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21. 发明授权

US6107190A Method of fabricating semiconductor device 失效
标题翻译：制造半导体器件的方法
公开(公告)号：US6107190A
公开(公告)日：2000-08-22
申请号：US959268
申请日：1997-10-28
申请人： Tetsuya Taguwa , Yoshiaki Yamada
发明人： Tetsuya Taguwa , Yoshiaki Yamada
IPC分类号： H01L21/311 , H01L21/768 , H01L23/485 , H01L21/441 , H01L21/4763 , H01L23/52 , H01L29/40
CPC分类号： H01L21/76877 , H01L21/28518 , H01L21/76802 , H01L21/76843 , H01L23/485 , H01L21/31144 , H01L2924/0002
摘要： There is provided a method of fabricating a semiconductor including the steps, in this order, of (a) forming an interlayer insulating film on a semiconductor substrate, (b) forming a first TiN film on the interlayer insulating film by sputtering, (c) forming a hole throughout the interlayer insulating film to thereby cause the semiconductor substrate to appear, (d) forming a second TiN film over the first TiN film by chemical vapor deposition to thereby fill the hole with the second TiN film, and (e) removing the first and second TiN films except TiN filling the hole therewith. When a Ti or TiN film having a thickness sufficient to fill a contact hole or a through-hole therewith is to be formed by CVD even at low temperature, the this method prevents the Ti or TiN film from being cracked or peeled off.
摘要翻译：提供一种制造半导体的方法，其包括以下步骤：（a）在半导体衬底上形成层间绝缘膜，（b）通过溅射在层间绝缘膜上形成第一TiN膜，（c）在整个层间绝缘膜上形成孔，从而使半导体衬底出现，（d）通过化学气相沉积在第一TiN膜上形成第二TiN膜，从而用第二TiN膜填充孔，（e）除TiN之外的第一和第二TiN膜填充孔。即使在低温下也要通过CVD形成具有足以填充接触孔或贯通孔的厚度的Ti或TiN膜，因此防止Ti或TiN膜破裂或剥离。

22. 发明授权

US5889801A Driving method for tunable semiconductor laser diode, tunable light source device and driving method for the same 失效
标题翻译：可调谐半导体激光二极管的驱动方法，可调谐光源器件及其驱动方法
公开(公告)号：US5889801A
公开(公告)日：1999-03-30
申请号：US919308
申请日：1997-08-28
申请人： Tomoaki Kato , Yoshiaki Yamada
发明人： Tomoaki Kato , Yoshiaki Yamada
IPC分类号： H01S5/06 , H01S5/042 , H01S5/0625 , H01S3/10 , H01S3/00 , H01S3/19
CPC分类号： H01S5/06256 , H01S5/042 , H01S5/06255
摘要： A driving method for a tunable semiconductor laser which is remarkably effective for realizing high speed and stable wavelength switching is presented. Generally, when a single longitudinal mode laser oscillation wavelength of a tunable semiconductor laser diode comprising an active region and a wavelength control region is switched from .lambda..sub.1 to .lambda..sub.2, a wavelength control current (.lambda.-Control) supplied to the wavelength control region is switched from I.sub.1 to I.sub.2. In the driving method according to the present invention, an active layer current (Active) supplied to the active region is temporarily decreased below a predetermined value during a predetermined period, in order to temporarily stop the single longitudinal mode laser oscillation of the laser diode. Preferably, the length of the predetermined period is set longer both before and after the moment of the wavelength control current switching than at least the carrier lifetime in the wavelength control region, and the predetermined value of the active layer current is set below threshold currents of all longitudinal modes existing between longitudinal modes corresponding to oscillation wavelengths before and after the wavelength control current switching. According to the driving method, oscillations at undesirable longitudinal modes are prevented, and thus stable high speed wavelength switchings precisely following supplied wavelength control signals are made possible even in a laser such as a tunable DBR laser diode involving longitudinal mode hops.
摘要翻译：提出了一种对于实现高速和稳定的波长切换非常有效的可调谐半导体激光器的驱动方法。通常，当将包括有源区和波长控制区的可调谐半导体激光二极管的单一纵模激光振荡波长从λ1切换到λ2时，提供给波长控制区的波长控制电流（λ-Control）为从I1切换到I2。在根据本发明的驱动方法中，为了暂时停止激光二极管的单个纵模激光振荡，在预定时间段期间，提供给有源区的有源层电流（有源）暂时降低到预定值以下。优选地，在波长控制电流切换的时刻之前和之后，将预定周期的长度设置得比至少波长控制区域中的载波寿命长，并且将有源层电流的预定值设置为低于阈值电流在纵向模式之间存在的所有纵向模式对应于在波长控制电流切换之前和之后的振荡波长。根据驱动方法，防止了不期望的纵向模式的振荡，因此即使在诸如涉及纵向跳跃的可调谐DBR激光二极管的激光器中，也可以精确地提供稳定的高速波长切换，所以可以实现提供的波长控制信号。

23. 发明授权

US5661558A Optical detector for flowing sample and optical detection method for flowing sample 失效
标题翻译：用于流动样品的光学检测器和用于流动样品的光学检测方法
公开(公告)号：US5661558A
公开(公告)日：1997-08-26
申请号：US492879
申请日：1995-06-20
申请人： Taro Nogami , Yoshiaki Yamada , Synichi Mathuura
发明人： Taro Nogami , Yoshiaki Yamada , Synichi Mathuura
IPC分类号： G01N21/05 , G01J1/42 , G01N21/27 , G01N21/59 , G01N21/85
CPC分类号： G01J1/42 , G01N21/85
摘要： An optical detector for flowing sample comprises a light condenser for condensing a diverging monochrome light, a flow cell arranged in the course of convergence of the converged light beam, and a sample-side detector for receiving a sample-side light. Such a construction makes it possible to correct delicate changes of the light axis due to intensity, position, temperature changes of the light source, density change of the flowing liquid, and any change of other causes effectively for stable sample analysis without difficult optical adjustment.
摘要翻译：用于流动样品的光学检测器包括用于聚焦发散单色光的光聚光器，在会聚光束会聚过程中布置的流动池和用于接收样品侧光的样品侧检测器。这种结构使得可以在没有困难的光学调节的情况下，由于强度，位置，光源的温度变化，流动液体的密度变化以及其它原因的任何变化而有效地校正光轴的微小变化，从而稳定的样品分析。

24. 发明授权

US07826032B2 Circulation system for high refractive index liquid in pattern forming apparatus 失效
$Circulation system for high refractive index liquid in pattern forming apparatus$
标题翻译：图案形成装置中高折射率液体的循环系统
公开(公告)号：US07826032B2
公开(公告)日：2010-11-02
申请号：US11778412
申请日：2007-07-16
申请人： Taro Yamamoto , Hitoshi Kosugi , Yoshiaki Yamada , Yasuhito Saiga
发明人： Taro Yamamoto , Hitoshi Kosugi , Yoshiaki Yamada , Yasuhito Saiga
IPC分类号： G03B27/42 , G21K5/10
CPC分类号： G03F7/38 , G03F7/168 , G03F7/70341 , G03F7/70991 , Y10S438/908
摘要： A circulation system for a high refractive index liquid includes a first collecting section configured to collect a high refractive index liquid used in an immersion light exposure section; a first supply section configured to supply the high refractive index liquid collected in the first collecting section to a cleaning section as a cleaning liquid; a second collecting section configured to collect the high refractive index liquid used in the cleaning section; and a second supply section configured to supply the high refractive index liquid collected in the second collecting section to the immersion light exposure section, wherein the high refractive index liquid is circulated between the immersion light exposure section and the cleaning section.
摘要翻译：用于高折射率液体的循环系统包括：第一收集部分，被配置为收集在浸没曝光部分中使用的高折射率液体; 第一供给部构造成将收集在第一收集部中的高折射率液体供给到作为清洗液的清洗部; 第二收集部，其构造成收集在所述清洗部中使用的高折射率液体; 以及第二供给部，被构造成将在第二收集部中收集的高折射率液体供给到浸没曝光部，其中高折射率液体在浸没曝光部和清洁部之间循环。

25. 发明授权

US07651285B2 Edge exposure apparatus, coating and developing apparatus, edge exposure method and coating and developing method, and storage medium 失效
标题翻译：边缘曝光装置，涂层显影装置，边缘曝光方法和涂覆显影方法以及存储介质
公开(公告)号：US07651285B2
公开(公告)日：2010-01-26
申请号：US11907131
申请日：2007-10-09
申请人： Hitoshi Kosugi , Taro Yamamoto , Yoshiaki Yamada , Yasuhito Saiga
发明人： Hitoshi Kosugi , Taro Yamamoto , Yoshiaki Yamada , Yasuhito Saiga
IPC分类号： G03D5/00 , G03B27/32 , B05C11/02
CPC分类号： G03B27/52 , G03F7/2028
摘要： An edge exposure apparatus performing an exposure process on an edge portion of a wafer having a coating film (resist film) formed thereon includes position detection means for detecting positional data of an outer edge of a wafer held by a spin chuck, an exposure portion for performing an exposure process on the edge portion of the wafer, a development nozzle supplying a developer to the exposed region, and alignment means for horizontally moving the spin chuck. An exposure process is performed by the exposure portion on the edge portion of the wafer held by the spin chuck while the alignment means is controlled, based on the positional data of the outer edge of the wafer which is detected by the position detection means, such that the positional relation between the outer edge of the wafer and the exposure portion is kept constant.
摘要翻译：在其上形成有涂膜（抗蚀剂膜）的晶片的边缘部分进行曝光处理的边缘曝光装置包括位置检测装置，用于检测由旋转卡盘保持的晶片的外边缘的位置数据，对晶片的边缘部分进行曝光处理，将显影剂供应到曝光区域的显影喷嘴以及用于使旋转卡盘水平移动的对准装置。基于由位置检测装置检测到的晶片的外边缘的位置数据，通过控制对准装置的由旋转卡盘保持的晶片的边缘部分上的曝光部分进行曝光处理，晶片的外边缘与曝光部分之间的位置关系保持恒定。

26. 发明申请

US20090185151A1 SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD 有权
标题翻译：基板处理系统和基板传输方法
公开(公告)号：US20090185151A1
公开(公告)日：2009-07-23
申请号：US12302853
申请日：2007-06-15
申请人： Yuichi Yamamoto , Tadayuki Yamaguchi , Yasuhito Saiga , Yoshiaki Yamada
发明人： Yuichi Yamamoto , Tadayuki Yamaguchi , Yasuhito Saiga , Yoshiaki Yamada
IPC分类号： G03B27/42 , G03B27/32
CPC分类号： H01L21/67225 , G03F7/70525 , G03F7/7075 , G03F7/70991 , H01L21/67727 , H01L21/67733 , Y10S414/135
摘要： A substrate processing system (100) includes a first automated substrate transfer line or main transfer line (20) configured to transfer wafers (W) over the entire system and to transfer wafers to and from respective process sections, and a second automated substrate transfer line or auxiliary transfer line (30) configured to transfer wafers (W) inside a photolithography process section (1a). The auxiliary transfer line (30) is disposed as a transfer mechanism independent of the main transfer line (20). An OHT (31) is configured to travel around on the auxiliary transfer line (30) having a loop shape, so as to transfer wafers (W) to and from and among the respective process apparatuses in the photolithography process section (1a).
摘要翻译：衬底处理系统（100）包括第一自动化衬底传送线或主传输线（20），其被配置为在整个系统上传送晶片（W）并将晶片传送到相应工艺部分和从相应工艺部分传送晶片，以及第二自动衬底传送线或辅助传输线（30），其配置成在光刻工艺部分（1a）内转移晶片（W）。辅助传输线（30）被设置为独立于主传输线（20）的传送机构。 OHT（31）构造成在具有环形的辅助传输线（30）周围行进，以便在光刻处理部分（1a）中将晶片（W）传送到各自的处理装置之间和之间。

27. 发明授权

US07510272B2 Apparatus and method of assembling head unit, of positioning liquid droplet ejection head, and of fixing liquid droplet ejection head; as well as method of manufacturing LCD device, organic EL device, electron emission device, PDP device, electrophoretic display device, color filter, organic EL, spacer, metallic wire, lens, resist, and light diffusion member 失效
标题翻译：组装头单元，定位液滴喷头和固定液滴喷头的装置和方法; 以及制造LCD器件，有机EL器件，电子发射器件，PDP器件，电泳显示器件，滤色器，有机EL，间隔物，金属线，透镜，抗蚀剂和光漫射元件的方法
公开(公告)号：US07510272B2
公开(公告)日：2009-03-31
申请号：US11299703
申请日：2005-12-13
申请人： Shinichi Nakamura , Yoshiaki Yamada
发明人： Shinichi Nakamura , Yoshiaki Yamada
IPC分类号： B41J2/45
CPC分类号： B41J2/1433 , B41J2/16535 , B41J2202/04 , B41J2202/09 , B41J2202/20
摘要： A liquid droplet ejection head has a liquid introduction part, a pump part which is in communication with the liquid introduction part, and a nozzle forming plate in which a nozzle port is formed in an overlapped manner with the pump part. The nozzle forming plate is formed substantially into a rectangle as seen from a liquid ejection side. A resin is molded in at least one of side surface portions along at least long sides of the nozzle forming plate.
摘要翻译：液滴喷射头具有液体引入部分，与液体引入部分连通的泵部分和与泵部分重叠形成喷嘴口的喷嘴形成板。喷嘴形成板基本上形成从液体喷出侧看的矩形。沿着喷嘴形成板的至少长边在至少一个侧表面部分中模制树脂。

28. 发明授权

US07455389B2 Ejecting method and ejecting apparatus 有权
标题翻译：喷射方法和喷射装置
公开(公告)号：US07455389B2
公开(公告)日：2008-11-25
申请号：US11239390
申请日：2005-09-30
申请人： Shinichi Nakamura , Yoshiaki Yamada
发明人： Shinichi Nakamura , Yoshiaki Yamada
IPC分类号： B41J2/145 , B41J2/15
CPC分类号： H05B33/10
摘要： In an ink jet apparatus for manufacturing a color filter 1, ink jet heads 22 having a plurality of nozzle 27 are disposed in a linear manner. Filter element member is ejected to a motherboard 12 from a plurality of nozzles 27 four times so as to form the filter element 3 in a predetermined thickness. By doing this, it is possible to prevent difference in the thickness in a plurality of the filter elements 3 and to equalize light transparency in planar manner. Thus, in an ejecting apparatus, a color filter can be formed in more common way at low cost and more efficiently. Also, it is possible to provide an ejecting apparatus which can equalize factors such as electrooptic characteristics of the electrooptic members, color displaying characteristics by the liquid crystal apparatuses, and illuminating characteristics by an EL surface.
摘要翻译：在用于制造滤色器1的喷墨装置中，具有多个喷嘴27的喷墨头22以线性方式设置。滤芯元件从多个喷嘴27喷射到母板12四次，以形成预定厚度的过滤元件3。通过这样做，可以防止多个滤光元件3的厚度差异，并平滑地均匀化透光性。因此，在喷射装置中，可以以更低成本和更有效地以更常见的方式形成滤色器。此外，可以提供一种能够使诸如电光元件的电光特性，液晶装置的显色特性和EL表面的照明特性等因素均衡的喷射装置。

29. 发明申请

US20080210944A1 Ejecting method and ejecting apparatus 审中-公开
标题翻译：喷射方法和喷射装置
公开(公告)号：US20080210944A1
公开(公告)日：2008-09-04
申请号：US12149562
申请日：2008-05-05
申请人： Shinichi Nakamura , Yoshiaki Yamada , Tsuyoshi Kitahara , Satoru Katagami
发明人： Shinichi Nakamura , Yoshiaki Yamada , Tsuyoshi Kitahara , Satoru Katagami
IPC分类号： H01L33/00
CPC分类号： H01L51/0005 , B41J2/145 , B41J2202/09 , B41J2202/20
摘要： In an ink jet apparatus for manufacturing a color filter 1, ink jet heads 22 having a plurality of nozzle 27 are disposed in a linear manner. Filter element member is ejected to a motherboard 12 from a plurality of nozzles 27 four times so as to form the filter element 3 in a predetermined thickness. By doing this, it is possible to prevent difference in the thickness in a plurality of the filter elements 3 and to equalize light transparency in planar manner. Thus, in an ejecting apparatus, a color filter can be formed in more common way at low cost and more efficiently. Also, it is possible to provide an ejecting apparatus which can equalize factors such as electrooptical characteristics of the electrooptical members, color displaying characteristics by the liquid crystal apparatuses, and illuminating characteristics by an EL surface.
摘要翻译：在用于制造滤色器1的喷墨装置中，具有多个喷嘴27的喷墨头22以线性方式设置。滤芯元件从多个喷嘴27喷射到母板12四次，以形成预定厚度的过滤元件3。通过这样做，可以防止多个滤光元件3的厚度差异，并平滑地均匀化透光性。因此，在喷射装置中，可以以更低成本和更有效地以更常见的方式形成滤色器。此外，可以提供一种可以使电光学构件的电光特性，液晶装置的显色特性和EL表面的照明特性等因素均衡的喷射装置。

30. 发明授权

US07384126B2 Liquid drop discharge head, discharge method and discharge device; electro optical device, method of manufacture thereof, and device for manufacture thereof; color filter, method of manufacture thereof, and device for manufacture thereof; and device incorporating backing, method of manufacture thereof, and device for manufacture thereof 有权
标题翻译：液滴放电头，放电方式及放电装置; 电光装置及其制造方法及其制造装置; 滤色器，其制造方法及其制造装置; 和背衬的装置，其制造方法及其制造装置
公开(公告)号：US07384126B2
公开(公告)日：2008-06-10
申请号：US11151523
申请日：2005-06-14
申请人： Shinichi Nakamura , Yoshiaki Yamada , Tsuyoshi Kitahara
发明人： Shinichi Nakamura , Yoshiaki Yamada , Tsuyoshi Kitahara
IPC分类号： B41J2/15 , B41J2/145
CPC分类号： B41J2/15 , B41J2202/09
摘要： An ink jet head 22 of linear form which consists of a plurality of nozzles 27 arranged as a nozzle row 28 is provided in an ink jet device for manufacture of a color filter. Filter element material 13 from the nozzles 27 which differ from the motherboard 12 is discharged four superimposed times by the plurality of nozzles 27, and is formed to a predetermined film thickness upon a single filter element 3. It is possible to prevent the occurrence of undesirable deviations in film thickness between different ones of the filter elements 3, so that it is possible to flatten and make even the optical transparency characteristic of the resulting color filter 1.
摘要翻译：在用于制造滤色器的喷墨装置中设置线性形式的喷墨头22，其由布置成喷嘴列28的多个喷嘴27组成。来自与主板12不同的喷嘴27的过滤元件材料13由多个喷嘴27四次排出，并且在单个过滤元件3上形成为规定的膜厚。可以防止在不同的过滤元件3之间产生不希望的膜厚偏差，使得可以使所得到的滤色器1的光学透明性变得平坦化并使其均匀。

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