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21. 发明授权

US06842969B2 Process for manufacturing a magnetic read head 失效
标题翻译：磁读头的制造工艺
公开(公告)号：US06842969B2
公开(公告)日：2005-01-18
申请号：US10116984
申请日：2002-04-05
申请人： Moris Dovek , Po-Kang Wang , Chen-Jung Chien , Chyu-Jiuh Torng , Yun-Fei Li
发明人： Moris Dovek , Po-Kang Wang , Chen-Jung Chien , Chyu-Jiuh Torng , Yun-Fei Li
IPC分类号： G11B5/39 , G11B5/127 , H04R31/00
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3903 , G11B2005/3996 , Y10T29/49032 , Y10T29/49036 , Y10T29/49044 , Y10T29/49046
摘要： In magnetic read heads based on bottom spin valves the preferred structure is for the longitudinal bias layer to be in direct contact with the free layer. Such a structure is very difficult to manufacture. The present invention overcomes this problem by using a liftoff technique to form, on the free layer, a buffer layer having a trapezoidal cross-section, sloping sidewalls, and a central area of uniform thickness, whose width defines the read track. A suitable bias layer and leads are then deposited on this buffer layer.
摘要翻译：在基于底部自旋阀的磁性读取头中，优选的结构是使纵向偏置层与自由层直接接触。这样的结构很难制造。本发明通过使用提升技术在自由层上形成具有梯形横截面，倾斜侧壁和均匀厚度的中心区域（其宽度限定读取轨迹）的缓冲层来克服该问题。然后将适当的偏置层和引线沉积在该缓冲层上。

22. 发明申请

US20050122637A1 Transverse or longitudinal patterned synthetic exchange biasing for stabilizing GMR sensors 失效
公开(公告)号：US20050122637A1
公开(公告)日：2005-06-09
申请号：US11036529
申请日：2005-01-14
申请人： Cheng Horng , Min Li , Ru-Ying Tong , Yun-Fei Li , YouFeng Zheng , Simon Liao , Kochan Ju , Cherng Han
发明人： Cheng Horng , Min Li , Ru-Ying Tong , Yun-Fei Li , YouFeng Zheng , Simon Liao , Kochan Ju , Cherng Han
IPC分类号： G01R33/09 , G11B5/31 , G11B5/39 , G11B5/33 , G11B5/127
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G11B5/3143 , G11B5/3163 , G11B5/3932 , G11B2005/3996 , Y10T29/49032 , Y10T29/49034 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Patterned, longitudinally and transversely antiferromagnetically exchange biased GMR sensors are provided which have narrow effective trackwidths and reduced side reading. The exchange biasing significantly reduces signals produced by the portion of the ferromagnetic free layer that is underneath the conducting leads while still providing a strong pinning field to maintain sensor stability. In the case of the transversely biased sensor, the magnetization of the free and biasing layers in the same direction as the pinned layer simplifies the fabrication process and permits the formation of thinner leads by eliminating the necessity for current shunting.

23. 发明授权

US09196270B1 Method for providing a magnetoresistive element having small critical dimensions 有权
标题翻译：提供具有小临界尺寸的磁阻元件的方法
公开(公告)号：US09196270B1
公开(公告)日：2015-11-24
申请号：US11635830
申请日：2006-12-07
申请人： Danning Yang , Guanghong Luo , Yun-Fei Li
发明人： Danning Yang , Guanghong Luo , Yun-Fei Li
IPC分类号： G11B5/31 , G11B5/39 , H01L21/311 , H01L21/314
CPC分类号： G11B5/398 , G11B5/3163 , G11B5/39 , G11B5/3903 , G11B5/3932 , H01L21/31138 , H01L21/3144 , H01L43/08 , Y10T29/49041 , Y10T29/49048 , Y10T29/49052
摘要： The method and system for providing a magnetoresistive device are described. The method and system include depositing a plurality of magnetoresistive element layers which cover at least one device area and at least one field area. The method and system also include providing a single layer mask. The single layer mask covers a first portion of the magnetoresistive element layers in the device area(s) and exposes the magnetoresistive element layers in the field area(s). The method and system include defining the magnetoresistive element(s) using the single layer mask and depositing a hard bias layer on the device area(s) and the field area(s) after the magnetic element(s) are defined. The method and system further include performing a planarization after the hard bias layer is deposited.
摘要翻译：描述了用于提供磁阻器件的方法和系统。该方法和系统包括沉积多个覆盖至少一个器件区域和至少一个场区域的磁阻元件层。该方法和系统还包括提供单层掩模。单层掩模覆盖器件区域中的磁阻元件层的第一部分并且暴露场区域中的磁阻元件层。该方法和系统包括使用单层掩模限定磁阻元件，并且在限定了磁性元件之后，在器件区域和场区域上沉积硬偏置层。所述方法和系统还包括在沉积硬偏压层之后执行平面化。

24. 发明授权

US08444866B1 Method and system for providing a perpendicular magnetic recording pole with a multi-layer side gap 有权
标题翻译：用于提供具有多层侧面间隙的垂直磁记录极的方法和系统
公开(公告)号：US08444866B1
公开(公告)日：2013-05-21
申请号：US12886999
申请日：2010-09-21
申请人： Lijie Guan , Changqing Shi , Ming Jiang , Yun-Fei Li , Ying Hong
发明人： Lijie Guan , Changqing Shi , Ming Jiang , Yun-Fei Li , Ying Hong
IPC分类号： B44C1/22
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T29/49021 , Y10T29/49032
摘要： A method for fabricating a magnetic transducer having a nonmagnetic intermediate layer is described. A trench is provided in the intermediate layer. The trench has a profile and location corresponding to a pole. A first nonmagnetic gap layer is provided. At least part of the first nonmagnetic gap layer resides in the trench. A pole including magnetic material(s) is provided. At least part of the pole resides in the trench and on the part of the nonmagnetic layer in the trench. At least part of the intermediate layer adjacent to the pole is removed and a second nonmagnetic gap layer provided. The second nonmagnetic gap layer is thicker than the first nonmagnetic gap layer. Part of the second nonmagnetic layer and part of the first nonmagnetic layer adjacent to the pole form a side gap. A side shield, a gap, and a top shield are also provided.
摘要翻译：描述了一种用于制造具有非磁性中间层的磁换能器的方法。在中间层设置沟槽。沟槽具有对应于杆的轮廓和位置。提供第一非磁性间隙层。第一非磁性间隙层的至少一部分位于沟槽中。提供包括磁性材料的极柱。极的至少一部分驻留在沟槽中以及在沟槽中的非磁性层的一部分上。去除与极相邻的中间层的至少一部分，并提供第二非磁性间隙层。第二非磁性间隙层比第一非磁性间隙层厚。第二非磁性层的一部分和与极相邻的第一非磁性层的一部分形成侧面间隙。还提供了侧护罩，间隙和顶盖。

25. 发明授权

US08375564B1 Method for fabricating a pole of a magnetic transducer 有权
标题翻译：一种用于制造磁换能器极点的方法
公开(公告)号：US08375564B1
公开(公告)日：2013-02-19
申请号：US12633562
申请日：2009-12-08
申请人： Guanghong Luo , Danning Yang , Weimin Si , Dujiang Wan , Yun-Fei Li , Lijie Guan , Ming Jiang
发明人： Guanghong Luo , Danning Yang , Weimin Si , Dujiang Wan , Yun-Fei Li , Lijie Guan , Ming Jiang
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/1278 , G11B5/3116 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method provides a pole of magnetic recording transducer. A nonmagnetic stop layer having a thickness and a top surface is provided. A depression that forms a bevel is provided in the stop layer. The bevel has a depth less than the thickness and a bevel angle with respect to a remaining portion of the top surface. The bevel angle is greater than zero and less than ninety degrees. An intermediate layer having a substantially flat top surface is provided over the stop layer. A trench is formed in the intermediate layer via a removal process. The trench has a profile corresponding to the pole. The stop layer is a stop for the removal process. The method also includes providing the pole in the trench. The pole has a leading edge bevel corresponding to the bevel in the stop layer.
摘要翻译：一种方法提供磁记录传感器的极点。提供具有厚度和顶表面的非磁性停止层。形成斜面的凹陷设置在停止层中。该斜面具有小于该厚度的深度和相对于顶部表面的剩余部分的斜角。斜角大于零，小于九十度。具有基本上平坦的顶表面的中间层设置在停止层上。通过去除工艺在中间层中形成沟槽。沟槽具有对应于极点的轮廓。停止层是移除过程的停止点。该方法还包括在沟槽中设置极点。极具有对应于停止层中的斜面的前缘斜面。

26. 发明授权

US08225488B1 Method for providing a perpendicular magnetic recording (PMR) pole 有权
标题翻译：提供垂直磁记录（PMR）极的方法
公开(公告)号：US08225488B1
公开(公告)日：2012-07-24
申请号：US12471278
申请日：2009-05-22
申请人： Jinqiu Zhang , Yun-Fei Li , Ying Hong
发明人： Jinqiu Zhang , Yun-Fei Li , Ying Hong
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for providing a PMR pole in a magnetic recording transducer comprises providing a mask on an intermediate layer, the mask including a line having at least one side, providing a hard mask on the mask, a first portion of the hard mask residing on the at least one side and a second portion residing on a surface of the intermediate layer, the hard mask including a dry-etchable layer and a high removal ratio layer on the dry-etchable layer, removing at least part of the first portion of the hard mask, at least a portion of the line being exposed, removing the line, thereby providing an aperture in the hard mask corresponding to the line, forming a trench in the intermediate layer under the aperture using a removal process, and providing the PMR pole, at least a portion of the PMR pole residing in the trench.
摘要翻译：用于在磁记录换能器中提供PMR极的方法包括在中间层上提供掩模，所述掩模包括具有至少一个侧面的线，在所述掩模上提供硬掩模，所述硬掩模的位于所述掩模上的第一部分驻留在中间层的表面上的至少一个侧面和第二部分，该硬掩模包括在该可干蚀刻层上的可干蚀刻层和高去除率层，去除硬的第一部分的至少一部分掩模，线的至少一部分被暴露，去除线，从而在对应于线的硬掩模中提供孔，使用去除过程在孔下方的中间层中形成沟槽，以及提供PMR极， PMR极的至少一部分位于沟槽中。

27. 发明申请

US20050141149A1 Transverse or longitudinal patterned synthetic exchange biasing for stabilizing GMR sensors 失效
公开(公告)号：US20050141149A1
公开(公告)日：2005-06-30
申请号：US11036959
申请日：2005-01-14
申请人： Cheng Horng , Min Li , Ru-Ying Tong , Yun-Fei Li , You Zheng , Simon Liao , Kochan Ju , Cherng Han
发明人： Cheng Horng , Min Li , Ru-Ying Tong , Yun-Fei Li , You Zheng , Simon Liao , Kochan Ju , Cherng Han
IPC分类号： G01R33/09 , G11B5/31 , G11B5/39 , G11B5/33 , G11B5/127
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G11B5/3143 , G11B5/3163 , G11B5/3932 , G11B2005/3996 , Y10T29/49032 , Y10T29/49034 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Patterned, longitudinally and transversely antiferromagnetically exchange biased GMR sensors are provided which have narrow effective trackwidths and reduced side reading. The exchange biasing significantly reduces signals produced by the portion of the ferromagnetic free layer that is underneath the conducting leads while still providing a strong pinning field to maintain sensor stability. In the case of the transversely biased sensor, the magnetization of the free and biasing layers in the same direction as the pinned layer simplifies the fabrication process and permits the formation of thinner leads by eliminating the necessity for current shunting.

28. 发明授权

US09202480B2 Double patterning hard mask for damascene perpendicular magnetic recording (PMR) writer 有权
标题翻译：用于大马士革垂直磁记录（PMR）作者的双重图案化硬掩模
公开(公告)号：US09202480B2
公开(公告)日：2015-12-01
申请号：US12579316
申请日：2009-10-14
申请人： Xiaohai Xiang , Yun-Fei Li , Jinqiu Zhang , Hongping Yuan , Xianzhong Zeng , Hai Sun
发明人： Xiaohai Xiang , Yun-Fei Li , Jinqiu Zhang , Hongping Yuan , Xianzhong Zeng , Hai Sun
IPC分类号： B44C1/22 , C03C15/00 , H01L21/4763 , G11B5/31 , G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T428/11
摘要： Various embodiments of the subject disclosure provide a double patterning process that uses two patterning steps to produce a write structure having a nose shape with sharp corners. In one embodiment, a method for forming a write structure on a multi-layer structure comprising a substrate and an insulator layer on the substrate is provided. The method comprises forming a hard mask layer over the insulator layer, performing a first patterning process to form a pole and yoke opening in the hard mask layer, performing a second patterning process to remove rounded corners of the pole and yoke opening in the hard mask layer, removing a portion of the insulator layer corresponding to the pole and yoke opening in the hard mask layer to form a trench in the insulator layer, and filling the trench with a magnetic material.
摘要翻译：本发明公开的各种实施例提供一种双重图案化工艺，其使用两个图案化步骤来产生具有尖角的鼻子形状的写入结构。在一个实施例中，提供了一种用于在包括衬底和衬底上的绝缘体层的多层结构上形成写结构的方法。该方法包括在绝缘体层上形成硬掩模层，执行第一图案化工艺以在硬掩模层中形成极和轭开口，执行第二图案化处理以去除硬掩模中的极和轭开口的圆角去除与硬掩模层中的极和轭开口相对应的绝缘体层的一部分，以在绝缘体层中形成沟槽，并用磁性材料填充沟槽。

29. 发明授权

US09153260B1 Electronic lapping guide in a magnetic recording transducer 有权
标题翻译：磁记录传感器中的电子研磨导轨
公开(公告)号：US09153260B1
公开(公告)日：2015-10-06
申请号：US13419313
申请日：2012-03-13
申请人： Steven C. Rudy , Matthew R. Gibbons , Curtis V. Macchioni , Yun-Fei Li , Changhe Shang , Carlos Corona
发明人： Steven C. Rudy , Matthew R. Gibbons , Curtis V. Macchioni , Yun-Fei Li , Changhe Shang , Carlos Corona
IPC分类号： G11B5/31 , G11B5/455
CPC分类号： G11B5/455 , G11B5/3166 , G11B5/3169 , Y10T29/49036 , Y10T29/49037 , Y10T29/49041 , Y10T29/49048
摘要： A slider includes a transducer including a magnetic structure having a front edge and a back edge. The slider further includes an electronic lapping guide (ELG) substantially coplanar with the magnetic structure and having a top edge and a bottom edge. The slider further includes a plurality of pads configured to calibrate a sheet resistance of the ELG and an offset of the ELG.
摘要翻译：滑块包括具有前缘和后缘的磁结构的换能器。滑块还包括与磁性结构基本上共面并具有顶部边缘和底部边缘的电子研磨导向器（ELG）。滑块还包括多个衬垫，其被配置成校准ELG的薄层电阻和ELG的偏移。

30. 发明授权

US09099118B1 Dual damascene process for producing a PMR write pole 有权
标题翻译：用于生产PMR写极的双镶嵌工艺
公开(公告)号：US09099118B1
公开(公告)日：2015-08-04
申请号：US12472341
申请日：2009-05-26
申请人： Ronghui Zhou , Ming Jiang , Guanghong Luo , Yun-Fei Li
发明人： Ronghui Zhou , Ming Jiang , Guanghong Luo , Yun-Fei Li
IPC分类号： G11B5/127 , H04R31/00 , G11B5/31
CPC分类号： G11B5/3169 , G11B5/1278 , G11B5/3116 , G11B5/313 , G11B5/3163 , Y10T29/49046
摘要： Methods of forming a write pole are disclosed. A structure comprising a bottom insulating layer and a top insulating layer is provided. A top damascene trench is formed in the top insulating layer, and a bottom damascene trench is formed in the bottom insulating layer. The bottom damascene trench and a portion of the top damascene trench are filled with a pole material. The top insulating layer and a portion of the pole material located above the bottom damascene trench are removed.
摘要翻译：公开了形成写极的方法。提供了包括底部绝缘层和顶部绝缘层的结构。在顶部绝缘层中形成顶部镶嵌沟槽，并且在底部绝缘层中形成底部镶嵌沟槽。底部镶嵌沟槽和顶部镶嵌沟槽的一部分填充有极材料。去除顶部绝缘层和位于底部镶嵌沟槽上方的极材料的一部分。

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