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    • 33. 发明专利
    • RAIL ROLLING STOCK
    • JP2002274373A
    • 2002-09-25
    • JP2001084002
    • 2001-03-23
    • HITACHI LTDHITACHI KASADO ENG CO LTD
    • YAMADA TOSHIHISAINE YOSHIHIKOKONO SAKAE
    • E06B3/62B61D19/00B61D25/00
    • PROBLEM TO BE SOLVED: To provide an inexpensive and safe sliding door. SOLUTION: A recessed part 23 is formed at the outer peripheral end part of window glass 20 installed in the sliding door 10 on the side surface of a rolling stock. The recessed part 23 is located on the inside of the rolling stock. An end part on the outside of the rolling stock is formed in a projected piece 21b. The piece 2b is inserted into an H rubber 30. The projected pieces 11b and 12b on the inner peripheral surface of the sliding door 10 are inserted into the H rubber 30. The surface of the H rubber 30 on the inside of the rolling stock is continued linearly from the window glass 20 to the surface of the H rubber on the inside of the thick portion of the sliding door 10. A wedge- shaped rubber 42 is disposed in the recessed part between the inner peripheral end of the H rubber 30 and the thick portion of the window glass 20. The outer peripheral end part of the H rubber 30 comes into contact with the slanted part 11c of the sliding door. Thus a step and a recessed part can be eliminated.
    • 39. 发明专利
    • SURFACE TREATING METHOD FOR INSIDE OF TREATING SYSTEM
    • JP2001081586A
    • 2001-03-27
    • JP25823799
    • 1999-09-13
    • HITACHI LTDHITACHI KASADO ENG CO LTD
    • TAUCHI TSUTOMUTAMURA NAOYUKI
    • H01L21/205C23C8/12C23F15/00
    • PROBLEM TO BE SOLVED: To simplify the costitution at the time of surface treating operation by introducing ozone into an airtight space formed at the inside of a treating system in a state same is assembled and passivating the inner surface of the airtight space. SOLUTION: After the completion of the assembly of a semiconductor fabrication system 1, the pressure in an airtight space is reduced, and, after that, high concentration ozone is introduced from a gas introducing tube 3. Ozone reaches a regulator 4, a valve 5, a mass flow controller 6 and a filter 7 together with a reaction chamber 8. At this time, the parts of joints 12b and 12c have been sealed by plugs or the like. Moreover, exhaust piping 9 in the reaction chamber 8 is sealed by a valve 11, ozone is charged thereto till the pressure reaches the atmospheric one, is sealed therein for a fixed time and is thereafter exhausted. Successively, such pressure reduction and charging operations are repeated, e.g. for three times. In this way, an oxidized film is deposited over the whole face of the inner surface of the system including details or the like of purchased parts in the gross, and by the oxidized film, the corrosion of the piping or the like caused by corrosive gas and plasma is prevented.