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    • 21. 发明授权
    • Control apparatus for capacitive electromechanical transducer, and method of controlling the capacitive electromechanical transducer
    • 用于电容式机电换能器的控制装置,以及控制电容式机电换能器的方法
    • US09238250B2
    • 2016-01-19
    • US13500284
    • 2010-11-16
    • Atsushi KandoriMakoto TakagiMasao MajimaKenichi Nagae
    • Atsushi KandoriMakoto TakagiMasao MajimaKenichi Nagae
    • G01S3/80B06B1/00B06B1/02G01S3/808
    • H02N1/006B06B1/0246B06B1/0292G01S3/8083
    • Provided is a control apparatus and control method for a capacitive electromechanical transducer with small decrease in transmission/reception efficiency, and with sets of transmission/reception characteristics with different frequency ranges. The apparatus has cells each including first and second electrodes facing each other via a gap; includes a driving/detecting unit and an external stress applying unit. The driving/detecting unit performs at least one of causing the second electrode to vibrate and transmit elastic waves by generating an AC electrostatic attractive force between the electrodes, and detecting a change of capacity between the electrodes, the change being caused by the second electrode vibrating upon receipt of elastic waves. The external stress applying unit changes the external stress applied to the second electrode. The driving/detecting unit adjusts frequency characteristics by changing a parameter defining the frequency domain used in a transmitting/receiving operation, corresponding to the change of the external stress.
    • 提供了一种用于容量式机电换能器的控制装置和控制方法,其具有小的发送/接收效率的降低以及具有不同频率范围的发送/接收特性的集合。 该装置具有各自包括经由间隙彼此面对的第一和第二电极的单元; 包括驱动/检测单元和外部应力施加单元。 驱动/检测单元执行以下至少一种:使第二电极通过在电极之间产生AC静电吸引力而振动并传播弹性波,并且检测电极之间的容量变化,由第二电极振动引起的变化 收到弹性波。 外部应力施加单元改变施加到第二电极的外部应力。 驱动/检测单元通过改变与发生/接收操作中使用的频域相对应的外部应力变化的参数来调整频率特性。
    • 24. 发明申请
    • CONTROL APPARATUS FOR CAPACITIVE ELECTROMECHANICAL TRANSDUCER, AND METHOD OF CONTROLLING THE CAPACITIVE ELECTROMECHANICAL TRANSDUCER
    • 电容式电磁传感器的控制装置及其控制电容式电磁传感器的方法
    • US20120194107A1
    • 2012-08-02
    • US13500284
    • 2011-11-16
    • Atsushi KandoriMakoto TakagiMasao MajimaKenichi Nagae
    • Atsushi KandoriMakoto TakagiMasao MajimaKenichi Nagae
    • H02N1/00
    • H02N1/006B06B1/0246B06B1/0292G01S3/8083
    • Provided is a control apparatus and control method for a capacitive electromechanical transducer with small decrease in transmission/reception efficiency, and with sets of transmission/reception characteristics with different frequency ranges. The apparatus has cells each including first and second electrodes facing each other via a gap; includes a driving/detecting unit and an external stress applying unit. The driving/detecting unit performs at least one of causing the second electrode to vibrate and transmit elastic waves by generating an AC electrostatic attractive force between the electrodes, and detecting a change of capacity between the electrodes, the change being caused by the second electrode vibrating upon receipt of elastic waves. The external stress applying unit changes the external stress applied to the second electrode. The driving/detecting unit adjusts frequency characteristics by changing a parameter defining the frequency domain used in a transmitting/receiving operation, corresponding to the change of the external stress.
    • 提供了一种用于容量式机电换能器的控制装置和控制方法,其具有小的发送/接收效率的降低以及具有不同频率范围的发送/接收特性的集合。 该装置具有各自包括经由间隙彼此面对的第一和第二电极的单元; 包括驱动/检测单元和外部应力施加单元。 驱动/检测单元执行以下至少一种:使第二电极通过在电极之间产生AC静电吸引力而振动并传播弹性波,并且检测电极之间的容量变化,由第二电极振动引起的变化 收到弹性波。 外部应力施加单元改变施加到第二电极的外部应力。 驱动/检测单元通过改变与发生/接收操作中使用的频域相对应的外部应力变化的参数来调整频率特性。
    • 25. 发明授权
    • Angular velocity sensor
    • 角速度传感器
    • US08176780B2
    • 2012-05-15
    • US12371530
    • 2009-02-13
    • Makoto TakagiAtsushi Kandori
    • Makoto TakagiAtsushi Kandori
    • G01C19/56
    • G01C19/5755G01C19/5762
    • An angular velocity sensor includes a supporting substrate, a detecting portion, a displacement detecting portion, a first driving portion, and a second driving portion. The detecting portion is supported by the supporting substrate movably in at least a free direction. The displacement detecting portion detects a displacement of the detecting portion in the free direction. The first driving portion excites a first reference oscillation of at least a portion of the detecting portion so that a first Coriolis' force in the free direction is generated in response to an angular velocity about a first axis. The second driving portion excites a second reference oscillation of at least a portion of the detecting portion so that a second Coriolis' force in the free direction is generated in response to an angular velocity about a second axis.
    • 角速度传感器包括支撑基板,检测部分,位移检测部分,第一驱动部分和第二驱动部分。 检测部分由至少沿自由方向可移动地由支撑基板支撑。 位移检测部分检测检测部分在自由方向上的位移。 第一驱动部分激发检测部分的至少一部分的第一参考振荡,使得响应于关于第一轴的角速度产生沿自由方向的第一科里奥利力。 第二驱动部分激发检测部分的至少一部分的第二基准振荡,使得响应于关于第二轴的角速度产生在自由方向上的第二科里奥利力。
    • 26. 发明授权
    • Registration detection system
    • 注册检测系统
    • US07974804B2
    • 2011-07-05
    • US11661418
    • 2005-10-17
    • Makoto Takagi
    • Makoto Takagi
    • G06F19/00
    • G03F7/70633G03F7/162G03F7/3021G03F7/70525G03F7/70616
    • A registration detection system realizes both substrate-by-substrate correction and highly accurate correction of an exposure process. Therefore, the registration detection system includes: the first detection apparatus installed on a pathway to a collection in a transport container of substrates taken out of the transport container, after passing at least an exposure process and a development process, registration-detects the substrates after passing the development process at multiple points; the second detection apparatus outside the pathway, and performing registration-detecting the substrates at more points than the first detection apparatus when the substrates after passing the first detection apparatus and collected in the transport container are taken out from the transport container again; and a generation unit (image processing parts of the aforementioned detection apparatuses) that generates compensation data for the exposure process based on detection results by the first detection apparatus and detection results by the second detection apparatus.
    • 注册检测系统实现了基板校正和曝光过程的高精度校正。 因此,登记检测系统包括:第一检测装置,在通过至少曝光处理和显影处理的至少曝光处理和显影处理之后,安装在从运送容器取出的基板的运送容器的收集路径中, 通过多个发展过程; 所述第二检测装置在所述通路外部,并且当经过所述第一检测装置并收集在所述运输容器中的所述基板再次从所述运输容器中取出时,在比所述第一检测装置多的点进行所述基板的对准检测; 以及基于第一检测装置的检测结果生成用于曝光处理的补偿数据的生成单元(上述检测装置的图像处理部分)和由第二检测装置检测的结果。
    • 27. 发明授权
    • Vehicle periphery monitor
    • 车辆外围监视器
    • US07248283B2
    • 2007-07-24
    • US10291618
    • 2002-11-12
    • Makoto TakagiToshiyasu KatsunoKazushi KonnoToshiaki Kakinami
    • Makoto TakagiToshiyasu KatsunoKazushi KonnoToshiaki Kakinami
    • H04N7/18H04N5/222G08G1/017
    • H04N7/18B60R1/00B60R2300/105B60R2300/302B60R2300/70
    • A front camera for filming an area stretching forwards is disposed in a front portion of a vehicle. A side camera for filming an area stretching laterally and diagonally forwards is disposed in a lateral-left portion of the vehicle. An indicator display that can be visually recognized by a driver is disposed in a compartment of the vehicle. An amount of change in the direction of the vehicle, that is, a deflection angle of the vehicle is detected on the basis of a vehicle speed and a steering angle of a steering wheel, which have been detected by means of various sensors. After the indicator display has started displaying a lateral photo image filmed by the side camera, the photo image displayed by the indicator display is shifted from the lateral photo image filmed by the side camera to a front photo image filmed by the front camera if the deflection angle has reached a predetermined angle.
    • 用于拍摄向前伸展的区域的前置摄像机设置在车辆的前部。 用于拍摄横向和斜前方伸展的区域的侧面照相机设置在车辆的左侧部分。 可以由驾驶员可视觉识别的指示器显示器被布置在车辆的隔室中。 基于已经通过各种传感器检测到的方向盘的车速和转向角来检测车辆方向的变化量,即车辆的偏转角度。 在指示器显示开始显示由侧面照相机拍摄的横向照片图像之后,由指示器显示器显示的照片图像从由侧面照相机拍摄的侧面照片图像偏移到由前置照相机拍摄的前部照片图像,如果偏转 角度已经达到预定角度。