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31. 发明授权

EP2682980B1 VAPORIZER, CENTER ROD USED THEREIN, AND METHOD FOR VAPORIZING MATERIAL CARRIED BY CARRIER GAS 有权
公开(公告)号：EP2682980B1
公开(公告)日：2019-07-31
申请号：EP12752383.5
申请日：2012-02-27
申请人： Kabushiki Kaisha Watanabe Shoko , Toda, Masayuki
发明人： TODA Masayuki , UMEDA, Masaru
IPC分类号： H01L21/31 , C23C16/448

32. 发明公开

EP2657957A1 VAPORIZER 有权
标题翻译： VERDAMPFER
公开(公告)号：EP2657957A1
公开(公告)日：2013-10-30
申请号：EP11849995.3
申请日：2011-12-21
申请人： Kabushiki Kaisha Watanabe Shoko , Kusuhara, Masaki , Umeda, Masaru , Toda, Masayuki
发明人： KUSUHARA, Masaki , UMEDA, Masaru , TODA Masayuki , FUKAGAWA, Mitsuru
IPC分类号： H01L21/31 , C23C16/448
CPC分类号： C23C16/4481 , B01D1/00
摘要： Provided is a vaporizer that can reduce ripples, particles, and a carbon content of a film and can supply a raw material capable of forming a film having a desired composition. Moreover, a vaporizer is obtained that sufficient vaporization can be performed without heating more than necessary and temperature management can be facilitated. A vaporizer includes a vaporizer main body (3) into which a carrier gas having a film forming liquid material dispersed is introduced and a heater main body (4) disposed in the vaporizer main body (3). The shape of the inlet portion of the heater main body is in a cone.
摘要翻译：提供一种蒸发器，其可以减少膜的波纹，颗粒和碳含量，并且可以提供能够形成具有期望组成的膜的原料。此外，获得能够在不需要加热的情况下进行充分蒸发的蒸发器，并且可以促进温度管理。蒸发器包括引入分散有成膜液体材料的载气的蒸发器主体（3）和设置在蒸发器主体（3）中的加热器主体（4）。加热器主体的入口部分的形状为锥形。

33. 发明公开

EP1363320A4 FERROELECTRIC THIN FILM, METAL THIN FILM OR OXIDE THIN FILM, AND METHOD AND APPARATUS FOR PREPARATION THEREOF, AND ELECTRIC OR ELECTRONIC DEVICE USING SAID THIN FILM 审中-公开
标题翻译： “FERRO ELECTRIC薄膜金属薄膜的氧化物薄膜和方法以及制造装置技术ITS和电气或电子元件WITH THIN FILM”
公开(公告)号：EP1363320A4
公开(公告)日：2007-05-23
申请号：EP02715794
申请日：2002-01-18
申请人： WATANABE M & CO LTD , TODA MASAYUKI
发明人： YAMOTO HISAYOSHI , TODA MASAYUKI , KUSUHARA MASAKI , UMEDA MASARU , FUKAGAWA MITSURU
IPC分类号： H01L21/316 , C23C16/40 , C23C16/448 , H01L21/02 , H01L21/31 , H01L21/8246 , H01L27/115
CPC分类号： H01L27/11502 , C23C16/40 , C23C16/4486 , H01L21/31691 , H01L27/11507 , H01L28/55
摘要： A ferroelectric thin film, characterized in that it exhibits a layered crystal structure containing oxygen (O) and at least carbon, strontium (Sr), bismuth (Bi), tantalum (Ta) and niobium (Nb), has an empirical formula of SrBiyTa2O9±d or SrxBiy(Ta, Nb)2O9±d, provided that 0.90 ≤ x

34. 发明授权

EP0889515B1 METHOD AND APPARATUS FOR CONVEYING THIN SHEET-LIKE SUBSTRATE 失效
标题翻译：方法和设备运送片状的T0
公开(公告)号：EP0889515B1
公开(公告)日：2006-06-28
申请号：EP97912528.3
申请日：1997-11-21
申请人： Taiyo Nippon Sanso Corporation , Toda, Masayuki , OHMI, Tadahiro
发明人： TODA, Masayuki , OHMI, Tadahiro , ISHIHARA, Yoshio, Nippon Sanso Corporation
IPC分类号： H01L21/00
CPC分类号： H01L21/67126 , H01L21/67724 , H01L21/67736
摘要： When a thin sheet-like substrate S is conveyed between conveying chambers (2) equipped with a processing apparatus (1) and kept in an inert gas atmosphere by using a conveying robot (30) equipped with an accommodation chamber (3) capable of accommodating the thin sheet-like substrate (S) in an inert gas atmosphere, a connection chamber (4) is interposed between the accommodation chamber (3) and the conveying chamber (2) when the thin sheet-like substrate (S) is transferred between the accommodation chamber (3) of the conveying robot (30) and the conveying chamber (2) on the side of the processing apparatus (1), and is vacuumized, and then an inert gas is introduced. Thereafter, gate valves (GV1 and GV2) of the accommodation chamber (3) and the conveying chamber (2) are opened and the thin sheet-like substrate (S) is carried in and out.

35. 发明专利

JPH09194887A CLEANING FLUID AND METHOD FOR CLEANING THEREWITH 失效
公开(公告)号：JPH09194887A
公开(公告)日：1997-07-29
申请号：JP540096
申请日：1996-01-17
申请人： TODA MASAYUKI
发明人： TODA MASAYUKI , OHMI TADAHIRO , HARADA YASUYUKI
IPC分类号： B08B3/10 , A61B19/00 , B08B3/12 , C11D3/39 , C11D7/00 , C11D11/00 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide a cleaning fluid being advantageous in that the treatment can be performed at room temperature without heating, the amounts of chemicals and water used are small, no special apparatus need for use, and no special chemicals need to be used, and also provide a method for cleaning therewith. SOLUTION: This fluid comprises pure water and 20 to 100ppb of oxygen and at least 2ppb of nitrogen contained therein. Alternatively, it comprises OH -containing electrolytic ionic water and 20-100ppb of oxygen contained therein. This method comprises cleaning a substrate with a cleaning fluid comprising pure water and 20-100ppb of oxygen and 2ppb to 15ppm of nitrogen contained therein or a cleaning fluid comprising OH -containing electrolytic ionic water and 20ppb to 100ppb oxygen therein while applying ultrasonic waves at 30kHz or above to the fluid.

36. 发明专利

JPH11309282A HAIRCUT MACHINE USING SUCTION POWER OF ELECTRIC VACUUM CLEANER 失效
公开(公告)号：JPH11309282A
公开(公告)日：1999-11-09
申请号：JP15661198
申请日：1998-04-28
申请人： TODA MASAYUKI
发明人： TODA MASAYUKI
IPC分类号： B26B19/28 , B26B19/44
摘要： PROBLEM TO BE SOLVED: To safely cut and vacuum to prevent cut hair from flying of haircut machine by using the suction power of electric vacuum cleaner. SOLUTION: A haircut machine rotates a rotary blade using the suction power of an electric vacuum cleaner 1, cuts hairs, which are sucked from a hole of external blade, with an internal blade mounted on the rotary blade and an external blade mounted in a cylinder and sucks in the electric vacuum cleaner to prevent cut hair from flying. Further, the metal storage cases for the internal blade are mounted on four rotary blades with touching the inside of cylinder, an air control window is opened at a handle junction part with a movable door which is capable of controling an influent air. Furthermore, a part on an air control side of the cylinder is opened, and a thick external blade, a guard wire mesh 3 and others are mounted.

37. 发明专利

JP2011233931A Vaporizer 有权
标题翻译：喷雾器
公开(公告)号：JP2011233931A
公开(公告)日：2011-11-17
申请号：JP2011173287
申请日：2011-08-08
申请人： M Watanabe & Co Ltd , Toda Masayuki , 株式会社渡辺商行 , 昌之都田
发明人： TSUDA MASAYUKI , KUSUHARA MASAKI , DOI MIKIO , UMEDA MASARU , FUKAGAWA MITSURU , KANNO YOICHI , UCHIZAWA OSAMU , YAMAMOTO KOHEI , MEGURO TOSHIKATSU
IPC分类号： H01L21/31 , C23C16/448
摘要： PROBLEM TO BE SOLVED: To provide a vaporizer for an MOCVD capable of obtaining a vaporized gas in which a material solution is uniformly dispersed, and further to provide a vaporizing method of the material solution.SOLUTION: A vaporizer for an MOCVD comprises: (1) a dispersion section 8 that includes a gas inlet port 4 for introducing a pressurized carrier gas 3 into a gas passage, means for supplying a raw material solution 5a to the gas passage, and a gas outlet 7 for sending a carrier gas containing the raw material solution to a vaporization section 22; and (2) the vaporization section 22 that includes a vaporizing tube 20a of which one end is connected to a reaction tube of the MOCVD device and other end is connected to the gas outlet 7 and heating means for heating the vaporizing tube 20a, and the vaporization section 22 heats and vaporizes the carrier gas containing the raw material solution supplied from a dispersion section 8. In the vaporizer for an MOCVD, (3) the dispersion section 8 comprises: a dispersion section main body 1 that includes a cylindrical hollow section; and a rod 10 having a smaller outer diameter than an inner diameter of the cylindrical hollow section, and includes spiral grooves 70 on the evaporator 22 side of an outer periphery of the rod 10. The rod 10 is inserted through the cylindrical hollow section.
摘要翻译：要解决的问题：提供一种能够获得材料溶液均匀分散的汽化气体的MOCVD蒸发器，并且进一步提供材料溶液的蒸发方法。解决方案：用于MOCVD的蒸发器包括：（1）分散部分8，其包括用于将加压载气3引入气体通道的气体入口4，用于将原料溶液5a供应到气体通道和用于将含有原料溶液的载气送到蒸发部22的气体出口7; 和（2）蒸发部分22，其包括一端与MOCVD装置的反应管连接的蒸发管20a和另一端连接到气体出口7和加热蒸发管20a的加热装置，蒸发部22对从分散部8供给的原料溶液的载气进行加热蒸发。在MOCVD蒸发器中，（3）分散部8包括：分散部主体1，其包括圆筒状的中空部; 以及具有比圆筒形中空部分的内径小的外径的杆10，并且在杆10的外周的蒸发器22侧上包括螺旋槽70.杆10穿过圆柱形中空部分插入。版权所有（C）2012，JPO＆INPIT

38. 发明授权

US5985811A Cleaning solution and cleaning method 失效
标题翻译：清洗液和清洗方法
公开(公告)号：US5985811A
公开(公告)日：1999-11-16
申请号：US780502
申请日：1997-01-08
申请人： Toda Masayuki , Tadahiro Ohmi , Yasuyuki Harada
发明人： Toda Masayuki , Tadahiro Ohmi , Yasuyuki Harada
IPC分类号： B08B3/10 , A61B19/00 , B08B3/12 , C11D3/39 , C11D7/00 , C11D11/00 , H01L21/304 , B08B3/04
CPC分类号： C11D3/3947 , B08B3/12 , C11D11/0047 , C11D11/007 , A61B90/70
摘要： A cleaning solution and cleaning method are provided which: (1) make treatment at room temperature possible, and do not require heating, (2) use little chemicals and water, (3) do not require specialized apparatuses, and moreover, (4) do not require the use of specialized chemicals. The cleaning solution of the present invention comprises pure water containing 20 ppb-100 ppb of oxygen and 2 ppb or more of nitrogen. Furthermore, the cleaning solution may comprise electrolytically ionized water containing OH.sup.- and containing 20 ppb-100 ppb of oxygen. In the cleaning method of the present invention, the cleaning of a material to be cleaned is conducted in a cleaning solution comprising pure water containing 20 ppb-100 ppb of oxygen and 2 ppb-15 ppm of nitrogen, while applying ultrasound having a frequency of 30 kHz or more. Furthermore, in the cleaning method of the present invention, the cleaning of a material to be cleaned may be conducted in a cleaning solution comprising electrolytically ionized water containing OH.sup.- and containing 20 ppb-100 ppb of oxygen, while applying ultrasound having a frequency of 30 kHz or more.
摘要翻译：提供清洗方法和清洗方法：（1）在室温下进行处理，不需要加热，（2）少量使用化学品和水，（3）不需要专门的设备，而且（4）不需要使用专门的化学品。本发明的清洗液含有20ppb-100ppb的氧和2ppb以上的氮的纯水。此外，清洁溶液可以包含含有OH-并且含有20ppb-100ppb氧的电解电离水。在本发明的清洗方法中，要清洗的材料在包含20ppb-100ppb氧气和2ppb-15ppm氮气的纯水的清洁溶液中进行，同时施加频率为 30 kHz以上。此外，在本发明的清洗方法中，清洗材料可以在含有OH-并含有20ppb-100ppb的氧的电解离子水的清洗溶液中进行，同时施加频率为 30 kHz以上。

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