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21. 发明专利

JPS6210369B2 失效
公开(公告)号：JPS6210369B2
公开(公告)日：1987-03-05
申请号：JP13284281
申请日：1981-08-25
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： SUGYAMA KATSUJI , TAKADA ASAO , OOMORI EIJI
IPC分类号： G01J1/04 , G01J1/02 , G01J1/26 , H01J31/50

22. 发明专利

JPS60235028A NARROW WAVELENGTH BAND LIGHT EMITTING AND RECEIVING APPARATUS 失效
公开(公告)号：JPS60235028A
公开(公告)日：1985-11-21
申请号：JP9162784
申请日：1984-05-08
申请人： CANON KK
发明人： SATOU YUUICHI
IPC分类号： G01J1/04 , G01J1/26 , G01J5/60
摘要： PURPOSE:To enhance the discrimination degree of the light from a light source and external light, by inclining the interference means of a light receiving means to an optical axis so as to bring the light receiving quantity by the light receiving means to a max. value. CONSTITUTION:In receiving the light of a light source 1 by a light receiver 6 through a light projecting lens 2 and a subject (not shown in the drawing), a color glass filter 4 and an interference filter 5 are arranged between the light receiving lens 3 and the light receiver 6 and a driving source 9 is controlled by a rotary angle control circuit 8 so as to make the output signal SO of the light receiver 6 max. to incline the filter 5. By this method, the variation in the peak wavelength of the light source 1 caused by the change in circumferential temp. can be compensated.

23. 发明专利

JPS5834328A PROTECTING DEVICE FOR PHOTOMULTIPLIER TUBE 失效
公开(公告)号：JPS5834328A
公开(公告)日：1983-02-28
申请号：JP13284281
申请日：1981-08-25
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： SUGIYAMA KATSUJI , TAKADA ASAO , OOMORI EIJI
IPC分类号： G01J1/04 , G01J1/02 , G01J1/26 , H01J31/50
摘要： PURPOSE:To prevent a photomultiplier tube from damaging by stopping power supply to the photomultiplier tube and the closing operation of a shutter when the intensity of external light is great. CONSTITUTION:When the level of external light is greater than a set value, a relay 31 is operated by the output of a photodetector once a power switch 27 is turned on, allowing a hook H to fall. Therefore, part 28a of a rotor 28 is hooked by an operating pin F to stop the rotation of the rotor 28. Then, a driving plate 26 is not pushed up and a shutter 22 is disabled to open. In this state, when a knob is turned off, a blade 28 presses the hook H up, and it stops by being hooked by the driving pin G of the relay. When this relay 31 when operating turns off a power source with a switch J, so the power source is turned off immediately after the hook falls, preventing the unnecessary consumption of electric power.

24. 发明专利

JP2017015683A センサおよび表面情報検知システム、定着ユニットおよび画像形成装置审中-公开
标题翻译：传感器和表面信息的检测系统，定影单元和图像形成装置
公开(公告)号：JP2017015683A
公开(公告)日：2017-01-19
申请号：JP2015232217
申请日：2015-11-27
申请人：株式会社リコー
发明人：宮垣一也 , 門馬進
IPC分类号： G03G15/20 , G01N21/892 , G01J1/06 , G01J1/26
摘要：【課題】光源の発光強度をモニタできる表面情報検知用の新規なセンサを実現する。【解決手段】光源201と、照射光学系205Aと、受光部207と、受光光学系205Bとを有し、光源201から射出した光を照射光学系205Aを介して被検知対象61の表面に照射し、反射光を受光光学系205Bを介して受光部207で受光して被検知対象61の表面情報を検知するセンサであって、第1の偏向部221、導光部222、第2の偏向部223を有する導光体220を備え、導光体220は、照射光学系205Aおよび受光光学系205Bよりも被検知対象61側で、且つ、被検知対象61よりも照射光学系205Aおよび受光光学系205Bの側に配置可能であり、光源201の発光強度をモニタするときは、照射光学系205Aおよび受光光学系205Bに対向する位置に配され、照射光学系205Aから射出する光を、第1および第2の偏向部221、223で偏向させ、受光光学系205Bを介して受光部207へ向かわせる。【選択図】図1
摘要翻译：甲实现用于检测表面信息可以监测光源的光发射强度的新的传感器。和光源201，照射和照射光学系统205A中，光接收部分207，以及受光光学系统205B，通过照明光学系统205A从光源201发射到检测目标61的表面的光和接收光学系统205B的反射光通过的光被光接收部分207，用于检测所述检测目标61的表面的信息，所述第一偏转部分221，导光部222，第二偏转的传感器接收包括具有部分223，光导220，照射光学系统205A和光接收光学系统的检测对象61侧比205B，和照明光学系统205A和光比检测目标61接收光学光导220 是在系统205B的侧面定位，监测光源201的发光强度时被布置在相对的位置的照明光学系统205A和光接收光学系统205B中，从照射光学系统205A发射的光，所述第一它是由第二偏转部221,223偏转，以引导光通过所述光接收光学系统205B接收部分207。点域1

25. 发明专利

JP4230676B2 Method of measuring illuminance unevenness of the exposure apparatus, a method of correcting illumination unevenness, the semiconductor device manufacturing method and an exposure apparatus 有权
公开(公告)号：JP4230676B2
公开(公告)日：2009-02-25
申请号：JP2001133298
申请日：2001-04-27
申请人：株式会社東芝
发明人：壮一井上 , 和也佐藤 , 聡田中
IPC分类号： H01L21/027 , G01J1/26 , G03F1/00 , G03F1/70 , G03F7/20
CPC分类号： G03F7/70125 , G01J1/26 , G03F7/70133

26. 发明专利

JP2000332691A OPTICAL OUTPUT CONTROL CIRCUIT 失效
公开(公告)号：JP2000332691A
公开(公告)日：2000-11-30
申请号：JP14455599
申请日：1999-05-25
申请人： MIYAGI NIPPON DENKI KK
发明人： KAMATA HIROSHI
IPC分类号： G01J1/44 , G01J1/26 , H04B10/079 , H04B10/293 , H04B10/296 , H04B10/564 , H04B10/572 , H04J14/02 , H04B10/14 , H04B10/04 , H04B10/06
摘要： PROBLEM TO BE SOLVED: To provide an optical output control circuit by which the strength of a light signal is easily and fixedly kept and also various kinds of additional functions are provided. SOLUTION: A light quantity detecting circuit part 9 includes an optic/electric conversion circuit 6 and an ADD converting circuit 7 for digitally converting the level of an analog voltage outputted from the circuit 6. An attenuator control circuit 5 gives an attenuation amount corresponding to the value of a digital control signal from a CPU 4 to a variable light attenuator 2. Relation between a digital value outputted from the part 9 and an output optical signal strength(output level) and the relation between the value of the digital control signal and the attenuation amount of the attenuator 2 are previously set in a relative table 8. The CPU 4 decides the attenuation amount in the attenuator 2 by the digital signal so that the output level is set to the desired value by one-time control without the necessity of several-time fine adjustment.

27. 发明专利

JPS59221629A COLOR MARK DETECTION SYSTEM 失效
公开(公告)号：JPS59221629A
公开(公告)日：1984-12-13
申请号：JP9658683
申请日：1983-05-31
申请人： YAMATAKE HONEYWELL CO LTD
发明人： OKADA MITSUYOSHI
IPC分类号： G01J1/26 , G01J3/10 , G01J3/51 , G01J9/00 , G02B5/28 , G01J3/50
摘要： PURPOSE:To select the wavelength of a light source continuously with good homogeneity and to improve the S/N ratio of mark detection by providing an interference filter which selects homogeneous light from a light rotatably on an optical path extending from the light source to a photocell. CONSTITUTION:Irradiation light from the light source 1 illuminates an object 4 of measurement through a half-mirror 2 and a lens 3. Reflected light from the object 4 enters the 1st photoelectric sensor 5 through the lens 3 and half-mirror 2. Another light beam from the light source 1, on the other hand, is reduced in quantity and then made incident to the 2nd photoelectric sensor 6. A comparator 8 compares electric signals from the photoelectric sensors 5 and 6 with each other and outputs the result through an output circuit 9. For the purpose, the rotatably interference filter 10 is provided between the half-mirror 2 and photoelectric sensor 5. Consequently, such wavelength that the difference in the quantity of light between the mark of the object of measurement and the background is maximized is selected.

28. 发明专利

JPS5847224A MEASURING DEVICE FOR AMOUNT OF LIGHT 失效
公开(公告)号：JPS5847224A
公开(公告)日：1983-03-18
申请号：JP14693981
申请日：1981-09-16
申请人： CANON KK
发明人： TAKAYAMA HARUYOSHI
IPC分类号： G03B7/08 , G01J1/04 , G01J1/18 , G01J1/26
摘要： PURPOSE:To perform the measurement of amount of light with high accuracy by adjusting the amount of light that reaches the amount of light sensor via a variable opening that is provided in front of the sensor. CONSTITUTION:An opening changeable section 1 consists of liquid crystal plate that has a plurality of concentric electrodes, and an electrode is selected by an opening diameter selection circuit to select an opening diameter. The light that comes in the direction of an arrow mark goes through the liquid crystal plate 1 and goes into a measurement sensor 2. The output of the sensor 2 is supplied to a CPU5 through an amplifier 3 and an A/D converter 4. At the CPU5 it is judged whether or not the data belongs to the linear section or non-linear section of the characteristic curve of the sensor 2. In the case of the data of non-linear section, opening diameter change signal 8 is sent to a selection signal 7. After the opening is adjusted, light measurement is performed again. The data on the amount of light is sent to a display device 6. Accordingly high precision measurement is performed.

29. 发明专利

JPS5834329A PROTECTING DEVICE FOR PHOTOMULTIPLIER TUBE 失效
公开(公告)号：JPS5834329A
公开(公告)日：1983-02-28
申请号：JP13284381
申请日：1981-08-25
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： SUGIYAMA KATSUJI , TAKADA ASAO , OOMORI EIJI
IPC分类号： G01J1/04 , G01J1/02 , G01J1/26 , H01J31/50
摘要： PURPOSE:To protect the photoelectric surface of a photomultiplier tube by providing the 1st shutter which opens and closes in coupling with a power switch and the 2nd shuter which cuts off intense incident light. CONSTITUTION:When the knob of a power switch is rotated, a power source is turned on and the 1st shutter blades are opened to left and right to allow external light to illuminate an optical amplification part. The 2nd shutter blades 31a and 32b are provided in parallel to the 1st shutter blades, and are driven by the output of a photosensing part 30 including a photodetector. Namely, variation with the incidence light is detected to cut off the incident light to the photomultiplier tube in response to intense incident light arriving during operation, thus preventing damage due to an excessive input.

30. 发明专利

JPH05142041A LOW-ILLUMINATION CALIBRATION DEVICE 失效
公开(公告)号：JPH05142041A
公开(公告)日：1993-06-08
申请号：JP30093191
申请日：1991-11-18
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： OTSUKA RIE , ONO YOSHIHIRO
IPC分类号： G01J1/02 , G01J1/26
摘要： PURPOSE:To prevent a low-illumination calibration device from being set by mistake and achieve an accurate calibration easily by changing illumination of light impinging on an illumination photometer without changing a distance between a luminous body and the illumination photometer and wattage of a standard light source. CONSTITUTION:A title item is provided with a standard light source 1, a standard light receiver 3 where an output per incidence illumination is evaluated and which receives light from the standard light source, a transmission diffusion plate 4 which is positioned between the standard light source 1 and the standard light receiver 3, a variable mask 5 which can change an area of an opening for the transmission diffusion plate 4, and a light-receiver replacement means 6 which replaces an illumination photometer 2 to be calibrated at a same position as the standard light receiver 3. Any setting illumination value can be realized by changing an opening diameter of a variable mask 5 continuously.

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