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21. 发明授权

US08901522B2 Chamber apparatus and extreme ultraviolet light generation system 有权
标题翻译：室内设备和极紫外光发生系统
公开(公告)号：US08901522B2
公开(公告)日：2014-12-02
申请号：US13196311
申请日：2011-08-02
申请人： Yoshifumi Ueno , Shinji Nagai , Osamu Wakabayashi
发明人： Yoshifumi Ueno , Shinji Nagai , Osamu Wakabayashi
IPC分类号： H05G2/00 , G21K5/00 , G03F7/20
CPC分类号： H05G2/003 , G03F7/70033 , G03F7/70916 , H05G2/008
摘要： A chamber apparatus used with a laser apparatus may include: a chamber provided with at least one inlet through which a laser beam outputted from the laser apparatus enters the chamber; a target supply unit provided to the chamber for supplying a target material to a predetermined region inside the chamber; a magnetic field generation unit for generating a magnetic field in the predetermined region; and a charged particle collection unit disposed in a direction of a magnetic flux of the magnetic field for collecting a charged particle thereinto, the charged particle being generated when the target material is irradiated with the laser beam inside the chamber and traveling along the magnetic flux.
摘要翻译：与激光装置一起使用的室装置可以包括：设置有至少一个入口的室，从激光装置输出的激光束通过该入口进入室; 目标供给单元，其设置在所述室中，用于将目标材料供应到所述室内的预定区域; 用于在预定区域中产生磁场的磁场产生单元; 以及带电粒子收集单元，其设置在所述磁场的磁通方向上，用于收集带电粒子，所述带电粒子是当所述靶材料被所述腔室内的所述激光束照射并且沿着所述磁通量行进时产生的。

22. 发明申请

US20140097461A1 PHOSPHOR SHEET-FORMING RESIN COMPOSITION 有权
标题翻译：磷光体成型树脂组合物
公开(公告)号：US20140097461A1
公开(公告)日：2014-04-10
申请号：US14123534
申请日：2012-07-05
申请人： Yasushi Ito , Yoshifumi Ueno , Hirofumi Tani
发明人： Yasushi Ito , Yoshifumi Ueno , Hirofumi Tani
IPC分类号： H01L33/50 , C09K11/02
CPC分类号： H01L33/502 , C08L53/025 , C09K11/02 , C09K11/025 , C09K11/7731 , H01L33/501 , H01L33/505 , Y10T428/31692 , Y10T428/31855
摘要： A phosphor sheet-forming resin composition uses a low-cost resin material having high light fastness and low visible light absorption and is capable of providing a phosphor sheet at low cost with deterioration of a phosphor due to moisture being suppressed. The phosphor sheet-forming resin composition contains a film-forming resin composition and a powdery phosphor that emits fluorescence when irradiated with excitation light. The film-forming resin composition contains a hydrogenated styrene-based copolymer, and uses a sulfide-based phosphor as the phosphor. Examples of the hydrogenated styrene-based copolymer include hydrogenated products of styrene-ethylene-butylene-styrene block copolymers. CaS:Eu is used as a preferred sulfide-based phosphor.
摘要翻译：荧光体片状树脂组合物使用具有高耐光性和低可见光吸收性的低成本树脂材料，并且能够以低成本提供荧光体片材，由于抑制了水分而使荧光体劣化。荧光体片状树脂组合物含有成膜树脂组合物和当用激发光照射时发出荧光的粉状磷光体。成膜树脂组合物含有氢化苯乙烯系共聚物，使用硫化物系荧光体作为荧光体。氢化苯乙烯类共聚物的实例包括苯乙烯 - 乙烯 - 丁烯 - 苯乙烯嵌段共聚物的氢化产物。 CaS：Eu用作优选的硫化物系荧光体。

23. 发明申请

US20140029238A1 ILLUMINATION APPARATUS 审中-公开
标题翻译：照明设备
公开(公告)号：US20140029238A1
公开(公告)日：2014-01-30
申请号：US14110796
申请日：2012-07-05
申请人： Yasushi Ito , Yoshifumi Ueno , Hirofumi Tani , Tomomitsu Hori
发明人： Yasushi Ito , Yoshifumi Ueno , Hirofumi Tani , Tomomitsu Hori
IPC分类号： F21V9/00 , F21V9/16
摘要： Provided is an illumination device that can be made thin and increases the efficiency of extracting light to the outside. The present invention is provided with: light-emitting structures wherein a blue light-emitting element is embedded in a transparent resin having a convex surface shape; a substrate wherein the light-emitting structures are disposed two-dimensionally; a diffuser plate that diffuses the blue light of the blue light-emitting elements; and a fluorescent sheet that is disposed spaced from the substrate and that contains a particulate fluorescent body that obtains a white light from the blue light of the blue light-emitting elements.
摘要翻译：本发明提供一种能够变薄的照明装置，提高向外部提取光的效率。本发明提供：发光结构，其中蓝色发光元件嵌入具有凸表面形状的透明树脂中; 基板，其中所述发光结构被二维地设置; 漫射板，其漫射蓝色发光元件的蓝色光; 以及荧光片，其与所述基板间隔开并且包含从蓝色发光元件的蓝色光获得白光的微粒荧光体。

24. 发明授权

US08164076B2 Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light 有权
标题翻译：极紫外光源装置和产生极紫外光的方法
公开(公告)号：US08164076B2
公开(公告)日：2012-04-24
申请号：US12569194
申请日：2009-09-29
申请人： Akira Endo , Yoshifumi Ueno , Youichi Sasaki , Osamu Wakabayashi
发明人： Akira Endo , Yoshifumi Ueno , Youichi Sasaki , Osamu Wakabayashi
IPC分类号： H05G2/00
CPC分类号： G21K5/00 , G03F7/70033 , H05G2/00 , H05G2/003 , H05G2/008
摘要： An extreme ultraviolet light source apparatus, which is to generate an extreme ultraviolet light by irradiating a target with a main pulse laser light after irradiating the target with a prepulse laser light, the extreme ultraviolet light source apparatus comprises: a prepulse laser light source generating a pre-plasma by irradiating the target with the prepulse laser light while a part of the target remains, the pre-plasma being generated at a different region from a target region, the different region being located on an incident side of the prepulse laser light; and a main pulse laser light source generating the extreme ultraviolet light by irradiating the pre-plasma with the main pulse laser light.
摘要翻译：一种极紫外光源装置，其特征在于，所述极紫外光源装置包括：前脉冲激光光源，其产生前脉冲激光光源，所述极紫外光源装置包括：前脉冲激光光源，其通过用前脉冲激光照射所述靶之后用主脉冲激光照射靶，在一部分目标物保留的同时用前脉冲激光照射靶的预等离子体，在与目标区域不同的区域产生预等离子体，不同的区域位于预激光激光的入射侧; 以及通过用主脉冲激光照射预等离子体而产生极紫外光的主脉冲激光光源。

25. 发明申请

US20080197298A1 Extreme ultra violet light source apparatus 有权
标题翻译：极紫外光源装置
公开(公告)号：US20080197298A1
公开(公告)日：2008-08-21
申请号：US12071250
申请日：2008-02-19
申请人： Tamotsu Abe , Yoshifumi Ueno , Takayuki Yabu
发明人： Tamotsu Abe , Yoshifumi Ueno , Takayuki Yabu
IPC分类号： G01J3/10
CPC分类号： H05G2/003 , H05G2/005 , H05G2/008
摘要： In an extreme ultra violet light source apparatus having a comparatively large output power for exposing, a solid target is supplied fast and continuously while heat dissipation for irradiation of a driver laser light is performed successfully. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a target material supplying unit which coats a wire with target material, a wire supplying unit which supplies the wire coated with the target material to a predetermined position within the chamber, a driver laser which applies a laser beam onto the wire coated with the target material to generate plasma; and a collector mirror which collects the extreme ultra violet light radiated from the plasma and outputting the extreme ultra violet light.
摘要翻译：在具有相对较大的曝光输出功率的极紫外光源装置中，能够快速，连续地供给固体靶，成功地进行用于照射驱动激光的散热。极紫外光源装置包括：产生极紫外光的室; 将目标材料供给单元涂敷到目标材料上的导线供给单元，将涂布有目标材料的线材供给到室内的预定位置的导线供给单元，将激光束施加到涂覆有目标材料的线材上的驱动器激光器产生等离子体; 以及收集从等离子体辐射的极紫外光并输出极紫外光的收集镜。

26. 发明授权

US06777622B2 Wiring boards 失效
标题翻译：接线板
公开(公告)号：US06777622B2
公开(公告)日：2004-08-17
申请号：US10351725
申请日：2003-01-27
申请人： Yoshifumi Ueno , Yokihiro Takikawa
发明人： Yoshifumi Ueno , Yokihiro Takikawa
IPC分类号： H05K706
CPC分类号： H01B7/0861 , H05K1/0218 , H05K1/0393
摘要： In a flexible wiring board of the present invention, a first shield film is connected to a ground wiring at the bottom of an opening in a cover film. The first shield film is connected to a second shield film via a through-hole penetrating from the surface to the rear surface of a base film. Thus, the second shield film is connected to the ground wiring via the first shield film, whereby the wiring board can be wholly shielded.
摘要翻译：在本发明的柔性布线基板中，第一屏蔽膜连接到覆盖膜的开口底部的接地布线。第一屏蔽膜通过从底膜的表面贯穿到后表面的贯通孔与第二屏蔽膜连接。因此，第二屏蔽膜通过第一屏蔽膜连接到接地布线，从而可以完全屏蔽布线板。

27. 发明授权

US08513630B2 Extreme ultraviolet light source apparatus 有权
标题翻译：极紫外光源设备
公开(公告)号：US08513630B2
公开(公告)日：2013-08-20
申请号：US13274991
申请日：2011-10-17
申请人： Yoshifumi Ueno , Georg Soumagne , Shinji Nagai , Akira Endo , Tatsuya Yanagida
发明人： Yoshifumi Ueno , Georg Soumagne , Shinji Nagai , Akira Endo , Tatsuya Yanagida
IPC分类号： H05G2/00 , G01J3/10
CPC分类号： H05G2/003 , H05G2/008
摘要： In an extreme ultraviolet light source apparatus generating an extreme ultraviolet light from a plasma generated by irradiating a target, which is a droplet D of molten Sn, with a laser light, and controlling the flow direction of ion generated at the generation of the extreme ultraviolet light by a magnetic field or an electric field, an ion collection cylinder 20 is arranged for collecting the ion, and ion collision surfaces Sa and Sb of the ion collection cylinder 20 are provided with or coated with Si, which is a metal whose sputtering rate with respect to the ion is less than one atom/ion.
摘要翻译：在极紫外光源装置中，通过用激光照射作为熔融Sn的液滴D而产生的等离子体产生极紫外光，并且控制在产生极紫外光时产生的离子的流动方向通过磁场或电场照射光，离子收集筒20被布置成用于收集离子，离子收集筒20的离子碰撞表面Sa和Sb设置有或涂覆有Si，溅射速率相对于离子小于一个原子/离子。

28. 发明授权

US07732794B2 Extreme ultra violet light source apparatus 有权
标题翻译：极紫外光源装置
公开(公告)号：US07732794B2
公开(公告)日：2010-06-08
申请号：US12071250
申请日：2008-02-19
申请人： Tamotsu Abe , Yoshifumi Ueno , Takayuki Yabu
发明人： Tamotsu Abe , Yoshifumi Ueno , Takayuki Yabu
IPC分类号： H01J35/20
CPC分类号： H05G2/003 , H05G2/005 , H05G2/008
摘要： In an extreme ultra violet light source apparatus having a comparatively large output power for exposing, a solid target is supplied fast and continuously while heat dissipation for irradiation of a driver laser light is performed successfully. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a target material supplying unit which coats a wire with target material, a wire supplying unit which supplies the wire coated with the target material to a predetermined position within the chamber, a driver laser which applies a laser beam onto the wire coated with the target material to generate plasma; and a collector mirror which collects the extreme ultra violet light radiated from the plasma and outputting the extreme ultra violet light.
摘要翻译：在具有相对较大的曝光输出功率的极紫外光源装置中，能够快速，连续地供给固体靶，成功地进行用于照射驱动激光的散热。极紫外光源装置包括：产生极紫外光的室; 将目标材料供给单元涂敷到目标材料上的导线供给单元，将涂布有目标材料的线材供给到室内的预定位置的导线供给单元，将激光束施加到涂覆有目标材料的线材上的驱动器激光器产生等离子体; 以及收集从等离子体辐射的极紫外光并输出极紫外光的收集镜。

29. 发明申请

US20100090133A1 EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND METHOD OF GENERATING EXTREME ULTRAVIOLET LIGHT 有权
标题翻译：极光紫外线光源装置及其产生极光紫外线灯的方法
公开(公告)号：US20100090133A1
公开(公告)日：2010-04-15
申请号：US12569194
申请日：2009-09-29
申请人： Akira ENDO , Yoshifumi Ueno , Youichi Sasaki , Osamu Wakabayashi
发明人： Akira ENDO , Yoshifumi Ueno , Youichi Sasaki , Osamu Wakabayashi
IPC分类号： G21K5/00
CPC分类号： G21K5/00 , G03F7/70033 , H05G2/00 , H05G2/003 , H05G2/008
摘要： An extreme ultraviolet light source apparatus, which is to generate an extreme ultraviolet light by irradiating a target with a main pulse laser light after irradiating the target with a prepulse laser light, the extreme ultraviolet light source apparatus comprises: a prepulse laser light source generating a pre-plasma by irradiating the target with the prepulse laser light while a part of the target remains, the pre-plasma being generated at a different region from a target region, the different region being located on an incident side of the prepulse laser light; and a main pulse laser light source generating the extreme ultraviolet light by irradiating the pre-plasma with the main pulse laser light.
摘要翻译：一种极紫外光源装置，其特征在于，所述极紫外光源装置包括：前脉冲激光光源，其产生前脉冲激光光源，所述极紫外光源装置包括：前脉冲激光光源，其通过用前脉冲激光照射所述靶之后用主脉冲激光照射靶，在一部分目标物保留的同时用前脉冲激光照射靶的预等离子体，在与目标区域不同的区域产生预等离子体，不同的区域位于预激光激光的入射侧; 以及通过用主脉冲激光照射预等离子体而产生极紫外光的主脉冲激光光源。

30. 发明授权

US07399929B2 Flexible flat cable 有权
标题翻译：柔性扁平电缆
公开(公告)号：US07399929B2
公开(公告)日：2008-07-15
申请号：US11569490
申请日：2005-04-21
申请人： Yoshifumi Ueno , Hiroshi Takamatsu , Noriaki Kudo
发明人： Yoshifumi Ueno , Hiroshi Takamatsu , Noriaki Kudo
IPC分类号： H01B7/08
CPC分类号： H01B7/0861
摘要： A flexible flat cable is provided. The FFC comprises multiple conductors with widths of 0.3(±0.03)mm arranged in a parallel manner with a pitch of 0.5 (±0.05)mm, the first insular material and the second insular material sandwiching these conductors from both sides, shield material, and the reinforcement board. The first insular material is porous PET possessing a 34 μm thick porous layer and the shield material is a polymer-based shield material possessing a shield layer made of a polymer-based conductive layer equal to or less than 20 μm thick that is a prescribed resin formed including air with uniformly dispersed conductive particles. Due to this, the FFC maintains the shield effect without damaging the electrical characteristics and also, along with being compatible with existing connecters, can combine with the electrical traits by existing processes and furthermore is capable of being established with any number of wires, any length of cable, and any alignment of wiring.
摘要翻译：提供柔性扁平电缆。 FFC包括宽度为0.3（±0.03）mm的多个导体，以0.5（±0.05）mm的间距平行布置，第一岛状材料和第二岛状材料从两侧夹持这些导体，屏蔽材料和加强板。第一岛状材料是具有34μm厚的多孔层的多孔PET，屏蔽材料是具有由等于或小于20μm的聚合物基导电层制成的屏蔽层的聚合物基屏蔽材料，其为规定的树脂形成包括具有均匀分散的导电颗粒的空气。因此，FFC保持屏蔽效果而不损害电气特性，并且与现有连接器兼容，可以通过现有工艺与电气特性组合，并且还可以建立任何数量的电线，任何长度的电缆，以及任何布线对齐。

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