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21. 发明授权

US5166516A Scanning probe microscope with slant detection and compensation 失效
标题翻译：扫描探针显微镜，具有倾斜检测和补偿
公开(公告)号：US5166516A
公开(公告)日：1992-11-24
申请号：US780017
申请日：1991-10-21
申请人： Hiroshi Kajimura
发明人： Hiroshi Kajimura
IPC分类号： G01B7/34 , G01B21/30 , G01N19/08 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q20/02 , G01Q60/10 , G01Q60/24 , H01J3/14 , H01J37/28
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q10/065 , G01Q20/04 , Y10S977/87
摘要： A scanning probe microscope comprises a probe supported by a cantilever at the end portion. The cantilever elastically deforms by force acting on the probe. During the probe is scanned along the sample surface, a displacement of the probe along a z-axis perpendicular to the sample surface and a slant of the probe with respect to the z-axis is detected by an optical system. The optical system includes a light source, a reflection surface provided on the end of the cantilever and an optical element having first through forth light receiving regions. A light beam from the light source is directed to and reflected on the reflection surface, the beam from the reflection surface is directed on the light receiving regions. The microscope further comprises a servo circuit for controlling the displacement and the slant of the cantilever to keep them constant in response to signals S.delta. and S.theta. respectively, the signal SD being a difference signal between the sum of the outputs from the first and second light receiving regions and the sum of the outputs from the third and fourth light receiving regions, and the S.theta. being a difference signal between the sum of outputs from the first and third light receiving regions and the sum of outputs from the second and fourth light receiving regions.
摘要翻译：扫描探针显微镜包括在端部由悬臂支撑的探针。悬臂通过作用在探头上的力弹性变形。在沿着样品表面扫描探针期间，通过光学系统检测探头沿垂直于样品表面的z轴和相对于z轴的探针的倾斜的位移。光学系统包括光源，设置在悬臂的端部上的反射表面和具有第一至第四光接收区域的光学元件。来自光源的光束被引导到反射表面并被反射，来自反射表面的光束被引导到光接收区域。显微镜还包括伺服电路，用于控制悬臂的位移和倾斜，以分别响应于信号Sδ和Sθ保持它们恒定，信号SD是来自第一和第二信号的输出之和之间的差信号光接收区域和来自第三和第四光接收区域的输出的总和，Sθ是来自第一和第三光接收区域的输出的和之间的差信号，以及来自第二和第四光接收区域的输出的总和接收地区。

22. 发明授权

US5141319A Displacement detection device with adjacent semiconductor diode lasers 失效
标题翻译：具有相邻半导体二极管激光器的位移检测装置
公开(公告)号：US5141319A
公开(公告)日：1992-08-25
申请号：US792819
申请日：1991-11-15
申请人： Hiroshi Kajimura , Masahiko Kato
发明人： Hiroshi Kajimura , Masahiko Kato
IPC分类号： G01D5/38 , G01B7/34 , G01B9/02 , G01B21/30 , G01N37/00 , G01Q20/02 , G01Q60/38 , G05D3/12 , H01J37/28
CPC分类号： G01Q20/02 , B82Y35/00 , G01B9/02002 , G01B9/02003 , G01B9/02051 , Y10S977/87
摘要： A displacement detection device has a laser unit. The laser unit has two semiconductor lasers formed on a single substrate through a single process. One of the lasers has an end coated with a reflection preventing film and facing a mirror provided at the end of a cantilever. The other end of the laser is coated with a film having a high reflectance film such that a light resonator is formed together with the mirror and the high reflectance film. The other laser has both opposite ends coated with films of a high reflectance, and a light resonator is formed between the opposite ends. Two laser beams emitted from the two semiconductor lasers interfere with each other, and the resultant interference light enters the light detector. The detector detects a variation in the interference light caused by displacement of the mirror, and outputs a signal indicative of a displacement in the cantilever.
摘要翻译：位移检测装置具有激光单元。激光单元具有通过单个工艺在单个衬底上形成的两个半导体激光器。其中一个激光器的端部涂有防反射膜，并且面向设置在悬臂端部的反射镜。激光的另一端涂覆有具有高反射率膜的膜，使得与镜和高反射率膜一起形成光谐振器。另一个激光器的两个相对端都涂覆有高反射率的膜，并且在相对端之间形成光谐振器。从两个半导体激光器发射的两束激光彼此干涉，并且所得到的干涉光进入光检测器。检测器检测由反射镜的位移引起的干涉光的变化，并且输出表示悬臂中的位移的信号。

23. 发明授权

US5079958A Sensor having a cantilever 失效
标题翻译：传感器有一个CANTILEVER
公开(公告)号：US5079958A
公开(公告)日：1992-01-14
申请号：US492811
申请日：1990-03-12
申请人： Tsugio Takase , Hideo Adachi , Takao Okada , Hisanari Shimazu , Hideo Tomabechi , Hiroshi Kajimura
发明人： Tsugio Takase , Hideo Adachi , Takao Okada , Hisanari Shimazu , Hideo Tomabechi , Hiroshi Kajimura
IPC分类号： G01B7/06 , G01L5/00
CPC分类号： G01Q10/06 , B82Y35/00 , G01B7/06 , G01Q20/00 , G01Q20/02 , G01Q60/16 , Y10S977/852
摘要： A sensor comprises a tiny cantilever of a thin film having a detection region at its free end portion, a detector for detecting a displacement of the cantilever caused by material acting on the detecting region, and calculation unit for calculating an amount of the material acting on the detection region, based on the displacement of the cantilever which has been detected by the detector, thereby to measure the intensity of a particle-stream applied to the detection region or the thickness of a film formed on the detection region.

24. 发明授权

US5036490A Memory device with dual cantilever means 失效
标题翻译：具有双悬臂装置的记忆装置
公开(公告)号：US5036490A
公开(公告)日：1991-07-30
申请号：US414128
申请日：1989-09-28
申请人： Hiroshi Kajimura , Takao Okada
发明人： Hiroshi Kajimura , Takao Okada
IPC分类号： G11C13/00 , G01N37/00 , G01Q60/10 , G01Q70/06 , G01Q80/00 , G01Q90/00 , G11B9/00 , G11B9/08 , G11B9/14 , G11B15/18 , G11B21/00 , G11B23/50 , G11C11/21 , G11C11/22
CPC分类号： G11B21/00 , G11B15/1808 , G11B23/50 , G11B9/08 , G11B9/14 , G11B9/1418 , G11B9/1436 , G11B9/1472 , G11C11/22 , B82Y10/00 , G01Q10/06 , G01Q60/16 , G01Q70/06 , G01Q80/00 , G11B9/149 , Y10S977/849 , Y10S977/861 , Y10S977/881 , Y10S977/943
摘要： The memory device comprises a recording member in which perturbations are selectively formed, a probe for detecting the presence or absence of the perturbations, a first cantilever having the recording member at a forward end, and a second cantilever having the probe needle at a forward end. The probe is supported by the first and second cantilevers at a relative position in close proximity to and spaced from the recording member. Independent drive of the first and second cantilevers permits the probe to be scanned relatively across the recording member over a wide range.
摘要翻译：存储装置包括记录部件，其中选择性地形成扰动，用于检测扰动的存在或不存在的探针，在前端具有记录部件的第一悬臂和在前端具有探针的第二悬臂。该探针由靠近记录部件并与间隔开的相对位置由第一和第二悬臂支撑。第一和第二悬臂的独立驱动器允许探测器相对穿过记录部件在宽范围内被扫描。

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