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1. 发明授权

US08444866B1 Method and system for providing a perpendicular magnetic recording pole with a multi-layer side gap 有权
标题翻译：用于提供具有多层侧面间隙的垂直磁记录极的方法和系统
公开(公告)号：US08444866B1
公开(公告)日：2013-05-21
申请号：US12886999
申请日：2010-09-21
申请人： Lijie Guan , Changqing Shi , Ming Jiang , Yun-Fei Li , Ying Hong
发明人： Lijie Guan , Changqing Shi , Ming Jiang , Yun-Fei Li , Ying Hong
IPC分类号： B44C1/22
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T29/49021 , Y10T29/49032
摘要： A method for fabricating a magnetic transducer having a nonmagnetic intermediate layer is described. A trench is provided in the intermediate layer. The trench has a profile and location corresponding to a pole. A first nonmagnetic gap layer is provided. At least part of the first nonmagnetic gap layer resides in the trench. A pole including magnetic material(s) is provided. At least part of the pole resides in the trench and on the part of the nonmagnetic layer in the trench. At least part of the intermediate layer adjacent to the pole is removed and a second nonmagnetic gap layer provided. The second nonmagnetic gap layer is thicker than the first nonmagnetic gap layer. Part of the second nonmagnetic layer and part of the first nonmagnetic layer adjacent to the pole form a side gap. A side shield, a gap, and a top shield are also provided.
摘要翻译：描述了一种用于制造具有非磁性中间层的磁换能器的方法。在中间层设置沟槽。沟槽具有对应于杆的轮廓和位置。提供第一非磁性间隙层。第一非磁性间隙层的至少一部分位于沟槽中。提供包括磁性材料的极柱。极的至少一部分驻留在沟槽中以及在沟槽中的非磁性层的一部分上。去除与极相邻的中间层的至少一部分，并提供第二非磁性间隙层。第二非磁性间隙层比第一非磁性间隙层厚。第二非磁性层的一部分和与极相邻的第一非磁性层的一部分形成侧面间隙。还提供了侧护罩，间隙和顶盖。

2. 发明授权

US08257597B1 Double rie damascene process for nose length control 有权
标题翻译：用于鼻长度控制的双重镶嵌工艺
公开(公告)号：US08257597B1
公开(公告)日：2012-09-04
申请号：US12717090
申请日：2010-03-03
申请人： Lijie Guan , Changqing Shi , Ming Jiang , Yun-Fei Li
发明人： Lijie Guan , Changqing Shi , Ming Jiang , Yun-Fei Li
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/3116 , Y10T29/49021 , Y10T29/49048
摘要： Methods of forming a write pole are disclosed. A first photomask having a first opening over one of a yoke region and a pole tip region of the write pole is formed over an insulation layer having an insulator material. A first etch process is performed on the insulation layer via the first opening, the first etch process removing the insulator material from a corresponding one of the yoke region and the pole tip region. A second photomask having a second opening over the other one of the yoke region and the pole tip region is formed over the insulation layer. A second etch process is performed on the insulation layer via the second opening, the second etch process removing the insulator material from a corresponding one of the yoke region and the pole tip region.
摘要翻译：公开了形成写极的方法。在具有绝缘体材料的绝缘层上形成第一光掩模，其具有位于写磁极的磁轭区域和极尖区域之一上的第一开口。通过第一开口在绝缘层上执行第一蚀刻工艺，第一蚀刻工艺从磁轭区域和极尖区域中的对应的一个去除绝缘体材料。在绝缘层上形成第二光掩模，该第二光掩模具有位于轭区域和极尖区域另一个之上的第二开口。经由第二开口在绝缘层上执行第二蚀刻工艺，第二蚀刻工艺从磁轭区域和极尖区域中的对应的一个去除绝缘体材料。

3. 发明授权

US08443510B1 Method for utilizing an electronic lapping guide for a beveled pole in a magnetic recording transducer 有权
标题翻译：在磁记录传感器中利用电子研磨引导件用于斜面极的方法
公开(公告)号：US08443510B1
公开(公告)日：2013-05-21
申请号：US12473893
申请日：2009-05-28
申请人： Changqing Shi , Ming Jiang , Lijie Guan
发明人： Changqing Shi , Ming Jiang , Lijie Guan
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3166 , G11B5/3169 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for providing at least one transducer including magnetic structure and having an air-bearing surface (ABS) are described. The method includes providing a lapping electronic lapping guide (lapping ELG) and a targeting ELG. The lapping ELG and targeting ELG each are coplanar with the desired thickness of the magnetic structure and have a back edge at the distance from the ABS such that the ELG back edges are substantially aligned with the flare point. The targeting ELG has a front edge at a front edge distance from the ABS corresponding to an intersection of the bevel and the desired thickness. The method further includes lapping the transducer and terminating the lapping based on a first resistance of the lapping ELG and a second resistance of the targeting ELG.
摘要翻译：描述了一种用于提供包括磁性结构并具有空气轴承表面（ABS）的至少一个换能器的方法。该方法包括提供研磨电子研磨导向器（研磨ELG）和靶向ELG。研磨ELG和靶向ELG各自与磁性结构的期望厚度共面，并且具有与ABS的距离的后边缘，使得ELG后边缘基本上与火炬点对准。靶向ELG在与斜面和所需厚度的交点相对应的ABS的前边缘距离处具有前边缘。该方法还包括基于研磨ELG的第一电阻和靶向ELG的第二电阻来研磨换能器并终止研磨。

4. 发明授权

US08409453B1 Method and system for providing a wrap-around shield using a patterned seed layer 失效
标题翻译：用于使用图案种子层提供环绕屏蔽的方法和系统
公开(公告)号：US08409453B1
公开(公告)日：2013-04-02
申请号：US12778480
申请日：2010-05-12
申请人： Ming Jiang , Changqing Shi
发明人： Ming Jiang , Changqing Shi
IPC分类号： B44C1/22
CPC分类号： G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A method and system for fabricating magnetic recording transducer are described. The magnetic recording transducer has a main pole, a nonmagnetic gap covering the main pole, and a field region distal from the main pole. A portion of the nonmagnetic gap resides on the top of the main pole. The method and system include providing a patterned seed layer. A thick portion of the patterned seed layer is thicker than a thin portion of the patterned seed layer. At least part of the thick portion of the patterned seed layer resides on a portion of the field region. A wrap-around shield is on the patterned seed layer. At least part of the thin portion of the patterned seed layer is in proximity to and exposed by the wrap-around shield. The method and system also include field etching the field region distal from the wrap-around shield.
摘要翻译：描述了用于制造磁记录换能器的方法和系统。磁记录传感器具有主极，覆盖主极的非磁性间隙和远离主极的场区域。非磁性间隙的一部分位于主极的顶部。该方法和系统包括提供图案化种子层。图案化种子层的厚部分比图案化种子层的薄部分厚。图案化种子层的厚部分的至少部分位于场区域的一部分上。环绕的屏蔽层在图案化的种子层上。图案化种子层的薄部分的至少一部分靠近环绕屏蔽并暴露于其中。该方法和系统还包括对远离环绕屏蔽的场区域进行场蚀刻。

5. 发明授权

US08262919B1 Method and system for providing a perpendicular magnetic recording pole using multiple chemical mechanical planarizations 有权
标题翻译：使用多个化学机械平面化提供垂直磁记录极的方法和系统
公开(公告)号：US08262919B1
公开(公告)日：2012-09-11
申请号：US12824036
申请日：2010-06-25
申请人： Guanghong Luo , Changqing Shi , Danning Yang , Jinwen Wang , Ming Jiang
发明人： Guanghong Luo , Changqing Shi , Danning Yang , Jinwen Wang , Ming Jiang
IPC分类号： B44C1/22
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A method and system for providing a pole of magnetic transducer having an intermediate layer are described. The method and system include providing a trench in the intermediate layer and depositing a nonmagnetic liner. A portion of the nonmagnetic liner resides in the trench. At least one seed layer is deposited. A portion of the at least one seed layer resides in the trench. The method and system include depositing at least one main pole layer. The at least one main pole layer is magnetic. A portion of the main pole layer(s) reside in the trench. The method and system also include performing a first chemical mechanical planarization (CMP). An excess portion of the seed layer(s) external to the trench are removed through an ion beam etch. The method and system further include performing a second CMP to remove an excess portion of the nonmagnetic liner external to the trench.
摘要翻译：描述了一种用于提供具有中间层的磁换能器的磁极的方法和系统。该方法和系统包括在中间层中提供沟槽并沉积非磁性衬垫。非磁性衬垫的一部分位于沟槽中。沉积至少一个种子层。至少一个种子层的一部分位于沟槽中。该方法和系统包括沉积至少一个主极层。至少一个主极层是磁性的。主极层的一部分驻留在沟槽中。该方法和系统还包括执行第一化学机械平面化（CMP）。通过离子束蚀刻去除沟槽外部的种子层的多余部分。该方法和系统还包括执行第二CMP以去除沟槽外部的非磁性衬垫的多余部分。

6. 发明授权

US07889456B2 Perpendicular magnetic recording write head with flux shaping layers on the write pole and magnetic recording system incorporating the write head 有权
标题翻译：垂直磁记录写磁头与写入磁极和磁记录系统中的磁通成形层结合写入头
公开(公告)号：US07889456B2
公开(公告)日：2011-02-15
申请号：US11939503
申请日：2007-11-13
申请人： Ming Jiang , Changqing Shi
发明人： Ming Jiang , Changqing Shi
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/112 , G11B5/1278 , G11B5/3146 , G11B5/315
摘要： A perpendicular magnetic recording write head having a flux shaping layer located on the write pole which has an end located substantially at the surface of the head carrier that faces the recording medium. The write head includes a main pole, on which the write pole is formed, that has an end recessed from the write pole end, and at least one flux return pole. In one implementation a first flux shaping layer is located between the main pole and the write pole. A second flux shaping layer may be located on the write pole with both shaping layers having an end recessed from the write pole end. The first and second flux shaping layers may also be tapered in the direction of the recording medium and cover the sides of the write pole in the cross-track direction to substantially surrounded the write pole with flux shaping material.
摘要翻译：一种垂直磁记录写头，其具有位于写极上的通量成形层，其具有大致位于头托架的面向记录介质的表面的端部。写头包括形成有写极的主极，其具有从写极端凹入的端部，以及至少一个通量返回极。在一个实施方案中，第一磁通形成层位于主极和写极之间。第二磁通形成层可以位于写极上，两个成形层具有从写极端凹入的端部。第一和第二磁通形成层也可以在记录介质的方向上渐缩，并且在交叉磁道方向上覆盖写极的侧面，以基本上用磁通量成形材料包围写极。

7. 发明申请

US20090154026A1 METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD WITH A THIN WRAP AROUND MAGNETIC SHIELD 有权
标题翻译：用于制造具有磁带的薄带的普通磁头写入头的方法
公开(公告)号：US20090154026A1
公开(公告)日：2009-06-18
申请号：US11955305
申请日：2007-12-12
申请人： Ming Jiang , Changqing Shi
发明人： Ming Jiang , Changqing Shi
IPC分类号： G11B5/33
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/315
摘要： A magnetic write head for perpendicular magnetic recording having a thin wrap-around magnetic shield. The small thickness and forming method of the thin wrap-around magnetic shield allow it to be electroplated using a thin photoresist frame mask. The thin photoresist frame mask has better critical dimension and straight wall control than a thicker mask, which allows the wrap-around magnetic shield to be constructed with much more straight and uniform back edge for shield throat height control than is possible when forming a thicker (i.e. taller) shield. The thin wrap-around magnetic shield can be stitched to a trailing return pole to avoid magnetic saturation of the wrap-around shield.
摘要翻译：用于垂直磁记录的磁写头，具有薄的环绕磁屏蔽。薄环绕磁屏蔽的小厚度和形成方法允许其使用薄的光致抗蚀剂框架掩模进行电镀。薄的光致抗蚀剂框架掩模具有比较厚的掩模更好的临界尺寸和直壁控制，这使得环绕的磁屏蔽件构造成具有更加直线和均匀的后边缘，用于在形成更厚的（即更高）的盾牌。薄环绕磁屏蔽可以缝合到尾部返回极，以避免环绕屏蔽的磁饱和。

8. 发明申请

US20090122445A1 PERPENDICULAR MAGNETIC RECORDING WRITE HEAD WITH FLUX SHAPING LAYERS ON THE WRITE POLE AND MAGNETIC RECORDING SYSTEM INCORPORATING THE WRITE HEAD 有权
标题翻译：写磁头和写磁头的磁记录系统的磁带记录头磁头记录头
公开(公告)号：US20090122445A1
公开(公告)日：2009-05-14
申请号：US11939503
申请日：2007-11-13
申请人： Ming Jiang , Changqing Shi
发明人： Ming Jiang , Changqing Shi
IPC分类号： G11B5/10
CPC分类号： G11B5/3116 , G11B5/112 , G11B5/1278 , G11B5/3146 , G11B5/315
摘要： A perpendicular magnetic recording write head has at least one flux shaping layer located on the write pole. The write pole has an end located substantially at the surface of the head carrier that faces the recording medium. The write head includes a main pole, on which the write pole is formed, that has an end recessed from the write pole end, and at least one flux return pole. In one implementation a first flux shaping layer is located between the main pole and the write pole and has an end recessed from the write pole end. A second flux shaping layer, also with its end recessed form the write pole end, may be located on the write pole. The second flux shaping layer may also cover the sides of the write pole in the cross-track direction so that together with the first flux shaping layer, the write pole is substantially surrounded by flux shaping material. The ends of the flux shaping layers may be tapered in the direction of the recording medium to enhance directing and shaping the flux to the write pole end.
摘要翻译：垂直磁记录写头具有位于写柱上的至少一个磁通形成层。写极具有大致位于头托架的面向记录介质的表面的端部。写头包括形成有写极的主极，其具有从写极端凹入的端部和至少一个通量返回极。在一个实施方案中，第一磁通形成层位于主极和写极之间，并且具有从写极端凹入的端部。第二磁通形成层，其端部凹入形成写极端，可以位于写极上。第二磁通形成层也可以覆盖写磁极的交叉磁道方向的侧面，使得与第一磁通形成层一起，写磁极基本上被磁通成形材料包围。焊剂成形层的端部可以在记录介质的方向上渐缩，以增强引导和成形焊剂到写入极端部。

9. 发明授权

US08291743B1 Method and system for calibrating an electronic lapping guide for a beveled pole in a magnetic recording transducer 有权
标题翻译：用于校准磁记录传感器中斜面极的电子研磨导轨的方法和系统
公开(公告)号：US08291743B1
公开(公告)日：2012-10-23
申请号：US12473159
申请日：2009-05-27
申请人： Changqing Shi , Ming Jiang
发明人： Changqing Shi , Ming Jiang
IPC分类号： G01N37/00 , G11B27/36
CPC分类号： G11B5/3166 , G11B5/3169
摘要： A method and system for calibrating an electronic lapping guide (ELG) for transducer(s) having an ABS and a magnetic structure are described. The magnetic structure has a desired thickness, a bevel, and a flare point a distance from the ABS. The method and system include providing at least three ELGs. A first ELG has first and second edges first and second distances from the ABS. A second ELG has third and fourth edges third and second distances from the ABS. A third ELG has fifth and sixth edges fourth and second distances from the ABS. The first, third, and fourth distances correspond to a stripe height and an offset. The first, third, and fourth distance and/or the second distance corresponds to an intersection between the bevel and the desired thickness. The method and system also include measuring resistances of the ELGs, and calibrating the ELG(s) utilizing the offset and resistances.
摘要翻译：描述了用于校准具有ABS和磁性结构的换能器的电子研磨导轨（ELG）的方法和系统。磁性结构具有所需的厚度，斜面和距离ABS的距离的火炬点。该方法和系统包括提供至少三个ELG。第一ELG具有第一和第二边缘和ABS之间的第二距离。第二ELG具有距ABS的第三和第四边缘第三和第二距离。第三ELG具有从ABS的第五和第六边缘第四和第二距离。第一，第三和第四距离对应于条纹高度和偏移。第一，第三和第四距离和/或第二距离对应于斜面和期望厚度之间的交点。该方法和系统还包括测量ELG的电阻，并利用偏移和电阻校准ELG。

10. 发明授权

US08254060B1 Straight top main pole for PMR bevel writer 有权
标题翻译： PMR斜面写入器的直顶主杆
公开(公告)号：US08254060B1
公开(公告)日：2012-08-28
申请号：US12426134
申请日：2009-04-17
申请人： Changqing Shi , Ming Jiang
发明人： Changqing Shi , Ming Jiang
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/3116
摘要： A magnetic recording head includes a write pole comprising a throat region. The throat region includes a lower portion having a substantially trapezoidal cross-section, and an upper portion having a substantially rectangular cross-section. In a beveled region of the write pole, the substantially rectangular cross-section of the upper portion decreases in height towards an air bearing surface of the magnetic recording head.
摘要翻译：磁记录头包括一个包括喉部区域的写柱。喉部区域包括具有基本上梯形横截面的下部和具有基本上矩形横截面的上部。在写入极的斜面区域中，上部的基本上矩形的横截面朝向磁记录头的空气支承表面的高度减小。

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