方法包括使用主照明源以各种角度照射样本的表面，使用次级照明源照亮表面，由次级照明源以基本上正常的入射角发射; 并将从表面接收的所有反射，散射和衍射的光能成像到检测器上。

36. 发明授权

US09793673B2 Semiconductor inspection and metrology system using laser pulse multiplier 有权
公开(公告)号：US09793673B2
公开(公告)日：2017-10-17
申请号：US13487075
申请日：2012-06-01
申请人： Yung-Ho Chuang , J. Joseph Armstrong , Justin Dianhuan Liou , Vladimir Dribinski , David L. Brown
发明人： Yung-Ho Chuang , J. Joseph Armstrong , Justin Dianhuan Liou , Vladimir Dribinski , David L. Brown
IPC分类号： G02B5/30 , G02B27/28 , H01S3/05 , H01S3/083 , H01S3/00 , G01N21/21 , G01N21/95 , G02B5/08
CPC分类号： H01S3/0057 , G01N21/21 , G01N21/9501 , G01N2201/06113 , G01N2201/0683 , G01N2201/0697 , G02B5/0816 , G02B5/3083 , G02B27/281 , G02B27/283 , G02B27/286 , H01S3/083
摘要： A pulse multiplier includes a polarizing beam splitter, a wave plate, and a set of mirrors. The polarizing beam splitter receives an input laser pulse. The wave plate receives light from the polarized beam splitter and generates a first set of pulses and a second set of pulses. The first set of pulses has a different polarization than the second set of pulses. The polarizing beam splitter, the wave plate, and the set of mirrors create a ring cavity. The polarizing beam splitter transmits the first set of pulses as an output of the pulse multiplier and reflects the second set of pulses into the ring cavity. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.

37. 发明授权

US07627007B1 Non-critical phase matching in CLBO to generate sub-213nm wavelengths 有权
标题翻译： CLBO中的非临界相位匹配产生亚213nm波长
公开(公告)号：US07627007B1
公开(公告)日：2009-12-01
申请号：US11346021
申请日：2006-03-10
申请人： J. Joseph Armstrong , Yung-Ho Chuang
发明人： J. Joseph Armstrong , Yung-Ho Chuang
IPC分类号： H01S3/10
CPC分类号： H01S3/06708 , G01N21/8806 , G01N21/9501 , G02F1/3501 , G02F1/3534 , G02F1/3536 , G02F1/3544 , G02F1/3551 , G02F1/3553 , G02F1/3558 , G02F1/37 , G02F2001/3507 , G02F2001/354 , H01S3/06712 , H01S3/06741 , H01S3/0675 , H01S3/06791 , H01S3/094007 , H01S3/09415 , H01S3/1118 , H01S3/23 , H01S3/2383
摘要： A laser illuminator and illumination method for use in an inspection system, such as a semiconductor wafer inspection system or photomask inspection system is provided. The design comprises generating fundamental frequency laser energy at different fundamental wavelengths, such as 998 nm, converting a portion of the fundamental frequency laser energy to 2nd harmonic frequency laser energy, further converting the 2nd harmonic frequency laser energy to 4th harmonic frequency laser energy, and mixing the 4th harmonic frequency laser energy with a portion of the fundamental frequency laser energy to produce laser energy at a sum frequency. Mixing is accomplished by non-critical phase matching in a crystal of Cesium Lithium Borate (CLBO). Alternately, the design may employ shifting a portion of the fundamental frequency laser energy to laser energy at a Raman line and/or mixing the 2nd harmonic frequency laser energy with a portion of the fundamental frequency laser energy to produce 3rd harmonic frequency laser energy.
摘要翻译：提供了一种用于检查系统中的激光照明器和照明方法，例如半导体晶片检查系统或光掩模检查系统。该设计包括在不同的基本波长（如998nm）产生基频激光能量，将基频激光能量的一部分转换为二次谐波激光能量，进一步将二次谐波激光能量转换为四次谐波激光能量，将第四谐波激光能量与基频激光能量的一部分混合，以产生激发能量的和频。在硼酸铯（CLBO）的晶体中通过非关键相位匹配来实现混合。或者，该设计可以采用将基频激光能量的一部分转换成拉曼线上的激光能量和/或将二次谐波频率激光能量与基频激光能量的一部分混合以产生三次谐波激光能量。

38. 发明授权

US07187500B2 Peak power and speckle contrast reduction for a single layer pulse 有权
标题翻译：单层脉冲的峰值功率和斑点对比度降低
公开(公告)号：US07187500B2
公开(公告)日：2007-03-06
申请号：US10776562
申请日：2004-02-10
申请人： Yung-Ho Chuang , J. Joseph Armstrong
发明人： Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B27/10 , G02B27/14
CPC分类号： G03F7/70583 , G02B27/106 , G02B27/144 , G02B27/145 , G02B27/48 , H01S3/005 , H01S3/225 , Y10S372/70
摘要： A system and method for reducing peak power of a laser pulse and reducing speckle contrast of a single pulse comprises a plurality of elements oriented to split and delay a pulse or pulses transmitted from a light emitting device. The design provides the ability to divide the pulse into multiple pulses by delaying the components relative to one another. Reduction of speckle contrast entails using the same or similar components to the power reduction design, reoriented to orient received energy wherein angles between the optical paths are altered such that the split or divided light energy components strike the target at different angles or different positions. An alternate embodiment for reducing speckle contrast is disclosed wherein a single pulse is passed in an angular orientation through a grating to create a delayed portion of the pulse relative to the leading edge of the pulse.
摘要翻译：用于减少激光脉冲的峰值功率并减少单个脉冲的斑点对比度的系统和方法包括多个元件，其定向为分离和延迟从发光器件传输的脉冲或脉冲。该设计提供了通过相对于彼此延迟部件将脉冲分成多个脉冲的能力。斑点对比度的减少需要使用与功率降低设计相同或相似的组件，重新定向以定向接收的能量，其中改变光路之间的角度，使得分裂或分开的光能分量以不同的角度或不同的位置撞击目标。公开了一种用于减少散斑对比度的替代实施例，其中单个脉冲以角度方向通过光栅以产生相对于脉冲的前沿的脉冲的延迟部分。

39. 发明授权

US07126100B1 System and method for sensing using adjustable modulation transfer function (MTF) 有权
标题翻译：使用可调调制传递函数（MTF）进行感测的系统和方法
公开(公告)号：US07126100B1
公开(公告)日：2006-10-24
申请号：US10850818
申请日：2004-05-21
申请人： Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown , Bin-Ming Benjamin Tsai
发明人： Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown , Bin-Ming Benjamin Tsai
IPC分类号： H01L27/00
CPC分类号： H01L27/14625 , H04N5/3559 , H04N5/357
摘要： A variable modulated transfer function (MTF) design employing a variable gate voltage source for use in inspecting specimens is disclosed. The design applies a variable gate voltage to each pixel of a sensor, wherein applying the variable gate voltage to each pixel adjusts the MTF of the pixel. MTF adjustment improves adverse effects encountered during inspection, such as aliasing and maintaining contrast.
摘要翻译：公开了一种使用可变栅极电压源的可变调制传递函数（MTF）设计，用于检查样本。该设计将可变栅极电压施加到传感器的每个像素，其中将可变栅极电压施加到每个像素来调整像素的MTF。 MTF调整改善了检查过程中遇到的不良影响，如混叠和维持对比度。

40. 发明授权

US06693930B1 Peak power and speckle contrast reduction for a single laser pulse 有权
标题翻译：单个激光脉冲的峰值功率和斑点对比度降低
公开(公告)号：US06693930B1
公开(公告)日：2004-02-17
申请号：US09737024
申请日：2000-12-12
申请人： Yung-Ho Chuang , J. Joseph Armstrong
发明人： Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： H01S313
CPC分类号： G03F7/70583 , G02B27/106 , G02B27/144 , G02B27/145 , G02B27/48 , H01S3/005 , H01S3/225 , Y10S372/70
摘要： A system and method for reducing peak power of a laser pulse and reducing speckle contrast of a single pulse comprises a plurality of beamsplitters, mirrors and delay elements oriented to split and delay a pulse or pulses transmitted from a light emitting device. The design provides the ability to readily divide the pulse into multiple pulses by delaying the components relative to one another. Reduction of speckle contrast entails using the same or similar components to the power reduction design, reoriented to orient received energy such that the angles between the optical paths are altered such that the split or divided light energy components strike the target at different angles or different positions. An alternate embodiment for reducing speckle contrast is disclosed wherein a single pulse is passed in an angular orientation through a grating to create a delayed portion of the pulse relative to the leading edge of the pulse.
摘要翻译：用于减少激光脉冲的峰值功率并降低单个脉冲的斑点对比度的系统和方法包括多个分束器，反射镜和定向成分离和延迟从发光器件传输的脉冲或脉冲的延迟元件。该设计提供了通过相对于彼此延迟部件来容易地将脉冲分割成多个脉冲的能力。减少斑点对比度需要使用与功率降低设计相同或相似的组件，重新定向以定向接收的能量，使得光路之间的角度被改变，使得分裂或分开的光能分量以不同的角度或不同的位置撞击目标。公开了一种用于减少散斑对比度的替代实施例，其中单个脉冲以角度方向通过光栅以产生相对于脉冲的前沿的脉冲的延迟部分。

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