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    • 27. 发明授权
    • Method of depositing thin film
    • 沉积薄膜的方法
    • US07785664B2
    • 2010-08-31
    • US11571547
    • 2005-12-14
    • Tae Wook SeoYoung Hoon ParkKi Hoon LeeSahng Kyoo Lee
    • Tae Wook SeoYoung Hoon ParkKi Hoon LeeSahng Kyoo Lee
    • C23C16/06C23C16/34
    • H01L21/76843H01L21/28556H01L21/76861
    • A method is provided for depositing thin films in which the thin films are continuously deposited into one chamber and 1-6 wafers are loaded into the chamber. In the method, a process gap between a shower head or a gas injection unit and a substrate is capable of being controlled. The method comprises (a) loading at least one substrate into the chamber, (b) depositing the Ti thin film onto the substrate, adjusted so that a first process gap is maintained, (c) moving a wafer block so that the first process gap is changed into a second process gap in order to control the process gap of the substrate upon which the Ti thin film is deposited, (d) depositing the TiN thin film onto the substrate, moved to set the second process gap, and (e) unloading the substrate upon which the Ti/TiN thin films are deposited.
    • 提供了一种用于沉积薄膜的方法,其中薄膜连续沉积到一个室中,并且将1-6个晶片装入室中。 在该方法中,能够控制淋浴喷头或气体喷射单元与基板之间的处理间隙。 该方法包括:(a)将至少一个衬底装载到腔室中,(b)将Ti薄膜沉积到衬底上,进行调整,使得保持第一工艺间隙;(c)移动晶片块使得第一工艺间隙 改变为第二工艺间隙,以便控制沉积Ti薄膜的衬底的工艺间隙,(d)将TiN薄膜沉积到衬底上,移动以设定第二工艺间隙,(e) 卸载沉积有Ti / TiN薄膜的基板。
    • 28. 发明授权
    • Image sensor having self-aligned and overlapped photodiode and method of making same
    • 具有自对准和重叠光电二极管的图像传感器及其制造方法
    • US07579208B2
    • 2009-08-25
    • US11648942
    • 2007-01-03
    • Young Hoon Park
    • Young Hoon Park
    • H01L21/00H01L21/20
    • H01L27/14603H01L27/14641H04N5/37457
    • An image sensing device includes a gate dielectric layer formed on a substrate and a transfer gate formed on the gate dielectric layer. A masking layer is formed on the transfer gate, the masking layer having a width smaller than a width of the transfer gate, such that a portion of the transfer gate protrudes laterally from under the masking layer. A photodiode is formed in the substrate to be self-aligned with the masking layer and to extending laterally under the transfer gate, that is, to overlap the transfer gate. Because of the overlap of the photodiode with the transfer gate, offset between the photodiode and the transfer gate is eliminated, such that an image lag phenomenon is eliminated.
    • 图像感测装置包括形成在基板上的栅极电介质层和形成在栅极电介质层上的转移栅极。 掩模层形成在传输栅极上,掩模层的宽度小于传输栅极的宽度,使得传输栅极的一部分从掩模层下方横向突出。 在衬底中形成光电二极管以与掩模层自对准并且在传输栅极下横向延伸,即与传输门重叠。 由于光电二极管与传输栅极的重叠,消除了光电二极管与传输门之间的偏移,从而消除了图像滞后现象。
    • 30. 发明授权
    • tdcBC/pckA gene-inactivated microorganism and method of producing L-threonine using the same
    • tdcBC / pckA基因灭活的微生物和使用其生产L-苏氨酸的方法
    • US07485450B2
    • 2009-02-03
    • US10817044
    • 2004-04-02
    • Young Hoon ParkByoung Choon LeeDae Cheol KimJin Ho LeeJae Yong Cho
    • Young Hoon ParkByoung Choon LeeDae Cheol KimJin Ho LeeJae Yong Cho
    • C12N1/20
    • C12P13/08C12N9/88
    • The present invention provide a microorganism comprising an inactivated chromosomal tdcBC gene and an inactivated chromosomal pckA gene, which has remarkably improved productivity of L-threonine. Also, the present invention provides a method of producing L-threonine using the microorganism. The microorganism is prepared by incorporating by a recombination technique an antibiotic resistance gene into a pckA gene on the chromosome of a bacterial strain containing an L-threonine degradation-associated operon gene, tdcBC, which is inactivated. The microorganism has the effect of preventing degradation and intracellular influx of L-threonine due to the inactivation of the tdcBC operon gene, and includes more activated pathways for L-threonine biosynthesis. Therefore, the microorganism is useful for mass production of L-threonine because of being capable of producing L-threonine in high levels and high yields even in the presence of high concentrations of glucose.
    • 本发明提供了包含灭活的染色体tdcBC基因和灭活的染色体pckA基因的微生物,其显着提高了L-苏氨酸的生产率。 另外,本发明提供使用该微生物生产L-苏氨酸的方法。 通过重组技术将抗生素抗性基因并入包含失活的L-苏氨酸降解相关操纵子基因tdcBC的细菌菌株的染色体上的pckA基因中来制备微生物。 该微生物具有防止由于tdcBC操纵子基因失活引起的L-苏氨酸的降解和细胞内流入的作用,并且包括用于L-苏氨酸生物合成的更多活化途径。 因此,即使在高浓度葡萄糖的存在下,微生物也能够以高水平和高产率生产L-苏氨酸,因此可用于批量生产L-苏氨酸。